公开(公告)号：US08160458B2

公开(公告)日：2012-04-17

申请号：US12523150

申请日：2008-01-10

Applicant: Takao Tanimoto ,  Koji Kawakita

Inventor： Takao Tanimoto ,  Koji Kawakita

IPC: H04L27/22 ,  H04B10/06

CPC classification number: G02B26/06 ,  G01J9/02 ,  G02B26/0875

Abstract: The present invention provides an optical phase modulation evaluating device that can measure and evaluate the precise degree of modulation in phase of an optical phase modulation signal in comparison with the conventionally-known optical phase modulation evaluating device. The optical phase modulation evaluating module includes: a bit delay device located on optical paths of the third and fifth light beams, and adapted to change the length of the optical paths to delay the third and fifth light beams by one bit per second; and an optical phase difference setting means for delaying either or both the ninth and tenth light beams by a designated phase angle which is not equal to zero, the optical phase difference setting means having a light transmissive plate located on an optical path for the ninth light beam, and a light transmissive plate located on an optical path for the tenth light beam.

Abstract translation: 本发明提供了一种光学相位调制评估装置，其与常规已知的光相位调制评估装置相比能够测量和评估光相位调制信号的相位的精确调制度。 光相位调制评估模块包括：位延迟装置，位于第三和第五光束的光路上，并且适于改变光路的长度以将第三和第五光束延迟一位每秒; 以及光学相位差设定装置，用于将第九和第十光束中的任一者或第二光束延迟不等于零的指定相位角，光学相位差设定装置具有位于第九光线的光路上的透光板 光束，以及位于第十光束的光路上的透光板。

公开(公告)号：US20110158493A1

公开(公告)日：2011-06-30

申请号：US13060112

申请日：2009-10-28

Applicant: Kentaro Nagai ,  Toru Den

Inventor： Kentaro Nagai ,  Toru Den

IPC: G06K9/00

CPC classification number: G06T7/0002 ,  A61B6/4291 ,  A61B6/484 ,  G01J9/02 ,  G01N23/04 ,  G01N23/20075 ,  G01N2223/401 ,  G21K1/06 ,  G21K2201/06 ,  G21K2201/067

Abstract: An analysis method for use in a radiation imaging apparatus employing intensity information of interference fringes of radiation rays that have passed through a detected object includes the steps of generating first phase information of the detected object wrapped into a range of 2π from the intensity information of the interference fringes; generating information on an absorption intensity gradient of the detected object from the intensity information of the interference fringes; generating a weighting function on the basis of an absolute value of a gradient in the information on the absorption intensity gradient; and generating second phase information by unwrapping the first phase information by using the weighting function.

Abstract translation: 一种在使用已经通过检测对象的辐射线的干涉条纹的强度信息的放射线成像装置中的分析方法包括以下步骤：产生被检测物体的第一相位信息，包含在2＆amp; 从干涉条纹的强度信息; 根据干涉条纹的强度信息生成关于被检测物体的吸收强度梯度的信息; 基于关于吸收强度梯度的信息中的梯度的绝对值生成加权函数; 以及通过使用所述加权函数展开所述第一相位信息来产生第二相位信息。

公开(公告)号：US07924437B2

公开(公告)日：2011-04-12

申请号：US12499531

申请日：2009-07-08

Applicant: Kazuki Yamamoto

Inventor： Kazuki Yamamoto

IPC: G01B11/02

CPC classification number: G03F7/706 ,  G01J9/02 ,  G01M11/0264 ,  G01M11/0271

Abstract: A measurement method for measuring a wavefront aberration of a target optical system using a measurement apparatus that measures the wavefront aberration of the target optical system by detecting an interference pattern includes the steps of measuring as a system parameter a shift from a design value of a value that defines a structure of the measurement apparatus and the target optical system, and measuring the wavefront aberration of the target optical system using the system parameter.

