Thin film resonator, method for making thin film resonator and filter having thin film resonators
    41.
    发明授权
    Thin film resonator, method for making thin film resonator and filter having thin film resonators 有权
    薄膜谐振器,制造薄膜谐振器的方法和具有薄膜谐振器的滤波器

    公开(公告)号:US07432785B2

    公开(公告)日:2008-10-07

    申请号:US10936522

    申请日:2004-09-09

    IPC分类号: H03H9/00 H03H9/09 H03H9/54

    摘要: A thin film resonator having a membrane layer formed on top of a substrate, a lower electrode formed on part of the top surface of the membrane layer, a piezoelectric layer formed on top of the lower electrode, an upper electrode formed on top of the piezoelectric layer, and a mass loading layer interposed between the lower electrode and the membrane layer and having a predetermined mass. This structure enables precise adjustment of the resonant frequency of the thin film resonator, thereby providing a more precise filter.

    摘要翻译: 一种薄膜谐振器,其具有形成在基板顶部的膜层,形成在所述膜层的上表面的一部分上的下电极,形成在所述下电极的顶部上的压电层,形成在所述压电体的顶部的上电极 层和介于下电极和膜层之间并具有预定质量的质量加载层。 这种结构能够精确地调整薄膜谐振器的谐振频率,从而提供更精确的滤波器。

    Method of fabricating inkjet print heads
    43.
    发明申请
    Method of fabricating inkjet print heads 有权
    制造喷墨打印头的方法

    公开(公告)号:US20070126772A1

    公开(公告)日:2007-06-07

    申请号:US11453012

    申请日:2006-06-15

    IPC分类号: B41J2/015

    摘要: A method of fabricating inkjet print heads usable in an ink jet printer. The method of fabricating ink jet print heads includes preparing a plurality of ink jet print heads on a wafer while forming sub sidewalls around the ink jet print heads when the ink jet print heads are being prepared, attaching protection films onto the sub sidewalls of the wafer and the ink jet print heads, and dicing the ink jet print heads and detaching the individual ink jet print heads from the wafer. In the method, the ink jet print heads are diced in a wafer unit. Particularly, connect pads of the ink jet print heads can be prevented from being contaminated by the protection films.

    摘要翻译: 一种制造可用于喷墨打印机的喷墨打印头的方法。 制造喷墨打印头的方法包括:当准备喷墨打印头时,在晶片上准备多个喷墨打印头,同时在喷墨打印头周围形成副侧壁,将保护膜附着在晶片的子侧壁上 和喷墨打印头,并且对喷墨打印头进行切割并将各个喷墨打印头从晶片上分离出来。 在该方法中,喷墨打印头在晶片单元中切割。 特别地,可以防止喷墨打印头的连接垫被保护膜污染。

    Tri-state RF switch
    44.
    发明申请

    公开(公告)号:US20060229045A1

    公开(公告)日:2006-10-12

    申请号:US11345237

    申请日:2006-02-02

    IPC分类号: H04B1/06

    摘要: A tri-state RF MEMS switch includes: a first well formed in a first substrate; a first input signal line and a first output signal line forming a first gap therebetween in the first well; a post bar forming a boundary between the second well and third well in the second substrate; a second input signal line and a second output signal line, and a third input signal line and a third output signal line forming a second gap and a third gap in the second well and the third well, respectively; and a membrane disposed between the first substrate and the second substrate such that the membrane crosses the first, second and third gaps, the membrane including a first conductive pad, a second conductive pad, and a third conductive pad thereon to face the first, second and third gaps, respectively.

    Actuator with double plate structure
    45.
    发明申请
    Actuator with double plate structure 审中-公开
    双板结构执行机构

    公开(公告)号:US20060208607A1

    公开(公告)日:2006-09-21

    申请号:US11369727

    申请日:2006-03-08

    IPC分类号: G02B26/08 H02N1/00

    CPC分类号: G02B26/0841 H02N1/006

    摘要: An actuator, including: a substrate; a middle plate supported above the substrate to be rotatable, about a rotation axis, with respect to the substrate; a stage connected to and spaced above the middle plate; a pair of first driving electrodes located on the substrate around the rotation axis; and a pair of second driving electrodes located on the substrate surrounding the first driving electrodes. Torsion springs connect opposite sides of the middle plate to support the middle plate above the substrate. A connecting member connects the stage and middle plate.

    摘要翻译: 一种致动器,包括:基板; 支撑在所述基板上方的中间板,以相对于所述基板绕旋转轴线旋转; 与中间板连接并间隔开的台阶; 一对第一驱动电极,位于绕旋转轴线的基板上; 以及位于围绕第一驱动电极的基板上的一对第二驱动电极。 扭转弹簧连接中间板的两侧,以支撑基板上方的中间板。 连接构件连接平台和中间板。

    Thin film resonator, method for making thin film resonator and filter having thin film resonators
    46.
    发明申请
    Thin film resonator, method for making thin film resonator and filter having thin film resonators 有权
    薄膜谐振器,制造薄膜谐振器的方法和具有薄膜谐振器的滤波器

    公开(公告)号:US20050052261A1

    公开(公告)日:2005-03-10

    申请号:US10936522

    申请日:2004-09-09

    摘要: A thin film resonator having a membrane layer formed on top of a substrate, a lower electrode formed on part of the top surface of the membrane layer, a piezoelectric layer formed on top of the lower electrode, an upper electrode formed on top of the piezoelectric layer, and a mass loading layer interposed between the lower electrode and the membrane layer and having a predetermined mass. This structure enables precise adjustment of the resonant frequency of the thin film resonator, thereby providing a more precise filter.

