公开(公告)号：US11981987B2

公开(公告)日：2024-05-14

申请号：US17510529

申请日：2021-10-26

Applicant: Universal Display Corporation

Inventor： Edwin van den Tillaart ,  Sven Pekelder ,  Mark Meuwese ,  William E. Quinn ,  Gregory McGraw ,  Gregg Kottas

IPC: C23C14/24 ,  C23C14/12 ,  C23C16/455 ,  C23C16/54 ,  H10K71/13 ,  H10K85/30

CPC classification number: C23C14/24 ,  C23C14/12 ,  C23C16/45517 ,  C23C16/45525 ,  C23C16/45563 ,  C23C16/45565 ,  C23C16/45574 ,  C23C16/45578 ,  C23C16/545 ,  H10K71/135 ,  H10K85/342

Abstract: A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.

公开(公告)号：US11778889B2

公开(公告)日：2023-10-03

申请号：US17361469

申请日：2021-06-29

Applicant: Universal Display Corporation

Inventor： Matthew King ,  Gregg Kottas ,  Igor Kozin ,  Gregory McGraw ,  William E. Quinn

IPC: H01L51/56 ,  B05B12/12 ,  H01L51/00 ,  H10K71/00 ,  H10K71/13

CPC classification number: H10K71/00 ,  B05B12/124 ,  H10K71/13

Abstract: Embodiments of the disclosed subject matter provide a device having a print head that includes a micronozzle array of depositors to deposit a material on a substrate. A reflective optical device may reflect a signal output by at least one optical sensor, and to reflect the signal from a surface of the substrate to the optical sensor. A processor may determine a distance between the optical sensor and the target surface of the substrate. The device may include one or more actuators coupled to the at least one print head to move the print head relative to an internal reference frame and adjust a position of the print head to the substrate. The sensor may be fixedly coupled with a mount to the internal reference frame. The print head may be configured to move independently of the optical sensor in at least one axis of linear or rotational motion.

公开(公告)号：US11591686B2

公开(公告)日：2023-02-28

申请号：US17082169

申请日：2020-10-28

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  William E. Quinn ,  Matthew King ,  Elliot H. Hartford, Jr. ,  Siddharth Harikrishna Mohan ,  Benjamin Swedlove ,  Gregg Kottas

IPC: C23C14/54 ,  C23C14/12 ,  C23C14/22 ,  B41J2/045 ,  C23C14/04 ,  H01L51/56 ,  H01L51/00 ,  B05D1/00

Abstract: Methods of modulating flow during vapor jet deposition of organic materials are provided. A method may include ejecting a vapor entrained in a delivery gas from a nozzle onto a substrate upon which the vapor condenses. A confinement gas may be provided that has a flow direction opposing a flow direction of the delivery gas ejected from the nozzle. A vacuum source may be provided that is adjacent to a delivery gas aperture of the nozzle. The method may include adjusting, by an actuator, a fly height separation between a deposition nozzle aperture of the nozzle and a deposition target.

公开(公告)号：US11588140B2

公开(公告)日：2023-02-21

申请号：US16245554

申请日：2019-01-11

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  William E. Quinn ,  Gregg Kottas ,  Matthew King ,  Benjamin Swedlove ,  Tomasz Trojacki

IPC: C23C16/455 ,  C23C16/44 ,  H01L51/56 ,  H01L51/00

Abstract: Devices for deposition of material via organic vapor jet printing (OVJP) and similar techniques are provided. The depositor includes delivery channels ending in delivery apertures, where the delivery channels are flared as they approach the delivery apertures, and/or have a trapezoidal shape. The depositors are suitable for fabricating OLEDs and OLED components and similar devices.

公开(公告)号：US11552159B2

公开(公告)日：2023-01-10

申请号：US16431813

申请日：2019-06-05

Applicant: Universal Display Corporation

Inventor： Xin Xu ,  Gregory McGraw ,  William E. Quinn ,  Gregg Kottas ,  Jason Paynter ,  Julia J. Brown

IPC: H01L27/32 ,  H01L51/00 ,  H01L51/56

Abstract: Embodiments of the disclosed subject matter provide a device having a substrate, and a plurality of unit areas of an organic light emitting diode (OLED) display disposed on the substrate. The unit areas may be repeating, area-filling subdivisions of the substrate that each have an anode and a cathode. The organic film may be disposed over portions of the device other than the unit areas. The device may include at least one pixel having a plurality of sub-pixels disposed within each of the plurality of unit areas. The cathode of at least one pixel of each of the plurality of unit areas may be a common cathode.