Abstract translation: 使用通过检测干涉图案测量目标光学系统的波面像差的测量装置测量目标光学系统的波前像差的测量方法包括以下步骤：从系统参数测量从值的设计值 其定义了测量装置和目标光学系统的结构，并且使用系统参数测量目标光学系统的波前像差。

公开(公告)号：US07924436B2

公开(公告)日：2011-04-12

申请号：US11703570

申请日：2007-02-07

Applicant: Markus Mengel ,  Michael Totzeck

Inventor： Markus Mengel ,  Michael Totzeck

IPC: G01B11/02 ,  G01B9/02

CPC classification number: G01J4/04 ,  G01J9/02 ,  G01J9/0215 ,  G01J2009/0223 ,  G01M11/02 ,  G01N21/19 ,  G01N2021/216 ,  G03F7/70566 ,  G03F7/70591

Abstract: A method for approximating an influence of an optical system on the state of polarization of optical radiation comprises the steps of providing incoming optical radiation for the optical system in several incoming states of polarization, including at least one incoming state having circularly polarized radiation components; directing the incoming optical radiation onto the optical system; measuring at least one characteristic, including a phase distribution, of a resulting outgoing optical radiation emerging from the optical system with respect to each of the incoming states of polarization; and approximating the influence of the optical system on the state of polarization of optical radiation by evaluating the measured characteristics of the outgoing optical radiation.

Abstract translation: 用于近似光学系统对光辐射的偏振状态的影响的方法包括以下步骤：在几个进入的偏振状态中为光学系统提供入射光辐射，包括至少一个具有圆偏振辐射分量的入射状态; 将进入的光辐射引导到光学系统上; 测量相对于所述进入的偏振状态中的每一个的从所述光学系统出射的所得出射光辐射的至少一个特性（包括相位分布）; 并通过评估出射光辐射的测量特性来近似光学系统对光学辐射的偏振状态的影响。

公开(公告)号：US20110043816A1

公开(公告)日：2011-02-24

申请号：US12922542

申请日：2009-02-27

Applicant: Eriko Watanabe ,  Kashiko Kodate

Inventor： Eriko Watanabe ,  Kashiko Kodate

IPC: G01B9/021

CPC classification number: G03H1/0005 ,  G01J9/02 ,  G01N21/453 ,  G03H1/041 ,  G03H1/2286 ,  G03H2001/0038 ,  G03H2001/0066 ,  G03H2001/0072 ,  G03H2001/0413 ,  G03H2001/0428 ,  G03H2001/2244 ,  G03H2210/11 ,  G03H2210/12 ,  G03H2223/12 ,  G03H2223/13 ,  G03H2223/55

Abstract: An object of the invention is to provide a phase object identification device and method which can identify a phase object in a completely different manner from conventional methods for observing or measuring a phase object.A phase object identification device 1 for identifying a phase object for changing the phase of light includes a light source 2, a sample holding means 3 for holding a phase object 31 to be identified, a holographic recording medium 4 on which a hologram 41 formed by interference between reference light 25 and object light 24 that is phase-modulated by a known phase object 32 is recorded, and a light detector 5, a phase of light 21 emitted from the light source is modulated by the phase object to be identified to generate sample light 22, the hologram of the holographic recording medium is irradiated with the sample light, reproduced light 23 reproduced from the hologram of the holographic recording medium is detected by the light detector.

