BISBENZOXAZINONE COMPOUND
    43.
    发明申请
    BISBENZOXAZINONE COMPOUND 审中-公开
    BISBENZOXAZINONE化合物

    公开(公告)号:US20120252941A1

    公开(公告)日:2012-10-04

    申请号:US13512077

    申请日:2009-11-26

    CPC分类号: C07D265/16 C08K5/357

    摘要: It is an object of the present invention to provide a bisbenzoxazinone compound which does not substantially contain an alkali metal salt, has high purity and provides a resin composition having excellent resistance to hydrolysis when it is contained in a resin, a production method thereof, and a resin composition comprising the compound.The present invention is a bisbenzoxazinone compound represented by the following formula (4): (R1 and R2 are each independently a hydrogen atom, hydroxyl group, alkyl group having 1 to 3 carbon atoms, or the like), and has (i) a purity of 98% or more, (ii) a content of a compound represented by the following formula (7) of less than 0.15 wt %: (iii) a maximum peak in the measurement of the light reflectance at a visible range of its powder at 380 to 480 nm and a maximum light reflectance of 100 to 120%, (iv) a metal sodium content of less than 50 ppm and (v) a YI value of −10 to 10.

    摘要翻译: 本发明的目的是提供一种基本上不含碱金属盐的双苯并恶嗪酮化合物,其纯度高,并且在树脂中含有具有优异的耐水解性的树脂组合物,其制造方法和 包含该化合物的树脂组合物。 本发明是由下式(4)表示的双苯并恶嗪酮化合物:(R1和R2各自独立地为氢原子,羟基,具有1〜3个碳原子的烷基等),并且(i) 纯度为98%以上,(ii)由下式(7)表示的化合物的含量小于0.15重量%:(iii)在其粉末的可见光范围内的光反射率的测定中的最大峰值 380至480nm,最大光反射率为100至120%,(iv)金属钠含量小于50ppm,(v)YI值为-10至10。

    LIGHT-EMITTING DEVICE
    44.
    发明申请
    LIGHT-EMITTING DEVICE 审中-公开
    发光装置

    公开(公告)号:US20120161186A1

    公开(公告)日:2012-06-28

    申请号:US13393408

    申请日:2010-10-22

    IPC分类号: H01L33/50

    摘要: A light-emitting device includes a substrate mounted with a light-emitting element, and a frame disposed on the substrate. The frame includes a first frame portion disposed on the substrate and surrounding the light-emitting element, and having an inner wall surface substantially perpendicular to an upper surface of the substrate, an upper end of the inner wall surface being positioned at a level higher than that of an upper surface of the light-emitting element, and a second frame portion surrounding the inner wall surface of the first frame portion when viewed in a plan view, and having an inner periphery which is so shaped as to extend at an outward incline from a lower end of the inner periphery to an upper thereof. The light-emitting device includes a wavelength converter supported on the frame and opposed to the substrate with a gap.

    摘要翻译: 发光装置包括安装有发光元件的基板和设置在基板上的框架。 所述框架包括设置在所述基板上并围绕所述发光元件的第一框架部分,并且具有基本上垂直于所述基板的上表面的内壁表面,所述内壁表面的上端定位在高于 发光元件的上表面以及围绕第一框架部分的内壁表面的平面图中的第二框架部分,并且具有内周,该内周被成形为在向外倾斜 从内周的下端到其上部。 发光装置包括支撑在框架上并与间隙相对的基板的波长转换器。

    EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
    45.
    发明申请
    EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD 审中-公开
    曝光装置和装置制造方法

    公开(公告)号:US20100182583A1

    公开(公告)日:2010-07-22

    申请号:US12690503

    申请日:2010-01-20

    IPC分类号: G03B27/72 G03B27/32

    摘要: An exposure apparatus 1 comprises a collecting mirror 104 configured to collect emitted light from plasma 101, an illumination optical system which includes illumination system mirrors 201 to 204 and is configured to illuminate a reticle 301 light collected by the collecting mirror 104 using the second reflective optical element 201 to 204, and a projection optical system configured to project a pattern of the reticle 301 onto a wafer 308. At a predetermined temperature, a first wavelength where a reflectance of light entering the collecting mirror 104 or the illumination system mirrors 201 to 204 at a predetermined angle is peaked is shorter than a second wavelength where a reflectance of light in the projection optical system is peaked.

    摘要翻译: 曝光装置1包括被配置为收集来自等离子体101的发射光的收集镜104,照明光学系统,其包括照明系统镜201至204,并且被配置为使用第二反射光学照明收集反射镜104收集的标线片301的光 元件201至204,以及投影光学系统,其配置为将标线片301的图案投影到晶片308上。在预定温度下,入射到聚光镜104或照明系统的光的反射率的第一波长201至204 峰值的预定角度比投影光学系统中的光的反射率达到峰值的第二波长短。

    Exposure apparatus using blaze type diffraction grating to diffract EUV light and device manufacturing method using the exposure apparatus
    46.
    发明授权
    Exposure apparatus using blaze type diffraction grating to diffract EUV light and device manufacturing method using the exposure apparatus 有权
    使用火焰型衍射光栅的曝光装置衍射EUV光和使用曝光装置的装置制造方法

    公开(公告)号:US07436490B2

    公开(公告)日:2008-10-14

    申请号:US11103041

    申请日:2005-04-11

    申请人: Akira Miyake

    发明人: Akira Miyake

    IPC分类号: G03B27/72 G02B3/08

    摘要: This invention generally relates to an exposure apparatus and an exposure method using EUV light. In one preferred form of the present invention, the exposure apparatus is arranged to expose a substrate to a pattern of an original by use of extreme ultraviolet light, and it includes a blaze type diffraction grating disposed so that light from a plasma light source is incident thereon, and an optical system for directing extreme ultraviolet light from the blaze type diffraction grating to at least one of the original and the substrate.

