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公开(公告)号：US20060197413A9
公开(公告)日：2006-09-07
申请号：US10896769
申请日：2004-07-22
IPC分类号： H01L41/04
CPC分类号： B81B3/0018 , B81B2201/032 , G02B26/0841 , G02B26/0858 , H01L41/0474 , H01L41/0973 , H04R17/005 , H04R2201/003
摘要： An actuator device has a drive section including a plurality of actuators arranged in a plane on a substrate, and a single first plate member to which drive forces from the actuators of the drive section are transmitted. A plurality of spacers are disposed between the first plate member and the substrate, forming m cells. Each of the actuators has a cavity, a vibrating section and a fixed section formed on the substrate. The rigidity of the first plate member is greater than the rigidity of the vibrating section of the actuator.
摘要翻译： 致动器装置具有驱动部，该驱动部具有布置在基板上的平面中的多个致动器，以及传递来自驱动部的致动器的驱动力的单个第一板部件。 多个间隔件设置在第一板构件和基板之间，形成m个单元。 每个致动器具有形成在基板上的空腔，振动部分和固定部分。 第一板构件的刚性大于致动器的振动部的刚性。
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公开(公告)号：US06968603B2
公开(公告)日：2005-11-29
申请号：US10122658
申请日：2002-04-15
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
IPC分类号： H01L41/08 , H01L41/083 , H01L41/09 , H01L41/22 , H01L41/338 , H02N2/00 , H04R17/00 , H01L41/04 , H01L41/18
CPC分类号： H01L41/0946 , H01L41/27 , Y10T29/42 , Y10T29/49789 , Y10T29/49798
摘要： A piezoelectric/electrostrictive device includes a pair of mutually opposing thin plate sections, a movable section, and a fixing section for supporting the thin plate sections and the movable section. Piezoelectric/electrostrictive elements are arranged on at least one thin plate section of the pair of thin plate sections. A hole is formed by both inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixing section. The piezoelectric/electrostrictive device further includes at least one beam section extending from the inner wall of the movable section to the inner wall of the fixing section.
摘要翻译： 压电/电致伸缩装置包括一对相互相对的薄板部分，可移动部分和用于支撑薄板部分和可移动部分的固定部分。 压电/电致伸缩元件布置在该对薄板部分的至少一个薄板部分上。 一对薄壁部分的内壁，可移动部分的内壁和固定部分的内壁都由一个孔形成。 压电/电致伸缩装置还包括从可动部分的内壁延伸到固定部分的内壁的至少一个梁部分。
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公开(公告)号：US06925693B2
公开(公告)日：2005-08-09
申请号：US09963696
申请日：2001-09-26
CPC分类号： H01L41/0946 , H01L41/314 , Y10T29/42 , Y10T29/49002 , Y10T29/4902 , Y10T29/49078 , Y10T29/49126 , Y10T29/49798 , Y10T83/0476 , Y10T83/0505 , Y10T83/051 , Y10T83/0577
摘要： A method of fabricating a piezoelectric/electrostrictive device including a driving portion, a movable portion, and a fixing portion for holding the driving portion and the movable portion. The driving portion includes a pair of thin plate portions facing each other, and a film-like piezoelectric/electrostrictive element formed on at least a part of the outer surface of at least one of the thin plate portions. A ceramic green laminate including at least one ceramic green sheet constituting one of the thin plates and at least one ceramic green sheet having at least one hole formed thereon is formed. The ceramic green laminate is sintered to produce a ceramic laminate. A piezoelectric/electrostrictive element is formed by a film formation method on the outer surface of the thin plate portion of the ceramic laminate. The ceramic laminate is then cut with the piezoelectric/electrostrictive element formed thereon.
