公开(公告)号：US20150326201A1

公开(公告)日：2015-11-12

申请号：US14805534

申请日：2015-07-22

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Toshio Nishimura

IPC: H03H9/215 ,  H01L41/047

CPC classification number: H03H9/215 ,  H01L41/047 ,  H03H9/02157

Abstract: A tuning-fork type quartz vibrator is disclosed that includes excitation electrodes and a tuning-fork type vibrating reed that is made of quartz and in which first and second vibrating arm sections are integrally joined to a base section. In each of the first and second vibrating sections, a plurality of through-holes and two or more crosspieces are provided. Further, an effective excitation electrode ratio is no more than 0.97, the effective excitation electrode ratio being expressed by (a total area of the excitation electrodes in a cross-section orthogonal to a second direction as a width direction of each of the first and second vibrating arm sections)/(an area of a region where the plurality of through-holes are provided in the cross-section orthogonal to the second direction as the width direction of each of the first and second vibrating arm sections).

Abstract translation: 公开了一种音叉型石英振子，其包括由石英制成的激励电极和音叉式振动片，并且其中第一和第二振动臂部分一体地接合到基部。 在第一和第二振动部分的每一个中，设置有多个通孔和两个或更多个挡条。 此外，有效激励电极比不大于0.97，有效激励电极比由（第一和第二的宽度方向的与第二方向垂直的截面的激励电极的总面积表示） 振动臂部）/（在与第二方向正交的截面上设置多个通孔的区域的区域作为第一和第二振动臂部的每一个的宽度方向）。

公开(公告)号：US12255599B2

公开(公告)日：2025-03-18

申请号：US17568017

申请日：2022-01-04

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Eitaro Kameda ,  Keisuke Takeyama ,  Toshio Nishimura ,  Hiroshi Nakatani

IPC: H03H3/02 ,  H03H9/02 ,  H03H9/56

Abstract: A piezoelectric resonator unit that includes a base, a cover, and a laminated structure disposed between the base and the cover. The laminated structure includes a piezoelectric resonator having a piezoelectric layer with a pair of principal surfaces facing each other, and a pair of excitation electrodes disposed on respective surfaces of the pair of principal surfaces so as to face each other with the piezoelectric layer therebetween, a semiconductor layer laminated on a side of one of the pair of principal surfaces of the piezoelectric layer, and a pair of measurement electrodes provided on the semiconductor layer. The pair of measurement electrodes measure signals based on temperature of the piezoelectric resonator through the semiconductor layer.

公开(公告)号：US11283423B2

公开(公告)日：2022-03-22

申请号：US16804075

申请日：2020-02-28

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Toshio Nishimura

IPC: H03H9/02 ,  H03H9/05 ,  H03H9/10 ,  H03H9/24

Abstract: A resonator is provided that includes a vibration portion having a first and second electrodes, a piezoelectric film disposed therebetween and having a first face opposing the first electrode, and at least two temperature characteristic adjustment films formed to oppose the first face of the piezoelectric film with the first electrode interposed therebetween. Moreover, the resonator includes a frame that surrounds at least part of the vibration portion; and a holding arm connecting the vibration portion to the holding portion. The vibration portion includes a surface opposing the first face of the piezoelectric film and having first and second regions in which an average amount of displacement is larger than an average amount of displacement in the first region when the vibration portion vibrates.

公开(公告)号：US10938375B2

公开(公告)日：2021-03-02

申请号：US15690482

申请日：2017-08-30

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Daisuke Nakamura ,  Toshio Nishimura ,  Ville Kaajakari

IPC: H03H9/10 ,  H03H9/05 ,  H03H9/17 ,  H03H9/13 ,  H03H9/02 ,  H03H9/24 ,  H03H9/15

Abstract: A resonator that includes a rectangular vibrating portion having first and second pairs of sides that provides contour vibration. A frame surrounds a periphery of the vibrating portion and a first holding unit between the frame and one of the first sides and includes a first arm substantially in parallel to the vibrating portion, multiple second arms connecting the first arm with the vibrating portion, and a third arm connecting the first arm with the frame. A first connection line is on the first arm; a first terminal is on the frame; three or more electrodes are on the vibrating portion; and multiple first extended lines are on the second arms and connect first and second electrodes with the first connection line. The first extended lines are connected to the first connection line, which is electrically connected to the first terminal.

