公开(公告)号：US06597261B2

公开(公告)日：2003-07-22

申请号：US09819764

申请日：2001-03-29

申请人： Jun Tsutsumi ,  Shogo Inoue ,  Takashi Matsuda ,  Osamu Ikata

发明人： Jun Tsutsumi ,  Shogo Inoue ,  Takashi Matsuda ,  Osamu Ikata

IPC分类号： H03H964

CPC分类号： H03H9/14552 ,  H03H9/6483

摘要： A surface acoustic wave filter has, on a piezoelectric substrate, surface acoustic wave resonators each composed of an interdigital transducer and reflectors disposed on both sides of the interdigital transducer. The surface acoustic wave resonators are arranged in series arms and in parallel arms to be connected in a ladder form. At least one of the surface acoustic wave resonators is replaced with an interdigital transducer that does not involve resonance in a propagation direction of a surface acoustic wave.

摘要翻译： 表面声波滤波器在压电基板上具有各自由叉指换能器和布置在叉指式换能器两侧的反射器构成的表面声波谐振器。 表面声波谐振器以串联臂和并联臂布置成梯形连接。 表面声波谐振器中的至少一个被替换为不涉及在声表面波的传播方向上的共振的叉指式换能器。

公开(公告)号：US07067956B2

公开(公告)日：2006-06-27

申请号：US10653213

申请日：2003-09-03

申请人： Masahiko Imai ,  Michio Miura ,  Takashi Matsuda ,  Masanori Ueda ,  Osamu Ikata

发明人： Masahiko Imai ,  Michio Miura ,  Takashi Matsuda ,  Masanori Ueda ,  Osamu Ikata

IPC分类号： H03H9/25

CPC分类号： H03H3/10 ,  H03H9/02574 ,  H03H9/02622 ,  H03H9/02834 ,  H03H9/6483

摘要： A surface acoustic wave device includes a piezoelectric substrate on which resonators having comb-like electrodes are formed; and a silicon substrate that is directly bonded to the piezoelectric substrate and is less expansive than the piezoelectric substrate, a cavity being formed in the silicon substrate and being located below at least one of the resonators.

摘要翻译： 声表面波器件包括其上形成有梳状电极的谐振器的压电基片; 以及直接接合到所述压电基板并且比所述压电基板更不膨胀的硅基板，在所述硅基板中形成有位于所述谐振器中的至少一个谐振器的空腔。

公开(公告)号：US06570471B2

公开(公告)日：2003-05-27

申请号：US09915550

申请日：2001-07-27

申请人： Shogo Inoue ,  Jun Tsutsumi ,  Takashi Matsuda ,  Osamu Ikata

发明人： Shogo Inoue ,  Jun Tsutsumi ,  Takashi Matsuda ,  Osamu Ikata

IPC分类号： H03H964

CPC分类号： H03H9/14505 ,  H03H9/14526 ,  H03H9/6423 ,  H03H9/6483

摘要： A surface acoustic wave filter includes a piezoelectric substrate having formed thereon plural surface acoustic wave resonators electrically connected in a ladder form for exciting a surface acoustic wave, wherein each of the surface acoustic wave resonators is composed of an interdigital transducer and reflectors arranged closely on both sides of the transducer in a direction parallel to a propagation direction of the excited surface acoustic wave; the interdigital transducer of at least one of the surface acoustic wave resonators is composed of a prescribed number of pairs of comb form electrodes; and the surface acoustic wave excited by the pairs of comb form electrodes contains two kinds of surface acoustic waves having phases that are different from each other by 180°.

摘要翻译： 表面声波滤波器包括：压电基板，其上形成有以梯形电连接以激励表面声波的多个声表面波谐振器，其中每个声表面波谐振器由交叉指型换能器和紧密配置在两者上的反射器组成 换能器的侧面在平行于被激励表面声波的传播方向的方向上; 至少一个声表面波谐振器的叉指换能器由规定数量的梳形电极对组成; 并且由梳形电极对激发的表面声波包含具有彼此相差180°的相位的两种表面声波。

公开(公告)号：US06466108B2

公开(公告)日：2002-10-15

申请号：US09771877

申请日：2001-01-30

申请人： Takashi Matsuda ,  Jun Tsutsumi ,  Shogo Inoue ,  Osamu Ikata

发明人： Takashi Matsuda ,  Jun Tsutsumi ,  Shogo Inoue ,  Osamu Ikata

IPC分类号： H03H964

CPC分类号： H03H9/14582 ,  H03H9/14552 ,  H03H9/6423 ,  H03H9/6483

摘要： A surface acoustic wave resonator includes a piezoelectric substrate having formed thereon a interdigital transducer part comprising plural electrode fingers having a period pi that is substantially equal to a wavelength of a surface acoustic wave to be excited, and at least one reflector arranged in the vicinity of the interdigital transducer part to reflect the surface acoustic wave excited by the interdigital transducer part in a direction parallel to a propagation direction of the surface acoustic wave. The interdigital transducer part has three or more electrode fingers within the period pi, and the reflector has plural gratings having a period pr that is equal to a half of a wavelength of a surface acoustic wave propagating in the reflector.