Abstract translation: 本发明的目的是提供一种相位对象识别装置和方法，其能够以与用于观察或测量相位对象的常规方法完全不同的方式识别相位对象。 用于识别用于改变相位相位的相位对象的相位对象识别装置1包括光源2，用于保持要识别的相位对象31的样本保持装置3，全息图记录介质4，全息图41由 记录参考光25与已知相位物体32进行相位调制的物体光24之间的干涉，光检测器5从光源发射的相位相位被相位物体调制以产生 采样光22用全息记录介质的全息图照射样品光，由全息记录介质的全息图重现的再现光23由光检测器检测。

公开(公告)号：US20100290058A1

公开(公告)日：2010-11-18

申请号：US12596422

申请日：2008-04-18

Applicant: Vincent Beau ,  Frederic Seguineau

Inventor： Vincent Beau ,  Frederic Seguineau

IPC: G01B9/02

CPC classification number: G01J9/02

Abstract: Method for determining a perturbation of an optical wave, wherein a first wave which has been subject to a perturbation, is caused to interfere with a second adaptive and continuously adjustable wave, used as a reference wave, in order to obtain a set of interference fringes, the phase of the first wave is reconstructed from this set, and the perturbation is determined from the thereby reconstructed phase. The shape of the wavefront of the second wave is dynamically adjusted so as to obtain a number of interference fringes adapted to the reconstruction of the phase.

Abstract translation: 用于确定光波的扰动的方法，其中已经经受扰动的第一波被干扰用作参考波的第二自适应和连续可调的波，以便获得一组干涉条纹 ，从该集合重建第一波的相位，并且从这样重建的相位确定扰动。 动态地调整第二波的波前的形状，以便获得适合于相位重建的多个干涉条纹。

公开(公告)号：US20100045999A1

公开(公告)日：2010-02-25

申请号：US12523150

申请日：2008-01-10

Applicant: Takao Tanimoto ,  Koji Kawakita

Inventor： Takao Tanimoto ,  Koji Kawakita

IPC: G01J9/02

CPC classification number: G02B26/06 ,  G01J9/02 ,  G02B26/0875

Abstract: It is an object of the present invention to provide an optical phase modulation evaluating device that can measure and evaluate the precise degree of modulation in phase of an optical phase modulation signal in comparison with the conventionally-known optical phase modulation evaluating device. The optical phase modulation evaluating module includes: a bit delay device located on optical paths of the third and fifth light beams, and adapted to change the length of the optical paths to delay the third and fifth light beams by one bit per second; and an optical phase difference setting means for delaying either or both the ninth and tenth light beams by a designated phase angle which is not equal to zero, the optical phase difference setting means having a light transmissive plate located on an optical path for the ninth light beam, and a light transmissive plate located on an optical path for the tenth light beam.

Abstract translation: 本发明的目的是提供一种光学相位调制评估装置，其可以与常规已知的光相位调制评估装置相比较来测量和评估光相位调制信号的相位的精确调制度。 光相位调制评估模块包括：位延迟装置，位于第三和第五光束的光路上，并且适于改变光路的长度以将第三和第五光束延迟一位每秒; 以及光学相位差设定装置，用于将第九和第十光束中的任一者或第二光束延迟不等于零的指定相位角，光学相位差设定装置具有位于第九光线的光路上的透光板 光束，以及位于第十光束的光路上的透光板。

公开(公告)号：US20100001199A1

公开(公告)日：2010-01-07

申请号：US12489600

申请日：2009-06-23

Applicant: Dong-Gun LEE ,  Seong-Sue KIM

Inventor： Dong-Gun LEE ,  Seong-Sue KIM

IPC: G01J1/42

CPC classification number: G01J9/02 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/24 ,  G03F1/84

Abstract: In a method of measuring a phase of a phase shift mask, initial extreme ultraviolet (EUV) light is divided into secondary EUV light portions. The secondary EUV light portions are irradiated onto the phase shift mask as incident EUV light portions, and the phase of the phase shift mask is measured from reflected incident EUV light portions.

