Method and manufacturing surface acoustic wave device
    1.
    发明授权
    Method and manufacturing surface acoustic wave device 有权
    表面声波装置的制造方法

    公开(公告)号:US07331092B2

    公开(公告)日:2008-02-19

    申请号:US10806148

    申请日:2004-03-23

    IPC分类号: H04R17/10

    摘要: A method of manufacturing a surface acoustic device that has a surface acoustic wave filter including comb-like electrodes, electrode pads, and wiring patterns formed on a joined substrate produced by joining a piezoelectric substrate and a supporting substrate to each other. This method includes the steps of: activating at least one of the joining surfaces of the piezoelectric substrate and the supporting substrate; and joining the piezoelectric substrate and the supporting substrate in such a manner that the activated joining surfaces face each other.

    摘要翻译: 一种表面声学装置的制造方法,其具有包括梳状电极,电极焊盘和布线图案的表面声波滤波器,所述梳状电极,电极焊盘和布线图案形成在通过将压电基板和支撑基板彼此接合而制成的接合基板上。 该方法包括以下步骤:激活压电衬底和支撑衬底的至少一个接合表面; 以及使活化的接合面彼此面对的方式接合压电基板和支撑基板。

    Surface acoustic wave device with lithium tantalate on a sapphire substrate and filter using the same
    2.
    发明授权
    Surface acoustic wave device with lithium tantalate on a sapphire substrate and filter using the same 失效
    在蓝宝石衬底上使用钽酸锂的表面声波器件和使用其的滤波器

    公开(公告)号:US06933810B2

    公开(公告)日:2005-08-23

    申请号:US10724577

    申请日:2003-12-01

    CPC分类号: H03H9/02834 H03H9/02559

    摘要: A surface acoustic wave device includes a piezoelectric substrate having a first surface on which comb-like electrodes are formed, and a second surface, and a support substrate joined to the second surface of the piezoelectric substrate. The piezoelectric substrate is made of lithium, tantalate, and the support substrate is made of sapphire. The following expressions being satisfied: T/t 10  (2) where T is a thickness of the piezoelectric substrate, t is a thickness of the support substrate, and λ is a wavelength of a surface acoustic filter, propagated along the first surface of the piezoelectric substrate.

    摘要翻译: 表面声波装置包括具有形成有梳状电极的第一表面和第二表面的压电基板和连接到压电基板的第二表面的支撑基板。 压电基板由钽酸锂制成,支撑基板由蓝宝石制成。 满足以下表达式:<?in-line-formula description =“In-line Formulas”end =“lead”?> T / t <1/3(1)<?in-line-formula description =“In- 行公式“end =”tail“?> <?in-line-formula description =”In-line Formulas“end =”lead“?> T / lambda> 10(2)<?in-line-formula description = 在线公式“end =”tail“?>其中T是压电基板的厚度,t是支撑基板的厚度,λ是表面声滤波器的波长,沿着压电的第一表面传播 基质。

    Surface acoustic wave device and method of manufacturing the same
    3.
    发明授权
    Surface acoustic wave device and method of manufacturing the same 有权
    表面声波装置及其制造方法

    公开(公告)号:US07202590B2

    公开(公告)日:2007-04-10

    申请号:US10840632

    申请日:2004-05-07

    IPC分类号: H03H9/25

    摘要: A surface acoustic wave device includes: a piezoelectric substrate that has two or more resonators formed on a surface; and a supporting substrate that is joined to another surface of the piezoelectric substrate. In this surface acoustic wave device, at least two of the resonators have exciting portions that overlap each other in the direction of propagating surface acoustic waves, and at least a part of the piezoelectric substrate is removed or modified to have different properties between at least one pair of overlapping resonators among the resonators having the overlapping portions.