公开(公告)号：US20210254207A1

公开(公告)日：2021-08-19

申请号：US17306665

申请日：2021-05-03

Applicant: The Regents of the University of Michigan ,  Universal Display Corporation

Inventor： Stephen Forrest ,  Gregory McGraw ,  Siddharth Harikrishna Mohan ,  Diane L. Peters

IPC: C23C14/12 ,  C23C14/22 ,  C23C14/24

Abstract: A microfluidic device for use with a microfluidic delivery system, such as an organic vapor jet printing device, includes a glass layer that is directly bonded to a microfabricated die and a metal plate via a double anodic bond. The double anodic bond is formed by forming a first anodic bond at an interface of the microfabricated die and the glass layer, and forming a second anodic bond at an interface of the metal plate and the glass layer, where the second anodic bond is formed using a voltage that is lower than the voltage used to form the first anodic bond. The second anodic bond is formed with the polarity of the voltage reversed with respect to the glass layer and the formation of the first anodic bond. The metal plate includes attachment features that allow removal of the microfluidic device from a fixture.

公开(公告)号：US11021785B2

公开(公告)日：2021-06-01

申请号：US15841171

申请日：2017-12-13

Applicant: The Regents of the University of Michigan ,  Universal Display Corporation

Inventor： Stephen Forrest ,  Gregory McGraw ,  Siddharth Harikrishna Mohan ,  Diane L. Peters

IPC: C23C14/12 ,  C23C14/22 ,  C23C14/24

Abstract: A microfluidic device for use with a microfluidic delivery system, such as an organic vapor jet printing device, includes a glass layer that is directly bonded to a microfabricated die and a metal plate via a double anodic bond. The double anodic bond is formed by forming a first anodic bond at an interface of the microfabricated die and the glass layer, and forming a second anodic bond at an interface of the metal plate and the glass layer, where the second anodic bond is formed using a voltage that is lower than the voltage used to form the first anodic bond. The second anodic bond is formed with the polarity of the voltage reversed with respect to the glass layer and the formation of the first anodic bond. The metal plate includes attachment features that allow removal of the microfluidic device from a fixture.

公开(公告)号：US10916704B2

公开(公告)日：2021-02-09

申请号：US16292422

申请日：2019-03-05

Applicant: Universal Display Corporation

Inventor： Michael Hack ,  William E. Quinn ,  Gregory McGraw ,  William T. Mayweather, III ,  Julia J. Brown

IPC: H01L51/00 ,  C23C16/30 ,  H01L51/50 ,  H01L51/52

Abstract: Embodiments of the disclosed subject matter provide systems and methods of depositing a film on a selective area of a substrate. A first jet of a first material may be ejected from a first nozzle assembly of a jet head having a plurality of nozzle assemblies to form a first portion of a film deposition on the substrate. A second jet of a second material may be ejected from a second nozzle assembly of the plurality of nozzle assemblies, the second nozzle assembly being aligned with the first nozzle assembly parallel to a direction of motion between the plurality of nozzle assemblies and the substrate, and the second material being different than the first material. The second material may react with the first portion of the film deposition to form a composite film deposition on the substrate when using reactive gas precursors.

公开(公告)号：US10704144B2

公开(公告)日：2020-07-07

申请号：US15290101

申请日：2016-10-11

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  William E. Quinn ,  Gregg Kottas ,  Siddharth Harikrishna Mohan ,  Matthew King

IPC: C23C16/44 ,  C23C16/455 ,  C23C14/12 ,  H01L51/00 ,  C23C14/24 ,  B41J2/00

Abstract: Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.

公开(公告)号：US10654272B2

公开(公告)日：2020-05-19

申请号：US16243393

申请日：2019-01-09

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  Matthew King ,  William E. Quinn

IPC: B41J2/14 ,  B41J2/16 ,  H01L51/00 ,  B05B1/16 ,  H01L51/56

Abstract: Embodiments of the disclosed subject matter provide a micronozzle array formed from monolithic silicon. The micronozzle array may have a plurality of nozzles, where each nozzle of the plurality of nozzles including an integrated plug valve that allows flow from the nozzle to be attenuated separately from each other nozzle of the plurality of nozzles. Each of the plurality of nozzles may include a microchannel, formed from the monolithic silicon, having a first channel portion and a second channel portion, where the first channel portion is narrower than the second channel portion, and where the first channel portion forms an aperture of the nozzle that is configured to eject vapor from the microchannel. Each of the plurality of nozzles may include a stem, formed from the monolithic silicon that includes the integrated plug valve is suspended in the microchannel to attenuate the flow from the nozzle.