公开(公告)号：US20190011379A1

公开(公告)日：2019-01-10

申请号：US15927520

申请日：2018-03-21

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Srivatsan Seshadri ,  Sylvia Jia Yun Lewis ,  Janos Kirz ,  Alan Francis Lyon ,  Benjamin Donald Stripe

IPC: G01N23/085

CPC classification number: G01N23/085 ,  G21K1/06 ,  H01J35/02 ,  H01J35/10 ,  H01J35/12

Abstract: A method for performing x-ray absorption spectroscopy and an x-ray absorption spectrometer system to be used with a compact laboratory x-ray source to measure x-ray absorption of the element of interest in an object with both high spatial and high spectral resolution. The spectrometer system comprises a compact high brightness laboratory x-ray source, an optical train to focus the x-rays through an object to be examined, and a spectrometer comprising a single crystal analyzer (and, in some embodiments, also a mosaic crystal) to disperse the transmitted beam onto a spatially resolving x-ray detector. The high brightness/high flux x-ray source may have a take-off angle between 0 and 105 mrad. and be coupled to an optical train that collects and focuses the high flux x-rays to spots less than 500 micrometers, leading to high flux density. The coatings of the optical train may also act as a “low-pass” filter, allowing a predetermined bandwidth of x-rays to be observed at one time while excluding the higher harmonics.

公开(公告)号：US20180261350A1

公开(公告)日：2018-09-13

申请号：US15954380

申请日：2018-04-16

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  David Vine ,  Sylvia Jia Yun Lewis ,  Janos Kirz ,  Srivatsan Seshadri

IPC: G21K1/02 ,  G21K7/00 ,  G01N23/083

CPC classification number: G21K1/025 ,  G01N23/083 ,  G01N2223/204 ,  G21K7/00

Abstract: Systems for x-ray microscopy using an array of micro-beams having a micro- or nano-scale beam intensity profile to provide selective illumination of micro- or nano-scale regions of an object. An array detector is positioned such that each pixel of the detector only detects x-rays corresponding to a single micro-or nano-beam. This allows the signal arising from each x-ray detector pixel to be identified with the specific, limited micro- or nano-scale region illuminated, allowing sampled transmission image of the object at a micro- or nano-scale to be generated while using a detector with pixels having a larger size and scale. Detectors with higher quantum efficiency may therefore be used, since the lateral resolution is provided solely by the dimensions of the micro- or nano-beams. The micro- or nano-scale beams may be generated using a arrayed x-ray source and a set of Talbot interference fringes.

公开(公告)号：US20150194287A1

公开(公告)日：2015-07-09

申请号：US14544191

申请日：2014-12-08

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Sylvia Jia Yun Lewis ,  Janos Kirz

IPC: H01J35/08 ,  H01J35/14 ,  G01N23/207

CPC classification number: H01J35/08 ,  G01N23/223 ,  G21K1/06 ,  H01J2235/081 ,  H01J2235/086

Abstract: This disclosure presents systems for x-ray illumination that have an x-ray brightness several orders of magnitude greater than existing x-ray technologies. These may therefore useful for applications such as trace element detection or for micro-focus fluorescence analysis.The higher brightness is achieved in part by using designs for x-ray targets that comprise a number of microstructures of one or more selected x-ray generating materials fabricated in close thermal contact with a substrate having high thermal conductivity. This allows for bombardment of the targets with higher electron density or higher energy electrons, which leads to greater x-ray flux.The high brightness/high flux x-ray source may then be coupled to an x-ray optical system, which can collect and focus the high flux x-rays to spots that can be as small as one micron, leading to high flux density.

Abstract translation: 本公开提供了具有比现有x射线技术大几个数量级的x射线亮度的用于x射线照明的系统。 因此，这些可用于微量元素检测或微聚焦荧光分析等应用。 较高的亮度部分地通过使用x射线靶的设计来实现，所述X射线靶包括与具有高导热性的衬底紧密热接触制造的一个或多个选定的x射线产生材料的多个微结构。 这允许用更高电子密度或更高能量的电子轰击靶，这导致更大的x射线通量。 然后可以将高亮度/高通量x射线源耦合到x射线光学系统，其可以将高通量x射线收集并聚焦到可以小到1微米的点，导致高通量密度。

公开(公告)号：US20250027889A1

公开(公告)日：2025-01-23

申请号：US18891371

申请日：2024-09-20

Applicant: Sigray, Inc.

