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    Optical deflector and optical instrument using the same
    43.
    发明授权
    Optical deflector and optical instrument using the same 失效
    光学偏转器和光学仪器使用相同

    公开(公告)号：US07446920B2

    公开(公告)日：2008-11-04

    申请号：US11753066

    申请日：2007-05-24

    申请人： Takahisa Kato ,  Yukio Furukawa ,  Yasuhiro Shimada

    发明人： Takahisa Kato ,  Yukio Furukawa ,  Yasuhiro Shimada

    IPC分类号： G02B26/08

    CPC分类号： G02B26/085 ,  G02B26/127

    摘要： An optical deflector arranged to be relatively stably driven regardless of any environmental disturbance such as temperature, includes an oscillating system 160 having plural natural oscillation modes of different frequencies, a driving unit for driving the oscillating unit, and a drive control unit for supplying a driving signal to the driving unit, the oscillating system 160 including a first oscillator movable element 11 with a light deflecting element 22, a first torsion spring 12, a second oscillator movable element 13, a second torsion spring 12 and a supporting member 15, the optical deflector further including a distortion detecting element 25a and 25b for detecting mechanical deformation of the first and/or second torsion spring and a heat generating element 19, for stabilizing the frequencies of the natural oscillation modes and the state of scan to ensure stable sinusoidal-wave combined drive.

    摘要翻译： 包括具有多种不同频率的自然振荡模式的振荡系统160，用于驱动振荡单元的驱动单元和用于提供驱动的驱动控制单元的驱动控制单元 信号到驱动单元，振荡系统160包括具有光偏转元件22的第一振荡器可移动元件11，第一扭转弹簧12，第二振荡器可移动元件13，第二扭簧12和支撑构件15，光学 偏转器还包括用于检测第一和/或第二扭簧的机械变形的失真检测元件25a和25b以及用于稳定自然振荡模式的频率和扫描状态的发热元件19，以确保稳定的正弦曲线 波混合驱动。

    OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT USING THE SAME
    44.
    发明申请
    OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT USING THE SAME 失效
    光学偏光仪和使用该光学仪器的光学仪器

    公开(公告)号：US20080266632A1

    公开(公告)日：2008-10-30

    申请号：US12146561

    申请日：2008-06-26

    申请人： Takahisa Kato ,  Kazutoshi Torashima ,  Yukio Furukawa ,  Yasuhiro Shimada

    发明人： Takahisa Kato ,  Kazutoshi Torashima ,  Yukio Furukawa ,  Yasuhiro Shimada

    IPC分类号： G02B26/10

    CPC分类号： G02B26/105 ,  G02B26/085

    摘要： An optical deflector includes an oscillating system and a driving system for driving the oscillating system, the oscillating system including a first oscillator, a first torsion spring, a second oscillator, a second torsion spring and a supporting member, the first oscillator including a first movable element having a light deflecting element configured to deflect light, the second oscillator including a second movable element having a mass adjusting member configured to adjust a mass, wherein the first movable element is resiliently supported by the second movable element through the first torsion spring, for torsional oscillation about an oscillation axis, wherein the second movable element is resiliently supported by the supporting member through the second torsional spring, for torsional oscillation about the oscillation axis, and wherein the oscillating system has at least two natural oscillation modes having different frequencies, about the oscillation axis.

    摘要翻译： 光偏转器包括振荡系统和用于驱动振荡系统的驱动系统，所述振荡系统包括第一振荡器，第一扭转弹簧，第二振荡器，第二扭转弹簧和支撑部件，所述第一振荡器包括第一可动 具有配置成使光偏转的光偏转元件的第二振荡器包括具有构造成调节质量的质量调节构件的第二可移动元件，其中第一可移动元件由第二可移动元件通过第一扭转弹簧弹性地支撑， 围绕振荡轴的扭转振荡，其中第二可移动元件由支撑构件通过第二扭转弹簧弹性地支撑，用于围绕振荡轴线的扭转振荡，并且其中振荡系统具有至少两个具有不同频率的固有振荡模式，约为 振荡轴。

