公开(公告)号：US06713747B2

公开(公告)日：2004-03-30

申请号：US10207832

申请日：2002-07-31

Applicant: Akikazu Tanimoto

Inventor： Akikazu Tanimoto

IPC: G01J132

CPC classification number: G03F7/70058 ,  G03F7/70358 ,  G03F7/70558

Abstract: A scanning exposure apparatus and method uses an optical member to change an intensity distribution of exposure light in an illumination region.

Abstract translation: 扫描曝光装置和方法使用光学部件来改变照明区域中的曝光光的强度分布。

公开(公告)号：US06689999B2

公开(公告)日：2004-02-10

申请号：US09872642

申请日：2001-06-01

Applicant: Joshua Paul Haines ,  Stephen Frazer Belafonte ,  Charles Henry Hurst Willis ,  Nicholas Andrew Rixham

Inventor： Joshua Paul Haines ,  Stephen Frazer Belafonte ,  Charles Henry Hurst Willis ,  Nicholas Andrew Rixham

IPC: G01J132

CPC classification number: H05B33/0851 ,  F21V23/0442 ,  F21Y2115/10 ,  G01J1/08 ,  G01J1/32 ,  G01J3/10 ,  G01N21/8806 ,  G01N2201/062 ,  G01N2201/0621 ,  G01N2201/0626

Abstract: A light emitting diode lighting apparatus that includes: a power supply for providing a fixed direct current; a light emitting diode head for emitting light; and a controller for adjusting the level of said light output on said head and compensating for efficiency altering effects of said light in said power head, whereby said controller receives signals for optical feedback stabilization, temperature compensation, and detection of short term current changes to adjust said light and efficiency.

Abstract translation: 一种发光二极管照明装置，包括：用于提供固定直流电的电源; 用于发光的发光二极管头; 以及控制器，用于调节所述头部上的所述光输出的电平，并补偿所述光源在所述电源头中的效率改变效果，由此所述控制器接收用于光反馈稳定，温度补偿和检测短期电流变化的信号以进行调整 说光和效率。

公开(公告)号：US06639200B2

公开(公告)日：2003-10-28

申请号：US09985576

申请日：2001-11-05

Applicant: Hung-Ta Chen

Inventor： Hung-Ta Chen

IPC: G01J132

CPC classification number: G07D7/121

Abstract: A paper currency recognition system used in a money exchange machine includes a LED type transmitter unit and a phototransistor type receiver unit controlled by a CPU. The receiver unit also includes an N-channel MOSFET. When a variation in the induction or signal current from the receiver unit is detected, the CPU controls the MOSFET to let a part of the induction current be shunt to the MOSFET, enabling the value of the induction current to be regulated to a readable range, and at the same time drives a control chip of the receiver unit to regulate the LED driving current, keeping the light intensity of the LED within a constant value.

Abstract translation: 货币兑换机中使用的纸币识别系统包括由CPU控制的LED型发送器单元和光电晶体管型接收器单元。 接收器单元还包括N沟道MOSFET。 当检测到来自接收器单元的感应或信号电流的变化时，CPU控制MOSFET以使感应电流的一部分与MOSFET分流，使得感应电流的值被调节到可读范围， 并同时驱动接收器单元的控制芯片来调节LED驱动电流，使LED的光强度保持在恒定值内。

公开(公告)号：US06633026B2

公开(公告)日：2003-10-14

申请号：US09999412

申请日：2001-10-31

Applicant: Juha Tuominen

Inventor： Juha Tuominen

IPC: G01J132

CPC classification number: H02J50/30 ,  H02J7/025 ,  H02J17/00 ,  H02J50/80 ,  H04B10/807

Abstract: A method for wireless power transmission in a system comprising a power transmitter which in turn comprises a first light source and means for directing the light emitted by the first light source to a desired direction, and at least one power receiver comprising a first photo-detector for receiving the emitted light and for converting it into electric current. A second light source included in the power transmitter is used for transmitting light around the light emitted by the first light source and substantially parallel to it, the intensity of the light being lower than that of the light emitted by the first light source. A second photo-detector included in the power receiver is used for detecting the light emitted by the second light source and for transmitting a control signal to the power transmitter in response to a successful reception of the light emitted by the second light source. The first light source of the power transmitter is switched on in response to the reception of the control signal from the power receiver informing of the reception of the light emitted by the second light source.

