公开(公告)号：US5969250A

公开(公告)日：1999-10-19

申请号：US10458

申请日：1998-01-21

Applicant: Paul Greiff

Inventor： Paul Greiff

IPC: G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  G01P15/00

CPC classification number: G01P15/097 ,  G01P15/0802 ,  G01P2015/0814 ,  G01P2015/0831

Abstract: A monolithic, micromechanical vibrating beam accelerometer with a trimmable resonant frequency is fabricated from a silicon substrate which has been selectively etched to provide a resonant structure suspended over an etched pit. The resonant structure comprises an acceleration sensitive mass and at least two flexible elements having resonant frequencies. Each of the flexible elements is disposed generally collinear with at least one acceleration sensitive axis of the accelerometer. One end of at least one of the flexible elements is attached to a tension relief beam for providing stress relief of tensile forces created during the fabrication process. Mass support beams having a high aspect ratio support the mass over the etched pit while allowing the mass to move freely in the direction collinear with the flexible elements. Also disclosed is a method for fabricating such an accelerometer. Further disclosed is an alternative embodiment of the aforementioned accelerometer characterized by a low profile, and alternative planar processing methods for fabrication of these and other embodiments.

Abstract translation: 具有可调谐谐振频率的单片微机械振动束加速度计由硅衬底制成，硅衬底已被选择性地蚀刻以提供悬浮在蚀刻凹坑上的谐振结构。 谐振结构包括加速度敏感质量和至少两个具有谐振频率的柔性元件。 每个柔性元件设置成与加速度计的至少一个加速度敏感轴线大致共线。 至少一个柔性元件的一端附接到张力释放梁，以提供在制造过程中产生的张力的应力消除。 具有高纵横比的质量支撑梁支撑蚀刻坑的质量，同时允许质量沿与柔性元件共线的方向自由移动。 还公开了一种用于制造这种加速度计的方法。 进一步公开的是上述加速度计的替代实施例，其特征在于具有低轮廓和用于制造这些和其它实施例的替代平面处理方法。

公开(公告)号：US5929515A

公开(公告)日：1999-07-27

申请号：US941823

申请日：1997-10-01

Applicant: Paul Greiff ,  Paul Brezinski

Inventor： Paul Greiff ,  Paul Brezinski

IPC: H01L23/26 ,  H01L23/20

CPC classification number: H01L23/26 ,  H01L2924/0002 ,  H01L2924/09701

Abstract: Gettering enclosures for semiconductor packages, comprising an enclosure having a cavity for accommodating a semiconductor device; a gettering chamber (disposed above the semiconductor device) communicating with the cavity, comprising a getter precursor secured to the cavity and spaced from a wall of the cavity, wherein the wall is transparent to laser light so as to allow a beam of laser light to strike the getter precursor and sputter same on the walls of the gettering chamber.

Abstract translation: 吸收用于半导体封装的外壳，包括具有用于容纳半导体器件的空腔的外壳; 与空腔连通的吸气室（设置在半导体器件上方），包括固定到空腔并与空腔的壁间隔开的吸气剂前体，其中该壁对于激光是透明的，以便允许一束激光 冲击吸气剂前体并在吸气室的壁上溅射相同。

公开(公告)号：US5796001A

公开(公告)日：1998-08-18

申请号：US481898

申请日：1995-06-07

Applicant: Paul Greiff ,  Burton Boxenhorn

Inventor： Paul Greiff ,  Burton Boxenhorn

IPC: G01C19/5719 ,  G01P9/04

CPC classification number: G01C19/5719 ,  G01P2015/0831

Abstract: A monolithic, micromechanical tuning fork gyroscope is fabricated from a unitary silicon substrate utilizing etch stop diffusions and selective anisotropic etching. A non-etched silicon structure is suspended over the selectively etched pit. The non-etched silicon structure includes at least first and second vibratable structures. Each vibratable structure is energizable to vibrate laterally along an axis normal to the rotation sensitive axis. The lateral vibration of the first and second vibratable structures effects simultaneous vertical movement of at least a portion of the non-etched silicon structure upon the occurrence of angular rotation of the gyroscope about the rotation sensitive axis. The vertical movement of the non-etched silicon structure is sensed, and a voltage proportional to the movement is generated, for providing an indication of angular rate of rotation detected by the gyroscope.

