公开(公告)号：US06575739B1

公开(公告)日：2003-06-10

申请号：US10123723

申请日：2002-04-15

申请人： Woo Sik Yoo

发明人： Woo Sik Yoo

IPC分类号： F27D300

CPC分类号： H01L21/67115 ,  C30B31/14

摘要： A processing system including a chamber defining an interior cavity having a processing tube assembly arranged within the interior cavity. A heating assembly moveable relative to the processing tube assembly from a first position where said processing tube assembly is disposed within the heating assembly and a second position where the processing tube assembly is exposed to an internal environment within the interior cavity of the chamber.

摘要翻译： 一种处理系统，包括限定内部空腔的室，其具有布置在所述内部空腔内的处理管组件。 加热组件可相对于处理管组件从第一位置移动，其中所述处理管组件设置在加热组件内，第二位置处于处理管组件暴露于室内腔内的内部环境中。

公开(公告)号：US06568899B1

公开(公告)日：2003-05-27

申请号：US09451678

申请日：1999-11-30

申请人： Hiromitsu Kuribayashi ,  Woo Sik Yoo

发明人： Hiromitsu Kuribayashi ,  Woo Sik Yoo

IPC分类号： B65G4907

CPC分类号： H01L21/67766 ,  Y10S414/135 ,  Y10S414/139

摘要： A wafer processing system occupies minimal floor space by using vertically mounted modules such as reactors, load locks, and cooling stations. Further saving in floor space is achieved by using a loading station which employs rotational motion to move a wafer carrier into a load lock. The wafer processing system includes a robot having extension, rotational, and vertical motion for accessing vertically mounted modules. The robot is internally cooled and has a heat resistant end-effector, making the robot compatible with high temperature semiconductor processing.

摘要翻译： 通过使用垂直安装的模块（如反应堆，装载锁和冷却站），晶圆处理系统占地面积最小。 通过使用采用旋转运动的装载站将晶片载体移动到装载锁中，可以进一步节省占地面积。 晶片处理系统包括具有用于访问垂直安装的模块的延伸，旋转和垂直运动的机器人。 机器人内部冷却并具有耐热的末端执行器，使机器人与高温半导体加工兼容。

公开(公告)号：US06379073B1

公开(公告)日：2002-04-30

申请号：US09541865

申请日：2000-04-03

申请人： Woo Sik Yoo ,  Hiromitsu Kuribayashi

发明人： Woo Sik Yoo ,  Hiromitsu Kuribayashi

IPC分类号： F16C1106

CPC分类号： F16M11/14 ,  F16C11/106 ,  F16M11/2078 ,  F16M13/027 ,  F16M2200/065 ,  Y10T403/22 ,  Y10T403/32311

摘要： A positionable arm composed of multiple member segments connected by an adjustable joint which may be fixedly positioned and repeatedly repositioned. The first member includes an end portion defining a first connector opening and an inner surface defining a chamber. A slideable piston provided in the first member includes a first end and a second end, the first end being adjacent the chamber and creating a seal along the inner surface of the first member. A rotatable connector is received in the first member between the second end of said piston and the end portion of the first member, and a second member is attached to the rotatable connector. To position the arm, a pressurized fluid source supplies compressed air to the chamber, which presses the piston against the rotatable connector, fixedly clamping the connector between the piston and the end portion of the first chamber.

摘要翻译： 由可调节接头连接的多个构件段构成的可定位臂，其可固定地定位并重复定位。 第一构件包括限定第一连接器开口和限定腔室的内表面的端部。 设置在第一构件中的可滑动活塞包括第一端和第二端，第一端邻近室并且沿着第一构件的内表面产生密封。 可旋转连接器容纳在第一构件中，位于活塞的第二端和第一构件的端部之间，第二构件附接到可旋转的连接器。 为了定位臂，加压流体源将压缩空气供应到室，该室将活塞压靠在可旋转连接器上，将连接器固定地夹持在活塞和第一室的端部之间。

公开(公告)号：US06303906B1

公开(公告)日：2001-10-16

申请号：US09451494

申请日：1999-11-30

申请人： Woo Sik Yoo

发明人： Woo Sik Yoo

IPC分类号： F27B514

CPC分类号： H01L21/67115 ,  H01L21/67109

摘要： A heating apparatus and method for isothermally distributing a temperature across the surface of a semiconductor device during processing. Specifically, a chamber is provided defining a cavity, which is configured to receive a single semiconductor wafer. A plurality of resistive heating elements are provided and advantageously arranged in the cavity. The heating elements are disposed across the chamber and are aligned in close proximity to one another so as to provide an even heating temperature distribution. In accordance with the present invention, the cavity is divided into heating zones. The resistive heating elements are each individually assigned to a zone and are independently controllable. By individually varying the amount of energy emanating from each resistive heating element, an isothermal temperature distribution may be generated across each zone.

