公开(公告)号：US20110297852A1

公开(公告)日：2011-12-08

申请号：US13124063

申请日：2011-03-22

申请人： Hidenobu Kameda ,  Osamu Wakabayashi ,  Masato Moriya

发明人： Hidenobu Kameda ,  Osamu Wakabayashi ,  Masato Moriya

IPC分类号： G21K5/00 ,  G02B7/192

CPC分类号： G21K1/062 ,  B82Y10/00 ,  G02B5/0891 ,  G03F7/70891 ,  G03F7/70983 ,  G21K2201/067

摘要： A mirror is provided which may include: a substrate; a thermal diffusion layer provided on a principal surface of the substrate, the thermal diffusion layer having a higher thermal conductivity than the substrate; and a reflective layer provided on the thermal diffusion layer, the reflective layer having a lower thermal conductivity than the thermal diffusion layer.

摘要翻译： 提供了一种可以包括：基底的反射镜; 设置在所述基板的主表面上的热扩散层，所述热扩散层具有比所述基板更高的热导率; 以及设置在所述热扩散层上的反射层，所述反射层具有比所述热扩散层低的热导率。

公开(公告)号：US20100176310A1

公开(公告)日：2010-07-15

申请号：US12385835

申请日：2009-04-21

申请人： Masato Moriya ,  Tamotsu Abe ,  Takashi Suganuma ,  Hiroshi Someya ,  Takayuki Yabu ,  Akira Sumitani ,  Osamu Wakabayashi

发明人： Masato Moriya ,  Tamotsu Abe ,  Takashi Suganuma ,  Hiroshi Someya ,  Takayuki Yabu ,  Akira Sumitani ,  Osamu Wakabayashi

IPC分类号： H01J99/00

CPC分类号： G03F7/70891 ,  G03F7/70033 ,  G03F7/7085 ,  G03F7/70883 ,  H05G2/008

摘要： An EUV light source apparatus capable of easily detecting deterioration etc. of a window of an EUV light generating chamber. The EUV light source apparatus includes a driver laser, an EUV light generating chamber, a window which passes the laser beam into the EUV light generating chamber, an EUV light collector mirror, laser beam focusing optics which focuses a laser beam onto a trajectory of a target material, a temperature sensor which detects a temperature of the window, and a laser beam optics deterioration determination processing unit which determines deterioration of the window based on the temperature of the window detected by the temperature sensor when extreme ultra violet light is generated.

摘要翻译： EUV光源装置，能够容易地检测EUV光产生室的窗口的劣化等。 EUV光源装置包括驱动激光器，EUV光产生室，将激光束通入EUV光产生室的窗口，EUV聚光镜，激光束聚焦光学器件，其将激光束聚焦到 目标材料，检测窗口的温度的温度传感器，以及激光束光学劣化判定处理单元，其基于当产生极紫外光时由温度传感器检测到的窗口的温度来确定窗口的劣化。

公开(公告)号：US07683355B2

公开(公告)日：2010-03-23

申请号：US11902596

申请日：2007-09-24

申请人： Masato Moriya ,  Tamotsu Abe ,  Takashi Suganuma ,  Hiroshi Someya ,  Takayuki Yabu ,  Akira Sumitani

发明人： Masato Moriya ,  Tamotsu Abe ,  Takashi Suganuma ,  Hiroshi Someya ,  Takayuki Yabu ,  Akira Sumitani

IPC分类号： H05G2/00 ,  G21G4/00 ,  A61N5/06 ,  G01J3/10

CPC分类号： H05G2/001

摘要： An EUV light source apparatus capable of preventing the efficiency of generation of EUV light from decreasing due to deterioration of a window of an EUV light generation chamber. The EUV light source apparatus includes an EUV light generation chamber provided with a window, a driver laser which generates a laser beam, a concave lens which enlarges the laser beam, a convex lens which collimates the enlarged laser beam, a parabolic concave mirror which is arranged in the EUV light generation chamber and reflects the collimated laser beam to collect the laser beam to a target material, a parabolic concave mirror adjusting mechanism which adjusts position and angle of the parabolic concave mirror, an EUV light collector mirror which collects EUV light, and a purge gas supply unit which supplies a purge gas for protecting the window and the parabolic concave mirror.

