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    Process for manufacturing a triaxial piezoresistive accelerometer and relative pressure-monitoring device
    1.
    发明申请
    Process for manufacturing a triaxial piezoresistive accelerometer and relative pressure-monitoring device 有权
    制造三轴压阻加速度计和相对压力监测装置的方法

    公开(公告)号：US20060185428A1

    公开(公告)日：2006-08-24

    申请号：US11338614

    申请日：2006-01-24

    申请人： Chantal Combi ,  Lorenzo Baldo ,  Dino Faralli ,  Flavio Villa

    发明人： Chantal Combi ,  Lorenzo Baldo ,  Dino Faralli ,  Flavio Villa

    IPC分类号： B60C23/02

    CPC分类号： G01P15/123 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/084

    摘要： A manufacturing process of a semiconductor piezoresistive accelerometer includes the steps of: providing a wafer of semiconductor material; providing a membrane in the wafer over a cavity; rigidly coupling an inertial mass to the membrane; and providing, in the wafer, piezoresistive transduction elements, that are sensitive to strains of the membrane and generate corresponding electrical signals. The step of coupling is carried out by forming the inertial mass on top of a surface of the membrane opposite to the cavity. The accelerometer is advantageously used in a device for monitoring the pressure of a tire of a vehicle.

    摘要翻译： 半导体压阻加速度计的制造方法包括以下步骤：提供半导体材料的晶片; 在晶片上在腔上提供膜; 将惯性质量刚性耦合到膜上; 并且在晶片中提供对膜的应变敏感的压阻转导元件并产生相应的电信号。 通过在与空腔相对的膜的表面的顶部上形成惯性质量来进行耦合的步骤。 加速度计有利地用于监测车辆的轮胎的压力的装置中。

    ANALOG INPUT DEVICE WITH INTEGRATED PRESSURE SENSOR AND ELECTRONIC APPARATUS EQUIPPED WITH SAID INPUT DEVICE
    2.
    发明申请
    ANALOG INPUT DEVICE WITH INTEGRATED PRESSURE SENSOR AND ELECTRONIC APPARATUS EQUIPPED WITH SAID INPUT DEVICE 有权
    具有集成压力传感器的模拟输入设备和配备有输入设备的电子设备

    公开(公告)号：US20070068779A1

    公开(公告)日：2007-03-29

    申请号：US11530170

    申请日：2006-09-08

    申请人： Lorenzo Baldo ,  Chantal Combi ,  Dino Faralli

    发明人： Lorenzo Baldo ,  Chantal Combi ,  Dino Faralli

    IPC分类号： H01H15/00 ,  H01H3/16 ,  H01H65/00

    CPC分类号： G01L5/223 ,  G06F3/0338 ,  Y10T29/49105 ,  Y10T29/49169

    摘要： In an input device, a control element is operated by a user; a pressure sensor is mechanically coupled to the control element and is provided with a monolithic body of semiconductor material housing a first sensitive element, which detects an actuation of the control element; a supporting element is connected to the pressure sensor; and connection elements electrically connect the monolithic body to the supporting element without interposition of a package. In particular, the monolithic body has electrical-contact areas carried by one main surface thereof, and the printed circuit board has conductive regions carried by a main face thereof; the connection elements are conductive bumps and electrically connect the electrical-contact areas to the conductive regions.

    摘要翻译： 在输入装置中，控制元件由用户操作; 压力传感器机械耦合到控制元件并且设置有容纳第一敏感元件的半导体材料的整体体，第一敏感元件检测控制元件的致动; 支撑元件连接到压力传感器; 并且连接元件将整体体电连接到支撑元件而不插入封装。 特别地，整体式主体具有由其主表面承载的电接触区域，并且印刷电路板具有由其主面承载的导电区域; 连接元件是导电凸块并将电接触区域电连接到导电区域。

    Process for manufacturing a triaxial piezoresistive accelerometer and relative pressure-monitoring device
    3.
    发明授权
    Process for manufacturing a triaxial piezoresistive accelerometer and relative pressure-monitoring device 有权
    制造三轴压阻加速度计和相对压力监测装置的方法

