Piezoelectric/electrostrictive film type elements and process for producing the same
    1.
    发明授权
    Piezoelectric/electrostrictive film type elements and process for producing the same 有权
    压电/电致伸缩膜型元件及其制造方法

    公开(公告)号:US06518690B2

    公开(公告)日:2003-02-11

    申请号:US09837546

    申请日:2001-04-18

    IPC分类号: H01L41187

    摘要: An integrated piezoelectric/electrostrictive film type element with excellent durability, includes a substrate made of a ceramic material composed mainly of completely stabilized or partially stabilized zirconium oxide, and a piezoelectric/electrostrictive operating section integrated onto the ceramic substrate by a film-forming method, the piezoelectric/electrostrictive operating section comprising a lower electrode, a piezoelectric/electrostrictive layer of a lead element-containing composition, and an upper electrode, wherein a heterophase-occurence rate at a surface of the piezoelectric/electrostrictive layer is controlled to a range of 0.1 to 30%.

    摘要翻译: 具有优异耐久性的集成压电/电致伸缩膜型元件包括由主要由完全稳定或部分稳定的氧化锆组成的陶瓷材料制成的基板和通过成膜方法集成在陶瓷基板上的压电/电致伸缩操作部分, 压电/电致伸缩操作部分包括下电极,含铅元素组合物的压电/电致伸缩层和上电极,其中在压电/电致伸缩层的表面处的异相发生率被控制在 0.1〜30%。

    Piezoelectric/electrostrictive film type elements and process for producing the same
    2.
    发明授权
    Piezoelectric/electrostrictive film type elements and process for producing the same 失效
    压电/电致伸缩膜型元件及其制造方法

    公开(公告)号:US06703257B2

    公开(公告)日:2004-03-09

    申请号:US10236754

    申请日:2002-09-06

    IPC分类号: H01L2100

    摘要: A process for providing an integrated piezoelectric/electrostrictive film type element with excellent durability, includes a substrate made of a ceramic material composed mainly of completely stabilized or partially stabilized zirconium oxide, and a piezoelectric/electrostrictive operating section integrated onto the ceramic substrate by a film-forming method, the piezoelectric/electrostrictive operating section comprising a lower electrode, a piezoelectric/electrostrictive layer of a lead element-containing composition, and an upper electrode, wherein a heterophase-occurence rate at a surface of the piezoelectric/electrostrictive layer is controlled to a range of 0.1 to 30%.

    摘要翻译: 提供具有优异的耐久性的集成压电/电致伸缩膜型元件的方法包括由主要由完全稳定或部分稳定的氧化锆组成的陶瓷材料制成的基板和通过膜整合到陶瓷基板上的压电/电致伸缩操作部 压电/电致伸缩操作部分包括下电极,含铅元素组合物的压电/电致伸缩层和上电极,其中在压电/电致伸缩层的表面处的异相发生率被控制 至0.1〜30%的范围。

    Ceramic device
    3.
    发明授权
    Ceramic device 失效
    陶瓷装置

    公开(公告)号:US06998763B2

    公开(公告)日:2006-02-14

    申请号:US10230731

    申请日:2002-08-29

    IPC分类号: H01L41/08

    摘要: A ceramic device has an actuator element which includes a shape-retaining layer, an upper electrode formed on an upper portion of the shape-retaining layer, and a lower electrode formed on a lower portion of the shape-retaining layer. A vibrating section of ceramics supports the actuator element and a fixed section of ceramics vibratingly supports the vibrating section. An electrode material of the lower electrode contacting the vibrating section contains an additive in an amount of 0.01% by weight to 20% by weight. The electrode material contains platinum as a major component, for example. The additive to the electrode material is preferably zirconium oxide, cerium oxide, or titanium oxide.