摘要翻译： EUV光源装置能够防止由于EUV光产生室的窗口的劣化导致的EUV光的产生效率降低。 EUV光源装置包括：具有窗口的EUV光产生室，产生激光束的驱动激光器，放大激光束的凹透镜;使激光束准直的凸透镜;抛物面凹面镜; 布置在EUV光产生室中，并且反射准直激光束以将激光束收集到目标材料上，调整抛物面凹面镜的位置和角度的抛物面凹面镜调节机构，收集EUV光的EUV聚光镜， 以及净化气体供给单元，其供给用于保护窗口和抛物面凹面镜的吹扫气体。

公开(公告)号：US20090250641A1

公开(公告)日：2009-10-08

申请号：US12385245

申请日：2009-04-02

申请人： Masato Moriya ,  Hiroshi Komori ,  Takeshi Asayama

发明人： Masato Moriya ,  Hiroshi Komori ,  Takeshi Asayama

IPC分类号： G01J3/10

CPC分类号： H05G2/003 ,  G03F7/70033 ,  G03F7/70916 ,  H05G2/005 ,  H05G2/008

摘要： An extreme ultra violet light source apparatus in which debris moving within a chamber are prevented from reducing reflectance or transmittance of optical elements of an EUV collector mirror, etc, and extreme ultra violet light can stably be generated in a long period. The apparatus includes: a target supply unit for supplying a target to a predetermined position within a chamber; a driver laser for applying a laser beam to the target to generate first plasma; a collector mirror provided within the chamber, for collecting extreme ultra violet light radiated from the first plasma; a gas supply unit for supplying a gas into the chamber; an excitation unit for exciting the gas to generate second plasma around a region where the first plasma is generated; and an exhaust unit for exhausting the chamber and ejecting debris emitted from the first plasma to outside of the chamber.

摘要翻译： 能够防止在室内移动的碎屑减少EUV收集镜等的光学元件的反射率或透射率的极端紫外线光源装置，能够长时间稳定地产生极紫外光。 该装置包括：目标供给单元，用于将目标供给到室内的预定位置; 用于将激光束施加到所述靶以产生第一等离子体的驱动器激光器; 设置在室内的收集器反射镜，用于收集从第一等离子体辐射的极紫外光; 气体供应单元，用于将气体供应到所述室中; 用于激发气体以在产生第一等离子体的区域周围产生第二等离子体的激励单元; 以及排气单元，用于排出室并将从第一等离子体发射的碎屑喷射到室外。

公开(公告)号：US20090224181A1

公开(公告)日：2009-09-10

申请号：US12382108

申请日：2009-03-09

申请人： Tamotsu Abe ,  Toshihiro Nishisaka ,  Hiroshi Someya ,  Masato Moriya ,  Takeshi Asayama ,  Hideo Hoshino ,  Hakaru Mizoguchi

发明人： Tamotsu Abe ,  Toshihiro Nishisaka ,  Hiroshi Someya ,  Masato Moriya ,  Takeshi Asayama ,  Hideo Hoshino ,  Hakaru Mizoguchi

IPC分类号： G01J3/10

CPC分类号： H05G2/001 ,  G03F7/70033 ,  G03F7/70916

摘要： An extreme ultra violet light source apparatus in which debris staying and accumulating within a chamber can be prevented from contaminating the chamber and deteriorating the performance of important optical component. The extreme ultra violet light source apparatus includes: a chamber in which extreme ultra violet light is generated; a driver laser for applying a laser beam to a target supplied to a predetermined position within the chamber to generate plasma; a collector mirror provided within the chamber, for collecting and outputting the extreme ultra violet light radiated from the plasma; an exhaust path communicating with the chamber and connected to an exhausting device, for maintaining an interior of the chamber at a certain pressure; a catching chamber provided in the exhaust path, for catching debris generated from the plasma; and a collecting unit for collecting the caught debris out of the chamber.

摘要翻译： 可以防止残留在室内积聚的碎片的极紫外光源装置污染室，劣化重要的光学部件的性能。 极紫外光源装置包括：产生极紫外光的室; 用于将激光束施加到提供到所述室内的预定位置的目标以产生等离子体的驱动器激光器; 设置在室内的收集器反射镜，用于收集和输出从等离子体辐射的极紫外光; 与所述室连通并连接到排气装置的排气路径，用于将所述室的内部保持在一定压力; 设置在排气路径中的捕获室，用于捕获从等离子体产生的碎屑; 以及收集单元，用于将捕获的碎屑收集在室外。

公开(公告)号：US06994748B2

公开(公告)日：2006-02-07

申请号：US10258984

申请日：2001-05-01

申请人： Masato Moriya ,  Tadayuki Hanamoto ,  Hiroshi Monden ,  Toshio Hayashida ,  Toshirou Kotooka