    公开(公告)号：US07322236B2

    公开(公告)日：2008-01-29

    申请号：US11338614

    申请日：2006-01-24

    申请人： Chantal Combi ,  Lorenzo Baldo ,  Dino Faralli ,  Flavio Francesco Villa

    发明人： Chantal Combi ,  Lorenzo Baldo ,  Dino Faralli ,  Flavio Francesco Villa

    IPC分类号： G01P15/00

    CPC分类号： G01P15/123 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/084

    摘要： A manufacturing process of a semiconductor piezoresistive accelerometer includes the steps of: providing a wafer of semiconductor material; providing a membrane in the wafer over a cavity; rigidly coupling an inertial mass to the membrane; and providing, in the wafer, piezoresistive transduction elements, that are sensitive to strains of the membrane and generate corresponding electrical signals. The step of coupling is carried out by forming the inertial mass on top of a surface of the membrane opposite to the cavity. The accelerometer is advantageously used in a device for monitoring the pressure of a tire of a vehicle.

    摘要翻译： 半导体压阻加速度计的制造方法包括以下步骤：提供半导体材料的晶片; 在晶片上在腔上提供膜; 将惯性质量刚性耦合到膜上; 并且在晶片中提供对膜的应变敏感的压阻转导元件并产生相应的电信号。 通过在与空腔相对的膜的表面的顶部上形成惯性质量来进行耦合的步骤。 加速度计有利地用于监测车辆的轮胎的压力的装置中。

    Analog input device with integrated pressure sensor and electronic apparatus equipped with said input device
    4.
    发明授权
    Analog input device with integrated pressure sensor and electronic apparatus equipped with said input device 有权
    具有集成压力传感器的模拟输入设备和配备有所述输入设备的电子设备

    公开(公告)号：US07928960B2

    公开(公告)日：2011-04-19

    申请号：US11530170

    申请日：2006-09-08

    申请人： Lorenzo Baldo ,  Chantal Combi ,  Dino Faralli

    发明人： Lorenzo Baldo ,  Chantal Combi ,  Dino Faralli

    IPC分类号： G09G5/00

    CPC分类号： G01L5/223 ,  G06F3/0338 ,  Y10T29/49105 ,  Y10T29/49169

    摘要： In an input device, a control element is operated by a user; a pressure sensor is mechanically coupled to the control element and is provided with a monolithic body of semiconductor material housing a first sensitive element, which detects an actuation of the control element; a supporting element is connected to the pressure sensor; and connection elements electrically connect the monolithic body to the supporting element without interposition of a package. In particular, the monolithic body has electrical-contact areas carried by one main surface thereof, and the printed circuit board has conductive regions carried by a main face thereof; the connection elements are conductive bumps and electrically connect the electrical-contact areas to the conductive regions.

    摘要翻译： 在输入装置中，控制元件由用户操作; 压力传感器机械耦合到控制元件并且设置有容纳第一敏感元件的半导体材料的整体体，第一敏感元件检测控制元件的致动; 支撑元件连接到压力传感器; 并且连接元件将整体体电连接到支撑元件而不插入封装。 特别地，整体式主体具有由其主表面承载的电接触区域，并且印刷电路板具有由其主面承载的导电区域; 连接元件是导电凸块并将电接触区域电连接到导电区域。

    Electronic device, system, and method comprising differential sensor MEMS devices and drilled substrates
    9.
    发明授权
    Electronic device, system, and method comprising differential sensor MEMS devices and drilled substrates 有权
    电子设备，系统和方法包括差分传感器MEMS器件和钻孔基板