    摘要翻译: 一种薄膜谐振器,其具有形成在基板顶部的膜层,形成在所述膜层的上表面的一部分上的下电极,形成在所述下电极的顶部上的压电层,形成在所述压电体的顶部的上电极 层和介于下电极和膜层之间并具有预定质量的质量加载层。 这种结构能够精确地调整薄膜谐振器的谐振频率,从而提供更精确的滤波器。

    Two-axis geomagnetic sensor and method for manufacturing the same
    47.
    发明授权
    Two-axis geomagnetic sensor and method for manufacturing the same 有权
    二轴地磁传感器及其制造方法

    公开(公告)号:US07710708B2

    公开(公告)日:2010-05-04

    申请号:US11637767

    申请日:2006-12-13

    IPC分类号: H01G5/012

    摘要: A two-axis geomagnetic sensor is disclosed. The two-axis geomagnetic sensor includes a first geomagnetic sensor part including a first wafer and a first geomagnetic sensor on a surface of the first wafer; and a second geomagnetic sensor part including a second wafer and a second geomagnetic sensor on a surface of the second wafer. The first and second geomagnetic sensor parts are bonded to each other, in which the first and second geomagnetic sensors positioned in an orthogonal relation to each other. Accordingly, an occupancy area of the geomagnetic sensor can be reduced. Further, the geomagnetic sensor on each axe can have the same magnetic material properties, and alignment deviation cannot be generated.

    摘要翻译: 公开了一种双轴地磁传感器。 双轴地磁传感器包括第一地磁传感器部分,其包括在第一晶片的表面上的第一晶片和第一地磁传感器; 以及第二地磁传感器部分,其包括在第二晶片的表面上的第二晶片和第二地磁传感器。 第一和第二地磁传感器部分彼此结合,其中第一和第二地磁传感器以彼此正交的关系定位。 因此,可以减少地磁传感器的占用面积。 此外,每个斧头上的地磁传感器可以具有相同的磁性材料性质,并且不能产生对准偏差。

    Tri-state RF switch
    49.
    发明授权
    Tri-state RF switch 有权
    三态RF开关

    公开(公告)号:US07477884B2

    公开(公告)日:2009-01-13

    申请号:US11345237

    申请日:2006-02-02

    IPC分类号: H04B1/06

    摘要: A tri-state RF MEMS switch includes: a first well formed in a first substrate; a first input signal line and a first output signal line forming a first gap therebetween in the first well; a post bar forming a boundary between the second well and third well in the second substrate; a second input signal line and a second output signal line, and a third input signal line and a third output signal line forming a second gap and a third gap in the second well and the third well, respectively; and a membrane disposed between the first substrate and the second substrate such that the membrane crosses the first, second and third gaps, the membrane including a first conductive pad, a second conductive pad, and a third conductive pad thereon to face the first, second and third gaps, respectively.

    摘要翻译: 三态RF MEMS开关包括:形成在第一衬底中的第一阱; 第一输入信号线和第一输出信号线,其在第一阱中形成第一间隙; 在第二基板中形成第二阱和第三阱之间的边界的柱条; 第二输入信号线和第二输出信号线,以及分别在第二阱和第三阱中形成第二间隙和第三间隙的第三输入信号线和第三输出信号线; 以及膜,其设置在所述第一基板和所述第二基板之间,使得所述膜跨越所述第一,第二和第三间隙,所述膜包括第一导电焊盘,第二导电焊盘和第三导电焊盘, 和第三个差距。

    Method of fabricating inkjet print heads
    50.
    发明授权
    Method of fabricating inkjet print heads 有权
    制造喷墨打印头的方法

    公开(公告)号:US07416675B2

    公开(公告)日:2008-08-26

    申请号:US11453012

    申请日:2006-06-15

    IPC分类号: G01D15/00

    摘要: A method of fabricating inkjet print heads usable in an ink jet printer. The method of fabricating ink jet print heads includes preparing a plurality of ink jet print heads on a wafer while forming sub sidewalls around the ink jet print heads when the ink jet print heads are being prepared, attaching protection films onto the sub sidewalls of the wafer and the ink jet print heads, and dicing the ink jet print heads and detaching the individual ink jet print heads from the wafer. In the method, the ink jet print heads are diced in a wafer unit. Particularly, connect pads of the ink jet print heads can be prevented from being contaminated by the protection films.

    摘要翻译: 一种制造可用于喷墨打印机的喷墨打印头的方法。 制造喷墨打印头的方法包括:当准备喷墨打印头时,在晶片上准备多个喷墨打印头,同时在喷墨打印头周围形成副侧壁,将保护膜附着在晶片的子侧壁上 和喷墨打印头,并且对喷墨打印头进行切割并将各个喷墨打印头从晶片上分离出来。 在该方法中,喷墨打印头在晶片单元中切割。 特别地,可以防止喷墨打印头的连接垫被保护膜污染。