公开(公告)号：US12158479B2

公开(公告)日：2024-12-03

申请号：US17557312

申请日：2021-12-21

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Eitaro Kameda

IPC: G01N5/00 ,  H10N30/20

Abstract: An analysis device that includes a piezoelectric substrate having a pair of opposing principal surfaces; a groove disposed in one of the principal surfaces of the piezoelectric substrate and that forms a flow passage through which an analysis target flows; a first electrode disposed in at least a portion of a space inside the groove; and a second electrode disposed on another of the principal surfaces of the piezoelectric substrate so as to oppose the first electrode with the piezoelectric substrate disposed therebetween. A projection projects from a bottom surface of the groove, and at least one of the first electrode and an adsorption material is provided in a region extending from the bottom surface of the groove portion to a side surface of the projection.

公开(公告)号：US10333490B2

公开(公告)日：2019-06-25

申请号：US15181771

申请日：2016-06-14

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Toshihiko Unami ,  Eitaro Kameda

IPC: H03H9/15 ,  H03H3/007 ,  H03H9/215 ,  H03H9/24 ,  H03H3/04

Abstract: A frequency adjustment method is provided in which a residual substance is unlikely to be generated, the frequency can be adjusted with high precision, and a decrease in strength is made small.A frequency adjustment method for a piezoelectric vibrator includes preparing the piezoelectric vibrator having a base portion, a vibration arm that includes a connection portion connected to the base portion as well as vibration arm main bodies extending from the connection portion and that is made of a single crystal, a lower electrode formed on the vibration arm, a piezoelectric thin film formed on the lower electrode, and an upper electrode formed on the piezoelectric thin film; and forming an alteration portion by irradiating the connection portion with a laser beam.

公开(公告)号：US12255599B2

公开(公告)日：2025-03-18

申请号：US17568017

申请日：2022-01-04

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Eitaro Kameda ,  Keisuke Takeyama ,  Toshio Nishimura ,  Hiroshi Nakatani

IPC: H03H3/02 ,  H03H9/02 ,  H03H9/56

Abstract: A piezoelectric resonator unit that includes a base, a cover, and a laminated structure disposed between the base and the cover. The laminated structure includes a piezoelectric resonator having a piezoelectric layer with a pair of principal surfaces facing each other, and a pair of excitation electrodes disposed on respective surfaces of the pair of principal surfaces so as to face each other with the piezoelectric layer therebetween, a semiconductor layer laminated on a side of one of the pair of principal surfaces of the piezoelectric layer, and a pair of measurement electrodes provided on the semiconductor layer. The pair of measurement electrodes measure signals based on temperature of the piezoelectric resonator through the semiconductor layer.

公开(公告)号：US20160322953A1

公开(公告)日：2016-11-03

申请号：US15206647

申请日：2016-07-11

Applicant: Murata Manufacturing Co., Ltd.

Inventor： KEISUKE TAKEYAMA ,  Daisuke Nakamura ,  Eitaro Kameda ,  Hiroaki Kaida

IPC: H03H9/02 ,  H03H9/17 ,  H03H3/02 ,  H03H3/007

CPC classification number: H03H9/02244 ,  H03H3/0077 ,  H03H3/02 ,  H03H3/04 ,  H03H9/0504 ,  H03H9/17 ,  H03H9/171 ,  H03H2003/027 ,  H03H2003/0442 ,  H03H2009/02173 ,  H03H2009/155

Abstract: A piezoelectric vibrator that includes a piezoelectric film with a pair of electrodes disposed on opposing sides of the piezoelectric film. Moreover, the vibrator includes first and second adjustment films with the first adjustment film covering the first surface of the piezoelectric film in a first region and the second adjustment film covering the first surface of the piezoelectric film in a second region that is different from the first region. Moreover, the second region of the piezoelectric film has a greater displacement than the first region when the piezoelectric vibrator vibrates.