发明人： Masato Moriya ,  Tadayuki Hanamoto ,  Hiroshi Monden ,  Toshio Hayashida ,  Toshirou Kotooka

IPC分类号： C30B15/00

CPC分类号： C30B15/20 ,  C30B15/26 ,  Y10T117/10 ,  Y10T117/1004

摘要： A melt level or the gap between a melt surface and a heat shield is measured accurately irrespective of how the melt surface is. A laser beam from a range-finding unit is reflected by a scanning mirror and projected on a melt surface through an entrance window and a quartz prism in a chamber of a puller. After specular reflection, the beam forms a measurement spot in the bottom of a heat shield and scatters. Part of the scatter, after specular reflection at the melt surface (secondary reflection), passes through the prism, the entrance window and the scanning mirror to the range-finding unit. The range-finding unit carries out triangulation using the distance between a laser source and a photodetector therein, and the angle of incidence and the angle of the received laser beam.

摘要翻译： 精确地测量熔体水平或熔体表面和隔热板之间的间隙，而不管熔体表面如何。 来自测距单元的激光束被扫描反射镜反射并通过入口窗口和在拉拔器的腔室中的石英棱镜投射在熔体表面上。 在镜面反射之后，光束在隔热板的底部形成测量点并散射。 在熔体表面（二次反射）的镜面反射之后，散射的一部分通过棱镜，入射窗和扫描镜到达测距单元。 测距单元使用激光源和其中的光电检测器之间的距离以及所接收的激光束的入射角和角度来进行三角测量。

公开(公告)号：US5629773A

公开(公告)日：1997-05-13

申请号：US492146

申请日：1995-06-07

申请人： Hideyuki Wakai ,  Toru Suzuki ,  Keiji Terada ,  Masato Moriya ,  Manabu Ando

发明人： Hideyuki Wakai ,  Toru Suzuki ,  Keiji Terada ,  Masato Moriya ,  Manabu Ando

IPC分类号： G01B11/00 ,  G01B11/02 ,  G01B11/24 ,  G01C3/06 ,  G02B5/32 ,  G03H1/26

CPC分类号： G01B11/24 ,  G01B11/026 ,  G01B11/2441 ,  G03H2001/0038

摘要： A three-dimensional image measuring device which comprises a light source; a plane image forming unit for forming a plane image in a space in its depth direction on the basis of light emitted from the light source; a scanning unit for moving and scanning the plane image formed by the plane image forming unit in its depth direction; an object to be measured disposed in the space where the plane image is formed; a light receiving unit for measuring the strength of light scattered on a surface of the object as the plane image is moved and scanned and; a distance measuring unit for measuring the distance to the object on the basis of the output of the light receiving unit, whereby a three-dimensional image with least reduced invisible area is easily and accurately measured in a short time without using the principle of triangulation.

摘要翻译： 一种三维图像测量装置，包括光源; 平面图像形成单元，用于基于从光源发射的光在其深度方向上的空间中形成平面图像; 扫描单元，用于在其深度方向上移动和扫描由平面图像形成单元形成的平面图像; 要被测量的物体设置在形成平面图像的空间中; 光接收单元，用于当移动和扫描平面图像时，测量在物体的表面上散射的光的强度; 距离测量单元，用于基于光接收单元的输出来测量到物体的距离，由此在不使用三角测量原理的情况下，在短时间内容易且精确地测量具有最小降低的不可见区域的三维图像。

公开(公告)号：US5448360A

公开(公告)日：1995-09-05

申请号：US165418

申请日：1993-12-13

申请人： Hideyuki Wakai ,  Toru Suzuki ,  Keiji Terada ,  Masato Moriya ,  Manabu Ando

发明人： Hideyuki Wakai ,  Toru Suzuki ,  Keiji Terada ,  Masato Moriya ,  Manabu Ando

IPC分类号： G01B11/00 ,  G01B11/02 ,  G01B11/24 ,  G01C3/06 ,  G02B5/32 ,  G03H1/26

CPC分类号： G01B11/24 ,  G01B11/026 ,  G01B11/2441 ,  G03H2001/0038

摘要： A three-dimensional image measuring device which comprises a light source; a plane image forming unit for forming a plane image in a space in its depth direction .on the basis of light emitted from the light source; a scanning unit for moving and scanning the plane image formed by the plane image forming means in its depth direction; an object to be measured disposed in the space where the plane image is formed; a light receiving unit for measuring a strength of light scattered on a surface of the object as the plane image is moved and scanned and; a distance measuring unit for measuring the distance to the object on the basis of the output of the light receiving unit, whereby a three-dimensional image with least reduced invisible area is easily and accurately measured in a short time without using the principle of triangulation.