Abstract translation: 使用蚀刻停止扩散和选择性各向异性蚀刻，由单一硅衬底制造单片微机械音叉陀螺仪。 未蚀刻的硅结构悬挂在选择性蚀刻的凹坑上。 非蚀刻硅结构至少包括第一和第二可振动结构。 每个可振动结构可激励以沿着垂直于旋转敏感轴的轴线横向振动。 当陀螺仪围绕旋转敏感轴发生角旋转时，第一和第二可振动结构的横向振动使至少一部分非蚀刻硅结构同时垂直运动。 感测未蚀刻的硅结构的垂直运动，并且产生与运动成比例的电压，以提供由陀螺仪检测的角速度的指示。

公开(公告)号：US5635639A

公开(公告)日：1997-06-03

申请号：US484363

申请日：1995-06-07

Applicant: Paul Greiff ,  Burton Boxenhorn

Inventor： Paul Greiff ,  Burton Boxenhorn

IPC: G01C19/5719 ,  G01C19/574 ,  G01P9/04

CPC classification number: G01C19/574 ,  G01C19/5719

Abstract: A micromechanical tuning fork gyroscope includes a suspended structure comprising at least first and second vibratable structures. Each vibratable structure is energizable to vibrate laterally, within a first plane, along an axis normal to the rotation sensitive axis. The lateral or inplane vibration of the first and second vibratable structures effects simultaneous vertical or rotational movement of at least a portion of the suspended structure upon the occurrence of angular rotation of the gyroscope about the rotation sensitive axis. Vertical or rotational movement of the suspended structure is sensed, and a voltage proportional to the movement is generated, for providing an indication of angular rate of rotation detected by the gyroscope.

Abstract translation: 微机械音叉陀螺仪包括至少包括第一和第二可振动结构的悬挂结构。 每个可振动结构可激励以沿着垂直于旋转敏感轴的轴线在第一平面内横向振动。 当陀螺仪围绕旋转敏感轴线发生角度旋转时，第一和第二可振动结构的横向或平面内的振动会影响至少一部分悬挂结构的垂直或旋转运动。 感测悬挂结构的垂直或旋转运动，并且产生与运动成比例的电压，以提供由陀螺仪检测的角速度的指示。

公开(公告)号：US5605598A

公开(公告)日：1997-02-25

申请号：US242274

申请日：1994-05-13

Applicant: Paul Greiff

Inventor： Paul Greiff

IPC: G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  H01L21/00

CPC classification number: G01P15/097 ,  G01P15/0802 ,  G01P2015/0814 ,  G01P2015/0831

Abstract: A monolithic, micromechanical vibrating beam accelerometer with a trimmable resonant frequency is fabricated from a silicon substrate which has been selectively etched to provide a resonant structure suspended over an etched pit. The resonant structure comprises an acceleration sensitive mass and at least two flexible elements having resonant frequencies. Each of the flexible elements is disposed generally collinear with at least one acceleration sensitive axis of the accelerometer. One end of at least one of the flexible elements is attached to a tension relief beam for providing stress relief of tensile forces created during the fabrication process. Mass support beams having a high aspect ratio support the mass over the etched pit while allowing the mass to move freely in the direction collinear with the flexible elements. Also disclosed is a method for fabricating such an accelerometer. Further disclosed is an alternative embodiment of the aforementioned accelerometer characterized by a low profile, and alternative planar processing methods for fabrication of these and other embodiments.

Abstract translation: 具有可调谐谐振频率的单片微机械振动束加速度计由硅衬底制成，硅衬底已被选择性地蚀刻以提供悬浮在蚀刻凹坑上的谐振结构。 谐振结构包括加速度敏感质量和至少两个具有谐振频率的柔性元件。 每个柔性元件设置成与加速度计的至少一个加速度敏感轴线大致共线。 至少一个柔性元件的一端附接到张力释放梁，以提供在制造过程中产生的张力的应力消除。 具有高纵横比的质量支撑梁支撑蚀刻坑的质量，同时允许质量沿与柔性元件共线的方向自由移动。 还公开了一种用于制造这种加速度计的方法。 进一步公开的是上述加速度计的替代实施例，其特征在于具有低轮廓和用于制造这些和其它实施例的替代平面处理方法。

公开(公告)号：US5216490A

公开(公告)日：1993-06-01

申请号：US562581

申请日：1990-08-03

Applicant: Paul Greiff ,  Jonathan J. Bernstein

Inventor： Paul Greiff ,  Jonathan J. Bernstein

IPC: B81B3/00 ,  G01C19/5719 ,  G01P15/08

CPC classification number: B81B3/0086 ,  G01C19/5719 ,  G01P15/0802 ,  B81B2201/0235 ,  B81B2203/0109 ,  G01P2015/0828

Abstract: A bridge electrode structure and method of fabrication thereof is provided that is adapted to provide electrically isolated metal bridges over the active portions of a monolithic micromechanical transducer. The bridge electrode of the invention is also adapted to operate in facing relationship with one or more buried electrodes, providing top-to-bottom symmetry for balanced application of forces, or motion detection when used in conjunction with transducer elements. The transducer, typically a gyroscope or an accelerometer, includes a semiconductor substrate and active elements etched out of the substrate, the active elements including flexure-supported transducer plates. The bridge electrodes are anchored at opposing points on the substrate's surface to metal layers used to facilitate their electro-forming. The central portions of the bridge are electroplated over an insulating spacer, such as a photoresist layer.