    摘要翻译: 陶瓷器件具有致动器元件,其包括形状保持层,形成在形状保持层的上部上的上电极和形成在形状保持层的下部的下电极。 陶瓷的振动部支承致动元件,陶瓷的固定部振动地支承振动部。 接触振动部的下部电极的电极材料含有0.01重量%〜20重量%的添加剂。 电极材料例如包含铂作为主要成分。 电极材料的添加剂优选为氧化锆,氧化铈或氧化钛。

    Display device
    4.
    发明授权
    Display device 失效
    显示设备

    公开(公告)号:US5862275A

    公开(公告)日:1999-01-19

    申请号:US882066

    申请日:1997-06-25

    摘要: Disclosed is a display device for displaying a picture on an optical waveguide plate in accordance with an image signal by controlling displacement movement of each of actuator elements in a direction to make contact or separation with respect to the optical waveguide plate so that scattered light is controlled at a predetermined position on the optical waveguide plate, wherein the actuator element comprises a main actuator element including a piezoelectric/electrostrictive layer, and a pair of electrodes formed on a first principal surface of the piezoelectric/electrostrictive layer, a vibrating section contacting with a second principal surface of the piezoelectric/electrostrictive layer, for supporting the main actuator element, and a fixed section for supporting the vibrating section in a vibrative manner, and wherein the actuator element further comprises a displacement-transmitting section for transmitting, to the optical waveguide plate, displacement movement of the main actuator element caused by applying a voltage between the pair of electrodes. According to the display device, the electrostatic capacity of the actuator element can be reduced, further, display brightness without any nonuniformity can be obtained, and it is possible to improve the image quality.

    摘要翻译: 公开了一种显示装置,用于根据图像信号在光波导板上显示图像,通过控制每个致动器元件在相对于光波导板接触或分离的方向上的位移运动,从而控制散射光 在所述光波导板上的预定位置处,所述致动器元件包括具有压电/电致伸缩层的主致动器元件和形成在所述压电/电致伸缩层的第一主表面上的一对电极,与所述压电/ 用于支撑主致动器元件的压电/电致伸缩层的第二主表面和用于以振动方式支撑振动部分的固定部分,并且其中所述致动器元件还包括位移传递部分,用于传输到所述光波导 板,主动作的位移运动 r元件通过在一对电极之间施加电压而引起。 根据显示装置,可以减小致动器元件的静电电容,而且可以获得不会不均匀的显示亮度,并且可以提高图像质量。

    Actuator Device
    5.
    发明申请
    Actuator Device 有权
    执行机构

    公开(公告)号:US20060197413A9

    公开(公告)日:2006-09-07

    申请号:US10896769

    申请日:2004-07-22

    IPC分类号: H01L41/04

    摘要: An actuator device has a drive section including a plurality of actuators arranged in a plane on a substrate, and a single first plate member to which drive forces from the actuators of the drive section are transmitted. A plurality of spacers are disposed between the first plate member and the substrate, forming m cells. Each of the actuators has a cavity, a vibrating section and a fixed section formed on the substrate. The rigidity of the first plate member is greater than the rigidity of the vibrating section of the actuator.

    摘要翻译: 致动器装置具有驱动部,该驱动部具有布置在基板上的平面中的多个致动器,以及传递来自驱动部的致动器的驱动力的单个第一板部件。 多个间隔件设置在第一板构件和基板之间,形成m个单元。 每个致动器具有形成在基板上的空腔,振动部分和固定部分。 第一板构件的刚性大于致动器的振动部的刚性。

    Method of producing a piezoelectric/electrostrictive device
    6.
    发明授权
    Method of producing a piezoelectric/electrostrictive device 失效
    制造压电/电致伸缩器件的方法

    公开(公告)号:US06968603B2

    公开(公告)日:2005-11-29

    申请号:US10122658

    申请日:2002-04-15

    摘要: A piezoelectric/electrostrictive device includes a pair of mutually opposing thin plate sections, a movable section, and a fixing section for supporting the thin plate sections and the movable section. Piezoelectric/electrostrictive elements are arranged on at least one thin plate section of the pair of thin plate sections. A hole is formed by both inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixing section. The piezoelectric/electrostrictive device further includes at least one beam section extending from the inner wall of the movable section to the inner wall of the fixing section.