    摘要翻译: 本发明一般涉及使用EUV光的曝光装置和曝光方法。 在本发明的一个优选形式中,曝光装置被布置为通过使用极紫外光将基板暴露于原稿的图案,并且其包括火焰型衍射光栅,其布置成使得来自等离子体光源的光入射 以及用于将来自火焰型衍射光栅的极紫外光引导到原始和基板中的至少一个的光学系统。

    MIRROR UNIT, METHOD OF PRODUCING THE SAME, AND EXPOSURE APPARATUS AND METHOD USING THE MIRROR UNIT
    47.
    发明申请
    MIRROR UNIT, METHOD OF PRODUCING THE SAME, AND EXPOSURE APPARATUS AND METHOD USING THE MIRROR UNIT 失效
    镜子单元,其制造方法和曝光装置以及使用镜子单元的方法

    公开(公告)号:US20080117512A1

    公开(公告)日:2008-05-22

    申请号:US11938439

    申请日:2007-11-12

    IPC分类号: G02B1/10

    摘要: Disclosed are a mirror unit and a method of producing the same. In one preferred embodiment, the mirror unit includes a mirror with a multilayered film formed on a substrate, the multilayered film having two materials periodically laminated in layers on the substrate, and a substrate deforming device for producing deformation of a shape of the substrate of the mirror, wherein, in the multilayered film, the number of laminated layers in a predetermined region of the substrate differs from that in another region of the substrate. A mirror unit producing method according to another preferred embodiment includes forming a multilayered film on a substrate, the multilayered film having two materials periodically laminated in layers on the substrate, providing substrate deforming means in association with the substrate, the deforming means having a function for producing deformation of the shape of the substrate, and partially removing the multilayered film.

    摘要翻译: 公开了镜单元及其制造方法。 在一个优选实施例中,反射镜单元包括具有在基板上形成的多层膜的反射镜,该多层膜具有在基板上周期层压的两种材料,以及用于产生基板的形状变形的基板变形装置 其特征在于,在所述多层膜中,所述基板的规定区域的层叠层数与所述基板的其他区域的层叠数不同。 根据另一优选实施例的镜单元制造方法包括在基板上形成多层膜,所述多层膜具有在基板上周期层压的两种材料,提供与基板相关联的基板变形装置,变形装置具有 产生基板形状的变形,并且部分地去除多层膜。

    LIGHT-EMITTING DEVICE
    49.
    发明申请
    LIGHT-EMITTING DEVICE 审中-公开
    发光装置

    公开(公告)号:US20080112165A1

    公开(公告)日:2008-05-15

    申请号:US11940769

    申请日:2007-11-15

    IPC分类号: F21V13/04 F21V7/04

    摘要: A lighting apparatus includes a substrate, a plurality of light-emitting chips and a light-emitting member. The substrate has a layer including a base material and a medium. The base material is formed of an inorganic material and includes a plurality of cells. The medium is provided in the cells and has a refractive index lower than that of the inorganic material. The light-emitting chips are made of a semiconductor material and mounted on the substrate. The light-emitting member includes a fluorescent material and is provided above the light-emitting chips.

    摘要翻译: 照明装置包括基板,多个发光芯片和发光部件。 基板具有包括基材和介质的层。 基材由无机材料形成,并且包括多个单元。 介质设置在电池中,折射率低于无机材料的折射率。 发光芯片由半导体材料制成并安装在基板上。 发光构件包括荧光材料,并且设置在发光芯片的上方。

    Spherical Active Carbon And Process For Producing The Same
    50.
    发明申请
    Spherical Active Carbon And Process For Producing The Same 审中-公开
    球形活性炭及其生产方法

    公开(公告)号:US20080063592A1

    公开(公告)日:2008-03-13

    申请号:US11597265

    申请日:2005-05-16

    IPC分类号: C01B31/08

    摘要: An active carbon produced from an infusible carbonaceous material as a raw material, which active carbon when used for prevention of automobile fuel evaporation, etc., would not cause any trouble attributed to dust generation, exhibiting reduced pressure loss; and a process for producing the same. There is provided a spherical active carbon produced from an infusible solid carbon material as a raw material, wherein providing that x represents an average particle diameter (mm) and y an MS hardness (%), when x is in the range of 0.5 to 20, y is ≧100×(1-0.8×1.45(0.3-x)). This spherical active carbon can be produced by a process comprising mixing a carbon material with a carbonizable binder; extruding the mixture into a strand form; carrying out rolling granulation so as to obtain a spherical form; rendering the same infusible under appropriate conditions corresponding to the particle size; and performing carbonization and thereafter activation under conditions appropriately restricting the contact with activation gas.

    摘要翻译: 从作为原料的不可渗入的碳质材料生成的活性碳,当用于防止汽车燃料蒸发等时使用的活性炭不会引起由于粉尘产生而引起的任何故障,表现出减小的压力损失; 及其制造方法。 提供由作为原料的不溶性固体碳材料制成的球状活性炭,其中x表示平均粒径(mm),y表示MS硬度(%),当x在0.5〜20的范围内时 ,y => 100×(1-0.8×1.4×(0.3-x))。 该球形活性炭可以通过包括将碳材料与可碳化粘合剂混合的方法来制备; 将混合物挤出成锭状; 进行轧制造粒,得到球形; 在与粒度对应的适当条件下使相同的不可渗透性; 进行碳酸化,然后在适当限制与活化气体接触的条件下进行活化。