公开(公告)号：US5854086A

公开(公告)日：1998-12-29

申请号：US697231

申请日：1996-08-21

申请人： Mehran Matloubian ,  Jeffrey B. Shealy

发明人： Mehran Matloubian ,  Jeffrey B. Shealy

IPC分类号： H01L21/335 ,  H01L21/338 ,  H01L21/76 ,  H01L21/66 ,  G01R31/26 ,  H01L21/28 ,  H01L21/44

CPC分类号： H01L29/66863 ,  H01L21/7605 ,  H01L29/66462

摘要： An apparatus and method of processing a planar HEMT or FET semiconductor device is disclosed. An ohmic metalization is patterned on a semiconductor surface then lifted-off. A plurality of process control monitors are isolated, preferably using a wet etch process. The process control monitors preferably include transmission line patterns (TLMs) and etch field effect transistors The TLMs measure the contact resistance during the ohmic alloy process, and the etch field effect transistors monitor the drain current during the gate-recess step. The ohmic metalizations are then alloyed, and a gate is written using an electron beam. The semiconductor device is isolated, followed by application of an overlay which connects all resulting planar device connecting pads.

摘要翻译： 公开了一种处理平面HEMT或FET半导体器件的设备和方法。 在半导体表面上形成欧姆金属化，然后剥离。 隔离多个过程控制监视器，优选地使用湿式蚀刻工艺。 过程控制监视器优选地包括传输线图案（TLM）和蚀刻场效应晶体管TLM在欧姆合金工艺期间测量接触电阻​​，并且蚀刻场效应晶体管在栅极 - 凹陷步骤期间监视漏极电流。 然后将欧姆金属化合金化，并使用电子束写入栅极。 隔离半导体器件，然后应用覆盖层，连接所有得到的平面器件连接焊盘。

公开(公告)号：US5623235A

公开(公告)日：1997-04-22

申请号：US532062

申请日：1995-09-22

申请人： Mehran Matloubian ,  Mark Lui

发明人： Mehran Matloubian ,  Mark Lui

IPC分类号： H01P1/23

CPC分类号： H01P1/23 ,  Y10T29/49016

摘要： A wide-bandwidth variable attenuator/modulator incorporating a region of material comprising a combination of a ferromagnetic/nonmagnetic material which exhibits a Giant Magnetoresistance (GMR) effect.

摘要翻译： 一种宽带可变衰减器/调制器，其结合包含表现出巨磁阻（GMR）效应的铁磁/非磁性材料的组合的材料区域。

公开(公告)号：US5528209A

公开(公告)日：1996-06-18

申请号：US430067

申请日：1995-04-27

申请人： Perry A. Macdonald ,  Lawrence E. Larson ,  Michael G. Case ,  Mehran Matloubian ,  Mary Y. Chen ,  David B. Rensch

发明人： Perry A. Macdonald ,  Lawrence E. Larson ,  Michael G. Case ,  Mehran Matloubian ,  Mary Y. Chen ,  David B. Rensch

IPC分类号： H01L21/822 ,  H01L27/04 ,  H01L27/06 ,  H01L29/205 ,  H01P3/08 ,  H03F3/54 ,  H03H7/38 ,  H01P5/00

CPC分类号： H01L27/0605 ,  H01L2223/6627 ,  H01L2223/6644 ,  H01L2223/6683

摘要： A monolithic microwave integrated circuit is formed by positioning a distributed, transmission-line network over a microwave-device structure. The ground plane of the transmission-line network adjoins an interconnect system of the microwave-device structure and signal lines of the transmission-line network are adapted to communicate with the microwave-device structure through orifices of the ground plane. The invention facilitates the use of low-cost silicon-based transistors in monolithic microwave integrated circuits.

摘要翻译： 通过在微波器件结构上定位分布式传输线网络来形成单片微波集成电路。 传输线网络的接地平面与微波器件结构的互连系统相邻，并且传输线网络的信号线适于通过接地平面的孔与微波器件结构通信。 本发明有助于在单片微波集成电路中使用低成本硅基晶体管。

公开(公告)号：US09236238B2

公开(公告)日：2016-01-12

申请号：US13244037

申请日：2011-09-23

申请人： Timothy J. Brockett ,  Mehran Matloubian

发明人： Frederick M. Espiau ,  Timothy J. Brockett ,  Mehran Matloubian

IPC分类号： H05B37/00 ,  H01J65/04

CPC分类号： H01J65/042

摘要： The present invention is directed to devices and methods for generating light with plasma lamps. More particularly, the present invention provides plasma lamps driven by a radio-frequency source without the use of electrodes inside the bulb and related methods. In a specific embodiment, a coaxial type coupling module is used to drive an electrodeless bulb. Merely by way of example, such plasma lamps can be applied to applications such as stadiums, security, parking lots, military and defense, street lighting, large and small buildings, vehicle headlamps, aircraft landing, bridges, warehouses, UV water treatment, agriculture, architectural lighting, stage lighting, medical illumination, microscopes, projectors and displays, any combination of these, and the like.