    公开(公告)号：US08134214B2

    公开(公告)日：2012-03-13

    申请号：US12508869

    申请日：2009-07-24

    申请人： Lorenzo Baldo ,  Chantal Combi ,  Mario Francesco Cortese

    发明人： Lorenzo Baldo ,  Chantal Combi ,  Mario Francesco Cortese

    IPC分类号： H01L29/84

    CPC分类号： B81B7/0061 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81C2203/0154 ,  G01L19/141 ,  G01L19/147 ,  G01L19/148 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2924/10253 ,  H01L2924/1461 ,  H01L2924/00014 ,  H01L2924/00

    摘要： Electronic device which comprises a substrate provided with at least one passing opening, a MEMS device with function of differential sensor provided with a first and a second surface and of the type comprising at least one portion sensitive to chemical and/or physical variations of fluids present in correspondence with a first and a second opposed active surface thereof, the first surface of the MEMS device leaving the first active surface exposed and the second surface being provided with a further opening which exposes said second opposed active surface, the electronic device being characterized in that the first surface of the MEMS device faces the substrate and is spaced therefrom by a predetermined distance, the sensitive portion being aligned to the passing opening of the substrate, and in that it also comprises a protective package, which incorporates at least partially the MEMS device and the substrate so as to leave the first and second opposed active surfaces exposed respectively through the passing opening of the substrate and the further opening of the second surface.

    摘要翻译： 电子设备，其包括设置有至少一个通过开口的基板，具有差分传感器的功能的MEMS装置，其具有第一和第二表面，并且所述MEMS装置包括对存在的流体的化学和/或物理变化敏感的至少一个部分 与其第一和第二相对的有效表面对应，离开第一有源表面的MEMS器件的第一表面暴露，并且第二表面设置有暴露所述第二相对有效表面的另一开口，电子器件的特征在于 MEMS器件的第一表面面向衬底并与之隔开预定距离，敏感部分与衬底的通过开口对准，并且还包括保护封装，其至少部分地与MEMS 装置和基板，以使第一和第二相对的有效表面暴露出来 通过基板的通过开口和第二表面的进一步打开。

    PROCESS FOR MANUFACTURING A MEMBRANE OF SEMICONDUCTOR MATERIAL INTEGRATED IN, AND ELECTRICALLY INSULATED FROM, A SUBSTRATE
    10.
    发明申请
    PROCESS FOR MANUFACTURING A MEMBRANE OF SEMICONDUCTOR MATERIAL INTEGRATED IN, AND ELECTRICALLY INSULATED FROM, A SUBSTRATE 有权
    一种制造半导体材料膜的方法，集成在一个基板上并电绝缘

    公开(公告)号：US20080224242A1

    公开(公告)日：2008-09-18

    申请号：US12047830

    申请日：2008-03-13

    申请人： Flavio Franceso Villa ,  Pietro Corona ,  Chantal Combi ,  Lorenzo Baldo ,  Gabriele Barlocchi

    发明人： Flavio Franceso Villa ,  Pietro Corona ,  Chantal Combi ,  Lorenzo Baldo ,  Gabriele Barlocchi

    IPC分类号： H01L29/96 ,  H01L21/02

    CPC分类号： B81C1/00158

    摘要： A process for manufacturing an integrated membrane made of semiconductor material includes the step of forming, in a monolithic body of semiconductor material having a front face, a buried cavity, extending at a distance from the front face and delimiting with the front face a surface region of the monolithic body, the surface region forming a membrane that is suspended above the buried cavity. The process further envisages the step of forming an insulation structure in a surface portion of the monolithic body to electrically insulate the membrane from the monolithic body; and the further and distinct step of setting the insulation structure at a distance from the membrane so that it will be positioned outside the membrane at a non-zero distance of separation.

    摘要翻译： 制造由半导体材料制成的集成膜的方法包括以下步骤：在具有前表面的半导体材料的整体中形成一个与前表面相距一定距离的掩埋腔， 的单体，表面区域形成悬浮在掩埋腔上方的膜。 该方法进一步设想在整体式主体的表面部分形成绝缘结构以将膜与整体式电绝缘的步骤; 以及将绝缘结构设置在离膜一定距离处的进一步和不同的步骤，使得其将以非零分离距离定位在膜的外部。