公开(公告)号：US20100319749A1

公开(公告)日：2010-12-23

申请号：US12152195

申请日：2008-05-12

Applicant: Paul Greiff ,  Robert DiMatteo ,  Eric Brown ,  Christopher Leitz

Inventor： Paul Greiff ,  Robert DiMatteo ,  Eric Brown ,  Christopher Leitz

IPC: H01L35/02 ,  H01L37/00 ,  H01L31/04

CPC classification number: H02S10/30

Abstract: An MTPV thermophotovoltaic chip comprising a photovoltaic cell substrate, micron/sub-micron gap-spaced from a juxtaposed heat or infrared radiation-emitting substrate, with a radiation-transparent intermediate window substrate preferably compliantly adhered to the photovoltaic cell substrate and bounding the gap space therewith.

Abstract translation: 一种MTPV热光伏芯片，其包括光伏电池基板，与并置的热或红外辐射发射基板间隔开的微米/亚微米间隙，其具有辐射透明的中间窗口基板，优选地柔顺地粘附到所述光伏电池基板并且限定所述间隙空间 随之而来。

公开(公告)号：US20080223435A1

公开(公告)日：2008-09-18

申请号：US12154120

申请日：2008-05-20

Applicant: Paul Greiff ,  Robert Stephen DiMatteo

Inventor： Paul Greiff ,  Robert Stephen DiMatteo

IPC: H01L31/04 ,  H01L31/18 ,  H01B13/00

CPC classification number: H02S10/30

Abstract: A method of making a micron gap thermal photovoltaic device wherein at least one standoff is formed on a photovoltaic substrate, a sacrificial layer is deposited on the photovoltaic substrate and about the standoff, an emitter is attached to the standoff and has a lower planar surface separated from the photovoltaic substrate by the sacrificial layer, and the sacrificial layer is removed to form a sub-micron gap between the photovoltaic substrate and the lower planar surface of the emitter.

公开(公告)号：US5817942A

公开(公告)日：1998-10-06

申请号：US608144

申请日：1996-02-28

Applicant: Paul Greiff

Inventor： Paul Greiff

IPC: G01P15/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01P15/18 ,  G01P15/00

CPC classification number: G01P15/131 ,  G01P15/02 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0814 ,  G01P2015/0831

Abstract: An accelerometer having one or more flexure stops for increasing the stiffness of the flexures when the accelerometer is subjected to relatively high acceleration. A wrap-around proof mass is suspended over a substrate by anchor posts and a plurality of flexures. In one embodiment, the proof mass has a rectangular frame including top and bottom beams extending between left and right beams and a central crossbeam extending between the left and right beams. Proof mass sense electrodes are cantilevered from the top, bottom and central beams and are interleaved with excitation electrodes extending from adjacent excitation electrode supports. Each of the flexure stops includes a pair of members extending along a portion of a respective flexure. Also described is a three axis accelerometer triad device and a dissolved wafer process for fabricating the devices described herein.

Abstract translation: 具有一个或多个挠曲止动件的加速度计，用于在加速度计受到相对高的加速度时增加挠曲件的刚度。 通过锚固柱和多个挠曲件将缠绕的质量块悬挂在基板上。 在一个实施例中，证明块具有包括在左梁和右梁之间延伸的顶梁和底梁的矩形框架，以及在左梁和右梁之间延伸的中心横梁。 证明质量感测电极从顶部，底部和中心束悬臂，并且与从相邻的激励电极支撑件延伸的激励电极交错。 每个弯曲止动件包括沿着相应挠曲件的一部分延伸的一对构件。 还描述了三轴加速度计三合一装置和用于制造本文所述装置的溶解晶片工艺。

公开(公告)号：US5555765A

公开(公告)日：1996-09-17

申请号：US340190

申请日：1994-11-14

Applicant: Paul Greiff

Inventor： Paul Greiff

IPC: B81B3/00 ,  G01C19/5712 ,  G01P15/08 ,  G01P15/125 ,  G01P9/04

CPC classification number: G01C19/5712 ,  B81B3/0051 ,  G01P15/0802 ,  G01P15/125 ,  B81B2201/0242 ,  B81B2203/056 ,  B81B2203/058