Inventor： David Vine ,  Wenbing Yun ,  Janos Kirz ,  Sheraz Gul ,  Sylvia Jia Yun Lewis ,  Richard Ian Spink

IPC: G01N23/046 ,  G01N23/083

Abstract: A three-dimensional x-ray imaging system includes at least one detector and an x-ray source including an x-ray transmissive vacuum window. The x-ray source is configured to produce diverging x-rays emerging from the vacuum window and propagating along an x-ray propagation axis extending through a region of interest of an object to the at least one detector. The diverging x-rays have propagation paths within an angular divergence angle greater than 1 degree centered on the x-ray propagation axis. The system further includes at least one sample motion stage configured to rotate the object about a rotation axis. The system further includes a sample mount configured to hold the object and comprises a first portion in the propagation paths of at least some of the diverging x-rays and having an x-ray transmission greater than 30% for x-rays having energies greater than 50% of a maximum x-ray energy of an x-ray spectrum of the diverging x-rays.

公开(公告)号：US20230293128A1

公开(公告)日：2023-09-21

申请号：US18176760

申请日：2023-03-01

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  David John Vine ,  Sylvia Jia Yun Lewis ,  Sheraz Gul ,  Janos Kirz

IPC: A61B6/00

CPC classification number: A61B6/4266 ,  A61B6/4241

Abstract: An x-ray computed laminography imaging system includes a transmission x-ray source configured to generate x-rays, at least some of the x-rays propagate along an x-ray propagation axis through a region of interest of an object. The system further includes a stage assembly configured to rotate the object about a rotation axis extending through the region of interest. The system further includes at least one x-ray detector configured to intercept at least some of the x-rays propagating along the x-ray propagation axis. The at least one x-ray detector includes a scintillator, at least one optical lens, and two-dimensional pixelated imaging circuitry. The scintillator has a thickness that is substantially parallel to the x-ray propagation axis and the at least one optical lens is configured to receive visible light from the scintillator and to focus the visible light into a two-dimensional image. The at least one optical lens has a depth of focus, and the thickness of the scintillator is in a range of 1 to 20 times the depth of focus.

公开(公告)号：US11686692B2

公开(公告)日：2023-06-27

申请号：US17540608

申请日：2021-12-02

Applicant: Sigray, Inc.

Inventor： David Vine ,  Wenbing Yun ,  Janos Kirz ,  Sheraz Gul ,  Sylvia Jia Yun Lewis ,  Richard Ian Spink

IPC: G01N23/046 ,  G01N23/083

CPC classification number: G01N23/046 ,  G01N23/083 ,  G01N2223/204 ,  G01N2223/309

Abstract: A three-dimensional x-ray imaging system includes at least one detector and an x-ray source including an x-ray transmissive vacuum window. The x-ray source is configured to produce diverging x-rays emerging from the vacuum window and propagating along an x-ray propagation axis extending through a region of interest of an object to the at least one detector. The diverging x-rays have propagation paths within an angular divergence angle greater than 1 degree centered on the x-ray propagation axis. The system further includes at least one sample motion stage configured to rotate the object about a rotation axis. The system further includes a sample mount configured to hold the object and comprises a first portion in the propagation paths of at least some of the diverging x-rays and having an x-ray transmission greater than 30% for x-rays having energies greater than 50% of a maximum x-ray energy of an x-ray spectrum of the diverging x-rays.