Abstract translation: 一种用于系统中的无线电力传输的方法，包括功率发射器，所述功率发射器又包括第一光源和用于将由第一光源发射的光引导到期望方向的装置，以及至少一个功率接收器，包括第一光检测器 用于接收发射的光并将其转换成电流。 包括在功率发射器中的第二光源用于围绕由第一光源发射的光并且基本上平行于其发射光，所述光的强度低于由第一光源发射的光的光强度。 包括在电力接收器中的第二光检测器用于检测由第二光源发射的光并响应于成功接收由第二光源发射的光而向控制信号发送控制信号。 响应于来自电力接收器的控制信号的接收通知接收到由第二光源发射的光，电力发射器的第一光源被接通。

公开(公告)号：US06621061B2

公开(公告)日：2003-09-16

申请号：US09820617

申请日：2001-03-30

Applicant: Michio Kohno

Inventor： Michio Kohno

IPC: G01J132

CPC classification number: G03F7/70058 ,  G03F7/70066 ,  G03F7/701 ,  G03F7/70558 ,  G03F7/70591 ,  G03F7/70941

Abstract: Disclosed is an exposure method, an exposure apparatus and a device manufacturing method, in which transmission factors of almost all optical systems, including a projection optical system, can be measured during an exposure process, and in which the exposure amount is controlled on the basis of it. The exposure apparatus includes an illumination optical system for illuminating a pattern of a reticle with a laser beam from an excimer laser, and a projection lens system for projecting the pattern illuminated by the illumination optical system onto a wafer, to thereby expose the wafer with the reticle pattern, wherein reflection light or ghost light produced at a surface of a lens of the projection lens system is received by a sensor and, on the basis of the an output of the sensor, the transmission factor of the projection lens system is measured. The exposure amount is then controlled on the basis of the measurement.

Abstract translation: 公开了一种曝光方法，曝光装置和装置制造方法，其中可以在曝光处理期间测量包括投影光学系统的几乎所有光学系统的透射因子，并且其中基于曝光量被控制 的。 曝光装置包括用于利用来自准分子激光器的激光束照射标线图案的照明光学系统和用于将由照明光学系统照射的图案投影到晶片上的投影透镜系统，从而将晶片暴露于晶片 掩模版图案，其中在投影透镜系统的透镜的表面处产生的反射光或重影光被传感器接收，并且基于传感器的输出，测量投影透镜系统的透射系数。 然后基于测量来控制曝光量。

公开(公告)号：US06617559B1

公开(公告)日：2003-09-09

申请号：US09482826

申请日：2000-01-13

Applicant: Keith Emery ,  George G Justice

Inventor： Keith Emery ,  George G Justice

IPC: G01J132

CPC classification number: G01J1/4204 ,  G01J1/4214

Abstract: A lighting arrangement for use in vision systems and imaging applications. The arrangement illuminates the object to be imaged with a supplied light of a specified illumination. The intensity, hue, and directionality of the supplied light can be varied. The desired illumination is specified either by manually operable controls or via a programming interface. The arrangement has a light source which includes light-emitting diodes mounted in a housing. The source provides a constant light output over a long lifetime. A light sensor senses the total illumination on the object being imaged resulting from ambient light in addition to the supplied light, and a negative feedback circuit in the arrangement can adjust the level of the supplied light in response so as to maintain a constant total illumination on the object despite variations in the ambient lighting.

Abstract translation: 用于视觉系统和成像应用的照明装置。 该装置用指定照明的所提供的光照亮要成像的物体。 所提供的光的强度，色调和方向性可以变化。 所需的照明通过手动操作的控制或通过编程接口来指定。 该装置具有包括安装在壳体中的发光二极管的光源。 源在长寿命期间提供恒定的光输出。 除了所提供的光之外，光传感器还感测由环境光产生的成像物体上的总照度，并且该配置中的负反馈电路可以响应地调节所提供的光的电平，以保持恒定的总照明 该物体尽管环境照明有变化。

公开(公告)号：US06603105B2

公开(公告)日：2003-08-05

申请号：US09758635

申请日：2001-01-10

Applicant: Alexander Paritsky ,  Sergey Smirnov

Inventor： Alexander Paritsky ,  Sergey Smirnov

IPC: G01J132

CPC classification number: G01D5/30

Abstract: The invention provides a smart optical microphone/sensor for sensing distances to a membrane or to a light-reflecting surface, including a source of light for illuminating the membrane or light-reflecting surface; a photodetector for receiving light reflected from the membrane or light-reflecting surface and for producing output signals; adjustable means for supplying power to the source of light, and a pre-amplifier for amplifying the output signals, whereby the sensitivity of the microphone/sensor can be adjusted.