Abstract translation: 在测量相移掩模的相位的方法中，初始极紫外（EUV）光被分成次级EUV光部分。 次级EUV光部分作为入射EUV光部分照射到相移掩模上，并且从反射入射的EUV光部分测量相移掩模的相位。

公开(公告)号：US20090257068A1

公开(公告)日：2009-10-15

申请号：US12419910

申请日：2009-04-07

Applicant: Satoru Komatsu ,  Yasuhiro Sawada

Inventor： Satoru Komatsu ,  Yasuhiro Sawada

IPC: G01B9/02

CPC classification number: G01M11/0271 ,  G01J9/02

Abstract: A wavefront measuring method includes steps of: obtaining a first transmitted-wavefront from a first image formed by transmitting beam through a substance at a first angle; obtaining a second image formed by transmitting the beam through the substance at a second angle; formulating a mask corresponding to an interference degree of the second image; converting the first transmitted-wavefront to match with a temporary second transmitted-wavefront from the second image; and unwrapping from the second image, the mask, and a converted first transmitted-wavefront to obtain a second transmitted-wavefront by transmitting the beam through the substance at the second angle.

Abstract translation: 一种波前测量方法包括以下步骤：从通过物质以第一角传送光束形成的第一图像获得第一透射波前; 获得通过以第二角度透射所述物质形成的第二图像; 制定对应于第二图像的干涉度的掩模; 将所述第一发射波前转换为与所述第二图像的临时第二发射波阵面匹配; 并且从第二图像，掩模和经转换的第一透射波前展开，以通过以第二角度发射光束穿过物质来获得第二透射波前。

公开(公告)号：US20090251703A1

公开(公告)日：2009-10-08

申请号：US11990627

申请日：2006-12-06

Applicant: Keiichi Edamatsu ,  Ryosuke Shimizu ,  Nobuyuki Matsuda

Inventor： Keiichi Edamatsu ,  Ryosuke Shimizu ,  Nobuyuki Matsuda

IPC: G01C19/72 ,  G02F1/025

CPC classification number: G02F1/3511 ,  G01J9/02 ,  G02F1/3519

Abstract: An optical nonlinear evaluation device (1) capable of accurately evaluating the optical nonlinearity of a Kerr medium in accordance with a phase difference caused by cross-phase modulation generated in the Kerr medium includes: a polarization Sagnac interference path (3) provided with a Kerr medium (4); an optical pulse light source (7) for supplying a signal beam (Dsig); a polarization beam splitter (PBS1) for splitting the signal beam (Dsig) into a signal beam (Hsig) and a signal beam (Vsig) polarized in a direction orthogonal to the signal beam (Hsig), for supplying the signal beam (Hsig) to a first side of the Kerr medium (4), and for supplying the signal beam (Vsig) to a second side of the Kerr medium (4); a glass plate (14) for entering, onto the signal beam (Hsig), a control beam (Vcont) for causing a change in phase difference between the signal beam (Hsig) and the signal beam (Vsig); separating means for separating the control beam (Vcont) from the signal beam (Hsig) having traveled through the Kerr medium (4); and a detection section (10) provided so as to detect the phase difference between the signal beam (Hsig) and the signal beam (Vsig).

Abstract translation: 能够根据由克尔介质中产生的交叉相位调制引起的相位差精确地评估克尔介质的光学非线性的光学非线性评估装置（1）包括：提供有克尔的极化Sagnac干涉路径（3） 中等（4）; 用于提供信号光束（Dsig）的光脉冲光源（7）; 用于将信号光束（Dsig）分离成信号光束（Hsig）的偏振分束器（PBS1）和与信号光束（Hsig）正交的方向偏振的信号光束（Vsig），用于提供信号光束（Hsig） 到所述克尔介质（4）的第一侧，并且用于将所述信号光束（Vsig）提供给所述克尔介质（4）的第二侧; 用于在信号光束（Hsig）上输入用于引起信号光束（Hsig）和信号光束（Vsig）之间的相位差变化的控制光束（Vcont）的玻璃板（14）; 分离装置，用于从已经穿过克尔介质（4）的信号光束（Hsig）分离控制光束（Vcont）; 以及检测部（10），以检测信号光束（Hsig）和信号光束（Vsig）之间的相位差。