Fabrication process for lateral-emitter field-emission device with
simplified anode

    公开(公告)号:US5618216A

    公开(公告)日:1997-04-08

    申请号:US459033

    申请日:1995-06-02

    申请人: Michael D. Potter

    发明人: Michael D. Potter

    摘要: A field emission device (10) is made with a lateral emitter (100) substantially parallel to a substrate (20) and with a simplified anode stucture (70). The lateral-emitter field-emission device has a thin-film emitter cathode (100) which has a thickness not exceeding several hundred angstroms and has an emitting blade edge or tip (110) having a small radius of curvature. The anode's top surface is precisely spaced apart from and below the plane of the lateral emitter and receives electrons emitted by field emission from the blade edge or tip of the lateral-emitter cathode, when a suitable bias voltage is applied. A fabrication process is disclosed using process steps (S1-S18) similar to those of semiconductor integrated circuit fabrication to produce the novel devices and their arrays. Various embodiments of the fabrication process allow the use of conductive or insulating substrates (20) and allow fabrication of devices having various functions and complexity. The anode (70) is simply fabricated, without the use of prior-art processes which formed a spacer made by a conformal coating. In a preferred fabrication process for the simplified anode device, the following steps are performed: an anode film (70) is deposited; an insulator film (90) is deposited over the anode film; an ultra-thin conductive emitter film (100) is deposited over the insulator and patterned; a trench opening (160) is etched through the emitter and insulator, stopping at the anode film, thus forming and automatically aligning an emitting edge of the emitter; and means are provided for applying an electrical bias to the emitter and anode, sufficient to cause field emission of electrons from the emitting edge of the emitter to the anode. The anode film may comprise a phosphor (75) for a device specially adapted for use in a field emission display. The fabrication process may also include steps to deposit additional insulator films (130) and to deposit additional conductive films for control electrodes (140), which are automatically aligned with the emitter blade edge or tip (110).

    Getter fixing device for a cathode ray tube
    43.
    发明授权
    Getter fixing device for a cathode ray tube 失效
    阴极射线管吸气固定装置

    公开(公告)号:US5443410A

    公开(公告)日:1995-08-22

    申请号:US224974

    申请日:1994-04-08

    申请人: Byoung D. Ko

    发明人: Byoung D. Ko

    IPC分类号: H01J7/18 H01J29/94 H01J9/39

    CPC分类号: H01J7/186 H01J29/94

    摘要: A getter fixing device for a cathode ray tube includes one or more folded strips. These strips are welded to a getter cover or united in one body with the getter cover or a support member. The device also includes two inclined wing portions that direct diffusion of the getter material. Such a getter device allows attachment of various getter forms, and parts needed for this device may be standardized.

    摘要翻译: 用于阴极射线管的吸气剂固定装置包括一个或多个折叠条。 这些条带被焊接到吸气罩或者与吸气罩或支撑构件一体地结合在一起。 该装置还包括引导吸气剂材料扩散的两个倾斜翼部。 这种吸气装置允许附接各种吸气剂形式,并且该装置所需的部件可以被标准化。

    Processing of vacuum-sealed dewar assembly
    44.
    发明授权
    Processing of vacuum-sealed dewar assembly 失效
    真空密封杜瓦组件的加工

    公开(公告)号:US5433639A

    公开(公告)日:1995-07-18

    申请号:US315013

    申请日:1994-09-29

    CPC分类号: B23K20/002 B23K20/02

    摘要: A dewar assembly is cleaned, baked out, assembled, and joined in a single vacuum system without exposing the components to ambient atmosphere. The vacuum system preferably has a first chamber with multiple subchambers that can be isolated from each other, and a second chamber that can be isolated from the first chamber. The multiple chambers and subchambers prevent cross contamination during the various process steps, and also permit multiple dewar assemblies to be batch processed at different stages simultaneously. The components of the dewar assembly are loaded into one subchamber and cleaned, and thereafter moved to another subchamber for bakeout. The dewar getter is heated in the second chamber and moved to one of the subchambers for assembly. The components of the dewar assembly are assembled and joined.

    摘要翻译: 清洁,烘烤,组装和连接在单个真空系统中的杜瓦组件,而不将组件暴露于环境大气中。 真空系统优选地具有第一室,其具有可以彼此隔离的多个子室,以及可以与第一室隔离的第二室。 多个室和子室在各种工艺步骤期间防止交叉污染,并且还允许在不同阶段同时批量处理多个杜瓦瓶组件。 杜瓦组件的部件被装载到一个子室中并进行清洁,然后移动到另一个子室以进行烘烤。 杜瓦瓶吸气器在第二室中被加热并移动到其中一个子室以进行组装。 组装和接合杜瓦组件的组件。

    Method for the manufacture of porous non-evaporable getter devices and
getter devices so produced
    45.
    发明授权
    Method for the manufacture of porous non-evaporable getter devices and getter devices so produced 失效
    制造多孔非蒸发器的装置和生产装置的方法