摘要翻译： 一种加热装置和方法，用于在加工过程中等温分布半导体器件的表面温度。 具体地，提供限定空腔的室，其被配置为容纳单个半导体晶片。 提供多个电阻加热元件并且有利地布置在空腔中。 加热元件跨过腔室设置并且彼此靠近地对准，以便提供均匀的加热温度分布。 根据本发明，空腔被分成加热区。 电阻加热元件分别被分配到一个区域并且是独立可控的。 通过单独改变从每个电阻加热元件发出的能量的量，可以在每个区域之间产生等温温度分布。

公开(公告)号：US06212088B1

公开(公告)日：2001-04-03

申请号：US09451493

申请日：1999-11-30

申请人： Woo Sik Yoo

发明人： Woo Sik Yoo

IPC分类号： H02M100

CPC分类号： H02M7/064 ,  H02J1/00

摘要： An adapter used in conjunction with voltage modules to provide multiple and variable DC output voltages. The adapter may include a circuit for stepping down an AC input voltage to lower AC output voltages. A voltage module is provided having an interface bus, configured to be coupleable to a distribution bus on the voltage adapter. Preferably, the voltage module includes AC-DC conversion circuitry, such that the AC output voltages received from the adapter may be converted to DC voltages. Once the adapter and voltage module are coupled together, the voltage module allows the user to select among the multiple DC output voltages provided. In some embodiments, the adapter includes additional circuitry for converting the stepped-down AC voltages into DC output voltages. Additional separate voltage modules may be coupled to the first voltage module, in series, to form a modular stack of voltage modules. Like the first voltage module, the second voltage module may have a selectable output voltage, as well.

摘要翻译： 与电压模块结合使用的适配器，可提供多个可变直流输出电压。 适配器可以包括用于降低AC输入电压以降低AC输出电压的电路。 提供具有接口总线的电压模块，其被配置为可与电压适配器上的分配总线耦合。 优选地，电压模块包括AC-DC转换电路，使得从适配器接收的AC输出电压可以被转换为DC电压。 一旦适配器和电压模块耦合在一起，电压模块允许用户在提供的多个DC输出电压之间进行选择。 在一些实施例中，适配器包括用于将降压AC电压转换成DC输出电压的附加电路。 额外的单独的电压模块可以串联耦合到第一电压模块，以形成模块化的电压模块组。 与第一电压模块一样，第二电压模块也可以具有可选择的输出电压。

公开(公告)号：US07816152B2

公开(公告)日：2010-10-19

申请号：US11734195

申请日：2007-04-11

申请人： Woo Sik Yoo ,  Kitaek Kang

发明人： Woo Sik Yoo ,  Kitaek Kang

IPC分类号： H01L21/00

CPC分类号： H01L22/14 ,  G01N21/718 ,  G01R31/2656

摘要： Methods and systems for in situ process control, monitoring, optimization and fabrication of devices and components on semiconductor and related material substrates includes a light illumination system and electrical probe circuitry. The light illumination system may include a light source and detectors to measure optical properties of the in situ substrate while the electrical probe circuitry causes one or more process steps due to applied levels of voltage or current signals. The electrical probe circuitry may measure changes in electrical properties of the substrate due to the light illumination, the applied voltages and/or currents or other processes. The in situ process may be controlled on the basis of the optical and electrical measurements.

摘要翻译： 用于半导体和相关材料基板上的器件和部件的原位过程控制，监测，优化和制造的方法和系统包括光照系统和电探针电路。 光照射系统可以包括光源和用于测量原位衬底的光学性质的检测器，而电探针电路由于施加的电压或电流信号的电平而导致一个或多个处理步骤。 电探针电路可以测量由于光照射，施加的电压和/或电流或其它过程而导致的衬底的电性能的变化。 可以基于光学和电学测量来控制原位过程。

公开(公告)号：US07564547B2

公开(公告)日：2009-07-21

申请号：US11268148

申请日：2005-11-07

申请人： Woo Sik Yoo

发明人： Woo Sik Yoo

IPC分类号： G01J3/44

CPC分类号： G01J3/02 ,  G01J3/0218 ,  G01J3/0229 ,  G01J3/0237 ,  G01J3/0262 ,  G01J3/2803 ,  G01J3/32 ,  G01J3/36 ,  G01J3/44 ,  G01N21/65

摘要： Systems and techniques for improved spectroscopy. In some embodiments, mechanical and/or optical zoom mechanisms may be provided for monochromator systems. For example, movable detector systems allow a detector to be positioned with respect to a dispersive element in order to obtain a first resolution. The detector systems may then allow the detector to be positioned with respect to a dispersive element to obtain a second different resolution. In some embodiments, spectroscopy of a first sample region may be performed using a plurality of excitation wavelengths. Multiple detectors may be positioned to receive light associated with different ones of the plurality of excitation wavelengths.

