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1.发明授权Piezoelectric/electrostrictive film type elements and process for producing the same 有权压电/电致伸缩膜型元件及其制造方法公开(公告)号：US06518690B2
公开(公告)日：2003-02-11
申请号：US09837546
申请日：2001-04-18
IPC分类号： H01L41187
CPC分类号： B81B3/0021 , H01L41/081 , H01L41/0933 , H01L41/094 , H01L41/0973 , H01L41/314 , H01L41/43 , Y10T29/40 , Y10T29/42 , Y10T29/49155
摘要： An integrated piezoelectric/electrostrictive film type element with excellent durability, includes a substrate made of a ceramic material composed mainly of completely stabilized or partially stabilized zirconium oxide, and a piezoelectric/electrostrictive operating section integrated onto the ceramic substrate by a film-forming method, the piezoelectric/electrostrictive operating section comprising a lower electrode, a piezoelectric/electrostrictive layer of a lead element-containing composition, and an upper electrode, wherein a heterophase-occurence rate at a surface of the piezoelectric/electrostrictive layer is controlled to a range of 0.1 to 30%.
摘要翻译： 具有优异耐久性的集成压电/电致伸缩膜型元件包括由主要由完全稳定或部分稳定的氧化锆组成的陶瓷材料制成的基板和通过成膜方法集成在陶瓷基板上的压电/电致伸缩操作部分， 压电/电致伸缩操作部分包括下电极，含铅元素组合物的压电/电致伸缩层和上电极，其中在压电/电致伸缩层的表面处的异相发生率被控制在 0.1〜30％。
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公开(公告)号：US06998763B2
公开(公告)日：2006-02-14
申请号：US10230731
申请日：2002-08-29
IPC分类号： H01L41/08
CPC分类号： H01L41/0973 , B81B3/0035 , G01P15/09 , H01L41/0477 , H03H9/02133 , H03H9/105 , H03H9/12 , H03H9/132 , H03H9/173 , H03H9/176
摘要： A ceramic device has an actuator element which includes a shape-retaining layer, an upper electrode formed on an upper portion of the shape-retaining layer, and a lower electrode formed on a lower portion of the shape-retaining layer. A vibrating section of ceramics supports the actuator element and a fixed section of ceramics vibratingly supports the vibrating section. An electrode material of the lower electrode contacting the vibrating section contains an additive in an amount of 0.01% by weight to 20% by weight. The electrode material contains platinum as a major component, for example. The additive to the electrode material is preferably zirconium oxide, cerium oxide, or titanium oxide.
摘要翻译： 陶瓷器件具有致动器元件，其包括形状保持层，形成在形状保持层的上部上的上电极和形成在形状保持层的下部的下电极。 陶瓷的振动部支承致动元件，陶瓷的固定部振动地支承振动部。 接触振动部的下部电极的电极材料含有0.01重量％〜20重量％的添加剂。 电极材料例如包含铂作为主要成分。 电极材料的添加剂优选为氧化锆，氧化铈或氧化钛。
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3.发明授权Piezoelectric/electrostrictive film type elements and process for producing the same 失效压电/电致伸缩膜型元件及其制造方法公开(公告)号：US06703257B2
公开(公告)日：2004-03-09
申请号：US10236754
申请日：2002-09-06
IPC分类号： H01L2100
CPC分类号： B81B3/0021 , H01L41/081 , H01L41/0933 , H01L41/094 , H01L41/0973 , H01L41/314 , H01L41/43 , Y10T29/40 , Y10T29/42 , Y10T29/49155
摘要： A process for providing an integrated piezoelectric/electrostrictive film type element with excellent durability, includes a substrate made of a ceramic material composed mainly of completely stabilized or partially stabilized zirconium oxide, and a piezoelectric/electrostrictive operating section integrated onto the ceramic substrate by a film-forming method, the piezoelectric/electrostrictive operating section comprising a lower electrode, a piezoelectric/electrostrictive layer of a lead element-containing composition, and an upper electrode, wherein a heterophase-occurence rate at a surface of the piezoelectric/electrostrictive layer is controlled to a range of 0.1 to 30%.
