Projection exposure apparatus and method, and illumination optical system thereof
    41.
    发明授权
    Projection exposure apparatus and method, and illumination optical system thereof 失效
    投影曝光装置及方法及其照明光学系统

    公开(公告)号:US06526118B2

    公开(公告)日:2003-02-25

    申请号:US09391171

    申请日:1999-09-07

    IPC分类号: G21K500

    摘要: In a projection exposure apparatus used in lithography process for transferring a predetermined pattern formed on a reflection type mask onto a photosensitive substrate, the reflection mask and the substrate are moved relative to each other by a scanning driver, and the illumination optical system located between a radiation light source and the reflection mask includes a field stop located near a position conjugate with the reflection mask. In another embodiment a scanning driver changes the positional relationship between the reflection mask and the projection optical system, or/and between the substrate and the projection optical system. In another embodiment an image of the field stop is formed on the reflection mask by a relay optical system, preferably a catoptric system, forming the predetermined pattern. The projection optical system located between the reflection mask and the substrate directs the light reflected from the mask to the substrate, and illuminance distribution of the light on the exposure area of the substrate is adjustable by changing the position of reflection optical elements located along the optical path of the radiation light in the illumination optical system.

    摘要翻译: 在用于将形成在反射型掩模上的预定图案转印到感光基板上的光刻工艺中的投影曝光装置中,反射掩模和基板通过扫描驱动器相对于彼此移动,并且照明光学系统位于 辐射光源和反射掩模包括位于与反射掩模共轭的位置附近的场停止。 在另一个实施例中,扫描驱动器改变反射掩模与投影光学系统之间,或/和基板与投影光学系统之间的位置关系。 在另一个实施例中,通过形成预定图案的中继光学系统,优选地是反射系统,在反射掩模上形成场光阑的图像。 位于反射掩模和衬底之间的投影光学系统将从掩模反射的光引导到衬底,并且通过改变沿着光学器件的反射光学元件的位置来调节光在衬底的曝光区域上的照度分布 在照明光学系统中辐射光的路径。

    Map display apparatus for motor vehicle
    42.
    发明授权
    Map display apparatus for motor vehicle 失效
    汽车地图显示装置

    公开(公告)号:US5862498A

    公开(公告)日:1999-01-19

    申请号:US678767

    申请日:1996-07-11

    摘要: A map display apparatus for a motor vehicle comprising: road map storage device which stores road map data relating to a road map; a display device capable of displaying the road map; bird's-eye view data converting circuit which converts the road map data into bird's-eye view data so that a bird's-eye view taken by obliquely looking down the road map from above is displayed on the display device; and display control circuit which displays a plurality of grid lines such that the grid lines are superposed on the bird's-eye view.

    摘要翻译: 一种用于机动车辆的地图显示装置,包括:路线图存储装置,其存储与路线图相关的路线图数据; 能够显示路线图的显示装置; 鸟瞰图数据转换电路,其将道路地图数据转换为鸟瞰数据,使得从显示装置上显示从上方倾斜地俯视路线图拍摄的鸟瞰图; 以及显示控制电路,其显示多个网格线,使得网格线叠加在鸟瞰图上。

    Illumination apparatus and exposure apparatus using it
    44.
    发明授权
    Illumination apparatus and exposure apparatus using it 失效
    照明装置和使用它的曝光装置

    公开(公告)号:US5615047A

    公开(公告)日:1997-03-25

    申请号:US259761

    申请日:1994-06-14

    CPC分类号: G03F7/70058 F21V5/04

    摘要: An illumination apparatus for uniformly illuminating an illuminated object surface. The apparatus comprises light source means for supplying an illumination light beam having parallel rays, an optical integrator for forming a plurality of beams from the illumination light beam from said light source means, a condenser optical system for converging the plurality of beams from said optical integrator to illuminate the illuminated object surface in a superimposed manner, and an optical member having a light quantity attenuator for transmitting said illumination light beam so as to attenuate a light quantity of said illumination light beam by a predetermined amount, said optical member being located at or in the vicinity of a position conjugate with said illuminated object surface.

