摘要:
An integrated piezoelectric/electrostrictive film type element with excellent durability, includes a substrate made of a ceramic material composed mainly of completely stabilized or partially stabilized zirconium oxide, and a piezoelectric/electrostrictive operating section integrated onto the ceramic substrate by a film-forming method, the piezoelectric/electrostrictive operating section comprising a lower electrode, a piezoelectric/electrostrictive layer of a lead element-containing composition, and an upper electrode, wherein a heterophase-occurence rate at a surface of the piezoelectric/electrostrictive layer is controlled to a range of 0.1 to 30%.
摘要:
A process for providing an integrated piezoelectric/electrostrictive film type element with excellent durability, includes a substrate made of a ceramic material composed mainly of completely stabilized or partially stabilized zirconium oxide, and a piezoelectric/electrostrictive operating section integrated onto the ceramic substrate by a film-forming method, the piezoelectric/electrostrictive operating section comprising a lower electrode, a piezoelectric/electrostrictive layer of a lead element-containing composition, and an upper electrode, wherein a heterophase-occurence rate at a surface of the piezoelectric/electrostrictive layer is controlled to a range of 0.1 to 30%.
摘要:
A ceramic device has an actuator element which includes a shape-retaining layer, an upper electrode formed on an upper portion of the shape-retaining layer, and a lower electrode formed on a lower portion of the shape-retaining layer. A vibrating section of ceramics supports the actuator element and a fixed section of ceramics vibratingly supports the vibrating section. An electrode material of the lower electrode contacting the vibrating section contains an additive in an amount of 0.01% by weight to 20% by weight. The electrode material contains platinum as a major component, for example. The additive to the electrode material is preferably zirconium oxide, cerium oxide, or titanium oxide.
摘要:
Disclosed is a display device for displaying a picture on an optical waveguide plate in accordance with an image signal by controlling displacement movement of each of actuator elements in a direction to make contact or separation with respect to the optical waveguide plate so that scattered light is controlled at a predetermined position on the optical waveguide plate, wherein the actuator element comprises a main actuator element including a piezoelectric/electrostrictive layer, and a pair of electrodes formed on a first principal surface of the piezoelectric/electrostrictive layer, a vibrating section contacting with a second principal surface of the piezoelectric/electrostrictive layer, for supporting the main actuator element, and a fixed section for supporting the vibrating section in a vibrative manner, and wherein the actuator element further comprises a displacement-transmitting section for transmitting, to the optical waveguide plate, displacement movement of the main actuator element caused by applying a voltage between the pair of electrodes. According to the display device, the electrostatic capacity of the actuator element can be reduced, further, display brightness without any nonuniformity can be obtained, and it is possible to improve the image quality.
摘要:
An actuator device has a drive section including a plurality of actuators arranged in a plane on a substrate, and a single first plate member to which drive forces from the actuators of the drive section are transmitted. A plurality of spacers are disposed between the first plate member and the substrate, forming m cells. Each of the actuators has a cavity, a vibrating section and a fixed section formed on the substrate. The rigidity of the first plate member is greater than the rigidity of the vibrating section of the actuator.
摘要:
A piezoelectric/electrostrictive device includes a pair of mutually opposing thin plate sections, a movable section, and a fixing section for supporting the thin plate sections and the movable section. Piezoelectric/electrostrictive elements are arranged on at least one thin plate section of the pair of thin plate sections. A hole is formed by both inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixing section. The piezoelectric/electrostrictive device further includes at least one beam section extending from the inner wall of the movable section to the inner wall of the fixing section.
摘要:
A method of fabricating a piezoelectric/electrostrictive device including a driving portion, a movable portion, and a fixing portion for holding the driving portion and the movable portion. The driving portion includes a pair of thin plate portions facing each other, and a film-like piezoelectric/electrostrictive element formed on at least a part of the outer surface of at least one of the thin plate portions. A ceramic green laminate including at least one ceramic green sheet constituting one of the thin plates and at least one ceramic green sheet having at least one hole formed thereon is formed. The ceramic green laminate is sintered to produce a ceramic laminate. A piezoelectric/electrostrictive element is formed by a film formation method on the outer surface of the thin plate portion of the ceramic laminate. The ceramic laminate is then cut with the piezoelectric/electrostrictive element formed thereon.
摘要:
A piezoelectric/electrostrictive device is provided, including a pair of mutually opposing thin plate sections and a fixation section for supporting the thin plate sections. A piezoelectric/electrostrictive element is arranged on each of the thin plate sections. The piezoelectric/electrostrictive device also includes movable sections defined by at least first end portions of the thin plate sections and a material which is different from that of the thin plate section
摘要:
A piezoelectric/electrostrictive device (P/E) includes driving, movable and fixing portions. One end of a first P/E element and P/E operating portion on the end are positioned on the fixing portion and an opposite end of the P/E operating portion of the first P/E element is positioned on a first thin plate portion. One end of a second P/E element and P/E operating portion on the end are positioned on the movable portion and an opposite end of the P/E operating portion of the second P/E element is positioned on a second thin plate portion. A hole formed by inner walls of the driving, movable and fixing portions has a central axis that extends in an axial direction substantially parallel to the thin plate portions and substantially perpendicular to the length direction, and the device is free of any other holes extending in any direction other than the axial direction.
摘要:
A piezoelectric/electrostrictive device comprises a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. Piezoelectric/electrostrictive elements are arranged on the pair of thin plate sections. A hole is formed by the inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixation section. A through-hole having a rectangular cross section is formed over a range from a forward end surface of the movable section to the hole to realize a light weight of the movable section.