摘要翻译： 提供具有优异的耐久性的集成压电/电致伸缩膜型元件的方法包括由主要由完全稳定或部分稳定的氧化锆组成的陶瓷材料制成的基板和通过膜整合到陶瓷基板上的压电/电致伸缩操作部 压电/电致伸缩操作部分包括下电极，含铅元素组合物的压电/电致伸缩层和上电极，其中在压电/电致伸缩层的表面处的异相发生率被控制 至0.1〜30％的范围。
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公开(公告)号：US6091182A
公开(公告)日：2000-07-18
申请号：US965239
申请日：1997-11-06
CPC分类号： G09G3/3433 , G02B26/08 , G09F9/305 , H01L41/0973 , G09G3/2014 , G09G3/2022 , G09G3/3493
摘要： Disclosed is a piezoelectric/electrostrictive element composed of an actuator section of a uni-morph type comprising a main actuator element including a piezoelectric/electrostrictive layer and a pair of electrodes formed on a first principal surface of the piezoelectric/electrostrictive layer; a vibrating section which contacts with a second principal surface of the piezoelectric/electrostrictive layer for supporting the main actuator element; and a fixed section for supporting the vibrating section in a vibrative manner; wherein a relationship of y=ax is satisfied, and an expression of 1/10.ltoreq.a.ltoreq.100 is satisfied provided that x represents a distance between the pair of electrodes (1 .mu.m.ltoreq.x.ltoreq.200 .mu.m), and y represents a thickness of the piezoelectric/electrostrictive layer (1 .mu.m.ltoreq.y.ltoreq.100 .mu.m). Accordingly, it is possible to greatly increase the relative displacement amount between the no-voltage-loaded state and the voltage-applied state and the relative displacement amount between the states in which mutually opposite electric fields are applied, making it possible to realize easy control when the element is utilized for actuators and improvement in sensitivity when the element is utilized for sensors.
摘要翻译： 本发明公开了一种压电/电致伸缩元件，由压电/电致伸缩层的第一主表面上形成的包括压电/电致伸缩层的主致动器元件和形成在第一主表面上的一对电极组成的单态致动器部分构成。 与所述压电/电致伸缩层的第二主表面接触以支撑所述主致动器元件的振动部分; 以及用于以振动方式支撑所述振动部分的固定部分; 其中满足y = ax的关系，并且满足+ E，fra 1/10 + EE a = 100的表达式，只要x表示一对电极之间的距离（1μm） = x <200μm），y表示压电/电致伸缩层的厚度（1μm×y =100μm）。 因此，可以大幅提高无负荷状态与施加电压之间的相对位移量和施加相互相反的电场的状态之间的相对位移量，从而可以实现易于控制 当元件用于传感器时，该元件被用于致动器和提高灵敏度。
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公开(公告)号：US5862275A
公开(公告)日：1999-01-19
申请号：US882066
申请日：1997-06-25
CPC分类号： G09G3/3493 , G02B26/08 , G02B26/0833 , G02B26/0858 , G09G3/3473 , G09G3/2014 , G09G3/2022 , Y10S385/901
摘要： Disclosed is a display device for displaying a picture on an optical waveguide plate in accordance with an image signal by controlling displacement movement of each of actuator elements in a direction to make contact or separation with respect to the optical waveguide plate so that scattered light is controlled at a predetermined position on the optical waveguide plate, wherein the actuator element comprises a main actuator element including a piezoelectric/electrostrictive layer, and a pair of electrodes formed on a first principal surface of the piezoelectric/electrostrictive layer, a vibrating section contacting with a second principal surface of the piezoelectric/electrostrictive layer, for supporting the main actuator element, and a fixed section for supporting the vibrating section in a vibrative manner, and wherein the actuator element further comprises a displacement-transmitting section for transmitting, to the optical waveguide plate, displacement movement of the main actuator element caused by applying a voltage between the pair of electrodes. According to the display device, the electrostatic capacity of the actuator element can be reduced, further, display brightness without any nonuniformity can be obtained, and it is possible to improve the image quality.
