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公开(公告)号：US08920948B2
公开(公告)日：2014-12-30
申请号：US13341997
申请日：2011-12-31
申请人： Liesl Folks , Michael K. Grobis , Dan S. Kercher , Ricardo Ruiz , Kentaro Takano , Bruce D. Terris , Qing Zhu
发明人： Liesl Folks , Michael K. Grobis , Dan S. Kercher , Ricardo Ruiz , Kentaro Takano , Bruce D. Terris , Qing Zhu
IPC分类号： G11B5/66
摘要： According to one embodiment, a patterned magnetic storage medium is disclosed herein. The magnetic storage medium includes a pattern formed on a substrate. The pattern includes at least a first and second feature and an edge defined between the first and second features. Additionally, the magnetic storage medium includes a magnetic layer formed on the pattern. The magnetic layer includes grains separated by a non-magnetic segregant boundary. The segregant boundary is positioned above the edge of the pattern.
摘要翻译： 根据一个实施例，本文公开了图案化的磁存储介质。 磁存储介质包括形成在基板上的图案。 该图案至少包括第一和第二特征以及在第一和第二特征之间限定的边缘。 此外，磁存储介质包括形成在图案上的磁性层。 磁性层包括由非磁性分离界面分离的晶粒。 分离边界位于图案边缘的上方。
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42.发明授权Patterned magnetic recording disk with high bit-aspect-ratio and master mold for nanoimprinting the disk 有权具有高比特宽比的图案磁记录磁盘和用于纳米压印磁盘的主模具公开(公告)号：US08822047B2
公开(公告)日：2014-09-02
申请号：US13152254
申请日：2011-06-02
申请人： Elizabeth Ann Dobisz , Ricardo Ruiz
发明人： Elizabeth Ann Dobisz , Ricardo Ruiz
摘要： A method for making a master mold that is used in the nanoimprinting process to make patterned-media disks with patterned data islands uses guided self-assembly of a block copolymer into its components. Conventional or e-beam lithography is used to first form a pattern of generally radial stripes on a substrate, with the stripes being grouped into annular zones or bands. A block copolymer material is then deposited on the pattern, resulting in guided self-assembly of the block copolymer into its components to multiply the generally radial stripes into generally radial lines. Various methods, including conventional lithography, guided self-assembly of a second block copolymer, and e-beam lithography, are then used to form concentric rings over the generally radial lines. After etching and resist removal, the master mold has a pattern of either pillars or holes, depending on the method used.
摘要翻译： 用于制造在纳米压印过程中制造具有图案化数据岛的图案化介质盘的主模具的方法使用嵌段共聚物向其组分的引导自组装。 使用常规或电子束光刻来首先在基底上形成大致径向条纹的图案，其中条纹被分组成环形区域或带。 然后将嵌段共聚物材料沉积在图案上，导致嵌段共聚物向其组分的引导自组装，以将大致径向的条纹乘以大致的径向线。 然后使用各种方法，包括常规光刻，第二嵌段共聚物的引导自组装和电子束光刻，以在大致径向线上形成同心环。 在蚀刻和抗蚀剂去除之后，主模具有任何柱或孔的图案，这取决于所使用的方法。
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43.发明授权Method using block copolymers for making a master disk with radial binary encoded nondata marks for nanoimprinting patterned magnetic recording disks 失效使用嵌段共聚物制造具有用于纳米压印图案化磁记录盘的径向二进制编码非标记标记的母盘的方法公开(公告)号：US08623223B2
公开(公告)日：2014-01-07
申请号：US13299664
申请日：2011-11-18
IPC分类号： B44C1/22
摘要： A method using directed self-assembly of BCPs enables the making of a master disk for nanoimprinting magnetic recording disks that have patterned data islands and patterned binary encoded nondata marks. The method uses guided self-assembly of a BCP to form patterns of sets of radial lines and circumferential gaps of one of the BCP components, which can be used as an etch mask to make the master disk. The sets of radial lines and circumferential gaps can be patterned so as to encode binary numbers. The pattern is replicated as binary encoded nondata marks into the nanoimprinted disks, with the marks functioning as binary numbers for data sector numbers and/or servo sector numbers. If the disks also use a chevron servo pattern, the binary numbers can function to identify groups of tracks associated with the chevron servo pattern.