    Optical deflector and optical apparatus using the same
    45.
    发明授权
    Optical deflector and optical apparatus using the same 失效
    光偏转器及使用其的光学装置

    公开(公告)号：US07355774B2

    公开(公告)日：2008-04-08

    申请号：US11739968

    申请日：2007-04-25

    申请人： Takahisa Kato ,  Yukio Furukawa ,  Yasuhiro Shimada

    发明人： Takahisa Kato ,  Yukio Furukawa ,  Yasuhiro Shimada

    IPC分类号： G02B26/08

    CPC分类号： G02B26/0833

    摘要： An optical deflector comprises a vibration system and a driver. The vibration system includes a first oscillatory moving element having a reflecting surface, a second oscillatory moving element, and a support. The first and second oscillatory moving elements are resiliently supported respectively by first and second torsion springs to be able to torsionally vibrate about an oscillation axis with respect to the second oscillatory moving element and to the support. The vibration system has natural oscillation modes with different frequencies about the oscillation axis. The first and/or second torsion spring has torsion leaf portions torsionally deformed about torsion axes parallel to the oscillation axis. One end of each torsion leaf portion is coupled to an end of another through a connecting portion, and the other end is coupled to one of the first and the second oscillatory moving elements and the support directly or through a connecting portion.

    摘要翻译： 光学偏转器包括振动系统和驱动器。 振动系统包括具有反射表面的第一振荡运动元件，第二振荡运动元件和支撑件。 第一和第二振荡运动元件分别由第一和第二扭转弹簧弹性地支撑，以能够相对于第二振荡运动元件和支撑件围绕振荡轴线扭转振动。 振动系统具有与振荡轴不同频率的自然振荡模式。 第一扭转弹簧和/或第二扭转弹簧具有扭转叶片部分，该扭转叶片部分围绕平行于振动轴线的扭转轴线扭转变形。 每个扭转叶片部分的一端通过连接部分连接到另一端部的另一端，另一端直接或通过连接部分与第一和第二振荡运动元件和支撑件中的一个连接。

    Oscillation device, optical deflector using the oscillation device, and image display device and image forming apparatus using the optical deflector, and method of manufacturing the oscillation device
    46.
    发明授权
    Oscillation device, optical deflector using the oscillation device, and image display device and image forming apparatus using the optical deflector, and method of manufacturing the oscillation device 失效
    振荡装置，使用振荡装置的光偏转器，以及使用该光偏转器的图像显示装置和图像形成装置，以及制造振荡装置的方法

    公开(公告)号：US06924915B2

    公开(公告)日：2005-08-02

    申请号：US10640046

    申请日：2003-08-14

    申请人： Futoshi Hirose ,  Yasuhiro Shimada ,  Takahisa Kato

    发明人： Futoshi Hirose ,  Yasuhiro Shimada ,  Takahisa Kato

    IPC分类号： B81B3/00 ,  G02B26/08

    CPC分类号： B81B3/0018 ,  G02B26/085

    摘要： Disclosed is an oscillation device comprising: a first movable plate adapted to be oscillated about a first rotation axis; a first elastic supporting portion for oscillatively supporting the first movable plate; a supporting substrate for fixing the first elastic supporting portion; a first magnetic field generating portion arranged in a position remote from the first movable plate; a second movable plate adapted to be oscillated about a second rotation axis; and a second elastic supporting portion fixed to the first movable plate for oscillatively supporting the second movable plate, in which a first coil is provided in the first movable plate to be turned round the second movable plate, and in which a second magnetic field generating portion is provided in the second movable plate. The oscillation device is capable of: operating at a high speed with large displacement; enhancing an energy efficiency; and oscillating about two axes.