摘要翻译： 公开了一种显示装置，用于根据图像信号在光波导板上显示图像，通过控制每个致动器元件在相对于光波导板接触或分离的方向上的位移运动，从而控制散射光 在所述光波导板上的预定位置处，所述致动器元件包括具有压电/电致伸缩层的主致动器元件和形成在所述压电/电致伸缩层的第一主表面上的一对电极，与所述压电/ 用于支撑主致动器元件的压电/电致伸缩层的第二主表面和用于以振动方式支撑振动部分的固定部分，并且其中所述致动器元件还包括位移传递部分，用于传输到所述光波导 板，主动作的位移运动 r元件通过在一对电极之间施加电压而引起。 根据显示装置，可以减小致动器元件的静电电容，而且可以获得不会不均匀的显示亮度，并且可以提高图像质量。
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公开(公告)号：US06297578B1
公开(公告)日：2001-10-02
申请号：US09584417
申请日：2000-06-01
IPC分类号： H01L4108
CPC分类号： G09G3/3433 , G02B26/08 , G09F9/305 , G09G3/2014 , G09G3/2022 , G09G3/3493 , H01L41/0973
摘要： Disclosed is a piezoelectric/electrostrictive element composed of an actuator section of a uni-morph type comprising a main actuator element including a piezoelectric/electrostrictive layer and a pair of electrodes formed on a first principal surface of the piezoelectric/electrostrictive layer; a vibrating section which contacts with a second principal surface of the piezoelectric/electrostrictive layer for supporting the main actuator element; and a fixed section for supporting the vibrating section in a vibrative manner; wherein a relationship of y=ax is satisfied, and an expression of {fraction (1/10)}≦a≦100 is satisfied provided that x represents a distance between the pair of electrodes (1 &mgr;m≦x≦200 &mgr;m), and y represents a thickness of the piezoelectric/electrostrictive layer (1 &mgr;m≦y≦100 &mgr;m). Accordingly, it is possible to greatly increase the relative displacement amount between the no-voltage-loaded state and the voltage-applied state and the relative displacement amount between the states in which mutually opposite electric fields are applied, making it possible to realize easy control when the element is utilized for actuators and improvement in sensitivity when the element is utilized for sensors.
摘要翻译： 本发明公开了一种压电/电致伸缩元件，由压电/电致伸缩层的第一主表面上形成的包括压电/电致伸缩层的主致动器元件和形成在第一主表面上的一对电极组成的致动器部分构成。 与所述压电/电致伸缩层的第二主表面接触以支撑所述主致动器元件的振动部分; 以及用于以振动方式支撑所述振动部分的固定部分; 其中满足y = ax的关系，并且满足{fraction（1/10）} <= a <= 100的表达式，只要x表示该对电极之间的距离（1mum≤x≤2.0 mum），y表示压电/电致伸缩层的厚度（1μm<= y <=100μm）。 因此，可以大幅提高无负荷状态与施加电压之间的相对位移量和施加相互相反的电场的状态之间的相对位移量，从而可以实现易于控制 当元件用于传感器时，该元件被用于致动器和提高灵敏度。
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公开(公告)号：US5852337A
公开(公告)日：1998-12-22
申请号：US863723
申请日：1997-05-27
申请人： Yukihisa Takeuchi , Koji Kimura , Masao Takahashi
发明人： Yukihisa Takeuchi , Koji Kimura , Masao Takahashi
CPC分类号： H01L41/0973 , H01L41/047
摘要： A piezoelectric film-type element includes a piezoelectric operating layer constructed by successively and integrally forming and stacking, on a ceramic substrate, a single flat film-shaped lower electrode, a piezoelectric layer, and an upper electrode comprising a plurality of alternately arranged strip electrodes. The lower electrode is designated as a first electrode, and the upper electrode is designated as a second electrode. A first piezoelectric operating means is constructed by the first and second electrodes and the piezoelectric layer, while a second piezoelectric operating means is constructed by the second electrode and the piezoelectric layer. No other piezoelectric layer is stacked on the foregoing piezoelectric operating layer. Operating characteristics of the piezoelectric operating section can be sufficiently utilized by constructing the piezoelectric film-type element as described above. Thus it is possible to provide a piezoelectric film-type element which has excellent performance, has a compact size and can operate at a low voltage.