摘要翻译： 一种制造压电/电致伸缩器件的方法，包括驱动部分，可移动部分和用于保持驱动部分和可动部分的固定部分。 驱动部分包括彼此面对的一对薄板部分，以及形成在至少一个薄板部分的外表面的至少一部分上的薄膜状压电/电致伸缩元件。 形成包括构成薄板之一的至少一个陶瓷生片和至少形成有至少一个孔的至少一个陶瓷生片的陶瓷生坯层压体。 将陶瓷生坯层压体烧结以制造陶瓷层压板。 在陶瓷层叠体的薄板部分的外表面上通过成膜方法形成压电/电致伸缩元件。 然后用形成在其上的压电/电致伸缩元件切割陶瓷层压体。
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公开(公告)号：US20050168109A1
公开(公告)日：2005-08-04
申请号：US10959420
申请日：2004-10-06
IPC分类号： B06B1/06 , H01L41/08 , H01L41/083 , H01L41/09 , H01L41/187 , H01L41/22 , H01L41/338 , H02N2/00 , H02N2/02 , H02N2/04
CPC分类号： H01L41/094 , H01L41/0831 , H01L41/0946 , H01L41/1132 , H01L41/273
摘要： A piezoelectric/electrostrictive device is provided, including a pair of mutually opposing thin plate sections and a fixation section for supporting the thin plate sections. A piezoelectric/electrostrictive element is arranged on each of the thin plate sections. The piezoelectric/electrostrictive device also includes movable sections defined by at least first end portions of the thin plate sections and a material which is different from that of the thin plate section
摘要翻译： 提供一种压电/电致伸缩器件，包括一对相互相对的薄板部分和用于支撑薄板部分的固定部分。 压电/电致伸缩元件布置在每个薄板部分上。 压电/电致伸缩装置还包括由薄板部分的至少第一端部限定的可移动部分和与薄板部分不同的材料
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公开(公告)号：US06570297B1
公开(公告)日：2003-05-27
申请号：US09643163
申请日：2000-08-21
IPC分类号： H01L4108
CPC分类号： H01L41/0946 , H01L41/27
摘要： A piezoelectric/electrostrictive device (P/E) includes driving, movable and fixing portions. One end of a first P/E element and P/E operating portion on the end are positioned on the fixing portion and an opposite end of the P/E operating portion of the first P/E element is positioned on a first thin plate portion. One end of a second P/E element and P/E operating portion on the end are positioned on the movable portion and an opposite end of the P/E operating portion of the second P/E element is positioned on a second thin plate portion. A hole formed by inner walls of the driving, movable and fixing portions has a central axis that extends in an axial direction substantially parallel to the thin plate portions and substantially perpendicular to the length direction, and the device is free of any other holes extending in any direction other than the axial direction.
摘要翻译： 压电/电致伸缩装置（P / E）包括驱动，可移动和固定部分。 第一P / E元件的一端和端部上的P / E操作部分位于固定部分上，并且第一P / E元件的P / E操作部分的相对端位于第一薄板部分上 。 第二P / E元件的一端和端部上的P / E操作部分位于可动部分上，并且第二P / E元件的P / E操作部分的相对端位于第二薄板部分上 。 由驱动，可移动和固定部分的内壁形成的孔具有中心轴线，所述中心轴线在基本上平行于薄板部分并且基本上垂直于长度方向的轴向方向上延伸，并且该装置没有任何其它孔延伸 轴向以外的任何方向。
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公开(公告)号：US06538362B1
公开(公告)日：2003-03-25
申请号：US09613536
申请日：2000-07-10
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
IPC分类号： H01L4108
CPC分类号： H01L41/0926 , H01L41/0946 , H01L41/1876 , H01L41/27 , Y10T29/42 , Y10T29/49005 , Y10T29/49574 , Y10T29/49789
摘要： A piezoelectric/electrostrictive device comprises a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. Piezoelectric/electrostrictive elements are arranged on the pair of thin plate sections. A hole is formed by the inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixation section. A through-hole having a rectangular cross section is formed over a range from a forward end surface of the movable section to the hole to realize a light weight of the movable section.
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47.发明授权Piezoelectric/electrostrictive film type elements and process for producing the same 有权压电/电致伸缩膜型元件及其制造方法公开(公告)号：US06518690B2
公开(公告)日：2003-02-11
申请号：US09837546
申请日：2001-04-18
IPC分类号： H01L41187
CPC分类号： B81B3/0021 , H01L41/081 , H01L41/0933 , H01L41/094 , H01L41/0973 , H01L41/314 , H01L41/43 , Y10T29/40 , Y10T29/42 , Y10T29/49155
摘要： An integrated piezoelectric/electrostrictive film type element with excellent durability, includes a substrate made of a ceramic material composed mainly of completely stabilized or partially stabilized zirconium oxide, and a piezoelectric/electrostrictive operating section integrated onto the ceramic substrate by a film-forming method, the piezoelectric/electrostrictive operating section comprising a lower electrode, a piezoelectric/electrostrictive layer of a lead element-containing composition, and an upper electrode, wherein a heterophase-occurence rate at a surface of the piezoelectric/electrostrictive layer is controlled to a range of 0.1 to 30%.