    摘要翻译: 一种用于均匀照射被照射物体表面的照明装置。 该装置包括用于提供具有平行光线的照明光束的光源装置,用于从所述光源装置的照明光束形成多个光束的光学积分器,用于会聚来自所述光学积分器的多个光束的聚光器光学系统 以叠加方式照亮被照明物体表面;以及光学构件,具有用于透射所述照明光束的光衰减器,以将所述照明光束的光量衰减预定量,所述光学构件位于或 在与所述被照射物体表面共轭的位置附近。

    Reactive power compensating apparatus and method for reducing in
switching loss in steady state operation thereof
    45.
    发明授权
    Reactive power compensating apparatus and method for reducing in switching loss in steady state operation thereof 失效
    无功功率补偿装置及其稳态运行中的开关损耗降低的方法

    公开(公告)号:US5485075A

    公开(公告)日:1996-01-16

    申请号:US269025

    申请日:1994-06-30

    IPC分类号: G05F1/70 H02J3/18 G05F3/00

    CPC分类号: H02J3/18 Y02E40/12 Y02E40/30

    摘要: A self-commutated static var compensator and a method is used for stabilizing a power system by controlling an output of a self-commutated converter for receiving/supplying power from/to the power system. A constant system voltage maintaining controller calculates a first target value signal of the reactive current in accordance with a difference between a reference voltage and a voltage detected by a voltage detector, and a reactive current controller generates a second target value signal of the reactive current in accordance with a difference between the first target value signal of the reactive current and a detected current. A converter controller applies a gate driving pulse to the self-commutated converter in response to the second target value signal of the reactive current and second target value signal of the active current. A loss reduction circuit stops the gate driving pulse corresponding to the second target value of the reactive current from being supplied to the gate of the self-commutated converter when reactive power output from the self-commutated converter is close to zero.

    摘要翻译: 自整定静态无功补偿器和方法用于通过控制用于从/向电力系统接收/供应电力的自换换转换器的输出来稳定电力系统。 恒定系统电压保持控制器根据参考电压和由电压检测器检测到的电压之间的差异来计算无功电流的第一目标值信号,无功电流控制器产生无功电流的第二目标值信号 根据无功电流的第一目标值信号与检测电流之间的差。 A转换器控制器响应于有功电流的无功电流和第二目标值信号的第二目标值信号,向自整流转换器施加栅极驱动脉冲。 当从自整流转换器输出的无功功率接近零时,损耗减小电路将对应于无功电流的第二目标值的栅极驱动脉冲停止供给到自整流转换器的栅极。

    Method for continuous casting of slab
    46.
    发明授权
    Method for continuous casting of slab 失效
    连续铸造板坯的方法

    公开(公告)号:US5307863A

    公开(公告)日:1994-05-03

    申请号:US113958

    申请日:1993-08-30

    摘要: A method for continuous casting of a slab comprises feeding molten steel into a mold through exit ports of an immersion nozzle and controlling a stream of the molten steel by means of an electromagnetic stirrer having a linearly shifting magnetic field. The direction of the linearly shifting magnetic field is toward the immersion nozzle, which is positioned at the center of the mold from a pair of narrow sides of the mold. A first frequency control step controls a frequency of a wave of the shifting magnetic field to be higher than a threshold frequency, wherein the wave has a period equal to the time during which the stream of the molten steel poured from the immersion nozzle passes through an area to which the linearly shifting magnetic field is introduced, said area having an upper limit and a lower limit. A second control step controls the frequency of the wave of the linearly shifting magnetic field to be low enough such that the magnetic fluxes of the linearly shifting magnetic field are of a density high enough to apply a braking force to the molten steel.

    摘要翻译: 连续铸造板坯的方法包括通过浸入式喷嘴的出口将钢水送入模具,并通过具有线性移动磁场的电磁搅拌器控制钢水流。 线性移动磁场的方向是朝向从模具的一对窄边位于模具中心的浸入式喷嘴。 第一频率控制步骤将移动磁场的波的频率控制为高于阈值频率,其中波具有等于从浸没喷嘴注入的钢水流过的时间段 引入线性移位磁场的区域,所述区域具有上限和下限。 第二控制步骤将线性移动磁场的波的频率控制得足够低,使得线性移位磁场的磁通量具有足够高的密度以对钢水施加制动力。

    Thermal image forming equipment forms image directly on image carrier or
paper sheet
    47.
    发明授权
    Thermal image forming equipment forms image directly on image carrier or paper sheet 失效
    热成像设备直接在图像载体或纸张上形成图像

    公开(公告)号:US5300952A

    公开(公告)日:1994-04-05

    申请号:US782609

    申请日:1991-10-25

    摘要: Image forming equipment for applying heat to a charged image carrier to attenuate part of the potential of the image carrier in order to form a latent image on the image carrier. The surface of a dielectric image carrier is charged by a charger and a thermal print head is driven in response to image information in order to form a latent image on the charged surface of the image carrier. A developing roller applies a liquid developer to the latent image and presses it against the portion where the potential has been lowered. The resulting toner image formed on the image carrier is fixed on a paper sheet fed from a paper feeding device or is directly fixed on the image carrier. The image carrier is formed of polyethylene terephthalate or a mixture of polybutylene terephthalate and silicon dioxide.