    摘要翻译: 表面声波装置包括:压电基板,其在表面上形成有两个以上的谐振器; 以及与压电基板的另一表面接合的支撑基板。 在该声表面波装置中,至少两个谐振器具有在传播表面声波的方向上彼此重叠的激励部分,并且压电基板的至少一部分被去除或修改为在至少一个 具有重叠部分的谐振器中的一对重叠谐振器。

    Acoustic wave device and filter using the same
    4.
    发明授权
    Acoustic wave device and filter using the same 有权
    声波装置和滤波器使用相同

    公开(公告)号:US07688161B2

    公开(公告)日:2010-03-30

    申请号:US11976441

    申请日:2007-10-24

    IPC分类号: H03H9/64 H03H9/52 H03H9/25

    CPC分类号: H03H9/6483

    摘要: An acoustic wave device includes a piezoelectric substrate, a resonator having comb electrodes that are provided above the piezoelectric substrate and excite an acoustic wave, and a capacitor that is provided above the piezoelectric substrate and is connected in series or parallel with the resonator, the capacitor including electrodes that horizontally face each other above the piezoelectric substrate. The electrodes of the capacitor are further from the piezoelectric substrate than the comb electrodes of the resonator.

    摘要翻译: 声波装置包括压电基板,具有设置在压电基板上方的梳状电极并激发声波的谐振器,以及设置在压电基板上方并与谐振器串联或并联连接的电容器,电容器 包括在压电基板上水平面对的电极。 与谐振器的梳状电极相比,电容器的电极比压电基片更远。

    Elastic boundary wave device, resonator, and filter
    5.
    发明授权
    Elastic boundary wave device, resonator, and filter 有权
    弹性边界波器件,谐振器和滤波器

    公开(公告)号:US07471171B2

    公开(公告)日:2008-12-30

    申请号:US11711893

    申请日:2007-02-28

    IPC分类号: H03H9/25 H03H9/64

    摘要: An elastic boundary wave device includes a LiNbO3 substrate, an electrode exciting an elastic wave and provided on the substrate, and a silicon oxide film provided on the substrate to cover the electrode, and parameters of the elastic boundary wave device have any one of ranges, where “θ” is a rotation Y cut angle of the substrate, “a” is a ratio of copper density with respect to a density of a material used as the electrode, “λ” is a wavelength of the elastic wave excited by the electrode, “h” is a film thickness of the electrode, “H” is a thickness of the silicon oxide film.

    摘要翻译: 弹性边界波装置包括LiNbO 3基板,激发弹性波并设置在基板上的电极和设置在基板上以覆盖电极的氧化硅膜,弹性边界波装置的参数具有范围, 其中“θ”是基板的旋转Y切割角,“a”是铜密度相对于用作电极的材料的密度的比率,“λ”是由电极激发的弹性波的波长 ,“h”是电极的膜厚,“H”是氧化硅膜的厚度。

    Elastic boundary wave device
    7.
    发明授权
    Elastic boundary wave device 失效
    弹性边界波装置

    公开(公告)号:US07830067B2

    公开(公告)日:2010-11-09

    申请号:US12431427

    申请日:2009-04-28

    IPC分类号: H01L41/04

    CPC分类号: H03H9/0222 H03H9/02818

    摘要: An elastic boundary wave device includes a first medium with piezoelectricity, an electrode exciting an elastic wave and provided on the first medium, a second medium made of a different material from the first medium and provided on the first medium to cover the electrode, and a sound absorbing portion provided on the second medium.

    摘要翻译: 弹性边界波装置包括具有压电性的第一介质,激发弹性波并设置在第一介质上的电极,由与第一介质不同的材料制成并设置在第一介质上以覆盖电极的第二介质,以及 设在第二介质上的吸音部。

    Acoustic wave device and filter using the same
    10.
    发明申请
    Acoustic wave device and filter using the same 有权
    声波装置和滤波器使用相同

    公开(公告)号:US20080129418A1

    公开(公告)日:2008-06-05

    申请号:US11976441

    申请日:2007-10-24

    IPC分类号: H03H9/64 H01L41/047

    CPC分类号: H03H9/6483

    摘要: An acoustic wave device includes a piezoelectric substrate, a resonator having comb electrodes that are provided above the piezoelectric substrate and excite an acoustic wave, and a capacitor that is provided above the piezoelectric substrate and is connected in series or parallel with the resonator, the capacitor including electrodes that horizontally face each other above the piezoelectric substrate. The electrodes of the capacitor are further from the piezoelectric substrate than the comb electrodes of the resonator.

    摘要翻译: 声波装置包括压电基板,具有设置在压电基板上方的梳状电极并激发声波的谐振器,以及设置在压电基板上方并与谐振器串联或并联连接的电容器,电容器 包括在压电基板上水平面对的电极。 与谐振器的梳状电极相比,电容器的电极比压电基片更远。