摘要翻译： 改进光谱学的系统和技术。 在一些实施例中，可以为单色器系统提供机械和/或光学变焦机构。 例如，可移动检测器系统允许检测器相对于分散元件定位，以便获得第一分辨率。 检测器系统然后可以允许检测器相对于分散元件定位以获得第二不同的分辨率。 在一些实施例中，可以使用多个激发波长来执行第一样本区域的光谱。 多个检测器可以被定位成接收与多个激发波长中的不同激发波长相关联的光。

公开(公告)号：US20080192250A1

公开(公告)日：2008-08-14

申请号：US11689419

申请日：2007-03-21

申请人： Woo Sik Yoo ,  Kitaek Kang

发明人： Woo Sik Yoo ,  Kitaek Kang

IPC分类号： G01J3/28 ,  H01S3/10

CPC分类号： G01N21/718 ,  B23K26/0622 ,  B23K26/082 ,  B23K26/40 ,  B23K2103/50 ,  G01N2021/1782 ,  G01N2021/8416 ,  H01L21/268

摘要： Methods and systems for control and monitoring processing of semiconductor materials with a focused laser beam. Laser light may be focused on a sample to excite optical emission at the sample surface during processing, which may include laser processing. Optical emission spectra produced may be analyzed for various properties effectively during the process. For example, process effects such as chemical composition analysis, species concentration, depth profiling, homogeneity characterization and mapping, purity, and reactivity may be monitored by optical spectral analysis. The wavelength may be selected to be appropriate for the process effect chosen.

摘要翻译： 用聚焦激光束控制和监测半导体材料的方法和系统。 激光可以聚焦在样品上以在处理期间激发样品表面的光发射，其可以包括激光加工。 可以在该过程中有效地分析所产生的光发射光谱的各种性质。 例如，可以通过光谱分析来监测诸如化学成分分析，物质浓度，深度分布，均匀性表征和测绘，纯度和反应性的过程效应。 可以选择波长适合于所选择的处理效果。

公开(公告)号：US07397561B2

公开(公告)日：2008-07-08

申请号：US11505661

申请日：2006-08-16

申请人： Woo Sik Yoo

发明人： Woo Sik Yoo

IPC分类号： G01J3/36 ,  G01J3/44 ,  G01N21/63 ,  G01N21/65

CPC分类号： G01J3/02 ,  G01J3/0218 ,  G01J3/0229 ,  G01J3/0237 ,  G01J3/0262 ,  G01J3/0291 ,  G01J3/10 ,  G01J3/2803 ,  G01J3/32 ,  G01J3/36 ,  G01J3/44 ,  G01N21/65

摘要： Systems and techniques for improved spectroscopy. In some embodiments, mechanical and/or optical zoom mechanisms may be provided for monochromator systems. For example, movable detector systems allow a detector to be positioned with respect to a dispersive element in order to obtain a first resolution. The detector systems may then allow the detector to be positioned with respect to a dispersive element to obtain a second different resolution. In some embodiments, spectroscopy of a first sample region may be performed using a plurality of excitation wavelengths. Multiple detectors may be positioned to receive light associated with different ones of the plurality of excitation wavelengths.

摘要翻译： 改进光谱学的系统和技术。 在一些实施例中，可以为单色器系统提供机械和/或光学变焦机构。 例如，可移动检测器系统允许检测器相对于分散元件定位，以便获得第一分辨率。 检测器系统然后可以允许检测器相对于分散元件定位以获得第二不同的分辨率。 在一些实施例中，可以使用多个激发波长来执行第一样本区域的光谱。 多个检测器可以被定位成接收与多个激发波长中的不同激发波长相关联的光。

公开(公告)号：US20080132045A1

公开(公告)日：2008-06-05

申请号：US11741300

申请日：2007-04-27

申请人： Woo Sik Yoo

发明人： Woo Sik Yoo

IPC分类号： H01L21/20 ,  H01L21/4763 ,  H01L21/31 ,  C23C16/00

CPC分类号： H01L21/31608 ,  C23C16/56 ,  H01L21/02164 ,  H01L21/0231 ,  H01L21/02348 ,  H01L21/02354 ,  H01L21/28185 ,  H01L21/28194 ,  H01L21/28211 ,  H01L21/31662 ,  H01L21/67115

摘要： A metallic, semiconductor, dielectric or oxide layer, such as a thin gate oxide, is formed by supplying a wafer in a processing chamber with thermal energy to heat the wafer and light energy, such as laser light at a selected wavelength, to improve the quality of the resulting layer. The laser light may be focused and/or scanned to control the depth and spatial extent of laser processing.

摘要翻译： 通过在处理室中提供具有热能的晶片以加热晶片和诸如选定波长的激光的光能来形成金属，半导体，电介质或氧化物层，例如薄栅极氧化物，以改善 所得层的质量。 激光可以被聚焦和/或扫描以控制激光加工的深度和空间范围。