    摘要翻译: 用于向充电的图像载体施加热量以衰减图像载体的一部分电位以便在图像载体上形成潜像的图像形成设备。 电介质图像载体的表面由充电器充电,响应于图像信息驱动热敏打印头,以在图像载体的带电表面上形成潜像。 显影辊将液体显影剂施加到潜像上并将其压在电位降低的部分上。 形成在图像载体上的所得到的调色剂图像被固定在从送纸装置供给的纸张上,或直接固定在图像载体上。 图像载体由聚对苯二甲酸乙二醇酯或聚对苯二甲酸丁二醇酯和二氧化硅的混合物形成。

    Printing apparatus with a printhead having stratified recording
electrodes, return electrode and preheating electrode for use with
resistive thermal transfer ribbon
    49.
    发明授权
    Printing apparatus with a printhead having stratified recording electrodes, return electrode and preheating electrode for use with resistive thermal transfer ribbon 失效
    具有打印头的打印装置具有分层的记录电极,返回电极和用于电阻热转印带的预热电极

    公开(公告)号:US5079566A

    公开(公告)日:1992-01-07

    申请号:US594327

    申请日:1990-10-09

    申请人: Takashi Mori

    发明人: Takashi Mori

    IPC分类号: B41J2/335 B41J2/355 B41J35/00

    CPC分类号: B41J2/355 B41J35/00

    摘要: An ink transferring printing mechanism includes an ink sheet having a resistance layer, a conductive layer and an ink layer which are stacked in this order, and a recording head. The recording head has a plurality of recording electrodes arranged in a line, each of which corresponds to a pixel in the image, a preheating electrode and a feedback electrode, each of said recording electrodes being positioned between the preheating electrode and the feedback electrode, at least each of the recording electrodes and the preheating electrode being integrated and stratified. Each of the recording electrodes, the preheating electrode and the feedback electrode are respectively in contact with the resistance layer of the ink sheet. A recording current corresponding to image information is supplied to each of the recording electrodes and a preheating current is supplied to the preheating electrode.

    摘要翻译: 油墨转印机构包括具有依次堆叠的电阻层,导电层和油墨层的油墨片和记录头。 记录头具有排列成一行的多个记录电极,每个记录电极对应于图像中的像素,预热电极和反馈电极,每个记录电极位于预热电极和反馈电极之间, 记录电极和预热电极中的每一个都被集成和分层。 各记录电极,预热电极和反馈电极分别与油墨片的电阻层接触。 与图像信息相对应的记录电流被提供给每个记录电极,并且预热电流被提供给预热电极。

    Thermal transfer type printing device
    50.
    发明授权
    Thermal transfer type printing device 失效
    热转印式印刷装置

    公开(公告)号:US4983994A

    公开(公告)日:1991-01-08

    申请号:US412797

    申请日:1989-09-26

    IPC分类号: B41J2/36

    CPC分类号: B41J2/36

    摘要: A printing device suitable for printing on a record medium for use in an overhead projector (OHP) prints at a density controlled as a function of the type of an OHP (transmission type of reflection type) in which the record medium will be used, and/or as a function of the distance from the OHP to the screen. The device can use a transfer printing type print head, in which case the density control can be achieved by means of amplitude or pulse width modulation of the electrical signal energizing the print head or by means of controlling the number or short energization pulses to be applied to the print head.

    摘要翻译: 适用于在用于高架投影仪(OHP)的记录介质上打印的打印装置以根据将使用记录介质的OHP(透射型反射型)的类型来控制的浓度进行打印,以及 /或作为从OHP到屏幕的距离的函数。 该装置可以使用转印印刷型打印头,在这种情况下,密度控制可以通过激励打印头的电信号的幅度或脉冲宽度调制来实现,或通过控制要施加的数量或短激励脉冲 到打印头。