摘要翻译： 表面声波谐振器包括：压电基板，其上形成有叉指式换能器部分，其包括多个电极指，所述多个电极指具有基本上等于待激励的表面声波的波长的周期pi，以及布置在 叉指换能器部分，以反射由指数变换器部分在与声表面波的传播方向平行的方向上激发的表面声波。 叉指换能器部分在周期pi内具有三个或更多个电极指，并且反射器具有多个光栅，其周期pr等于在反射器中传播的声表面波的波长的一半。

公开(公告)号：US20060181524A1

公开(公告)日：2006-08-17

申请号：US11401281

申请日：2006-04-11

申请人： Fumihiko Nakazawa ,  Satoshi Sano ,  Yoshio Satoh ,  Takashi Matsuda

发明人： Fumihiko Nakazawa ,  Satoshi Sano ,  Yoshio Satoh ,  Takashi Matsuda

IPC分类号： G09G5/00

摘要： Surface acoustic waves are transmitted from a respective plurality of excitation elements to a non-piezoelectric substrate, and the surface acoustic waves propagating in the non-piezoelectric substrate are received by a respective receiving elements, thus a position of an object in contact with the non-piezoelectric substrate is detected based on received results in the receiving elements. An indicated direction is detected based on a reception level of surface acoustic waves in the receiving elements. A direction of a vector starting at the center of a range (contact range) in which a reception level is not higher than a predetermined level and ending at a position obtained based on the reception level is detected as a direction indicated by a user. The indicated direction can be detected even when the object stays at a position.

摘要翻译： 表面声波从相应的多个激励元件传递到非压电基片，并且在非压电基片中传播的表面声波由相应的接收元件接收，因此物体与非压电基片接触的位置 基于接收元件中的接收结果检测压电基板。 基于接收元件中的表面声波的接收电平来检测指示的方向。 作为用户指示的方向，检测在接收电平不高于预定电平并在基于接收电平获得的位置结束的范围（接触范围）的中心开始的矢量的方向。 即使对象停留在某个位置，也可以检测到指示的方向。

公开(公告)号：US20060181523A1

公开(公告)日：2006-08-17

申请号：US11401280

申请日：2006-04-11

申请人： Fumihiko Nakazawa ,  Satoshi Sano ,  Yoshio Satoh ,  Takashi Matsuda

发明人： Fumihiko Nakazawa ,  Satoshi Sano ,  Yoshio Satoh ,  Takashi Matsuda

IPC分类号： G09G5/00

CPC分类号： G06F3/0436

摘要： A plurality of excitation elements are disposed on two facing sides of a quadrilateral detection range in a non-piezoelectric substrate, and a plurality of receiving elements are disposed on the other two sides of the detection range so as to face the excitation elements respectively. Surface acoustic waves are transmitted from the respective plurality of excitation elements in two diagonal directions of the detection range respectively, and the surface acoustic waves from the two diagonal directions are received by the respective receiving elements, so that a position of an object in contact with the substrate is detected based on received results in the receiving elements.

摘要翻译： 多个激励元件设置在非压电基板中的四边形检测范围的两个相对侧上，并且多个接收元件分别设置在检测范围的另外两侧，以分别面对激励元件。 表面声波分别从检测范围的两个对角线方向从相应的多个激励元件发射，并且来自两个对角线方向的表面声波由各个接收元件接收，使得物体与 基于接收元件中的接收结果来检测基板。

公开(公告)号：US06756973B2

公开(公告)日：2004-06-29

申请号：US09866848

申请日：2001-05-30

申请人： Satoshi Sano ,  Fumihiko Nakazawa ,  Takashi Matsuda ,  Yoshio Satoh ,  Takashi Katsuki ,  Yuji Takahashi

发明人： Satoshi Sano ,  Fumihiko Nakazawa ,  Takashi Matsuda ,  Yoshio Satoh ,  Takashi Katsuki ,  Yuji Takahashi

IPC分类号： G09G500

CPC分类号： G06F3/0436

摘要： Surface acoustic waves are excited in two diagonal directions from each of IDTs (excitation elements) disposed on the upper side and the lower side of a non-piezoelectric substrate, and the surface acoustic waves propagated on a detection region are received by IDTs (receiving elements) disposed on the left side and right side of the non-piezoelectric substrate so that a position of an object touching the non-piezoelectric substrate is detected based on the reception results. In each IDT, comb-like electrode fingers are joined to two facing electrode bases (signal electrode and ground electrode) in such a manner that the comb-like electrode fingers are inclined from a facing direction of the electrode bases.

