METHOD OF DETECTING A TOPOLOGY OF A REFLECTIVE SURFACE
    41.
    发明申请
    METHOD OF DETECTING A TOPOLOGY OF A REFLECTIVE SURFACE 有权
    检测反射表面的方法

    公开(公告)号:US20120182557A1

    公开(公告)日:2012-07-19

    申请号:US13356379

    申请日:2012-01-23

    IPC分类号: G01N21/55

    摘要: A method detects a topology of a reflective surface. The method includes providing an optical fiber positioned such that light emitted from the optical fiber is reflected by at least a portion of the reflective surface. The optical fiber and the portion of the reflective surface form an optical resonator having an optical resonance with a resonance lineshape. The method further includes emitting light from the optical fiber while the optical fiber is at a plurality of positions along the reflective surface. The light emitted from the optical fiber irradiates a corresponding plurality of portions of the reflective surface. The method further includes measuring a change of the resonance lineshape due to the irradiation of the plurality of portions of the reflective surface.

    摘要翻译: 一种方法检测反射表面的拓扑。 该方法包括提供光纤,其定位成使得从光纤发射的光被反射表面的至少一部分反射。 光纤和反射表面的部分形成具有谐振线形的光学共振的光学谐振器。 该方法还包括在光纤沿着反射表面处于多个位置时从光纤发射光。 从光纤发射的光照射反射表面的对应的多个部分。 该方法还包括测量由于反射表面的多个部分的照射引起的谐振线形变化。

    High-sensitivity fiber-compatible optical acoustic sensor
    44.
    发明授权
    High-sensitivity fiber-compatible optical acoustic sensor 有权
    高灵敏度光纤兼容光学声学传感器

    公开(公告)号:US07526148B2

    公开(公告)日:2009-04-28

    申请号:US11414506

    申请日:2006-04-28

    IPC分类号: G02B6/00 G01B9/02

    CPC分类号: G01H9/00 G01H9/004

    摘要: An acoustic sensor includes at least one photonic crystal structure having at least one optical resonance with a resonance frequency and a resonance lineshape. The acoustic sensor further includes a housing substantially surrounding the at least one photonic crystal structure and mechanically coupled to the at least one photonic crystal structure. At least one of the resonance frequency and the resonance lineshape is responsive to acoustic waves incident upon the housing.

    摘要翻译: 声传感器包括至少一个光子晶体结构,其具有至少一个具有谐振频率和谐振线形的光学谐振。 声学传感器还包括壳体,其基本上围绕所述至少一个光子晶体结构并且机械耦合到所述至少一个光子晶体结构。 谐振频率和谐振线形形状中的至少一个响应于入射到壳体上的声波。

    Atomic Force Microscope Using A Torsional Harmonic Cantilever
    45.
    发明申请
    Atomic Force Microscope Using A Torsional Harmonic Cantilever 有权
    原子力显微镜使用扭转谐波悬臂

    公开(公告)号:US20080041143A1

    公开(公告)日:2008-02-21

    申请号:US11877353

    申请日:2007-10-23

    IPC分类号: G01B5/28

    CPC分类号: G01Q60/38 G01Q60/34

    摘要: An atomic force microscope based apparatus for examining a sample includes a cantilever having a cantilever arm and a probe tip where the probe tip is offset laterally from a longitudinal axis of torsion of the cantilever arm, an oscillator that drives the cantilever into oscillation in a flexural mode to cause the probe tip to repeatedly interact with the sample where the tip-sample interaction of the laterally offset probe tip excites torsional motion of the cantilever, and a detection system that detects torsional motion of the cantilever in response to the tip-sample interaction.