摘要翻译： 使用BCP的定向自组装的方法使得能够制造具有图案化数据岛和图案化二进制编码非标记的纳米压印磁记录盘的母盘。 该方法使用BCP的引导自组装来形成一组BCP组件的径向线和圆周间隙的图案，其可用作蚀刻掩模以制造母盘。 径向线和圆周间隙的组可以被图案化以便编码二进制数。 该图案作为二进制编码的非标记标记复制到纳米压印盘中，其标记用作数据扇区号和/或伺服扇区号的二进制数。 如果磁盘还使用人字形伺服模式，则二进制数字可用于识别与人字形伺服模式相关联的磁道组。
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44.发明授权Method for manufacturing a patterned magnetic media with offset data and servo regions 失效用于制造具有偏移数据和伺服区域的图案化磁性介质的方法公开(公告)号：US08475670B2
公开(公告)日：2013-07-02
申请号：US13180405
申请日：2011-07-11
IPC分类号： B44C1/22
CPC分类号： G11B5/746 , B82Y10/00 , G11B5/59688 , G11B5/855 , Y10T29/4902
摘要： A method for manufacturing a patterned magnetic media. The method allows both a data region and a servo region to be patterned without the patterning of one region adversely affecting the patterning of the other region. The method results in a patterned data region a patterned servo region and intermediate regions between the servo and data regions. The intermediate regions, which are most likely, but not necessarily, asymmetrical with one another indicate that the method has been used to pattern the media.
摘要翻译： 一种图案化磁性介质的制造方法。 该方法允许图案化数据区域和伺服区域，而不会对不利地影响其它区域的图案化的一个区域的图案化。 该方法导致图案化数据区域中的图案化伺服区域和伺服区域和数据区域之间的中间区域。 最可能但并不必然的中间区域彼此不对称地表示该方法已被用于对介质进行图案化。
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45.发明申请METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER DISK WITH RADIAL NONDATA MARKS FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS 失效使用块状共聚物制备具有径向非标记标记的主磁盘的方法用于纳刻图形磁记录磁盘公开(公告)号：US20130105437A1
公开(公告)日：2013-05-02
申请号：US13287761
申请日：2011-11-02
摘要： A method for making a master disk for nanoimprinting patterned-media magnetic recording disks has patterns for both the data islands and the nondata regions. The method uses guided self-assembly of a block copolymer (BCP) to form patterns of generally radial lines and/or generally concentric rings as well as patterns of gap regions of one of the BCP components. The pattern of lines and/or rings have the BCP components aligned as lamellae perpendicular to the substrate, while the pattern of gap regions has the BCP components aligned as lamellae parallel to the substrate. One of the BCP components is removed, leaving the other BCP component as an etch mask to fabricate either the final master disk or two separate molds that are then used to fabricate the master disk.
摘要翻译： 用于制造用于纳米压印图案化介质磁记录盘的母盘的方法具有用于数据岛和非数据区的图案。 该方法使用嵌段共聚物（BCP）的引导自组装形成大体上径向线和/或大致同心环的图案以及一种BCP组分的间隙区域的图案。 线和/或环的图案具有垂直于衬底的薄片对准的BCP组分，而间隙区域的图案将BCP组分排列成平行于衬底的薄片。 BCP组件中的一个被去除，另一个BCP组件作为蚀刻掩模来制造最终的主磁盘或两个单独的模具，然后用于制造主磁盘。
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46.发明申请METHOD FOR MANUFACTURING A PATTERNED MAGNETIC MEDIA WITH OFFSET DATA AND SERVO REGIONS 失效使用偏移数据和服务区域制作图形磁介质的方法公开(公告)号：US20130016444A1
公开(公告)日：2013-01-17
申请号：US13180405
申请日：2011-07-11
CPC分类号： G11B5/746 , B82Y10/00 , G11B5/59688 , G11B5/855 , Y10T29/4902
摘要： A method for manufacturing a patterned magnetic media. The method allows both a data region and a servo region to be patterned without the patterning of one region adversely affecting the patterning of the other region. The method results in a patterned data region a patterned servo region and intermediate regions between the servo and data regions. The intermediate regions, which are most likely, but not necessarily, asymmetrical with one another indicate that the method has been used to pattern the media.
摘要翻译： 一种图案化磁性介质的制造方法。 该方法允许图案化数据区域和伺服区域，而不会对不利地影响其它区域的图案化的一个区域的图案化。 该方法导致图案化数据区域中的图案化伺服区域和伺服区域和数据区域之间的中间区域。 最可能但并不必然的中间区域彼此不对称地表示该方法已被用于对介质进行图案化。
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公开(公告)号：US20120237733A1
公开(公告)日：2012-09-20
申请号：US13482944
申请日：2012-05-29
IPC分类号： B32B3/12
CPC分类号： B82Y10/00 , B82Y25/00 , B82Y30/00 , B82Y40/00 , G11B5/746 , G11B5/82 , Y10T428/24355 , Y10T428/24504 , Y10T428/249953
摘要： Block copolymer lithography has emerged as an alternative lithographic method to achieve large-area, high-density patterns at resolutions near or beyond the limit of conventional lithographic techniques for the formation of bit patterned media and discrete track media. In one embodiment, a structure includes a plurality of nanostructures extending upwardly from a substrate and a porous membrane extending across upper ends of the plurality of nanostructures. Other systems and methods are disclosed as well.
