公开(公告)号：US20200169262A1

公开(公告)日：2020-05-28

申请号：US16681469

申请日：2019-11-12

Applicant: STMicroelectronics S.r.l.

Inventor： Giorgio Mussi ,  Giacomo Langfelder ,  Carlo Valzasina ,  Gabriele Gattere

IPC: H03L7/099 ,  H03K3/353 ,  H03L7/18 ,  H03K5/00

Abstract: In an embodiment, a clock generator has a variable-modulus frequency divider that receives a high-frequency clock signal and outputs a divided clock signal having a frequency controlled by a modulus-control signal generated by a temperature-compensation circuit. A jitter filter is coupled to the output of the variable-modulus frequency divider and to the temperature-compensation circuit and generates a compensated clock signal having switching edges that are delayed, with respect to the divided clock signal, by a time correlated to a quantization-error signal.

公开(公告)号：US20200064134A1

公开(公告)日：2020-02-27

申请号：US16664041

申请日：2019-10-25

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Gattere ,  Luca Giuseppe Falorni ,  Carlo Valzasina

IPC: G01C19/5712

Abstract: A micromechanical detection structure includes a substrate of semiconductor material and a driving-mass arrangement is coupled to a set of driving electrodes and driven in a driving movement following upon biasing of the set of driving electrodes. A first anchorage unit is coupled to the driving-mass arrangement for elastically coupling the driving-mass arrangement to the substrate at first anchorages. A driven-mass arrangement is elastically coupled to the driving-mass arrangement by a coupling unit and designed to be driven by the driving movement. A second anchorage unit is coupled to the driven-mass arrangement for elastically coupling the driven-mass arrangement to the substrate at second anchorages. Following upon the driving movement, the resultant of the forces and of the torques exerted on the substrate at the first and second anchorages is substantially zero.

公开(公告)号：US20200049505A1

公开(公告)日：2020-02-13

申请号：US16655096

申请日：2019-10-16

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Carlo Valzasina ,  Luca Giuseppe Falorni

IPC: G01C19/5747 ,  G01C19/5712

Abstract: A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.

公开(公告)号：US10480942B2

公开(公告)日：2019-11-19

申请号：US15273312

申请日：2016-09-22

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Carlo Valzasina ,  Luca Giuseppe Falorni

IPC: G01C19/5747 ,  G01C19/5712

Abstract: A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.

公开(公告)号：US10458794B2

公开(公告)日：2019-10-29

申请号：US15454907

申请日：2017-03-09

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Luca Giuseppe Falorni ,  Carlo Valzasina

IPC: G01C19/5712

Abstract: A micromechanical detection structure includes a substrate of semiconductor material and a driving-mass arrangement is coupled to a set of driving electrodes and driven in a driving movement following upon biasing of the set of driving electrodes. A first anchorage unit is coupled to the driving-mass arrangement for elastically coupling the driving-mass arrangement to the substrate at first anchorages. A driven-mass arrangement is elastically coupled to the driving-mass arrangement by a coupling unit and designed to be driven by the driving movement. A second anchorage unit is coupled to the driven-mass arrangement for elastically coupling the driven-mass arrangement to the substrate at second anchorages. Following upon the driving movement, the resultant of the forces and of the torques exerted on the substrate at the first and second anchorages is substantially zero.

公开(公告)号：US10433068B2

公开(公告)日：2019-10-01

申请号：US15365590

申请日：2016-11-30

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Matteo Perletti ,  Igor Varisco ,  Luca Lamagna ,  Silvia Adorno ,  Gabriele Gattere ,  Carlo Valzasina ,  Sebastiano Conti

IPC: H04R25/00 ,  H04R19/00 ,  B81B3/00 ,  B81C1/00 ,  G01H11/06 ,  H04R31/00

Abstract: A MEMS acoustic transducer provided with: a substrate of semiconductor material, having a back surface and a front surface opposite with respect to a vertical direction; a first cavity formed within the substrate, which extends from the back surface to the front surface; a membrane which is arranged at the upper surface, suspended above the first cavity and anchored along a perimeter thereof to the substrate; and a combfingered electrode arrangement including a number of mobile electrodes coupled to the membrane and a number of fixed electrodes coupled to the substrate and facing respective mobile electrodes for forming a sensing capacitor, wherein a deformation of the membrane as a result of incident acoustic pressure waves causes a capacitive variation of the sensing capacitor. In particular, the combfingered electrode arrangement lies vertically with respect to the membrane and extends parallel thereto.

公开(公告)号：US10267869B2

公开(公告)日：2019-04-23

申请号：US15638204

申请日：2017-06-29

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Giacomo Laghi ,  Giacomo Langfelder ,  Gabriele Gattere ,  Alessandro Tocchio ,  Dario Paci

IPC: G01R33/02 ,  G01R33/028 ,  G01R33/038

Abstract: A MEMS triaxial magnetic sensor device includes a sensing structure having: a substrate; an outer frame, which internally defines a window and is elastically coupled to first anchorages fixed with respect to the substrate by first elastic elements; a mobile structure arranged in the window, suspended above the substrate, which is elastically coupled to the outer frame by second elastic elements and carries a conductive path for flow of an electric current; and an elastic arrangement operatively coupled to the mobile structure. The mobile structure performs, due to the first and second elastic elements and the arrangement of elastic elements, first, second, and third sensing movements in response to Lorentz forces from first, second, and third magnetic-field components, respectively. The first, second, and third sensing movements are distinct and decoupled from one another.