公开(公告)号：US20220082515A1

公开(公告)日：2022-03-17

申请号：US17476355

申请日：2021-09-15

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Benjamin Donald Stripe ,  Janos Kirz ,  Sylvia Jia Yun Lewis

IPC: G01N23/223 ,  G01N23/083 ,  G01N23/2273

Abstract: A system and method for analyzing a three-dimensional structure of a sample includes generating a first x-ray beam having a first energy bandwidth less than 20 eV at full-width-at-half maximum and a first mean x-ray energy that is in a range of 1 eV to 1 keV higher than an absorption edge energy of a first atomic element of interest, and that is collimated to have a collimation angular range less than 7 mrad in at least one direction perpendicular to a propagation direction of the first x-ray beam; irradiating the sample with the first x-ray beam at a plurality of incidence angles relative to a substantially flat surface of the sample, the incidence angles of the plurality of incidence angles in a range of 3 mrad to 400 mrad; and simultaneously detecting a reflected portion of the first x-ray beam from the sample and detecting x-ray fluorescence x-rays and/or photoelectrons from the sample.

公开(公告)号：US20210356412A1

公开(公告)日：2021-11-18

申请号：US17320852

申请日：2021-05-14

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Srivatsan Seshadri ,  Ruimin Qiao ,  Janos Kirz ,  Sylvia Jia Yun Lewis

IPC: G01N23/223 ,  G01N23/085

Abstract: An apparatus includes a crystal analyzer positioned relative to an x-ray source on a Rowland circle in a tangential plane and having a Rowland circle radius (R). The crystal analyzer includes crystal planes curved along at least one direction within at least the tangential plane with a radius of curvature substantially equal to twice the Rowland circle radius (2R). The crystal planes are configured to receive x-rays from the x-ray source and to disperse the received x-rays according to Bragg's law. The apparatus further includes a spatially resolving detector configured to receive at least a portion of the dispersed x-rays. The spatially resolving detector includes a plurality of x-ray detection elements having a tunable first x-ray energy and/or a tunable second x-ray energy. The plurality of x-ray detection elements are configured to measure received dispersed x-rays having x-ray energies below the first x-ray energy while suppressing measurements of the received dispersed x-rays above the first x-ray energy and/or to measure the received dispersed x-rays having x-ray energies above the second x-ray energy while suppressing measurements of the received dispersed x-rays below the second x-ray energy. The first and second x-ray energies are tunable in a range of 1.5 keV to 30 keV.

公开(公告)号：US10991538B2

公开(公告)日：2021-04-27

申请号：US16866953

申请日：2020-05-05

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Sylvia Jia Yun Lewis ,  Janos Kirz ,  William Henry Hansen

IPC: H01J35/00 ,  H01J35/12 ,  H01J35/30 ,  H01J35/14

Abstract: An x-ray target, x-ray source, and x-ray system are provided. The x-ray target includes a thermally conductive substrate comprising a surface and at least one structure on or embedded in at least a portion of the surface. The at least one structure includes a thermally conductive first material in thermal communication with the substrate. The first material has a length along a first direction parallel to the portion of the surface in a range greater than 1 millimeter and a width along a second direction parallel to the portion of the surface and perpendicular to the first direction. The width is in a range of 0.2 millimeter to 3 millimeters. The at least one structure further includes at least one layer over the first material. The at least one layer includes at least one second material different from the first material. The at least one layer has a thickness in a range of 2 microns to 50 microns. The at least one second material is configured to generate x-rays upon irradiation by electrons.

公开(公告)号：US10962491B2

公开(公告)日：2021-03-30

申请号：US16555143

申请日：2019-08-29

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Janos Kirz ,  Benjamin Donald Stripe ,  Sylvia Jia Yun Lewis

IPC: G01N23/223 ,  G21K1/06 ,  G21K1/02

Abstract: An x-ray optical filter includes at least one x-ray optical mirror configured to receive a plurality of x-rays having a first x-ray spectrum with a first intensity as a function of energy in a predetermined solid angle range and to separate at least some of the received x-rays by multilayer reflection or total external reflection into reflected x-rays and non-reflected x-rays and to form an x-ray beam including at least some of the reflected x-rays and/or at least some of the non-reflected x-rays. The x-ray beam has a second x-ray spectrum with a second intensity as a function of energy in the solid angle range, the second intensity greater than or equal to 50% of the first intensity across a first continuous energy range at least 3 keV wide, the second intensity less than or equal to 10% of the first intensity across a second continuous energy range at least 100 eV wide.