公开(公告)号：US06268919B1

公开(公告)日：2001-07-31

申请号：US09376151

申请日：1999-08-17

Applicant: Steven W. Meeks ,  Rusmin Kudinar ,  Ronny Soetarman

Inventor： Steven W. Meeks ,  Rusmin Kudinar ,  Ronny Soetarman

IPC: G01B2117

CPC classification number: G01B11/065 ,  G01B11/303

Abstract: A system and method for measuring lubricant thickness and degradation, carbon wear and carbon thickness, and surface roughness of thin film magnetic disks at angles that are not substantially Brewster's angle of the thin film (carbon) protective overcoat. A focused optical light whose polarization can be switched between P or S polarization is incident at an angle to the surface of the thin film magnetic disk. The range of angles can be from zero degrees from normal to near Brewster's angle and from an angle greater than Brewster's angle to 90 degrees. This range of angles allows the easy measurement of the change in lubricant thickness due to the interaction of the thin film head, the absolute lubricant thickness and degradation of the lubricant. It also allows the measurement of changes in carbon thickness and the absolute carbon thickness. The surface roughness can also be measured at any of the angles specified above. The present invention utilizes a first and second histogram representing disk properties (1) at two different time periods, (2) at two different locations on the disk, or (3) on two different disks.

Abstract translation: 用于测量薄膜（碳）保护外涂层基本上布鲁斯特角角度的薄膜磁盘的润滑剂厚度和降解，碳磨损和碳厚度以及表面粗糙度的系统和方法。 其偏振可以在P或S偏振之间切换的聚焦光学光以与薄膜磁盘的表面成一定角度入射。 角度范围可以从普通到布鲁斯特角附近的零度以及从布鲁斯特角度大到90度的角度。 这种角度范围可以容易地测量润滑剂厚度的变化，这是由于薄膜头的相互作用，绝对润滑剂厚度和润滑剂的劣化。 它还允许测量碳厚度和绝对碳厚度的变化。 表面粗糙度也可以在上述任何角度测量。 本发明利用在两个不同时间段（2）在盘上的两个不同位置或（3）在两个不同盘上的表示盘属性（1）的第一和第二直方图。

公开(公告)号：US6130749A

公开(公告)日：2000-10-10

申请号：US376152

申请日：1999-08-17

Applicant: Steven W. Meeks ,  Rusmin Kudinar ,  Ronny Soetarman

Inventor： Steven W. Meeks ,  Rusmin Kudinar ,  Ronny Soetarman

IPC: G01B11/06 ,  G01B11/30 ,  G01Q60/00

CPC classification number: G01B11/065 ,  G01B11/303

Abstract: A system and method for measuring lubricant thickness and degradation, carbon wear and carbon thickness, and surface roughness of thin film magnetic disks at angles that are not substantially Brewster's angle of the thin film (carbon) protective overcoat. A focused optical light whose polarization can be switched between P or S polarization is incident at an angle to the surface of the thin film magnetic disk. The range of angles can be from zero degrees from normal to near Brewster's angle and from an angle greater than Brewster's angle to 90 degrees. This range of angles allows the easy measurement of the change in lubricant thickness due to the interaction of the thin film head, the absolute lubricant thickness and degradation of the lubricant. It also allows the measurement of changes in carbon thickness and the absolute carbon thickness. The surface roughness can also be measured at any of the angles specified above. The present invention generates a histogram from the specular and scattered components of the reflected light, generates a centroid of the histogram and performs a symmetry operation to identify the characteristics of the thin film.

