摘要:
A window unit may include: a window configured to allow a laser beam to be transmitted therethrough; and a holder for holding the window at a periphery thereof, the holder being provided with a flow channel thereinside configured to allow a fluid to flow.
摘要:
A window unit may include: a window configured to allow a laser beam to be transmitted therethrough; and a holder for holding the window at a periphery thereof, the holder being provided with a flow channel thereinside configured to allow a fluid to flow.
摘要:
A mirror is provided which may include: a substrate; a thermal diffusion layer provided on a principal surface of the substrate, the thermal diffusion layer having a higher thermal conductivity than the substrate; and a reflective layer provided on the thermal diffusion layer, the reflective layer having a lower thermal conductivity than the thermal diffusion layer.
摘要:
Provided is a laser device which is installed within a predetermined space and on a predetermined floor area, the laser device may includes: a master oscillator; at least one amplifier unit that amplifies a laser beam outputted from the master oscillator; at least one power source unit that supplies excitation energy to the at least one amplifier unit; and a movement mechanism which enables at least one among the at least one amplifier unit and the at least one power source unit to be moved in a direction parallel with a floor surface.
摘要:
A holder device for holding an optical element includes a holder having first and second members to sandwich the optical element therebetween, and a sealing member for creating a seal between the second member and the optical element.
摘要:
A mirror includes a mirror base provided with a flow channel through which a heat medium passes for cooling the mirror. The flow channel includes a buffer tank portion for adjusting a flow rate of the heat medium in the flow channel. A reflective film is provided on the mirror base.
摘要:
A tube for a heat exchanger includes a tube main body (10) with a long plate shape in an extrusion direction and formed with a plurality of fluid paths (1a) through which a fluid for heat exchange flows internally along the extrusion direction, a plurality of concave parts formed with intervals in a pressing direction in which either an upper surface part (1c) of the tube, that is, a surface of one side in a thickness direction of the tube main body (10) or a lower surface part (1d) of the tube, that is, a surface of a reverse direction to the upper surface part (1c) is pressed in the direction, convex parts (1b) projected in a direction that narrows a cross sectional area of the fluid paths (1a) are formed by the pressed concave parts in the fluid path (1a).
摘要:
A heat exchanger includes a plurality of plate-shaped heat exchanger units and a plurality of flat fins arranged on the units, respectively. Each of the units has a first planar fluid communication chamber for receiving the flat fin. The flat fin has a first end provided with a first recess and a second end opposing to the first end and provided with a second recess. The first recess includes a circular opening and a cutout part. The second recess includes a circular opening and a cutout part. A clearance is defined between an edge of the first end and an inner periphery of the chamber, while another clearance is defined between an edge of the second end and the inner periphery. Consequently, a fluid can flow along the edge of the first end after being introduced into the first planar fluid communication chamber through the first recess.
摘要:
A target supply unit may include: a reservoir for storing a target material; a heater provided inside the reservoir for heating the target material stored in the reservoir; a heater power supply for supplying current to the heater; and a target outlet for outputting the target material stored inside the reservoir.
摘要:
A heat exchanger includes a plurality of plate-shaped heat exchanger units and a plurality of flat fins arranged on the units, respectively. Each of the units has a first planar fluid communication chamber for receiving the flat fin. The flat fin has a first end provided with a first recess and a second end opposing to the first end and provided with a second recess. The first recess includes a circular opening and a cutout part. The second recess includes a circular opening and a cutout part. A clearance is defined between an edge of the first end and an inner periphery of the chamber, while another clearance is defined between an edge of the second end and the inner periphery. Consequently, a fluid can flow along the edge of the first end after being introduced into the first planar fluid communication chamber through the first recess.