    公开(公告)号:US5242559A

    公开(公告)日:1993-09-07

    申请号:US709644

    申请日:1985-03-08

    申请人: Ettore Giorgi

    发明人: Ettore Giorgi

    CPC分类号: C25D13/02 H01J7/18

    摘要: A method is described for the electrophoretic deposition, in the form of a porous coating, of at least one getter material and simultaneously an antisintering agent on any form of support.The getter material may be a powder of a metal, of a metal alloy or of a hydride thereof, or a mixture of these components. The getter material powders have a particle size less than 100 .mu. and an average particle size less than 60 .mu. but preferably greater than about 20 .mu.. The antisintering agent has a particle size of the same order of magnitude. After a heat treatment under vacuum the getter devices produced have an open porous structure and have good gas sorption properties. The support for the getter material can be graphite or a metal or a metal coated with ceramic.

    Getter flashing device
    46.
    发明授权
    Getter flashing device 失效
    吸气装置闪烁

    公开(公告)号:US4740184A

    公开(公告)日:1988-04-26

    申请号:US24193

    申请日:1986-03-10

    IPC分类号: H01J9/39 H01J9/00

    CPC分类号: H01J9/39

    摘要: A getter flashing device includes low friction sloping guide numbers which direct a CRT toward a yoke. The yoke has a conical aperture which receives the funnel portion of the CRT. The wide end of the conical aperture forms a reference edge to position the getter within the CRT at a particular location. The yoke slideable supports a coil at the preselected location. The yoke is pivotable to bring the coil and the getter into substantial planar parallelism and to substantially center the getter with respect to the coil.

    摘要翻译: 吸气剂闪光装置包括将CRT引向轭的低摩擦倾斜引导数。 轭具有接收CRT的漏斗部分的锥形孔。 锥形孔的宽端形成参考边缘,以将吸气剂定位在CRT内的特定位置。 可滑动的轭支撑在预选位置的线圈。 轭可枢转以使线圈和吸气剂进入实质上的平面平行度并使吸气体相对于线圈大致居中。

    Method of manufacturing a picture display tube having a gas-absorbing
layer; picture display tube thus manufactured, and gettering device
suitable for such a method
    48.
    发明授权
    Method of manufacturing a picture display tube having a gas-absorbing layer; picture display tube thus manufactured, and gettering device suitable for such a method 失效
    制造具有气体吸收层的图像显示管的方法; 如此制造的图像显示管,以及适合于这种方法的吸气装置

    公开(公告)号:US4481441A

    公开(公告)日:1984-11-06

    申请号:US351574

    申请日:1982-02-23

    IPC分类号: H01J9/39 H01J29/94 H01J9/20

    CPC分类号: H01J29/94

    摘要: A gettering device installed in a picture display tube includes an annular, channel-shaped metal holder containing an evaporable gettering metal and a heat-activated gas releasing material. The gas releasing material is disposed in the holder against a surface which rapidly increases in temperature in response to inductive heating of the holder. This material is covered by the gettering metal to protect it against deterioration by exposure to moist, high temperature air during tube manufacturing processes occurring after installation of the device. During inductive heating, the temperature of the gas releasing material increases faster than that of the gettering metal and begins releasing gas before the gettering metal begins to evaporate.

    摘要翻译: 安装在图像显示管中的吸气装置包括一个包含可蒸发吸气金属和热活化气体释放材料的环形的通道形金属保持器。 气体释放材料被设置在保持器中抵靠温度响应于保持器的感应加热而迅速增加的表面。 这种材料被吸气金属覆盖,以防止在安装设备后发生的管道制造过程中暴露于潮湿的高温空气,防止其变质。 在感应加热期间,气体释放材料的温度比吸气金属的温度升高,并且在吸气金属开始蒸发之前开始释放气体。

    Method of producing magnetrons
    49.
    发明授权
    Method of producing magnetrons 失效
    磁控管的制造方法

    公开(公告)号:US4445873A

    公开(公告)日:1984-05-01

    申请号:US290194

    申请日:1981-08-05

    CPC分类号: H01J23/05 H01J9/39

    摘要: A method of producing a magnetron is disclosed which has a getter on at least one of the opposed surfaces of two end shields of a cathode. The getter is formed in such a manner that after the cathode is assembled, a paste containing a getter metal powder is coated on at least one of the opposed surfaces of the end shields and dried before the filament of the cathode is carburized and then while the magnetron is being exhausted, the dried paste is sintered to produce a sintered substance of the getter metal powder.

    摘要翻译: 公开了一种制造磁控管的方法,其在阴极的两个端盖的相对表面中的至少一个上具有吸气剂。 吸气剂以这样的方式形成,即阴极组装后,将含有吸气剂金属粉末的糊剂涂覆在端部屏蔽件的至少一个相对的表面上,并在阴极的细丝渗碳之前干燥,然后在 磁控管正在耗尽,干燥的糊料被烧结以产生吸气剂金属粉末的烧结物质。