摘要翻译： 一种压电薄膜型元件，包括：在陶瓷基板上依次整体形成和堆叠单个平坦薄膜状下部电极，压电体层和上部电极构成的压电工作层，该单个平面薄膜状下部电极，包括多个交替排列的带状电极 。 下电极被指定为第一电极，上电极被指定为第二电极。 第一压电操作装置由第一和第二电极和压电层构成，而第二压电操作装置由第二电极和压电层构成。 在上述压电工作层上没有其他压电层堆叠。 通过如上所述构造压电膜型元件，可以充分利用压电操作部的工作特性。 因此，可以提供具有优异性能，具有紧凑尺寸并且可以在低电压下操作的压电膜型元件。
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公开(公告)号：US06249370B1
公开(公告)日：2001-06-19
申请号：US09397229
申请日：1999-09-16
IPC分类号： G02B2600
CPC分类号： G02B26/02 , G02B26/0833 , G02B26/0841 , G02B26/0858
摘要： Disclosed is a display device comprising a light-shielding plate including a metal thin film formed on a first principal surface of an optical waveguide plate for introducing the light thereinto and including light-transmitting sections formed at portions corresponding to picture elements to make penetration through the optical waveguide plate, and shutter sections provided opposingly to a second principal surface of the light-shielding plate, for selectively intercepting the light transmitted through the light-transmitting sections in accordance with an input signal. The shutter sections include actuator elements provided corresponding to the large number of light-transmitting sections so that the light to be transmitted through the light-transmitting sections is intercepted substantially in synchronization with the operation of the actuator elements. Accordingly, it is possible to improve the contrast and improve the image quality of a displayed image.
摘要翻译： 公开了一种显示装置，其包括遮光板，该遮光板包括金属薄膜，该金属薄膜形成在光波导板的第一主表面上，用于将光引入其中，并且包括形成在对应于图像元素的部分处的透光部分， 光波导板和与遮光板的第二主表面相对设置的遮光部分，用于根据输入信号有选择地遮挡透过透光部分的光。 闸门部分包括对应于大量光透射部分设置的致动器元件，使得要透过光传输部分的光基本上与致动器元件的操作同步地截获。 因此，可以提高对比度并提高显示图像的图像质量。
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公开(公告)号：US08810039B2
公开(公告)日：2014-08-19
申请号：US13323454
申请日：2011-12-12
申请人： Koji Takemura , Hiroshige Hirano , Masao Takahashi , Hikari Sano , Yutaka Itoh , Koji Koike
发明人： Koji Takemura , Hiroshige Hirano , Masao Takahashi , Hikari Sano , Yutaka Itoh , Koji Koike
CPC分类号： H01L24/05 , H01L22/32 , H01L2224/02166 , H01L2224/04042 , H01L2224/05093 , H01L2224/05094 , H01L2224/05095 , H01L2224/05553 , H01L2224/05554 , H01L2224/05556 , H01L2224/05624 , H01L2224/48463 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01015 , H01L2924/01033 , H01L2924/01057 , H01L2924/01074 , H01L2924/01079 , H01L2924/3025 , H01L2924/00
摘要： A semiconductor device includes: a semiconductor substrate; a first interlayer insulating film formed over the semiconductor substrate; a pad formed above the first interlayer insulating film; and a plurality of first interconnects spaced apart from each other in a portion of the first interlayer insulating film located below the pad. Below the pad, the first interconnects are formed in quadrangular plan shapes.
摘要翻译： 半导体器件包括：半导体衬底; 形成在半导体衬底上的第一层间绝缘膜; 形成在第一层间绝缘膜上方的焊盘; 以及在位于所述垫下方的所述第一层间绝缘膜的部分中彼此间隔开的多个第一互连。 在焊盘下面，第一互连以四边形的平面形状形成。
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公开(公告)号：US08450734B2
公开(公告)日：2013-05-28
申请号：US12713724
申请日：2010-02-26
申请人： Masao Takahashi , Noriyuki Nagai
发明人： Masao Takahashi , Noriyuki Nagai
IPC分类号： H01L23/525
CPC分类号： H01L23/5258 , G01R31/2856 , H01L22/32 , H01L24/06 , H01L24/11 , H01L24/14 , H01L2224/0401 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01015 , H01L2924/01033 , H01L2924/01078 , H01L2924/014 , H01L2924/13091 , H01L2924/00
摘要： A semiconductor device includes: a semiconductor element (1) having an internal circuit (17); and electrode pads (22, 22, . . . ) provided for the semiconductor element (1). The electrode pads (22, 22, . . . ) are electrically connected to the internal circuit (17) via control portions (31) for controlling electrical connection between the electrode pads (22, 22, . . . ) and the internal circuit (17).
摘要翻译： 一种半导体器件包括：具有内部电路（17）的半导体元件（1） 以及为半导体元件（1）提供的电极焊盘（22,22 ...）。 电极焊盘（22,22 ...）通过控制部分（31）电连接到内部电路（17），用于控制电极焊盘（22,22 ...）和内部电路（ 17）。
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