Abstract translation: 一种压电振动器，其包括具有设置在所述压电膜的相对侧上的一对电极的压电膜。 此外，振动器包括第一和第二调节膜，其中第一调节膜在第一区域中覆盖压电膜的第一表面，并且第二调节膜在与第一区域不同的第二区域中覆盖压电膜的第一表面 地区。 此外，当压电振动器振动时，压电膜的第二区域具有比第一区域更大的位移。

公开(公告)号：US20160294355A1

公开(公告)日：2016-10-06

申请号：US15181771

申请日：2016-06-14

Applicant: Murata Manufacturing Co., Ltd.

Inventor： TOSHIHIKO UNAMI ,  Eitaro Kameda

IPC: H03H9/15 ,  H03H3/04

CPC classification number: H03H9/15 ,  H03H3/0077 ,  H03H3/04 ,  H03H9/215 ,  H03H9/2457 ,  H03H2003/0421 ,  H03H2003/0492

Abstract: A frequency adjustment method is provided in which a residual substance is unlikely to be generated, the frequency can be adjusted with high precision, and a decrease in strength is made small.A frequency adjustment method for a piezoelectric vibrator includes preparing the piezoelectric vibrator having a base portion, a vibration arm that includes a connection portion connected to the base portion as well as vibration arm main bodies extending from the connection portion and that is made of a single crystal, a lower electrode formed on the vibration arm, a piezoelectric thin film formed on the lower electrode, and an upper electrode formed on the piezoelectric thin film; and forming an alteration portion by irradiating the connection portion with a laser beam.

Abstract translation: 一种压电振动器的频率调节方法包括制备具有基部的压电振动器，包括连接到基部的连接部的振动臂以及从连接部延伸的振动臂主体，并且由单个 形成在振动臂上的下电极，形成在下电极上的压电薄膜和形成在压电薄膜上的上电极; 以及通过用激光束照射连接部分来形成改变部分。

公开(公告)号：US10333486B2

公开(公告)日：2019-06-25

申请号：US15206647

申请日：2016-07-11

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Keisuke Takeyama ,  Daisuke Nakamura ,  Eitaro Kameda ,  Hiroaki Kaida

IPC: H03H9/17 ,  H03H9/02 ,  H03H9/05 ,  H03H3/007 ,  H03H3/02 ,  H03H3/04 ,  H03H9/15

Abstract: A piezoelectric vibrator that includes a piezoelectric film with a pair of electrodes disposed on opposing sides of the piezoelectric film. Moreover, the vibrator includes first and second adjustment films with the first adjustment film covering the first surface of the piezoelectric film in a first region and the second adjustment film covering the first surface of the piezoelectric film in a second region that is different from the first region. Moreover, the second region of the piezoelectric film has a greater displacement than the first region when the piezoelectric vibrator vibrates.

公开(公告)号：US09350273B2

公开(公告)日：2016-05-24

申请号：US14261921

申请日：2014-04-25

Applicant: MURATA MANUFACTURING CO., LTD.

Inventor： Eitaro Kameda ,  Katsumi Fujimoto ,  Toshiki Nishiwaki ,  Makoto Kitamura ,  Yuji Fujino

IPC: H02N2/18

CPC classification number: H02N2/18

Abstract: A piezoelectric power generating device that includes a piezoelectric element having a first surface and a second surface opposite the first surface, a stopper, and a lever. The stopper has a first contact surface that is in contact with the first surface. The lever includes a contact portion, which includes a second contact surface that is in contact with the second surface, and a displacement portion. The lever is arranged in such a manner as to be rotatable relative to the stopper around a rotation axis such that the second contact surface presses the second surface when the displacement portion rotates relative to the stopper around the rotation axis.

Abstract translation: 一种压电发电装置，包括具有第一表面和与第一表面相对的第二表面的压电元件，止动器和杠杆。 止动器具有与第一表面接触的第一接触表面。 杠杆包括接触部分，其包括与第二表面接触的第二接触表面和位移部分。 杠杆以相对于止动件围绕旋转轴线旋转的方式布置，使得当位移部分围绕旋转轴线相对于止动件旋转时，第二接触表面按压第二表面。

公开(公告)号：US09130483B2

公开(公告)日：2015-09-08

申请号：US13726701

申请日：2012-12-26

Applicant: MURATA MANUFACTURING CO., LTD.