Abstract translation: 用于测量薄膜（碳）保护外涂层基本上布鲁斯特角角度的薄膜磁盘的润滑剂厚度和降解，碳磨损和碳厚度以及表面粗糙度的系统和方法。 其偏振可以在P或S偏振之间切换的聚焦光学光以与薄膜磁盘的表面成一定角度入射。 角度范围可以从普通到布鲁斯特角附近的零度以及从布鲁斯特角度大到90度的角度。 这种角度范围可以容易地测量润滑剂厚度的变化，这是由于薄膜头的相互作用，绝对润滑剂厚度和润滑剂的劣化。 它还允许测量碳厚度和绝对碳厚度的变化。 表面粗糙度也可以在上述任何角度测量。 本发明根据反射光的镜面和散射分量产生直方图，产生直方图的质心，并执行对称操作以识别薄膜的特性。

公开(公告)号：US6031615A

公开(公告)日：2000-02-29

申请号：US136897

申请日：1998-08-19

Applicant: Steven W. Meeks ,  Rusmin Kudinar ,  Ronny Soetarman

Inventor： Steven W. Meeks ,  Rusmin Kudinar ,  Ronny Soetarman

IPC: G01B11/06 ,  G01B11/30 ,  G01Q60/00 ,  G01B21/17

CPC classification number: G01B11/065 ,  G01B11/303

Abstract: A system and method for measuring lubricant thickness and degradation, carbon wear and carbon thickness, and surface roughness of thin film magnetic disks at angles that are not substantially Brewster's angle of the thin film (carbon) protective overcoat. A focused optical light whose polarization can be switched between P or S polarization is incident at an angle to the surface of the thin film magnetic disk. The range of angles can be from zero degrees from normal to near Brewster's angle and from an angle greater than Brewster's angle to 90 degrees. This range of angles allows the easy measurement of the change in lubricant thickness due to the interaction of the thin film head, the absolute lubricant thickness and degradation of the lubricant. It also allows the measurement of changes in carbon thickness and the absolute carbon thickness. The surface roughness can also be measured at any of the angles specified above.

Abstract translation: 用于测量薄膜（碳）保护外涂层基本上布鲁斯特角角度的薄膜磁盘的润滑剂厚度和降解，碳磨损和碳厚度以及表面粗糙度的系统和方法。 其偏振可以在P或S偏振之间切换的聚焦光学光以与薄膜磁盘的表面成一定角度入射。 角度范围可以从普通到布鲁斯特角附近的零度以及从布鲁斯特角度大到90度的角度。 这种角度范围可以容易地测量润滑剂厚度的变化，这是由于薄膜头的相互作用，绝对润滑剂厚度和润滑剂的劣化。 它还允许测量碳厚度和绝对碳厚度的变化。 表面粗糙度也可以在上述任何角度测量。

公开(公告)号：US20220187218A1

公开(公告)日：2022-06-16

申请号：US17685679

申请日：2022-03-03

Applicant: Steven W. Meeks ,  Hung Phi Nguyen ,  Alireza Shahdoost Moghaddam

Inventor： Steven W. Meeks ,  Hung Phi Nguyen ,  Alireza Shahdoost Moghaddam

IPC: G01N21/958 ,  G01N21/84 ,  G01N21/88 ,  G02B26/10

Abstract: An angle independent optical surface inspector capable of generating a light beam, directing the light beam to a sample, and de-scanning a reflected light beam that is reflected from the sample, thereby generating a first de-scanned light beam. The de-scanning is performed at approximately one focal length of a de-scanning lens from an irradiation location where the light beam irradiates the sample. The optical inspector also capable of focusing the first de-scanned light beam, thereby generating a focused light beam, and measuring the location of the focused light beam. The measuring of the location is performed at approximately one focal length of a focusing lens from the focusing lens. The incident angle of the light beam is within ten degrees of Brewster's angle. The focusing is performed by an achromatic lens.

公开(公告)号：US09163987B2

公开(公告)日：2015-10-20

申请号：US12861894

申请日：2010-08-24

Applicant: Roman Sappey ,  Steven W. Meeks

Inventor： Roman Sappey ,  Steven W. Meeks

IPC: F21V9/16 ,  G01J3/36 ,  G01J3/44 ,  G01N21/64 ,  G01N21/95

CPC classification number: G01J3/36 ,  G01J3/4412 ,  G01N21/6489 ,  G01N21/9501

Abstract: A system for defect detection and photoluminescence measurement of a sample may include a radiation source configured to target radiation to the sample. The system may also include an optics assembly positioned above the sample to receive a sample radiation. The system may also include a filter module configured to receive the sample radiation collected by the optics assembly. The filter module may separate the sample radiation collected by the optics assembly into a first radiation portion and a second radiation portion. The system may also include a defect detection module configured to receive the first radiation portion from the filter module. The system may further include a photoluminescence measurement module configured to receive the second radiation portion from the filter module. The defect detection module and the photoluminescence measurement module may be configured to receive the respective first radiation portion and the second radiation portion substantially simultaneously.