    摘要翻译： 公开了一种振荡装置，包括：适于围绕第一旋转轴线摆动的第一可动板; 用于摆动地支撑所述第一可动板的第一弹性支撑部分; 用于固定所述第一弹性支撑部的支撑基板; 布置在远离所述第一可动板的位置的第一磁场产生部分; 适于围绕第二旋转轴线摆动的第二活动板; 以及第二弹性支撑部，其固定到所述第一可动板，用于振荡地支撑所述第二可动板，其中，所述第一可动板中设置有第一线圈，以绕所述第二可移动板转动，并且其中第二磁场产生部分 设置在第二可移动板中。 振荡装置能够：大排量高速运转; 提高能源效率; 并围绕两个轴摆动。

    Optical deflector
    47.
    发明申请
    Optical deflector 失效
    光学偏转器

    公开(公告)号：US20050128609A1

    公开(公告)日：2005-06-16

    申请号：US11003455

    申请日：2004-12-06

    申请人： Yasuhiro Shimada ,  Takahisa Kato

    发明人： Yasuhiro Shimada ,  Takahisa Kato

    IPC分类号： B41J2/44 ,  B81B3/00 ,  G02B26/08 ,  G02B26/10 ,  H04N1/036 ,  H04N1/113

    CPC分类号： G02B26/085 ,  G02B26/0841

    摘要： Optical deflector includes a movable mirror, a gimbal for rotatably supporting the movable mirror about a first rotational axis with a first support portion, and a frame for rotatably supporting the gimbal with a second support portion about a second rotational axis that forms an angle relative to the first rotational axis. A moving comb electrode is provided on the gimbal and has a surface extending approximately parallel to a direction of a rotational movement of the gimbal, and a stationary comb electrode is disposed facing the surface of the moving comb electrode. An electrostatic driving unit displaces the gimbal by an electrostatic force acting between the moving comb electrode and the stationary comb electrode. An electromagnetic driving unit displaces the movable mirror by an electromagnetic force.

    摘要翻译： 光学偏转器包括可移动反射镜，用于以第一支撑部分围绕第一旋转轴线可旋转地支撑可移动反射镜的万向架和用于可旋转地支撑万向节的框架，其具有围绕第二旋转轴线的第二支撑部分，该第二旋转轴线相对于 第一旋转轴。 移动的梳状电极设置在万向节上并且具有大致平行于万向节的旋转运动的方向延伸的表面，并且固定的梳状电极被设置为面向移动梳状电极的表面。 静电驱动单元通过作用在移动梳状电极和固定梳状电极之间的静电力来移动万向节。 电磁驱动单元通过电磁力使可动镜移位。

    Microstructure array and a microlens array
    49.
    发明授权
    Microstructure array and a microlens array 失效
    微结构阵列和微透镜阵列

    公开(公告)号：US07294389B2

    公开(公告)日：2007-11-13

    申请号：US10930959

    申请日：2004-09-01

    申请人： Takayuki Teshima ,  Takayuki Yagi ,  Yasuhiro Shimada ,  Takashi Ushijima

    发明人： Takayuki Teshima ,  Takayuki Yagi ,  Yasuhiro Shimada ,  Takashi Ushijima

    IPC分类号： B32B3/00 ,  H01L23/48

    CPC分类号： G02B3/0025 ,  G02B3/0012 ,  G02B3/0031 ,  G02B3/0056 ,  Y10S428/901 ,  Y10T428/24917

    摘要： In a method of fabricating an array of microstructures, a substrate with an electrically-conductive portion is provided, an insulating mask layer is formed on the electrically-conductive portion of the substrate, a plurality of openings are formed in the insulating mask layer to expose the electrically-conductive portion, and a first plated or electrodeposited layer is deposited in the openings and on the insulating mask layer by electroplating or electrodeposition. A second plated layer is further formed on the first plated or electrodeposited layer and on the electrically-conductive portion by electroless plating to reduce a size distribution of microstructures over the array.

    摘要翻译： 在制造微结构阵列的方法中，提供具有导电部分的衬底，在衬底的导电部分上形成绝缘掩模层，在绝缘掩模层中形成多个开口以露出 导电部分和第一电镀或电沉积层通过电镀或电沉积沉积在开口中和绝缘掩模层上。 在第一镀层或电沉积层上和通过无电镀处理导电部分上进一步形成第二镀层，以减小阵列上微结构的尺寸分布。