Abstract: A gimballed vibrating wheel gyroscope for detecting rotational rates in inertial space. The gyroscope includes a support oriented in a first plane and a wheel assembly disposed over the support parallel to the first plane. The wheel assembly is adapted for vibrating rotationally at a predetermined frequency in the first plane and is responsive to rotational rates about a coplanar input axis for providing an output torque about a coplanar output axis. The gyroscope also includes a post assembly extending between the support and the wheel assembly for supporting the wheel assembly. The wheel assembly has an inner hub, an outer wheel, and spoke flexures extending between the inner hub and the outer wheel and being stiff along both the input and output axes. A flexure is incorporated in the post assembly between the support and the wheel assembly inner hub and is relatively flexible along the output axis and relatively stiff along the input axis. With this arrangement, the wheel assembly is gimballed on the support. More particularly, the post flexure flexes in response to the output torque; whereas, the spoke flexures allow for the rotational vibration in the first plane. Also provided is a single semiconductor crystal fabrication technique which allows for improved device manufacture.

Abstract translation: 用于检测惯性空间中的旋转速度的摇摆陀螺陀螺仪。 陀螺仪包括定位在第一平面中的支撑件和布置在平行于第一平面的支撑件上的车轮组件。 车轮组件适于在第一平面中以预定频率旋转地旋转，并且响应于围绕共面输入轴的旋转速率，以提供围绕共面输出轴的输出扭矩。 陀螺仪还包括在支撑件和车轮组件之间延伸的支柱组件的支柱组件。 车轮组件具有内轮毂，外轮和在内轮毂和外轮之间延伸并且沿着输入轴和输出轴线都是刚性的轮辐弯曲件。 在支架和车轮组件内轮毂之间的后组件中并入弯曲部，并且沿着输出轴线相对柔性并且沿着输入轴线相对刚性。 通过这种布置，车轮组件被支撑在支架上。 更具体地，后弯曲响应于输出扭矩而弯曲; 而辐条弯曲允许第一平面中的旋转振动。 还提供了允许改进器件制造的单个半导体晶体制造技术。

公开(公告)号：US5515724A

公开(公告)日：1996-05-14

申请号：US425857

申请日：1995-04-20

Applicant: Paul Greiff ,  Burton Boxenhorn

Inventor： Paul Greiff ,  Burton Boxenhorn

IPC: G01C19/5719 ,  G01P9/04

CPC classification number: G01C19/5719

Abstract: A double gimbal micromachined gyroscopic transducer is provided in a substrate having a pit extending downwardly from a top surface of the substrate. A gyroscopic transducer element suspended above the pit comprises an outer sense gimbal plate integral with the substrate, coupled to the substrate by a pair of flexible elements attached to opposite ends of the plate. The flexible elements are axially aligned to permit oscillatory motion about a sense axis passing through the flexible elements. The gyroscopic transducer further includes an inner drive gimbal plate integral with and interior to the sense gimbal plate. The drive gimbal plate is coupled to the sense gimbal plate by a second pair of flexible elements along an axis orthogonal to the first pair of flexible elements. The drive gimbal plate also includes a balanced mass generally centrally located on the drive gimbal plate. Also included are drive and sense electronics, for energizing the drive gimbal plate to oscillate about the drive axis, and for sensing any movement of the sense gimbal plate indicative of an angular rate about an input axis. The sense electronics includes a sense electrode disposed so as not to be in close proximity to and interfere with free oscillatory motion of the drive gimbal plate.

公开(公告)号：US5408119A

公开(公告)日：1995-04-18

申请号：US599131

申请日：1990-10-17

Applicant: Paul Greiff

Inventor： Paul Greiff

IPC: G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  H01L29/84 ,  H01L29/66 ,  H01L29/96

CPC classification number: G01P15/097 ,  G01P15/0802 ,  G01P2015/0814 ,  G01P2015/0831 ,  Y10S438/978

Abstract: A monolithic, micromechanical vibrating string accelerometer with a trimmable resonant frequency is fabricated from a silicon substrate which has been selectively etched to provide a resonant structure suspended over an etched pit. The resonant structure comprises an acceleration sensitive mass and at least two flexible elements having resonant frequencies. Each of the flexible elements is disposed generally colinear with at least one acceleration sensitive axis of the accelerometer. One end of at least one of the flexible elements is attached to a tension relief beam for providing stress relief of tensile forces created during the fabrication process. Mass support beams having a high aspect ratio support the mass over the etched pit while allowing the mass to move freely in the direction colinear with the flexible elements. Also disclosed is a method for fabricating such an accelerometer with high aspect ratio tension relief and mass support beams.