Abstract translation: 本发明提供了一种用于感测到膜或光反射表面的距离的智能光学麦克风/传感器，包括用于照亮膜或光反射表面的光源; 用于接收从膜或光反射表面反射并产生输出信号的光的光电检测器; 用于向光源供电的可调节装置和用于放大输出信号的前置放大器，从而可以调节麦克风/传感器的灵敏度。

公开(公告)号：US06603103B1

公开(公告)日：2003-08-05

申请号：US09350051

申请日：1999-07-08

Applicant: Franz W. Ulrich ,  Charles T. Bourn ,  Steven W. Tonkin

Inventor： Franz W. Ulrich ,  Charles T. Bourn ,  Steven W. Tonkin

IPC: G01J132

CPC classification number: G06K9/3275 ,  G01B11/2513 ,  G01B11/2518 ,  G03F7/70483 ,  G06K2209/19 ,  G06T7/521 ,  H01L21/00 ,  H01L21/67288

Abstract: Manufacturing lines include inspection systems for monitoring the quality of parts produced. Manufacturing lines for making semiconductor devices generally inspect each fabricated part. The information obtained is used to fix manufacturing problems in the semiconductor fab plant. A machine-vision system for inspecting devices includes a light source for propagating light to the device and an image detector that receives light from the device. Also included is a light sensor assembly for receiving a portion of the light from the light source. The light sensor assembly produces an output signal responsive to the intensity of the light received at the light sensor assembly. A controller controls the amount of light received by the image detector to a desired intensity range in response to the output from the light sensor. The image detector may include an array of imaging pixels. The imaging system may also include a memory device which stores correction values for at least one of the pixels in the array of imaging pixels. To minimize or control thermal drift of signals output from an array of imaging pixels, the machine-vision system may also include a cooling element attached to the imaging device. The light source for propagating light to the device may be strobed. The image detector that receives light from the device remains in a fixed position with respect to the strobed light source. A translation element moves the strobed light source and image detector with respect to the device. The strobed light may be alternated between a first and second level.

公开(公告)号：US06596977B2

公开(公告)日：2003-07-22

申请号：US09972111

申请日：2001-10-05

Applicant: Subramanian Muthu ,  Frank Schuurmans

Inventor： Subramanian Muthu ,  Frank Schuurmans

IPC: G01J132

CPC classification number: H05B33/0818 ,  H05B33/0869 ,  H05B33/0872

Abstract: An LED array is controlled by determining a constant relating the peak light output of an LED to the peak driving current of a PWM pulse driving the LED, and multiplying the average current of the PWM pulse by the constant to obtain a value of average light output for the LED. The constant may be determined by simultaneously measuring peak light output of the LED and peak current of a PWM pulse driving the LED. The constant is then calculated by dividing the peak light output by the peak current of the PWM pulse. By making the simultaneous measurements at a time during the duration of the PWM pulse where the pulse has reached its full magnitude, rise and fall times of the pulse do not affect the measurements. The average current of the PWM pulse may be determined by a variety of methods including integrating current in the PWM pulse over time, or passing the PWM current through a low pass filter configured for providing an average value of PWM current. Determining average current in this manner further reduces the effect of rise and fall time on determining the average light output of the LED.

Abstract translation: 通过确定将LED的峰值光输出与驱动LED的PWM脉冲的峰值驱动电流相关联的常数来确定LED阵列，并将PWM脉冲的平均电流乘以常数以获得平均光输出的值 为LED。 该常数可以通过同时测量LED的峰值光输出和驱动LED的PWM脉冲的峰值电流来确定。 然后通过将峰值光输出除以PWM脉冲的峰值电流来计算常数。 通过在脉冲达到其全部幅度的PWM脉冲的持续时间期间进行同时测量，脉冲的上升和下降时间不会影响测量。 PWM脉冲的平均电流可以通过各种方法来确定，包括随时间积分PWM脉冲中的电流，或者通过配置成提供PWM电流的平均值的低通滤波器来传递PWM电流。 以这种方式确定平均电流进一步降低了上升和下降时间对确定LED的平均光输出的影响。

公开(公告)号：US06576881B2

公开(公告)日：2003-06-10

申请号：US09827629

申请日：2001-04-06

Applicant: Subramanian Muthu ,  Arjen Van Der Sijde

Inventor： Subramanian Muthu ,  Arjen Van Der Sijde

IPC: G01J132

CPC classification number: H05B33/086 ,  H05B33/0869

Abstract: A light output control system for implementing a method for sensing the tri-stimulus values for controlling a light output illuminated from an LED based luminary is disclosed. The system comprises one or more filter/photo diode sensors for sensing a first set of tri-stimulus values of the light output and providing signals indicative thereof. The signals are utilized in a transformation matrix whereby a second set of tri-stimulus values is obtained. The system controls the light output as a function of the second set of tri-stimulus values.