Abstract translation: 提供了桥电极结构及其制造方法，其适于在单片微机械换能器的有源部分上提供电隔离的金属桥。 本发明的桥电极还适于与一个或多个掩埋电极面对关系地工作，从而提供从上到下的对称性以平衡施加力，或者当与换能器元件一起使用时的运动检测。 换能器，通常是陀螺仪或加速度计，包括半导体衬底和蚀刻出衬底的有源元件，活性元件包括挠曲支撑的换能器板。 桥接电极锚定在基板表面上的相对点处，以用于促进其电成形的金属层。 桥的中心部分电镀在诸如光阻层之类的绝缘隔离物上。

公开(公告)号：US5195371A

公开(公告)日：1993-03-23

申请号：US479854

申请日：1990-02-14

Applicant: Paul Greiff

Inventor： Paul Greiff

IPC: G01C19/56 ,  G01L1/18 ,  G01P15/08 ,  H01L29/84

CPC classification number: G01C19/5719 ,  G01P15/0802 ,  G01P15/0888 ,  G01P2015/0828

Abstract: A motion transducer fabricated from a semiconductor material by etched exposure and release of a resiliently suspended element. Electrical sensing and/or torquing is applied to the suspended element to produce mass or vibrational sensitivities to provide a transducer for various physical parameters. In the case of a gyroscopic transducer a mass is applied to the element and may be applied in a balanced configuration on either side. The semiconductor element and electrodes may be isolated by the use of buried PN junctions or dielectric layers, and a separately formed insulating dielectric bridge may be used to provide a support link between the suspended element and the remainder of the semiconductor material. A specific crystal orientation is useful in permitting etch control in freeing the suspended element from the remainder of the material. Suspension link stress relief is provided and a waffle construction achieved in the suspended element for use in motional transduction.

Abstract translation: 通过蚀刻曝光和释放弹性悬挂元件由半导体材料制造的运动传感器。 将电感和/或扭矩施加到悬挂元件以产生质量或振动灵敏度以提供用于各种物理参数的换能器。 在陀螺换能器的情况下，质量被施加到元件并且可以以任何一侧上的平衡配置施加。 半导体元件和电极可以通过使用掩埋的PN结或电介质层来隔离，并且可以使用单独形成的绝缘电介质桥来提供悬挂元件和半导体材料的其余部分之间的支撑连接。 特定的晶体取向在允许蚀刻控制中将悬浮元件从材料的其余部分释放中是有用的。 提供了悬挂连杆应力消除，并且在悬浮元件中实现了用于运动转导的松饼结构。

公开(公告)号：US5060039A

公开(公告)日：1991-10-22

申请号：US314453

申请日：1989-02-22

Applicant: Marc S. Weinberg ,  Paul Greiff

Inventor： Marc S. Weinberg ,  Paul Greiff

IPC: G01C19/5719

CPC classification number: G01P15/132 ,  G01C19/5719 ,  G01P15/125

Abstract: An accelerometer fabricated by micromachining techniques from a crystaline precursor. The accelerometer is formed in a body of a semiconductor crystal such as silicon by doping portions to an etch resistant condition and etching a cavity around them to release a resiliently suspended multi legged member. A conductor is formed in one of the legs. A permanent magnet is placed with opposite polarity poles on either side of the leg and the acceleration displacement of the member sensed from which a current is developed through the leg conductor to restore the member position and provide an output indication of acceleration.

Abstract translation: 通过微结晶技术从结晶前体制造的加速度计。 加速度计通过将部分掺杂到耐蚀刻状态而形成在诸如硅的半导体晶体的主体中，并且蚀刻其周围的空腔以释放弹性悬挂的多腿构件。 导体形成在一条腿中。 永磁体被放置成在腿的任一侧上具有相反的极性极，并且感测到的构件的加速度位移通过腿导体从该位置产生电流，以恢复构件位置并提供加速度的输出指示。