Abstract translation: 具有可调谐谐振频率的单片微机械振弦系统加速度计由硅衬底制成，该衬底已被选择性地蚀刻以提供悬浮在蚀刻凹坑上的谐振结构。 谐振结构包括加速度敏感质量和至少两个具有谐振频率的柔性元件。 每个柔性元件通常与加速度计的至少一个加速度敏感轴线共线设置。 至少一个柔性元件的一端附接到张力释放梁，以提供在制造过程中产生的张力的应力消除。 具有高纵横比的质量支撑梁支撑蚀刻凹坑上的质量，同时允许质量在与柔性元件的共线方向上自由移动。 还公开了一种用于制造具有高纵横比张力释放和质量支撑梁的这种加速度计的方法。

公开(公告)号：US5129983A

公开(公告)日：1992-07-14

申请号：US660793

申请日：1991-02-25

Applicant: Paul Greiff

Inventor： Paul Greiff

IPC: B81B3/00 ,  G01P15/08

CPC classification number: B81B3/0072 ,  G01P15/0802 ,  B81B2201/0235 ,  B81C2201/014

Abstract: A method of fabrication of micromechanical devices enables the production of large area micromechanical transducer structures which are symmetric, stress balanced structures relatively devoid of geometric distortions. Micromechanical transducer structures are fabricated implementing processes and physical characteristics which overcome the unbalanced stresses occurring in high concentration diffusion planar structures that cause problematic geometric distortions that restrict physical size. Large increases in the practical size of micromechanical devices which may be fabricated are achieved while permitting greater depths of structural features, without the resultant concentration and stress distortions. Multilevel, balanced stress structures can be created which are of varying geometries at each level to produce a "sculpted" structure.

Abstract translation: 微机械装置的制造方法使得能够生产大面积的微机械换能器结构，其是对称的，应力平衡的结构相对缺乏几何失真。 制造了微机械传感器结构，其实现了克服在高浓度扩散平面结构中发生的不平衡应力的过程和物理特性，其导致限制物理尺寸的有问题的几何失真。 实现可以制造的微机械装置的实际尺寸的大的增加，同时允许较大的结构特征深度，而没有产生的浓度和应力变形。 可以创建多层平衡的应力结构，其在各个层次上具有不同的几何形状以产生“雕刻”结构。

公开(公告)号：US5016072A

公开(公告)日：1991-05-14

申请号：US493327

申请日：1990-03-14

Applicant: Paul Greiff

Inventor： Paul Greiff

IPC: G01C19/5719

CPC classification number: G01C19/5719

Abstract: A semiconductor chip gyroscopic transducer is disclosed in which a semiconductor element is supported in an outer element by a flexible linkage system which is in turn supported in a frame of semiconductor material by another flexible linkage system which permits the element to vibrate about two axes relative to the frame. Balanced torque forces are provided by a system of buried and bridge electrodes. The stress and tension resulting from doping of these elements are released by a flexure beam. The inertial mass of the inner element is balanced by formation in a central pin and on-chip electronics avoids the capacitive loading effects of long runs from high impedance sources.Flexure footings are intergrated with the structure adding stability to flexures connecting the supported gyroscopic resonator element to the supporting structure, offsetting a rippling effect inherent in the oxide structure. Flexure grooves provide selective stiffness in the flexure. The bridge electrodes are additionally electrically isolated for electrical compatibility with gyroscope electronics.