    摘要翻译: 压电/电致伸缩装置包括一对相互相对的薄板部分,可移动部分和用于支撑薄板部分和可移动部分的固定部分。 压电/电致伸缩元件布置在该对薄板部分的至少一个薄板部分上。 一对薄壁部分的内壁,可移动部分的内壁和固定部分的内壁都由一个孔形成。 压电/电致伸缩装置还包括从可动部分的内壁延伸到固定部分的内壁的至少一个梁部分。

    Method of fabricating a piezoelectric/electrostrictive device
    7.
    发明授权
    Method of fabricating a piezoelectric/electrostrictive device 失效
    制造压电/电致伸缩器件的方法

    公开(公告)号:US06925693B2

    公开(公告)日:2005-08-09

    申请号:US09963696

    申请日:2001-09-26

    IPC分类号: H01L41/09 H01L41/24 H04R17/00

    摘要: A method of fabricating a piezoelectric/electrostrictive device including a driving portion, a movable portion, and a fixing portion for holding the driving portion and the movable portion. The driving portion includes a pair of thin plate portions facing each other, and a film-like piezoelectric/electrostrictive element formed on at least a part of the outer surface of at least one of the thin plate portions. A ceramic green laminate including at least one ceramic green sheet constituting one of the thin plates and at least one ceramic green sheet having at least one hole formed thereon is formed. The ceramic green laminate is sintered to produce a ceramic laminate. A piezoelectric/electrostrictive element is formed by a film formation method on the outer surface of the thin plate portion of the ceramic laminate. The ceramic laminate is then cut with the piezoelectric/electrostrictive element formed thereon.

    摘要翻译: 一种制造压电/电致伸缩器件的方法,包括驱动部分,可移动部分和用于保持驱动部分和可动部分的固定部分。 驱动部分包括彼此面对的一对薄板部分,以及形成在至少一个薄板部分的外表面的至少一部分上的薄膜状压电/电致伸缩元件。 形成包括构成薄板之一的至少一个陶瓷生片和至少形成有至少一个孔的至少一个陶瓷生片的陶瓷生坯层压体。 将陶瓷生坯层压体烧结以制造陶瓷层压板。 在陶瓷层叠体的薄板部分的外表面上通过成膜方法形成压电/电致伸缩元件。 然后用形成在其上的压电/电致伸缩元件切割陶瓷层压体。

    Piezoelectric/electrostrictive device
    9.
    发明授权
    Piezoelectric/electrostrictive device 失效
    压电/电致伸缩器件

    公开(公告)号:US06570297B1

    公开(公告)日:2003-05-27

    申请号:US09643163

    申请日:2000-08-21

    IPC分类号: H01L4108

    CPC分类号: H01L41/0946 H01L41/27

    摘要: A piezoelectric/electrostrictive device (P/E) includes driving, movable and fixing portions. One end of a first P/E element and P/E operating portion on the end are positioned on the fixing portion and an opposite end of the P/E operating portion of the first P/E element is positioned on a first thin plate portion. One end of a second P/E element and P/E operating portion on the end are positioned on the movable portion and an opposite end of the P/E operating portion of the second P/E element is positioned on a second thin plate portion. A hole formed by inner walls of the driving, movable and fixing portions has a central axis that extends in an axial direction substantially parallel to the thin plate portions and substantially perpendicular to the length direction, and the device is free of any other holes extending in any direction other than the axial direction.

    摘要翻译: 压电/电致伸缩装置(P / E)包括驱动,可移动和固定部分。 第一P / E元件的一端和端部上的P / E操作部分位于固定部分上,并且第一P / E元件的P / E操作部分的相对端位于第一薄板部分上 。 第二P / E元件的一端和端部上的P / E操作部分位于可动部分上,并且第二P / E元件的P / E操作部分的相对端位于第二薄板部分上 。 由驱动,可移动和固定部分的内壁形成的孔具有中心轴线,所述中心轴线在基本上平行于薄板部分并且基本上垂直于长度方向的轴向方向上延伸,并且该装置没有任何其它孔延伸 轴向以外的任何方向。