    摘要翻译: 用于检查样品的基于原子力显微镜的装置包括悬臂,其具有悬臂和探针尖端,探针尖端从悬臂的扭转纵向轴向横向偏移,振荡器将悬臂驱动成弯曲的振荡 模式,使得探针尖端与样品重复相互作用,其中横向偏移探针尖端的尖端 - 样品相互作用激发悬臂的扭转运动,以及检测系统,其响应于尖端 - 样品相互作用检测悬臂的扭转运动 。

    Integrated optical MEMS devices
    46.
    发明授权
    Integrated optical MEMS devices 失效
    集成光学MEMS器件

    公开(公告)号:US07238621B2

    公开(公告)日:2007-07-03

    申请号:US11130904

    申请日:2005-05-17

    IPC分类号: H01L21/00

    CPC分类号: G02B26/0833

    摘要: A method for fabricating an optical device and micromechanical device, wherein both devices are monolithically-integrated with a substrate. The optical surfaces and micromechanical devices are each formed in an etch step that is well-suited for forming that device. In addition, the embodiments of the present invention enable the optical surface and micromechanical device to be fabricated irrespective of severe topography on the surface of the substrate.

    摘要翻译: 一种用于制造光学器件和微机械器件的方法,其中两个器件与衬底单片集成。 光学表面和微机械装置各自以适合于形成该装置的蚀刻步骤形成。 此外,本发明的实施例使得能够制造光学表面和微机械装置,而与基板表面上的严重形貌无关。

    Phased array gratings and tunable lasers using same

    公开(公告)号:US07042920B2

    公开(公告)日:2006-05-09

    申请号:US10384180

    申请日:2003-03-06

    IPC分类号: H01S3/08

    摘要: A tunable laser comprises multiple reflectors defining a resonant cavity, and an optical gain medium positioned within the resonant cavity. One of the reflectors is a programmable micromirror array that acts as a tunable blazed diffraction grating providing continuous tuning of a single resonant mode over a wavelength gain region of the gain medium. The continuous tuning is provided by altering the micromirror array to shift, in synchrony, a resonant mode wavelength of the resonant cavity and a reflection filtering peak of the array. The array comprises a plurality of micromirror elements that can be controlled to independently move in a direction perpendicular to the plane of the array. In one embodiment, each element has a V-shaped movable mirror. In another embodiment, each element has a flat or slightly-tilted horizontal mirror and a vertical or nearly-vertical mirror orthogonal to the horizontal mirror producing a corner-cube-like reflection.

    Reconfigurable wavelength multiplexers and filters employing micromirror array in a gires-tournois interferometer
    48.
    发明授权
    Reconfigurable wavelength multiplexers and filters employing micromirror array in a gires-tournois interferometer 失效
    可重配置的波长多路复用器和采用微镜阵列的发光二极管干涉仪中的滤光片

    公开(公告)号:US06804429B2

    公开(公告)日:2004-10-12

    申请号:US10072639

    申请日:2002-02-08

    IPC分类号: G02B6293

    摘要: A reconfigurable optical device capable of filtering, multiplexing, and spectrometry, among other functions. The device has an array of micromirrors disposed under a floating reflector that is partially reflecting. The floating reflector is spaced apart from the micromirrors a certain distance. The micromirrors are each capable of independent vertical motion, and, optionally, tilting motion. In use, light is projected at an oblique angle into the space between the micromirrors. Each reflection from the floating reflector produces an emergent beam from the floating reflector. The emergent light beams are combined with a lens. As a direct result of this structure, different wavelengths are focused to different points in the focal plane of the lens. The focal point positions of the different wavelengths can be moved by manipulating the micromirrors. This allows for reconfigurable filtering, spectrometry, and multiplexing, among other applications.

    摘要翻译: 能够进行滤波,复用和光谱测定的可重构光学器件等功能。 该装置具有设置在部分反射的浮动反射器下方的微镜阵列。 浮动反射器与微镜距离一定距离。 微镜每个都能够独立的垂直运动,以及可选的倾斜运动。 在使用中,光以倾斜角投射到微镜之间的空间中。 来自浮动反射器的每个反射从浮动反射器产生出射光束。 出现的光束与透镜组合。 作为这种结构的直接结果,不同的波长被聚焦到透镜的焦平面中的不同点。 通过操纵微镜可以移动不同波长的焦点位置。 这允许可重构滤波,光谱测量和复用以及其他应用。