公开(公告)号：US11885755B2

公开(公告)日：2024-01-30

申请号：US18309021

申请日：2023-04-28

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Ruimin Qiao ,  Sylvia Jia Yun Lewis ,  Srivatsan Seshadri ,  Janos Kirz ,  Benjamin Donald Stripe

IPC: G01N23/207 ,  G01N23/20008 ,  G01N23/085 ,  G01N23/2209

CPC classification number: G01N23/2076 ,  G01N23/085 ,  G01N23/20008 ,  G01N23/2209 ,  G01N2223/041 ,  G01N2223/0568 ,  G01N2223/076 ,  G01N2223/1016 ,  G01N2223/316 ,  G01N2223/32 ,  G01N2223/50 ,  G01N2223/652

Abstract: An apparatus is configured to receive x-rays propagating from an x-ray source. The apparatus includes first and second x-ray diffractors, the second x-ray diffractor downstream from the first x-ray diffractor and first and second x-ray detectors. The first x-ray diffractor is configured to receive the x-rays, to diffract a first spectral band of the x-rays to the first x-ray detector, and to transmit at least 2% of the received x-rays to the second x-ray diffractor. The second x-ray diffractor is configured to receive the transmitted x-rays from the first x-ray diffractor and to diffract a second spectral band of the x-rays to the second x-ray detector. The first x-ray detector is configured to measure a first spectrum of the first spectral band of the x-rays and the second x-ray detector is configured to measure a second spectrum of the second spectral band of the x-rays.

公开(公告)号：US11143605B2

公开(公告)日：2021-10-12

申请号：US17009500

申请日：2020-09-01

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Sylvia Jia Yun Lewis ,  Janos Kirz ,  Benjamin Donald Stripe

IPC: G01N23/22 ,  G01N23/2204 ,  G01N23/2209 ,  G01N23/223 ,  G01N23/207 ,  G01N23/20016 ,  G01N23/20025 ,  G01N23/2055

Abstract: A system and a method use x-ray fluorescence to analyze a specimen by illuminating a specimen with an incident x-ray beam having a near-grazing incident angle relative to a surface of the specimen and while the specimen has different rotational orientations relative to the incident x-ray beam. Fluorescence x-rays generated by the specimen in response to the incident x-ray beam are collected while the specimen has the different rotational orientations.

公开(公告)号：US20170052128A1

公开(公告)日：2017-02-23

申请号：US15240972

申请日：2016-08-18

Applicant: SIGRAY, INC.

Inventor： Wenbing Yun ,  Sylvia Jia Yun Lewis ,  Janos Kirz ,  Benjamin Donald Stripe

IPC: G01N23/22 ,  G01N23/223 ,  G01N23/20

CPC classification number: G01N23/223 ,  G01N23/04 ,  G01N23/20058 ,  G01N2223/052 ,  G01N2223/056 ,  G01N2223/076

Abstract: An x-ray spectrometer system comprising an x-ray imaging system with at least one achromatic imaging x-ray optic and an x-ray detection system. The optical train of the imaging system is arranged so that its object focal plane partially overlaps an x-ray emitting volume of an object. An image of a portion of the object is formed with a predetermined image magnification at the x-ray detection system. The x-ray detection system has both high spatial and spectral resolution, and converts the detected x-rays to electronic signals. In some embodiments, the detector system may have a small aperture placed in the image plane, and use a silicon drift detector to collect x-rays passing through the aperture. In other embodiments, the detector system has an energy resolving pixel array x-ray detector. In other embodiments, wavelength dispersive elements may be used in either the optical train or the detector system.

Abstract translation: 一种X射线光谱仪系统，包括具有至少一个消色差成像x射线光学元件和x射线检测系统的x射线成像系统。 成像系统的光学系列被布置成使得其物体焦平面部分地与物体的x射线发射体积重叠。 物体的一部分的图像在x射线检测系统处以预定的图像倍率形成。 x射线检测系统具有高空间和光谱分辨率，并将检测到的x射线转换为电子信号。 在一些实施例中，检测器系统可以具有放置在图像平面中的小孔，并且使用硅漂移检测器来收集穿过孔的x射线。 在其他实施例中，检测器系统具有能量分辨像素阵列x射线检测器。 在其他实施例中，波长色散元件可以用于光学列车或检测器系统中。

公开(公告)号：US20230280291A1

公开(公告)日：2023-09-07

申请号：US18175171

申请日：2023-02-27

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Benjamin Donald Stripe ,  Frances Yenan Su ,  Vikaram Singh ,  Sylvia Jia Yun Lewis ,  Janos Kirz

IPC: G01N23/223 ,  G01N23/2204

CPC classification number: G01N23/223 ,  G01N23/2204 ,  G01N2223/204 ,  G01N2223/206

Abstract: A system includes a stage for supporting a sample having at least first and second atomic elements. The first atomic element has a first characteristic x-ray line with a first energy and the second atomic element has a second characteristic x-ray line with a second energy, the first and second energies lower than 8 keV and separated from one another by less than 1 keV. The system further includes an x-ray source of x-rays having a third energy between the first and second energies and at least one x-ray optic configured to receive and focus at least some of the x-rays as an x-ray beam to illuminate the sample. The system further includes at least one x-ray detector configured to detect fluorescence x-rays produced by the sample in response to being irradiated by the x-ray beam.