Abstract translation: 用于样品的缺陷检测和光致发光测量的系统可以包括被配置为将辐射靶向样品的辐射源。 该系统还可以包括位于样品上方以接收样品辐射的光学组件。 该系统还可以包括被配置为接收由光学组件收集的样品辐射的滤波器模块。 过滤器模块可以将由光学组件收集的样品辐射分离成第一辐射部分和第二辐射部分。 该系统还可以包括被配置为从过滤器模块接收第一辐射部分的缺陷检测模块。 该系统可以进一步包括光致发光测量模块，其被配置为从过滤器模块接收第二辐射部分。 缺陷检测模块和光致发光测量模块可以被配置为基本上同时地接收相应的第一辐射部分和第二辐射部分。

公开(公告)号：US08848181B1

公开(公告)日：2014-09-30

申请号：US13861383

申请日：2013-04-12

Applicant: Steven W. Meeks ,  Rusmin Kudinar ,  Hung P. Nguyen

Inventor： Steven W. Meeks ,  Rusmin Kudinar ,  Hung P. Nguyen

IPC: G01N21/00 ,  G01N21/958

CPC classification number: G01N21/958 ,  G01N21/896 ,  G01N2021/8967

Abstract: An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a first and second waveplate, a polarizing beam splitter, a first detector, a focusing lens, a blocker, and a second detector. The radiating source irradiates the first waveplate generating circularly polarized source beam that irradiates a first position of on the time varying beam reflector with a source beam. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a sample. Reflected radiation from a sample is directed to the second waveplate generating linearly polarized beam that irradiates the polarizing beam splitter which directs a portion of the reflected radiation to the first detector. Scattered radiation from the sample is directed by the focusing lens to the second detector. Contemporaneous measurements by the first and second detectors are compared to differentiate.

Abstract translation: 光学检查器包括辐射源，时变光束反射器，远心扫描透镜，第一和第二波片，偏振分束器，第一检测器，聚焦透镜，阻挡器和第二检测器。 辐射源照射产生圆偏振源光束的第一波片，其用源光束照射时变光束反射器上的第一位置。 时变光束反射器将源光束引导到远心扫描透镜，然后将远光扫描透镜引导到源样品。 来自样品的反射辐射被引导到产生线偏振光束的第二波片，该线偏振光束照射偏振分束器，其将一部分反射辐射引导到第一检测器。 来自样品的散射辐射由聚焦透镜引导到第二检测器。 将第一和第二检测器的同期测量值进行比较。

公开(公告)号：US08836935B1

公开(公告)日：2014-09-16

申请号：US13861382

申请日：2013-04-12

Applicant: Steven W. Meeks ,  Rusmin Kudinar ,  Hung P. Nguyen

Inventor： Steven W. Meeks ,  Rusmin Kudinar ,  Hung P. Nguyen

IPC: G01N21/00 ,  G01N21/958

CPC classification number: G01N21/958 ,  G01N2021/8967

Abstract: An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a blocker, a focusing lens, an aperture, and a detector. The radiating source irradiates a first position of on the time varying beam reflector with a source beam. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a transparent sample. A portion of the source beam travels through the transparent sample to another surface. The blocker blocks scattered radiation originating at the other surface. Scattered radiation originating from the transparent sample is not redirected by the blocker and is focused by the focusing lens to a first focal plane. The focused scattered radiation passes through the aperture before irradiating the detector. The detector output an intensity measurement of the scattered radiation that irradiates the detector.