公开(公告)号：US10291202B2

公开(公告)日：2019-05-14

申请号：US15072610

申请日：2016-03-17

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Hiroshi Yamada ,  Keiichi Umeda ,  Takehiko Kishi ,  Toshio Nishimura

IPC: H03H9/17 ,  H03H3/007 ,  H03H9/02 ,  H03H9/24 ,  H03H3/02

Abstract: A vibration device that includes a support member, vibration arms connected to the support member and each having an n-type Si layer which is a degenerate semiconductor, and electrodes provided so as to excite the vibration arms, and silicon oxide films containing impurities in contact with a respective lower surface of the n-type Si layers of each vibration arm.

公开(公告)号：US10276775B2

公开(公告)日：2019-04-30

申请号：US14978242

申请日：2015-12-22

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Takashi Hase ,  Toshio Nishimura ,  Hiroaki Kaida

IPC: H01L41/09 ,  H01L41/053 ,  H03H9/02 ,  H02N2/00 ,  H03H9/24

Abstract: A vibration device that includes a vibration portion, a support portion connected to the vibration portion, a bending-vibrating portion connected to the support portion, and a frame-shaped base portion connected to the bending-vibration portion and disposed so as to surround the vibration portion. The base portion defines a slit that extends in a first direction crossing a second direction in which the support portion extends from the vibration portion, the slit defining first and second fixed ends of the bending-vibrating portion and which are continuous with the base portion. A length between a portion of the bending-vibrating portion connected to the support portion to one of the first and second fixed ends of the bending-vibrating portion is in a range of λ/8 to 3λ/8, where λ denotes a wavelength of a bending vibration corresponding to a frequency of a characteristic vibration of the vibration portion.

公开(公告)号：US20190074811A1

公开(公告)日：2019-03-07

申请号：US16174526

申请日：2018-10-30

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Toshio Nishimura

IPC: H03H9/02 ,  H03H9/05 ,  H03H9/10 ,  H03H9/13 ,  H03H9/17

Abstract: A vibrator that includes a silicon substrate, an electrode facing a surface of the silicon substrate, and a piezoelectric body between the silicon substrate and the electrode and that produces contour vibration in a plane along the surface of the silicon substrate in accordance with a voltage applied to the electrode. The vibrator includes one or more substantially rectangular vibration regions each having a long side parallel to a node of the contour vibration of the piezoelectric body and a short side orthogonal to the node of the contour vibration of the piezoelectric body and corresponding to a half-wavelength of the contour vibration. The resonator satisfies W/T≥4 and y=−0.85×(1/T)+0.57±0.05 where T is the thickness of the silicon substrate, W is the width of the short side of the vibration region, and y is the resistivity of the silicon substrate.

公开(公告)号：US20170222621A1

公开(公告)日：2017-08-03

申请号：US15483161

申请日：2017-04-10

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Toshio Nishimura ,  Yuichi Goto ,  Daisuke Nakamura

IPC: H03H9/13 ,  H03H9/05 ,  H03H9/17

Abstract: A resonator includes a support frame, a rectangular vibrating plate that performs contour vibration in a predetermined direction, and two pairs of support arms. The vibrating plate includes four vibration regions arranged in a row in the lengthwise direction and electrodes disposed in the vibration regions. Each of the vibration regions vibrate with a phase opposite to phases with which the adjacent vibration regions vibrate upon excitation. A center line of a pair of the electrodes in the lengthwise direction is offset from a center line, in the lengthwise direction, of a corresponding vibration region that includes the electrode disposed thereon.

公开(公告)号：US09584093B2

公开(公告)日：2017-02-28

申请号：US14933336

申请日：2015-11-05

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Toshio Nishimura ,  Takashi Hase ,  Keisuke Takeyama ,  Hiroaki Kaida ,  Keiichi Umeda ,  Takehiko Kishi ,  Hiroshi Yamada

IPC: H03H9/21

CPC classification number: H03H9/21

Abstract: A vibrating device having a number 2N (N is an integer equal to 2 or larger) of tuning fork arms extending in a first direction are arranged side by side in a second direction. Phases of flexural vibrations of the number N of tuning fork arms positioned at a first side of an imaginary line A, which passes a center of a region in the second direction where the number 2N of tuning fork arms are disposed and which extends in the first direction, are symmetric to phases of flexural vibrations of the number N of tuning fork arms positioned at a second side of the imaginary line opposite the first side.

Abstract translation: 具有沿第一方向延伸的音叉臂的数量为2N（N是等于2或更大的整数）的振动装置在第二方向上并排布置。 定位在假想线A的第一侧的音叉臂数量N的弯曲振动相位，该假想线A的第二方向的中心位于音叉臂的数目2N的第二方向上，并且在第一方向上延伸 方向，对称于位于与第一侧相对的假想线的第二侧的音叉臂数量N的弯曲振动的相位。