VACUUM PUMP SYSTEM INCLUDING SCROLL PUMP AND SECONDARY PUMPING MECHANISM
    41.
    发明申请
    VACUUM PUMP SYSTEM INCLUDING SCROLL PUMP AND SECONDARY PUMPING MECHANISM 有权
    真空泵系统,包括滚筒泵和二次泵浦机构

    公开(公告)号:US20160348679A1

    公开(公告)日:2016-12-01

    申请号:US14726404

    申请日:2015-05-29

    发明人: Ronald J. Forni

    摘要: A vacuum pump system includes a secondary pumping mechanism incorporated into a stationary portion of a scroll pump. The stationary portion includes the stationary plate scroll of the scroll pump and defines a gas passageway in which the secondary pumping mechanism is disposed. The gas passageway is connected to a gas flow path through the scroll pump at a location upstream of an exhaust check valve of the scroll pump. The secondary pumping mechanism is displaceable within the gas passageway to draw residual gas in the compression stage upstream of the check valve into the gas passageway, and may pump the residual gas back out through the exhaust check valve, to evacuate residual gas from the compression stage.

    摘要翻译: 真空泵系统包括并入涡旋泵的静止部分的二次泵送机构。 固定部分包括涡旋泵的固定板涡旋件并且限定了其中设置有二次泵送机构的气体通道。 气体通道在涡旋泵的排气止回阀的上游位置连接到通过涡旋泵的气体流路。 次级泵送机构可在气体通道内移位,将止回阀上游的压缩段中的残余气体吸入气体通道,并可通过排气止回阀将剩余气体抽回,从而将残留气体从压缩级排出 。

    VEHICLE DRIVE APPARATUS
    42.
    发明申请
    VEHICLE DRIVE APPARATUS 有权
    车辆驱动装置

    公开(公告)号:US20160319930A1

    公开(公告)日:2016-11-03

    申请号:US15104715

    申请日:2015-01-08

    IPC分类号: F16H61/00 F04B41/06

    摘要: A mechanical oil pump, an electric oil pump, and a strainer are disposed inside a transmission case. As a suction oil passage that returns an excess hydraulic pressure in a hydraulic control device to the mechanical oil pump, a common oil passage extending from the hydraulic control device, a branch point, a first oil passage extending from the branch point to the mechanical oil pump, and a second oil passage extending from the branch point to the electric oil pump are formed in the transmission case. A meeting point where an inlet oil passage for suctioning oil via the strainer and the first oil passage of the suction oil passage meet is formed inside a pump body of the mechanical oil pump. Accordingly, the suction oil passage of the mechanical oil pump and an inlet oil passage of the electric oil pump have a portion in common.

    摘要翻译: 机械油泵,电动油泵和过滤器设置在变速箱内部。 作为将液压控制装置中的多余液压返回到机械油泵的吸入油路,从液压控制装置延伸的共用油路,分支点,从分支点延伸到机械油的第一油路 泵,并且从分支点延伸到电动油泵的第二油路形成在变速箱中。 在机械油泵的泵体内形成有用于通过过滤器吸入油的入口油路和吸入油路的第一油路相遇的汇合点。 因此,机械油泵的吸油通路和电动油泵的入口油路具有共同的部分。

    GAS HANDLING SYSTEM AND METHOD FOR EFFICIENTLY MANAGING CHANGES IN GASEOUS CONDITIONS
    43.
    发明申请
    GAS HANDLING SYSTEM AND METHOD FOR EFFICIENTLY MANAGING CHANGES IN GASEOUS CONDITIONS 审中-公开
    气体处理系统和方法,有效管理气候条件的变化

    公开(公告)号:US20160319810A1

    公开(公告)日:2016-11-03

    申请号:US15091908

    申请日:2016-04-06

    IPC分类号: F04B41/06 F04B49/08

    摘要: A system and method is provided for efficiently managing the compression of gas depending on the operating conditions and operating mode of the compression system, wherein the system includes a booster compressor, a booster compressor bypass, a conduit connected to the booster compressor and the booster compressor bypass conduit, a means for selectively directing the flow of the gas based on current operating conditions, to the booster compressor bypass or the booster compressor and a baseline compressor connected to both the booster compressor and the booster compressor bypass conduit.

    摘要翻译: 提供了一种系统和方法,用于根据压缩系统的操作条件和操作模式有效地管理气体压缩,其中该系统包括增压压缩机,增压压缩机旁路,连接到增压压缩机和增压压缩机 旁路管道,用于基于当前操作条件选择性地将气体流引导到增压压缩机旁路或增压压缩机的装置,以及连接到增压压缩机和增压压缩机旁路管道的基线压缩机。

    System for generating vaporized hydrogen peroxide for fillers
    45.
    发明授权
    System for generating vaporized hydrogen peroxide for fillers 有权
    用于生成填充剂的蒸发过氧化氢的系统

    公开(公告)号:US09370591B2

    公开(公告)日:2016-06-21

    申请号:US14290631

    申请日:2014-05-29

    IPC分类号: A61L2/20 F04B41/06 F04B23/04

    摘要: A vapor hydrogen peroxide system and method that includes a reservoir assembly, a first pump assembly, a second pump assembly, a test assembly and a heating assembly. The system is configured to operate sequentially switching between the first pump assembly and the second pump assembly. The pump assembly that is to be utilized is directed through a recirculation procedure prior to the switching, to, in turn, purge any air bubbles that may have amassed within the pump assembly prior to switching.

