摘要:
A method is provided of manufacturing semiconductor devices formed on a semiconductor wafer, including placing the wafer in a semiconductor container and conveying the container to a semiconductor manufacturing apparatus. An opening of the container is opposed to an opening of the apparatus such that an opener of the apparatus holds a lid of the opening the container. A key of the opener is inserted to a latch groove of the lid, and the key is rotated to contact a latch of the lid. The openings are connected such that a velocity differential pressure ratio obtained by dividing the maximum velocity when the opener holding the lid horizontally moves away from the opening of the container, by the differential pressure between the inside pressure and the outside pressure of the apparatus, is set to be 0.06 ((m/s)/Pa) or less, and then the wafer is processed.
摘要:
An opening and closing member control system includes a rotation sensing device, which outputs a pulse signal synchronously to a movement of a window glass, and a controller, which senses pinching of an object by an opening and closing member based on the pulse signal. The controller has leaning stored data Δωm based on the pulse signal. The controller computes a rotational speed difference Δω at a current position of the window glass based on the pulse signal while the window glass is driven in a closing direction. The controller computes a difference between the rotational speed difference Δω and leaning stored data Δωm in such a manner that the controller determines whether the pinching of the object based on a comparison between the difference and a pinching determining threshold value β.
摘要:
It is an object of the invention to provide a pulse generation circuit and a modulator for realizing a high On/Off ratio in a small circuit scale and with lower power consumption. A short pulse generation circuit according to the invention includes an oscillator 101, a control signal generation circuit 102, an intermittent frequency multiplier 103, a filter 104, and an output terminal 105. The oscillator 101 and the intermittent frequency multiplier 103 are active circuits implemented as active elements. A continuous signal is output from the oscillator 101 and is input to the intermittent frequency multiplier 103 and the intermittent frequency multiplier 103 intermittently operates according to a control signal output from the control signal generation circuit 102, thereby generating a short pulse signal, and a spurious component is removed through the filter.
摘要:
When a conventional semiconductor container opening/closing apparatus opens a lid of a semiconductor container, foreign particles enter into the container from outside through a gap between the container and a wall surface of the container opening/closing apparatus and adhere to a wafer in the container. An apparatus is provided to reduce the number of foreign particles adhering to the wafer by preventing foreign particles from entering into the container at the time of opening the container by the opening/closing apparatus. To achieve this, a velocity-differential pressure ratio obtained by dividing the maximum velocity at the time of opening the lid of the container in a vertical direction to an opening of the container, by the differential pressure between the inside pressure and the outside pressure of said semiconductor manufacturing apparatus, is set to be 0.06 ((m/s) Pa) or less.
摘要:
A first guiding mechanism is formed by the interior shape of an engagement portion of a plug housing and the exterior shape of an engagement portion of a receptacle housing, to be guided and inserted into the engagement portion. A second guiding mechanism is formed by guide posts and guide holes. A third guiding mechanism is formed by the interior shape of the engagement portion of the receptacle housing and the exterior shapes of first multi core ferrules of the plug side optical connector, to be inserted into the engagement portion of the receptacle housing. A fourth guiding mechanism is formed by guide pins of second multi core ferrules and guide pin apertures, for receiving the guide pins of the first multi core ferrules. The first, second, third, and fourth guiding mechanisms operate in this order during engagement of a receptacle side optical connector and a plug side optical connector.
摘要:
When a conventional semiconductor container opening/closing apparatus opens a lid of a semiconductor container, foreign particles enter into the container from outside through a gap between the container and a wall surface of the container opening/closing apparatus and adhere to a wafer in the container. A method is provided to reduce the number of foreign particles adhering to the wafer by preventing foreign particles from entering into the container at the time of opening the container by the opening/closing apparatus. To achieve this, a velocity-differential pressure ratio obtained by dividing the maximum velocity at the time of opening the lid of the container in a vertical direction to an opening of the container, by the differential pressure between the inside pressure and the outside pressure of said semiconductor manufacturing apparatus, is set to be 0.06 ((m/s) Pa) or less.
摘要:
An image processing apparatus comprising: a spatial filtering section storing coefficients arranged in i rows and j columns, for receiving pixel data items representing the input image and arranged in i rows and j columns, and for multiplying each pixel data item by a corresponding coefficient; a coefficient memory having groups of coefficient registers for storing the coefficients set in the spatial filtering section; a selection data generating section for generating coefficient-selecting data representing coefficients to be read from the coefficient registers of each group and for changing the coefficient-selecting data in accordance with the pixel data items which is to be input to the spatial filtering section; and a coefficient selecting section for receiving the coefficient-selecting data generated by the selecting data generating section, reading coefficients from the coefficient registers of each group in accordance with the coefficient-selecting data, and setting the coefficients in the spatial filtering section.
摘要:
In a liquid crystal projector having a light source and liquid crystal panel units disposed in the optical paths, reflecting means is disposed on the emanating side of the projector for reflecting the light in a direction approximately perpendicular to the optical axis, and change-over means is coupled to the liquid crystal panel units for reversing the lateral directions of images.
摘要:
Various types of air cleaning devices for cleaning air fed to a passenger compartment of a motor vehicle are described. These air cleaning devices are arranged to incorporate with a cowl top structure of the vehicle. In one type, an air filter is disposed in an external air introduction passage led to the passenger compartment, and when the air filter is blocked with arrested dusts, a bypass passage is established to keep the feeding of atmospheric air to the passenger compartment. In a modified type, the bypass passage is instantly blocked and an internal air circulation mode is established. In one type, an electrostatic air collecting unit is used for arresting very fine particles in the atmospheric air fed to the passenger compartment. In order to achieve a smoothed air flow in the electrostatic air collecting unit, smoothly curved air guide passages are defined between positive and negative electrode plates. In one type, two hood ridge reinforcing hollowed structures are used for feeding the air box and thus the passenger compartment with a satisfied amount of atmospheric air. In order to facilitate the maintenance of the air filter in the air box, an inspection aperture is provided in the cowl top. Usually, the inspection aperture is covered by a lid.
摘要:
A method for manufacturing concrete panels by continuously pressing and an apparatus for carrying out the method. The concrete panels are successively manufactured by continuously feeding pallets onto a conveyor, feeding a concrete material onto the pallets, continuously pressure frames against the concrete material from the upper side and both lateral sides of the concrete material while imparting vibrations to the pressure frames, forming hollows in the concrete material by thrusting a rotary screw-type core rod therethrough to provide a panel shape hollow molding, and cutting the molded concrete material into a length corresponding to the length of each pallet. In the manufacture process, an organic or inorganic fiber material may be incorporated into the concrete material for the purpose of reinforcement of the finished products.