Abstract translation: 公开了一种半导体芯片陀螺换能器，其中半导体元件通过柔性连杆系统支撑在外部元件中，柔性连杆系统又通过另一个柔性连杆系统支撑在半导体材料的框架中，该柔性连接系统允许元件相对于 框架。 平衡扭矩力由埋地和桥接电极系统提供。 由这些元件的掺杂产生的应力和张力由弯曲梁释放。 内部元件的惯性质量通过中心引脚的形成来平衡，片上电子元件避免了长距离高阻抗源的电容负载效应。 柔性基脚与结构相结合，增加了将支撑的陀螺谐振器元件连接到支撑结构的挠曲的稳定性，抵消氧化物结构中固有的波纹效应。 挠曲槽在挠曲件中提供选择性刚度。 桥电极另外电隔离，用于与陀螺仪电子设备的电气兼容性。

公开(公告)号：US09065006B2

公开(公告)日：2015-06-23

申请号：US13469842

申请日：2012-05-11

Applicant: Paul Greiff ,  Jose M Borrega

Inventor： Paul Greiff ,  Jose M Borrega

IPC: H01L31/042 ,  H02S10/30 ,  H01L31/18 ,  H01L31/068 ,  H01L31/046 ,  H01L31/0465 ,  H01L31/056

CPC classification number: H02S10/30 ,  H01L31/046 ,  H01L31/0465 ,  H01L31/056 ,  H01L31/068 ,  H01L31/1808 ,  Y02E10/52 ,  Y02E10/547

Abstract: A device, method and process of fabricating an interdigitated multicell thermo-photo-voltaic component that is particularly efficient for generating electrical energy from photons in the red and near-infrared spectrum received from a heat source in the near field. Where the absorbing region is germanium, the device is capable of generating electrical energy by absorbing photon energy in the greater than 0.67 electron volt range corresponding to radiation in the infrared and near-infrared spectrum. Use of germanium semiconductor material provides a good match for converting energy from a low temperature heat source. The side that is opposite the photon receiving side of the device includes metal interconnections and dielectric material which provide an excellent back surface reflector for recycling below band photons back to the emitter. Multiple cells may be fabricated and interconnected as a monolithic large scale array for improved performance.

Abstract translation: 一种用于制造交叉指示的多单元热电荷分量的装置，方法和过程，其特别有效地用于从近场中的热源接收的红色和近红外光谱中的光子产生电能。 在吸收区域是锗的情况下，该装置能够通过在大于0.67电子伏范围内吸收光子能量来产生电能，该范围对应于红外和近红外光谱中的辐射。 使用锗半导体材料可以很好地匹配从低温热源转换能量。 与器件的光子接收侧相对的一侧包括金属互连和电介质材料，其提供优良的后表面反射器，用于将低于光谱的光子再循环回发射器。 可以制造多个单元并将其互连成单片大规模阵列，以提高性能。

公开(公告)号：US08450598B2

公开(公告)日：2013-05-28

申请号：US13297535

申请日：2011-11-16

Applicant: Paul Greiff ,  Robert DiMatteo ,  Eric Brown ,  Christopher Leitz

Inventor： Paul Greiff ,  Robert DiMatteo ,  Eric Brown ,  Christopher Leitz

IPC: H01L31/00 ,  H01L35/00 ,  H01L37/00 ,  H01L35/34

CPC classification number: H01L31/024 ,  H02S10/30

Abstract: A near-field energy conversion method, utilizing a sub-micrometer “near-field” gap between juxtaposed infrared radiation receiver and emitter surfaces, wherein compliant membrane structures, preferably fluid-filled, are interposed in the structure for maintaining uniform gap separation. Thermally resistant gap spacers are also used to maintain uniform gap separation. Means are provided for cooling a receiver substrate structure and for conducting heat to an emitter substrate structure. The gap may also be evacuated for more effective operation.

Abstract translation: 近场能量转换方法利用并置的红外辐射接收器和发射器表面之间的亚微米“近场”间隙，其中优选流体填充的柔性膜结构被插入在结构中以保持均匀的间隙分离。 耐热间隙垫片也用于保持均匀的间隙分离。 提供了用于冷却接收器衬底结构并将热量传导到发射极衬底结构的装置。 间隙也可以被抽出来以便更有效的操作。