摘要翻译： 表面声波从设置在非压电基板的上侧和下侧的每个IDT（激励元件）沿两个对角线方向激发，并且在检测区域上传播的声表面波被IDT（接收元件）接收 ）配置在非压电基板的左侧和右侧，使得基于接收结果来检测接触非压电基板的物体的位置。 在每个IDT中，梳状电极指以这样的方式连接到两个相对的电极基座（信号电极和接地电极），使得梳状电极指从电极基座的相对方向倾斜。

公开(公告)号：US07170371B2

公开(公告)日：2007-01-30

申请号：US10823648

申请日：2004-04-14

申请人： Masanori Ueda ,  Osamu Kawachi ,  Shogo Inoue ,  Jun Tsutsumi ,  Takashi Matsuda ,  Yoshio Satoh

发明人： Masanori Ueda ,  Osamu Kawachi ,  Shogo Inoue ,  Jun Tsutsumi ,  Takashi Matsuda ,  Yoshio Satoh

IPC分类号： H03H9/64 ,  H03H9/25

CPC分类号： H03H9/6436 ,  H03H9/14538 ,  H03H9/25 ,  H03H9/6433 ,  H03H9/6489

摘要： Efficient transverse energy confinement, and provision of a surface acoustic wave filter having preferable characteristics of both insertion loss and shape factor are obtained. In the surface acoustic wave filter, electrode fingers of one comb electrode are laid in a state of being inserted to the electrode fingers of the other comb electrode, and a thick film thicker than each plurality of electrode fingers is produced in a partial area of the bus bar, and a tip gap is provided between the top of each plurality of electrode fingers and the end face of the opposed bus bar, with a distance therebetween set not greater than 0.2λ (where, λ is one period of the comb electrode).

摘要翻译： 获得有效的横向能量限制，并且提供具有插入损耗和形状系数都优选的特性的表面声波滤波器。 在表面声波滤波器中，一个梳状电极的电极指状物被插入到另一梳状电极的电极指的状态，并且在该多个电极指的部分区域中产生厚于多个电极指的厚膜 汇流条，并且在每个多个电极指的顶部和相对的母线的端面之间设置有尖端间隙，其间的距离设置为不大于0.2λ（其中，λ是梳状电极的一个周期） 。

公开(公告)号：US07977848B2

公开(公告)日：2011-07-12

申请号：US12711753

申请日：2010-02-24

申请人： Suguru Warashina ,  Takashi Matsuda ,  Shogo Inoue ,  Yoshio Satoh

发明人： Suguru Warashina ,  Takashi Matsuda ,  Shogo Inoue ,  Yoshio Satoh

IPC分类号： H01L41/08 ,  H01L23/00 ,  H03H9/25

CPC分类号： H03H9/02574 ,  H03H9/14541 ,  Y10T29/42

摘要： An acoustic wave device of the present application includes a piezoelectric substrate (14), interdigital transducer electrodes (13) formed on the piezoelectric substrate (14), and an SiO2 film (12) formed so as to cover the electrodes (13). The acoustic wave device also includes a displacement adjustment film (11) formed on the SiO2 film (12), and the displacement adjustment film (11) is formed from a substance whose acoustic velocity is slower than that of the substance forming the SiO2 film (12). According to this configuration, it is possible to suppress unnecessary waves as well as improve temperature characteristics. Also, by mounting such an acoustic wave device in a communication module or communication apparatus, it is possible to achieve an improvement in reliability.

摘要翻译： 本申请的声波元件包括形成在压电基板（14）上的压电基板（14），叉指式换能器电极（13）和形成为覆盖电极（13）的SiO 2膜（12）。 声波装置还包括形成在SiO 2膜（12）上的位移调节膜（11），位移调节膜（11）由声速慢于形成SiO 2膜的物质的物质形成（ 12）。 根据该结构，能够抑制不必要的波以及改善温度特性。 此外，通过将这种声波装置安装在通信模块或通信装置中，可以实现可靠性的提高。

公开(公告)号：US07331092B2

公开(公告)日：2008-02-19

申请号：US10806148

申请日：2004-03-23

申请人： Michio Miura ,  Takashi Matsuda ,  Yoshio Satoh ,  Masanori Ueda ,  Hideki Takagi

发明人： Michio Miura ,  Takashi Matsuda ,  Yoshio Satoh ,  Masanori Ueda ,  Hideki Takagi

IPC分类号： H04R17/10

CPC分类号： H03H3/08 ,  H03H9/02574 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/49016 ,  Y10T29/49126

摘要： A method of manufacturing a surface acoustic device that has a surface acoustic wave filter including comb-like electrodes, electrode pads, and wiring patterns formed on a joined substrate produced by joining a piezoelectric substrate and a supporting substrate to each other. This method includes the steps of: activating at least one of the joining surfaces of the piezoelectric substrate and the supporting substrate; and joining the piezoelectric substrate and the supporting substrate in such a manner that the activated joining surfaces face each other.

摘要翻译： 一种表面声学装置的制造方法，其具有包括梳状电极，电极焊盘和布线图案的表面声波滤波器，所述梳状电极，电极焊盘和布线图案形成在通过将压电基板和支撑基板彼此接合而制成的接合基板上。 该方法包括以下步骤：激活压电衬底和支撑衬底的至少一个接合表面; 以及使活化的接合面彼此面对的方式接合压电基板和支撑基板。