摘要翻译： 已经出现嵌段共聚物光刻作为替代的光刻方法，以在分辨率接近或超过用于形成位图案化介质和离散轨道介质的常规平版印刷技术的极限之下实现大面积，高密度图案。 在一个实施例中，结构包括从衬底向上延伸的多个纳米结构和延伸穿过多个纳米结构的上端的多孔膜。 还公开了其它系统和方法。
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公开(公告)号：US08257598B2
公开(公告)日：2012-09-04
申请号：US13351385
申请日：2012-01-17
申请人： Thomas R. Albrecht , Ricardo Ruiz
发明人： Thomas R. Albrecht , Ricardo Ruiz
IPC分类号： B44C1/22 , C03C15/00 , C03C25/68 , H01L21/302 , H01L21/461
CPC分类号： G11B5/855
摘要： The invention is a method for making a master mold to be used for nanoimprinting patterned-media magnetic recording disks. The method uses conventional optical or e-beam lithography to form a pattern of generally radial stripes on a substrate, with the stripes being grouped into annular zones or bands. A block copolymer material is deposited on the pattern, resulting in guided self-assembly of the block copolymer into its components to multiply the generally radial stripes into generally radial lines of alternating block copolymer components. The radial lines of one of the components are removed and the radial lines of the remaining component are used as an etch mask to etch the substrate. Conventional lithography is used to form concentric rings over the generally radial lines. After etching and resist removal, the master mold has pillars arranged in circular rings, with the rings grouped into annular bands.
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49.发明申请METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER MOLD WITH HIGH BIT-ASPECT-RATIO FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS 有权使用块状共聚物制备具有高比特比例的主模的纳米压印图形磁记录盘的方法公开(公告)号：US20120111827A1
公开(公告)日：2012-05-10
申请号：US13351385
申请日：2012-01-17
申请人： Thomas R. Albrecht , Ricardo Ruiz
发明人： Thomas R. Albrecht , Ricardo Ruiz
CPC分类号： G11B5/855
摘要： The invention is a method for making a master mold to be used for nanoimprinting patterned-media magnetic recording disks. The method uses conventional optical or e-beam lithography to form a pattern of generally radial stripes on a substrate, with the stripes being grouped into annular zones or bands. A block copolymer material is deposited on the pattern, resulting in guided self-assembly of the block copolymer into its components to multiply the generally radial stripes into generally radial lines of alternating block copolymer components. The radial lines of one of the components are removed and the radial lines of the remaining component are used as an etch mask to etch the substrate. Conventional lithography is used to form concentric rings over the generally radial lines. After etching and resist removal, the master mold has pillars arranged in circular rings, with the rings grouped into annular bands.
摘要翻译： 本发明是用于制造用于纳米压印图案化介质磁记录盘的母模的方法。 该方法使用常规光学或电子束光刻在基底上形成大致径向条纹的图案，其中条纹被分组成环形区域或条带。 嵌段共聚物材料沉积在图案上，导致嵌段共聚物引导自组装成其组分，以将大致径向的条带乘以交替的嵌段共聚物组分的大致径向线。 除去其中一个部件的径向线，并且将其余部件的径向线用作蚀刻掩模以蚀刻基板。 常规光刻用于在大致径向线上形成同心环。 在蚀刻和抗蚀剂去除之后，主模具有布置成圆形环的柱，其中环被分组成环形带。
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公开(公告)号：US07977247B2
公开(公告)日：2011-07-12
申请号：US11873316
申请日：2007-10-16
申请人： Charles T. Black , Ricardo Ruiz
发明人： Charles T. Black , Ricardo Ruiz
IPC分类号： H01L21/302 , H01L21/461 , G03F1/00 , G03F7/00
CPC分类号： H01L29/785 , H01L29/0673 , H01L29/66795 , H01L29/78681 , H01L29/78684 , Y10S438/945 , Y10S438/947 , Y10S438/948 , Y10S438/949
摘要： The present invention relates to a semiconductor structure such as a field effect transistors (FETs) in which the channel region of each of the FETs is composed of an array of more than one electrically isolated channel. In accordance with the present invention, the distance between each of the channels present in the channel region is within a distance of no more than twice their width from each other. The FETs of the present invention are fabricated using methods in which self-assembled block copolymers are employed in forming the channel.
摘要翻译： 本发明涉及诸如场效应晶体管（FET）的半导体结构，其中每个FET的沟道区域由多于一个的电隔离沟道的阵列组成。 根据本发明，存在于通道区域中的每个通道之间的距离在彼此宽度不超过其两倍的距离内。 使用自组装嵌段共聚物形成通道的方法制造本发明的FET。
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