摘要翻译： 一种三维图像测量装置，包括光源; 平面图像形成单元，用于基于从光源发射的光在其深度方向上的空间中形成平面图像; 扫描单元，用于在其深度方向上移动和扫描由平面图像形成装置形成的平面图像; 要被测量的物体设置在形成平面图像的空间中; 光接收单元，用于当平面图像被移动和扫描时，测量在物体的表面上散射的光的强度; 距离测量单元，用于基于光接收单元的输出来测量到物体的距离，由此在不使用三角测量原理的情况下，在短时间内容易且精确地测量具有最小降低的不可见区域的三维图像。

公开(公告)号：US20140191108A1

公开(公告)日：2014-07-10

申请号：US14238405

申请日：2012-09-05

申请人： Masato Moriya ,  Osamu Wakabayashi

发明人： Masato Moriya ,  Osamu Wakabayashi

IPC分类号： H01S3/101 ,  H05G2/00

CPC分类号： H01S3/101 ,  H01S3/005 ,  H01S3/0078 ,  H01S3/2391 ,  H05G2/008

摘要： An alignment system for a laser apparatus includes a guide laser device outputting a guide laser beam, an adjusting mechanism adjusting travel directions of the guide laser beam and a laser beam from the laser apparatus, a beam path combiner controlling travel directions of the laser beam and the guide laser beam to substantially coincide with each other, a first optical detection unit provided from the beam path combiner detecting the laser and guide laser beams, a first controller controlling the adjusting mechanism based on a first optical detection unit detection result, a beam steering unit downstream from the beam path combiner controlling travel directions of the laser and guide laser beams, a second optical detection unit downstream from the beam steering unit detecting the guide laser beam, and a second controller controlling the beam steering unit based on a second optical detection unit detection result.

摘要翻译： 用于激光装置的对准系统包括：输出导向激光束的导向激光装置，调整引导激光束的行进方向的调节机构和来自激光装置的激光束;光束组合器，控制激光束的行进方向; 所述引导激光束彼此基本一致，从所述光束组合器提供的检测所述激光和引导激光束的第一光学检测单元，基于第一光学检测单元检测结果控制所述调节机构的第一控制器， 控制光束路径组合器的下游，控制激光束和引导激光束的行进方向，第二光学检测单元，在检测引导激光束的光束转向单元的下游;以及第二控制器，其基于第二光学检测器控制光束转向单元 单位检测结果。

公开(公告)号：US08592787B2

公开(公告)日：2013-11-26

申请号：US13437678

申请日：2012-04-02

申请人： Masato Moriya ,  Osamu Wakabayashi ,  Georg Soumagne

发明人： Masato Moriya ,  Osamu Wakabayashi ,  Georg Soumagne

IPC分类号： G21K5/04

CPC分类号： G02B5/1838 ,  G02B5/0891 ,  G02B5/1857 ,  G03F7/70575 ,  G21K1/065 ,  G21K2201/064

摘要： An EUV light source is configured for generating an EUV light for an exposure device. The EUV light source includes a chamber, a target supply device configured for supplying a target into the chamber, an optical system for introducing laser light from a driver laser into the chamber and irradiating the target with the laser light to turn the target into plasma from which EUV light is emitted, and an EUV collector mirror in the chamber. The EUV collector mirror may include a multilayered reflecting surface with grooves and collect the EUV light from the plasma to a focal spot. The grooves can be arranged in a concentric fashion, and be configured for diffracting at least light at a wavelength which is the same as that of the laser light from the driver laser.

摘要翻译： EUV光源被配置为产生用于曝光装置的EUV光。 所述EUV光源包括室，被配置为将靶供给到所述室中的目标供给装置，用于将来自驱动器激光器的激光引入所述室并且用所述激光照射所述靶的光学系统，以将所述靶转换成等离子体 哪个EUV光被发射，并且在室中的EUV收集器反射镜。 EUV收集器反射镜可以包括具有凹槽的多层反射表面并且将来自等离子体的EUV光收集到焦点。 凹槽可以以同心的方式布置，并且被配置为至少衍射与来自驱动器激光器的激光的波长相同的光。