Abstract translation: 光学检查器包括辐射源，时变光束反射器，远心扫描透镜，阻挡器，聚焦透镜，孔径和检测器。 辐射源用源光束照射时变光束反射器上的第一位置。 时变光束反射器将源光束引导到远心扫描透镜，然后再将源光束引导到透明样品。 源光束的一部分穿过透明样品到另一表面。 阻断剂阻止源于另一个表面的散射辐射。 来自透明样品的散射辐射不被阻断剂重新导向，并被聚焦透镜聚焦到第一焦平面。 聚焦的散射辐射在照射检测器之前穿过孔。 检测器输出照射检测器的散射辐射的强度测量值。

公开(公告)号：US08736831B2

公开(公告)日：2014-05-27

申请号：US13472421

申请日：2012-05-15

Applicant: Mahendra Prabhu Ramachandran ,  Steven W. Meeks ,  Romain Sappey

Inventor： Mahendra Prabhu Ramachandran ,  Steven W. Meeks ,  Romain Sappey

IPC: G01N21/00 ,  G01N21/95 ,  G01N21/956

CPC classification number: G01N21/9501 ,  G01N21/47 ,  G01N21/8422 ,  G01N21/956 ,  G01N21/95623 ,  G01N21/958

Abstract: Various embodiments for substrate inspection are provided.

Abstract translation: 提供了用于基板检查的各种实施例。

公开(公告)号：US08325334B2

公开(公告)日：2012-12-04

申请号：US12858669

申请日：2010-08-18

Applicant: Mahendra P. Ramachandran ,  Steven W. Meeks ,  Alireza S. Moghadam ,  Hung P. Nguyen

Inventor： Mahendra P. Ramachandran ,  Steven W. Meeks ,  Alireza S. Moghadam ,  Hung P. Nguyen

IPC: G01N21/00 ,  G01N21/55

CPC classification number: G01N21/9503

Abstract: An apparatus for inspecting an edge of a substrate. A light source produces a light beam, and a two-dimensional beam deflector receives the light beam and creates a semi-annular scanning beam. A first flared parabolic surface receives the semi-annular scanning beam and directs the semi-annular scanning beam onto the edge of the substrate, thereby creating specularly reflected light from the edge of the substrate. A second flared parabolic surface receives and directs the specularly reflected light to a detector. The detector receives the directed specularly reflected light and produces signals. An analyzer analyzes the signals and detects defects at the edge of the substrate.

Abstract translation: 一种用于检查基板边缘的装置。 光源产生光束，二维光束偏转器接收光束并产生半环形扫描光束。 第一扩张抛物面接收半环形扫描光束并将半环形扫描光束引导到衬底的边缘上，从而从衬底的边缘产生镜面反射的光。 第二个扩张的抛物线表面接收并将镜面反射光引导到检测器。 检测器接收定向镜面反射光并产生信号。 分析仪分析信号并检测基板边缘的缺陷。

公开(公告)号：US20110058174A1

公开(公告)日：2011-03-10

申请号：US12858669

申请日：2010-08-18

Applicant: Mahendra P. Ramachandran ,  Steven W. Meeks ,  Alireza S. Moghadam ,  Hung P. Nguyen

Inventor： Mahendra P. Ramachandran ,  Steven W. Meeks ,  Alireza S. Moghadam ,  Hung P. Nguyen

IPC: G01N21/55

CPC classification number: G01N21/9503

Abstract: An apparatus for inspecting an edge of a substrate. A light source produces a light beam, and a two-dimensional beam deflector receives the light beam and creates a semi-annular scanning beam. A first flared parabolic surface receives the semi-annular scanning beam and directs the semi-annular scanning beam onto the edge of the substrate, thereby creating specularly reflected light from the edge of the substrate. A second flared parabolic surface receives and directs the specularly reflected light to a detector. The detector receives the directed specularly reflected light and produces signals. An analyzer analyzes the signals and detects defects at the edge of the substrate.

Abstract translation: 一种用于检查基板边缘的装置。 光源产生光束，二维光束偏转器接收光束并产生半环形扫描光束。 第一扩张抛物面接收半环形扫描光束并将半环形扫描光束引导到衬底的边缘上，从而从衬底的边缘产生镜面反射的光。 第二个扩张的抛物线表面接收并将镜面反射光引导到检测器。 检测器接收定向镜面反射光并产生信号。 分析仪分析信号并检测基板边缘的缺陷。