公开(公告)号：US11549895B2

公开(公告)日：2023-01-10

申请号：US17476355

申请日：2021-09-15

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Benjamin Donald Stripe ,  Janos Kirz ,  Sylvia Jia Yun Lewis

IPC: G01N23/20 ,  G01N23/223 ,  G01N23/2273 ,  G01N23/2206

Abstract: A system and method for analyzing a three-dimensional structure of a sample includes generating a first x-ray beam having a first energy bandwidth less than 20 eV at full-width-at-half maximum and a first mean x-ray energy that is in a range of 1 eV to 1 keV higher than an absorption edge energy of a first atomic element of interest, and that is collimated to have a collimation angular range less than 7 mrad in at least one direction perpendicular to a propagation direction of the first x-ray beam; irradiating the sample with the first x-ray beam at a plurality of incidence angles relative to a substantially flat surface of the sample, the incidence angles of the plurality of incidence angles in a range of 3 mrad to 400 mrad; and simultaneously detecting a reflected portion of the first x-ray beam from the sample and detecting x-ray fluorescence x-rays and/or photoelectrons from the sample.

公开(公告)号：US20200072770A1

公开(公告)日：2020-03-05

申请号：US16555143

申请日：2019-08-29

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Janos Kirz ,  Benjamin Donald Stripe ,  Sylvia Jia Yun Lewis

IPC: G01N23/223 ,  G21K1/06 ,  G21K1/02

Abstract: An x-ray optical filter includes at least one x-ray optical mirror configured to receive a plurality of x-rays having a first x-ray spectrum with a first intensity as a function of energy in a predetermined solid angle range and to separate at least some of the received x-rays by multilayer reflection or total external reflection into reflected x-rays and non-reflected x-rays and to form an x-ray beam including at least some of the reflected x-rays and/or at least some of the non-reflected x-rays. The x-ray beam has a second x-ray spectrum with a second intensity as a function of energy in the solid angle range, the second intensity greater than or equal to 50% of the first intensity across a first continuous energy range at least 3 keV wide, the second intensity less than or equal to 10% of the first intensity across a second continuous energy range at least 100 eV wide.

公开(公告)号：US20220082515A1

公开(公告)日：2022-03-17

申请号：US17476355

申请日：2021-09-15

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Benjamin Donald Stripe ,  Janos Kirz ,  Sylvia Jia Yun Lewis

IPC: G01N23/223 ,  G01N23/083 ,  G01N23/2273

Abstract: A system and method for analyzing a three-dimensional structure of a sample includes generating a first x-ray beam having a first energy bandwidth less than 20 eV at full-width-at-half maximum and a first mean x-ray energy that is in a range of 1 eV to 1 keV higher than an absorption edge energy of a first atomic element of interest, and that is collimated to have a collimation angular range less than 7 mrad in at least one direction perpendicular to a propagation direction of the first x-ray beam; irradiating the sample with the first x-ray beam at a plurality of incidence angles relative to a substantially flat surface of the sample, the incidence angles of the plurality of incidence angles in a range of 3 mrad to 400 mrad; and simultaneously detecting a reflected portion of the first x-ray beam from the sample and detecting x-ray fluorescence x-rays and/or photoelectrons from the sample.

公开(公告)号：US10962491B2

公开(公告)日：2021-03-30

申请号：US16555143

申请日：2019-08-29

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Janos Kirz ,  Benjamin Donald Stripe ,  Sylvia Jia Yun Lewis

IPC: G01N23/223 ,  G21K1/06 ,  G21K1/02

Abstract: An x-ray optical filter includes at least one x-ray optical mirror configured to receive a plurality of x-rays having a first x-ray spectrum with a first intensity as a function of energy in a predetermined solid angle range and to separate at least some of the received x-rays by multilayer reflection or total external reflection into reflected x-rays and non-reflected x-rays and to form an x-ray beam including at least some of the reflected x-rays and/or at least some of the non-reflected x-rays. The x-ray beam has a second x-ray spectrum with a second intensity as a function of energy in the solid angle range, the second intensity greater than or equal to 50% of the first intensity across a first continuous energy range at least 3 keV wide, the second intensity less than or equal to 10% of the first intensity across a second continuous energy range at least 100 eV wide.

公开(公告)号：US20210080408A1

公开(公告)日：2021-03-18

申请号：US17009500

申请日：2020-09-01

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Sylvia Jia Yun Lewis ,  Janos Kirz ,  Benjamin Donald Stripe

IPC: G01N23/207 ,  G01N23/20016 ,  G01N23/20025 ,  G01N23/2055

Abstract: A system and a method use x-ray fluorescence to analyze a specimen by illuminating a specimen with an incident x-ray beam having a near-grazing incident angle relative to a surface of the specimen and while the specimen has different rotational orientations relative to the incident x-ray beam. Fluorescence x-rays generated by the specimen in response to the incident x-ray beam are collected while the specimen has the different rotational orientations.

公开(公告)号：US10295486B2

公开(公告)日：2019-05-21

申请号：US15240972

申请日：2016-08-18

Applicant: SIGRAY, INC.

Inventor： Wenbing Yun ,  Sylvia Jia Yun Lewis ,  Janos Kirz ,  Benjamin Donald Stripe

IPC: G01N23/223 ,  G01N23/20058 ,  G01N23/04

Abstract: An x-ray spectrometer system comprising an x-ray imaging system with at least one achromatic imaging x-ray optic and an x-ray detection system. The optical train of the imaging system is arranged so that its object focal plane partially overlaps an x-ray emitting volume of an object. An image of a portion of the object is formed with a predetermined image magnification at the x-ray detection system. The x-ray detection system has both high spatial and spectral resolution, and converts the detected x-rays to electronic signals. In some embodiments, the detector system may have a small aperture placed in the image plane, and use a silicon drift detector to collect x-rays passing through the aperture. In other embodiments, the detector system has an energy resolving pixel array x-ray detector. In other embodiments, wavelength dispersive elements may be used in either the optical train or the detector system.