摘要:
A vacuum pump system includes a secondary pumping mechanism incorporated into a stationary portion of a scroll pump. The stationary portion includes the stationary plate scroll of the scroll pump and defines a gas passageway in which the secondary pumping mechanism is disposed. The gas passageway is connected to a gas flow path through the scroll pump at a location upstream of an exhaust check valve of the scroll pump. The secondary pumping mechanism is displaceable within the gas passageway to draw residual gas in the compression stage upstream of the check valve into the gas passageway, and may pump the residual gas back out through the exhaust check valve, to evacuate residual gas from the compression stage.
摘要:
A mechanical oil pump, an electric oil pump, and a strainer are disposed inside a transmission case. As a suction oil passage that returns an excess hydraulic pressure in a hydraulic control device to the mechanical oil pump, a common oil passage extending from the hydraulic control device, a branch point, a first oil passage extending from the branch point to the mechanical oil pump, and a second oil passage extending from the branch point to the electric oil pump are formed in the transmission case. A meeting point where an inlet oil passage for suctioning oil via the strainer and the first oil passage of the suction oil passage meet is formed inside a pump body of the mechanical oil pump. Accordingly, the suction oil passage of the mechanical oil pump and an inlet oil passage of the electric oil pump have a portion in common.
摘要:
A system and method is provided for efficiently managing the compression of gas depending on the operating conditions and operating mode of the compression system, wherein the system includes a booster compressor, a booster compressor bypass, a conduit connected to the booster compressor and the booster compressor bypass conduit, a means for selectively directing the flow of the gas based on current operating conditions, to the booster compressor bypass or the booster compressor and a baseline compressor connected to both the booster compressor and the booster compressor bypass conduit.
摘要:
The present invention relates to a vacuum source for providing vacuum to at least a first vacuum drain through conduits, comprising at least a first and a second vacuum pump. The vacuum source comprises a control system adapted to detect the consumed airflow, and to control the operation of each of the first and second vacuum pump based on the detected airflow.
摘要:
A vapor hydrogen peroxide system and method that includes a reservoir assembly, a first pump assembly, a second pump assembly, a test assembly and a heating assembly. The system is configured to operate sequentially switching between the first pump assembly and the second pump assembly. The pump assembly that is to be utilized is directed through a recirculation procedure prior to the switching, to, in turn, purge any air bubbles that may have amassed within the pump assembly prior to switching.
摘要:
Pump priming systems and chromatography systems containing the same are, disclosed. Methods of making and methods of using pump priming systems are also disclosed. In conventional chromatography instrumentation, pump priming is performed in a manual mode where the operator manually opens a mechanical valve and uses a syringe to move liquid through the pump until the lines and the pump are filled with liquid.
摘要:
The present invention relates to a vacuum pumping system (18) for evacuating gas from a plurality of chambers (12, 14, 16) at different pressures. The pumping system comprises a plurality of compound vacuum pumps (20, 22), wherein each compound pump comprises a plurality of pumping mechanisms (24,26,28) connected in series between a pump inlet (30) and a pump exhaust (32) and an interstage port (34, 36) between pumping mechanisms in the series. The system is configured such that gas evacuated from one of said chambers is pumped through the interstage ports of at least two of said compound pumps.
摘要:
A vacuum pumping system comprises a primary foreline for receiving a gas stream from an outlet of a chamber, a first vacuum pump for evacuating the chamber, a second vacuum pump for evacuating the chamber, a first secondary foreline for conveying gas from the primary foreline to the first vacuum pump, a second secondary foreline for conveying gas from the primary foreline to the second vacuum pump, and valve means for selectively connecting a chosen one of the first and second secondary forelines to the primary foreline. The condition of the vacuum pumps is monitored during use. When both vacuum pumps are operating normally, the valve means is controlled to divert a first reactant-rich gas from the primary foreline into the first secondary foreline, and to divert a second reactant-rich gas from the primary foreline to the second secondary foreline, thereby inhibiting mixing of the first and second reactants within the vacuum pumps. However, in the event that the condition of one of the vacuum pumps indicates that one of the pumps is likely to fail during a current process within the chamber, the valve means is controlled to divert both the first reactant-rich gas and the second reactant-rich gas to the other vacuum pump, thereby preventing the potentially costly loss of a batch of substrates within the chamber.
摘要:
A multistage piston compressor for a gaseous or cryogenically liquefied medium with at least two compressor stages, which operatively interact with a shared drive train for purposes of joint powering, wherein each compressor stage exhibits a piston that is mechanically connected with the drive train, and arranged in a compressor cylinder so that it can longitudinally shift.
摘要:
A pressure wave generator (40) for driving one or more cryogenic refrigerator systems. The pressure wave generator (40) comprises a housing with one or more inlet/outlet ports (57,58) through which generated pressure waves of gas may pass through to drive a cryogenic refrigerator system or systems connected to the inlet/outlet ports (57,58). The pressure waves are generated by at least one pair of opposed diaphragms (41,42) located in the housing that are moveable in a reciprocating motion within the housing to create pressure waves in gas spaces (55,56) associated with each diaphragm (41,42). The gas spaces (55,56) each having associated inlet/outlet ports (57,58) through which the pressure waves may pass. An operable drive system is also provided to move the pair of diaphragms (41,42) in a reciprocating motion.