    摘要翻译: 一种蒸汽过氧化氢系统和方法,其包括储存器组件,第一泵组件,第二泵组件,测试组件和加热组件。 该系统被配置为在第一泵组件和第二泵组件之间顺序地切换。 要使用的泵组件在切换之前通过循环过程引导,从而在切换之前清除可能在泵组件内积聚的任何气泡。

    Vacuum pumping system
    48.
    发明授权
    Vacuum pumping system 有权
    真空泵系统

    公开(公告)号:US09133836B2

    公开(公告)日:2015-09-15

    申请号:US12226083

    申请日:2007-03-30

    摘要: A vacuum pumping system comprises a primary foreline for receiving a gas stream from an outlet of a chamber, a first vacuum pump for evacuating the chamber, a second vacuum pump for evacuating the chamber, a first secondary foreline for conveying gas from the primary foreline to the first vacuum pump, a second secondary foreline for conveying gas from the primary foreline to the second vacuum pump, and valve means for selectively connecting a chosen one of the first and second secondary forelines to the primary foreline. The condition of the vacuum pumps is monitored during use. When both vacuum pumps are operating normally, the valve means is controlled to divert a first reactant-rich gas from the primary foreline into the first secondary foreline, and to divert a second reactant-rich gas from the primary foreline to the second secondary foreline, thereby inhibiting mixing of the first and second reactants within the vacuum pumps. However, in the event that the condition of one of the vacuum pumps indicates that one of the pumps is likely to fail during a current process within the chamber, the valve means is controlled to divert both the first reactant-rich gas and the second reactant-rich gas to the other vacuum pump, thereby preventing the potentially costly loss of a batch of substrates within the chamber.

    摘要翻译: 真空泵系统包括用于从腔室的出口接收气流的主要前级管线,用于抽空腔室的第一真空泵,用于抽空腔室的第二真空泵,用于将气体从主要前级管线输送到第一副管路 第一真空泵,用于将气体从初级前级管线输送到第二真空泵的第二辅助前级管线,以及用于选择性地将第一和第二辅助前级管线中选定的一条线连接到主要前级管路的阀门装置。 在使用过程中监控真空泵的状态。 当两个真空泵正常运行时,阀装置被控制以将第一富含反应物的气体从初级前级管线转移到第一辅助前级管线中,并将第二富含反应物的气体从主要前级管线转移到第二辅助前级管线, 从而抑制真空泵内的第一和第二反应物的混合。 然而,在其中一个真空泵的状态表明在室内的当前过程中泵中的一个可能失效的情况下,阀装置被控制以使第一富反应物气体和第二反应物 从而防止在室内的一批衬底潜在的昂贵的损失。

    Cryogenic refrigerator system with pressure wave generator
    50.
    发明授权
    Cryogenic refrigerator system with pressure wave generator 有权
    带压力波发生器的低温冰箱系统

    公开(公告)号:US08984898B2

    公开(公告)日:2015-03-24

    申请号:US13425521

    申请日:2012-03-21

    CPC分类号: F25B9/14 F04B37/08

    摘要: A pressure wave generator (40) for driving one or more cryogenic refrigerator systems. The pressure wave generator (40) comprises a housing with one or more inlet/outlet ports (57,58) through which generated pressure waves of gas may pass through to drive a cryogenic refrigerator system or systems connected to the inlet/outlet ports (57,58). The pressure waves are generated by at least one pair of opposed diaphragms (41,42) located in the housing that are moveable in a reciprocating motion within the housing to create pressure waves in gas spaces (55,56) associated with each diaphragm (41,42). The gas spaces (55,56) each having associated inlet/outlet ports (57,58) through which the pressure waves may pass. An operable drive system is also provided to move the pair of diaphragms (41,42) in a reciprocating motion.

    摘要翻译: 一种用于驱动一个或多个低温冰箱系统的压力波发生器(40)。 压力波发生器(40)包括具有一个或多个入口/出口端口(57,58)的壳体,产生的气体压力波通过所述入口/出口端口(57,58)通过其驱动以驱动连接到入口/出口(57)的低温冰箱系统 ,58)。 压力波由位于壳体中的至少一对相对的隔膜(41,42)产生,其能够在壳体内以往复运动的方式运动,以在与每个隔膜(41)相关联的气体空间(55,56)中产生压力波 ,42)。 每个具有相关联的入口/出口端口(57,58)的气体空间(55,56),压力波可以通过这些口/出口。 还提供可操作的驱动系统以使往复运动中的一对隔膜(41,42)移动。