摘要翻译： 具有优异耐久性的集成压电/电致伸缩膜型元件包括由主要由完全稳定或部分稳定的氧化锆组成的陶瓷材料制成的基板和通过成膜方法集成在陶瓷基板上的压电/电致伸缩操作部分， 压电/电致伸缩操作部分包括下电极，含铅元素组合物的压电/电致伸缩层和上电极，其中在压电/电致伸缩层的表面处的异相发生率被控制在 0.1〜30％。
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公开(公告)号：US06931698B2
公开(公告)日：2005-08-23
申请号：US10096059
申请日：2002-03-12
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
IPC分类号： G02B26/08 , H01L41/04 , H01L41/08 , H01L41/09 , H01L41/314 , H01L41/338 , H02N2/02 , H04R17/00
CPC分类号： G02B26/0858 , H01L41/094 , H01L41/0946 , H01L41/314 , H01L41/338 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/4902 , Y10T29/4908
摘要： A piezoelectric/electrostrictive device is provided including a functional element. The functional element includes a base portion, a deformable portion assuming the form of a thin plate and extending from the base portion to thereby form a plane, a piezoelectric/electrostrictive element formed on the deformable portion, and a reflective portion extending from the deformable portion so as to form an active plane intersecting with the plane of the deformable portion and having a light-reflecting member disposed on the active plane. Operation of the piezoelectric/electrostrictive element causes the deformable portion to be deformed in a direction substantially perpendicular to the plane of the deformable portion to thereby change a reflection angle of light reflected from the reflective portion.
摘要翻译： 提供了包括功能元件的压电/电致伸缩器件。 功能元件包括基部，呈现薄板形状并从基部延伸形成平面的可变形部分，形成在可变形部分上的压电/电致伸缩元件以及从可变形部分延伸的反射部分 以便形成与可变形部分的平面相交并且具有设置在有效平面上的光反射部件的有源平面。 压电/电致伸缩元件的操作使得可变形部分在基本上垂直于可变形部分的平面的方向上变形，从而改变从反射部分反射的光的反射角度。
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公开(公告)号：US20050057120A1
公开(公告)日：2005-03-17
申请号：US10881328
申请日：2004-06-30
IPC分类号： G02B6/35 , G02B26/08 , H01L41/08 , H01L41/083 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/193 , H02N2/00 , H02N2/04
CPC分类号： G02B26/0858 , G02B6/3502 , G02B6/3578 , H01L41/0474 , H01L41/0973
摘要： An actuator element has a plate member, a piezoelectric/electrostrictive body disposed in facing relation to the plate member, and a beam disposed between the plate member and the piezoelectric/electrostrictive body and fixing the piezoelectric/electrostrictive body to the plate member. The piezoelectric/electrostrictive body has a piezoelectric/electrostrictive layer, an upper electrode formed on a surface of the piezoelectric/electrostrictive layer which faces the plate member, and a lower electrode formed on a surface of the piezoelectric/electrostrictive layer which is opposite to the surface thereof facing the plate member. When an electric field is applied to the upper electrode and the lower electrode, a portion of the piezoelectric/electrostrictive body is displaced toward or away from the plate member.
摘要翻译： 致动器元件具有板构件，与板构件相对设置的压电/电致伸缩体，以及设置在板构件和压电/电致伸缩体之间的梁，并将压电/电致伸缩体固定到板构件。 压电/电致伸缩体具有压电/电致伸缩层，形成在压电/电致伸缩层的面向板构件的表面上的上电极和形成在与压电/电致伸缩层相对的压电/电致伸缩层的表面上的下电极 其表面面向板构件。 当电场施加到上电极和下电极时，压电/电致伸缩体的一部分朝向或远离板构件移动。
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公开(公告)号：US06671939B2
公开(公告)日：2004-01-06
申请号：US10099671
申请日：2002-03-15
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
IPC分类号： H04R1700
CPC分类号： H01L41/0946 , H01L41/27 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49128 , Y10T29/49574 , Y10T29/49789 , Y10T29/49798
摘要： A piezoelectric/electrostrictive device includes a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. One or more piezoelectric/electrostrictive elements are arranged on the pair of thin plate sections. A hole is formed by both inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixation section. At least one thin plate section of the pair of thin plate sections is previously bent in a direction to make mutual approach so that it has an inwardly convex configuration to the hole.
摘要翻译： 压电/电致伸缩装置包括一对相互相对的薄板部分，可移动部分和用于支撑薄板部分和可移动部分的固定部分。 一对或多个压电/电致伸缩元件设置在一对薄板部分上。 由一对薄板部分的内壁，可移动部分的内壁和固定部分的内壁两个孔形成一个孔。 该一对薄板部分中的至少一个薄板部分预先沿着相互接近的方向弯曲，使得其具有朝向该孔的向内凸起的构造。
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