Inventor： Eitaro Kameda ,  Chikahiro Horiguchi ,  Katsumi Fujimoto

IPC: H02N2/18 ,  B60C23/04 ,  H01L41/113

CPC classification number: H02N2/18 ,  B60C23/0411 ,  H01L41/1134

Abstract: A piezoelectric power generator that includes a first elastic body, which deforms along a first direction x upon receiving a stress, and a piezoelectric power-generating element. A second elastic body is arranged on a y1 side of the first elastic body and a piezoelectric element is fixed to a y1-side surface of the second elastic body. When the first elastic body bends into a shape that is concave toward the y1 side, the second elastic body receives a stress from the first elastic body. When the first elastic body bends into a shape that is convex toward the y1 side, the second elastic body does not receive a stress from the first elastic body. The piezoelectric power generator further includes a vibration suppressing member that is arranged between the first elastic body and the second elastic body and suppresses bending mode vibration of the second elastic body.

Abstract translation: 一种压电发电机，包括：第一弹性体，其在受到应力时沿着第一方向x变形;以及压电发电元件。 第二弹性体设置在第一弹性体的y1侧，压电元件固定在第二弹性体的y1侧面上。 当第一弹性体弯曲成朝向y1侧凹入的形状时，第二弹性体受到来自第一弹性体的应力。 当第一弹性体弯曲成朝向y1侧凸出的形状时，第二弹性体不会受到来自第一弹性体的应力。 压电发电机还包括设置在第一弹性体与第二弹性体之间的振动抑制构件，并抑制第二弹性体的弯曲模式振动。

公开(公告)号：US20130181578A1

公开(公告)日：2013-07-18

申请号：US13726701

申请日：2012-12-26

Applicant: MURATA MANUFACTURING CO., LTD.

Inventor： Eitaro Kameda ,  Chikahiro Horiguchi ,  Katsumi Fujimoto

IPC: H02N2/18

CPC classification number: H02N2/18 ,  B60C23/0411 ,  H01L41/1134

Abstract: A piezoelectric power generator that includes a first elastic body, which deforms along a first direction x upon receiving a stress, and a piezoelectric power-generating element. A second elastic body is arranged on a y1 side of the first elastic body and a piezoelectric element is fixed to a y1-side surface of the second elastic body. When the first elastic body bends into a shape that is concave toward the y1 side, the second elastic body receives a stress from the first elastic body. When the first elastic body bends into a shape that is convex toward the y1 side, the second elastic body does not receive a stress from the first elastic body. The piezoelectric power generator further includes a vibration suppressing member that is arranged between the first elastic body and the second elastic body and suppresses bending mode vibration of the second elastic body.

Abstract translation: 一种压电发电机，包括：第一弹性体，其在受到应力时沿着第一方向x变形;以及压电发电元件。 第二弹性体设置在第一弹性体的y1侧，压电元件固定在第二弹性体的y1侧面上。 当第一弹性体弯曲成朝向y1侧凹入的形状时，第二弹性体受到来自第一弹性体的应力。 当第一弹性体弯曲成朝向y1侧凸出的形状时，第二弹性体不会受到来自第一弹性体的应力。 压电发电机还包括设置在第一弹性体与第二弹性体之间的振动抑制构件，并抑制第二弹性体的弯曲模式振动。

公开(公告)号：US10396752B2

公开(公告)日：2019-08-27

申请号：US15206585

申请日：2016-07-11

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Hiroaki Kaida ,  Eitaro Kameda ,  Keisuke Takeyama ,  Daisuke Nakamura

IPC: H03H9/02 ,  B81B3/00 ,  H03H9/24 ,  H03H9/15

Abstract: A MEMS device that suppresses variations in a resistance value caused by contracting vibrations in a direction in which a holding portion extends. The MEMS device includes a frame, a rectangular plate that receives an input of a driving signal, and holding portions that anchor the rectangular plate to the frame. The frame and the rectangular plate are both rectangular in shape. The holding portions are provided extending toward the frame from central areas of the opposing sides of the rectangular plate, and anchor the rectangular plate to the frame. A resistive film is formed in a region that follows a straight line connecting the holding portions that anchor the rectangular plate to the frame and that corresponds to no more than half a maximum displacement from a vibration distribution.