摘要翻译： 本发明涉及用等离子体灯产生光的装置和方法。 更具体地说，本发明提供了由射频源驱动的等离子体灯，而不使用灯泡内的电极和相关方法。 在具体实施例中，使用同轴型耦合模块来驱动无电极灯泡。 仅仅举例来说，这种等离子灯可以应用于诸如体育馆，安全，停车场，军事和国防，街道照明，大型和小型建筑物，车前灯，飞机着陆，桥梁，仓库，UV水处理，农业等应用 ，建筑照明，舞台灯光，医疗照明，显微镜，投影仪和显示器，它们的任意组合等。

公开(公告)号：US08766539B2

公开(公告)日：2014-07-01

申请号：US12685650

申请日：2010-01-11

申请人： Frederick M. Espiau ,  Timothy J. Brockett ,  Mehran Matloubian ,  Douglas A. Doughty

发明人： Frederick M. Espiau ,  Timothy J. Brockett ,  Mehran Matloubian ,  Douglas A. Doughty

IPC分类号： H05B37/00 ,  H05B41/16

CPC分类号： H05B41/2806 ,  H01J65/046 ,  H01J65/048 ,  Y02B20/22

摘要： An electrode-less plasma lamp, comprising generally of a bulb containing a gas-fill and light emitter(s) that is excited to produce light using radio-frequency (RF) energy. The present lamp includes compact air resonators/waveguides that use grounded coupling-elements with integrated bulb assemblies to reduce the size of the resonator and improve the performance of the lamp as well as reduce cost and simplify manufacturability.

摘要翻译： 一种无电极等离子体灯，其包括通常包含气体填充的灯泡和被激发以使用射频（RF）能量产生光的发光器）。 本灯包括紧凑型空气谐振器/波导，其使用具有集成灯泡组件的接地耦合元件来减小谐振器的尺寸并提高灯的性能，以及降低成本并简化可制造性。

公开(公告)号：US20140062298A1

公开(公告)日：2014-03-06

申请号：US13602030

申请日：2012-08-31

申请人： Timothy Brockett ,  David Schmelzer ,  Aric Dorschner ,  Mehran Matloubian

发明人： Timothy Brockett ,  David Schmelzer ,  Aric Dorschner ,  Mehran Matloubian

IPC分类号： H01J65/04

CPC分类号： H01J65/042 ,  H05B41/2806 ,  H05B41/2813 ,  Y02B20/22

摘要： This disclosure is directed to devices and methods for generating light with electrode-less plasma lamps. More particularly, the present invention provides plasma lamps driven by a radio-frequency source without the use of electrodes inside the bulb, and a pulse-width modulation device that provides RF power regulation, and related methods. The bulb comprises gaseous material with metal halides and/or light emitters that, when powered, substantially stays in an arc shape state. The switching pulse-width modulation device is operable at specific modulation frequencies, duty cycles, and durations to stabilize or control the arc state/mode, which enables consistent and high efficiencies.

摘要翻译： 本公开涉及用无电极等离子体灯产生光的装置和方法。 更具体地说，本发明提供了不使用灯泡内部的电极的由射频源驱动的等离子体灯，以及提供RF功率调节的脉宽调制装置及相关方法。 灯泡包括具有金属卤化物和/或发光体的气体材料，当被供电时，该灯泡基本上保持在弧形状态。 开关脉宽调制装置可以在特定的调制频率，占空比和持续时间中工作，以稳定或控制电弧状态/模式，从而实现一致和高效率。

公开(公告)号：US08294368B2

公开(公告)日：2012-10-23

申请号：US12818984

申请日：2010-06-18

申请人： Frederick M. Espiau ,  Mehran Matloubian ,  Timothy J. Brockett ,  David Schmelzer

发明人： Frederick M. Espiau ,  Mehran Matloubian ,  Timothy J. Brockett ,  David Schmelzer

IPC分类号： H01J7/46

CPC分类号： H01J65/04 ,  H01J65/044 ,  H05B41/2806 ,  Y02B20/22

摘要： An electrodeless plasma lamp includes a bulb containing a gas-fill and light emitter(s) excited to produce light using radio-frequency (RF) energy. Input and output coupling elements separated from each other by a gap couple RF energy from an RF source to the bulb. One end of the input coupling element is electrically connected to an RF source while the other end is connected to ground. One end of the output coupling element is connected to ground while the other end is connected to the bulb.

摘要翻译： 一种无电极等离子体灯包括一个灯泡，其中包含一个被激发以产生使用射频（RF）能量的光的气体填充物和发光体。 输入和输出耦合元件通过间隙将RF能量从RF源耦合到灯泡。 输入耦合元件的一端电连接到RF源，而另一端连接到地。 输出耦合元件的一端连接到地，而另一端连接到灯泡。

公开(公告)号：US08283866B2

公开(公告)日：2012-10-09

申请号：US12904043

申请日：2010-10-13

申请人： Frederick M. Espiau ,  Timothy J. Brockett ,  Mehran Matloubian

发明人： Frederick M. Espiau ,  Timothy J. Brockett ,  Mehran Matloubian

IPC分类号： H01J7/46

CPC分类号： H01J65/042 ,  H01J65/044 ,  H05B41/2806 ,  Y02B20/22

摘要： An electrode-less plasma lamps comprises generally of a bulb containing a gas-fill that is excited to produce light using radio-frequency (RF) energy. In specific embodiments, the use of grounded coupling-elements with integrated bulb assemblies simplifies manufacturability, improves resonant frequency control, and enables the use of solid, partially filled, and hollow lamp bodies. In some embodiments, a method of operating an electrodeless plasma lamp device includes transferring RF energy from the RF source to an input coupling-element and illuminating electromagnetic energy substantially from the length of a gas-filled vessel from discharge of the gas-filled vessel.

摘要翻译： 无电极等离子体灯通常包括含有气体填充物的灯泡，其被激发以使用射频（RF）能量产生光。 在具体实施例中，使用具有集成灯泡组件的接地耦合元件简化了可制造性，改善了谐振频率控制，并且能够使用固体，部分填充和中空的灯体。 在一些实施例中，操作无电极等离子体灯装置的方法包括将RF能量从RF源传输到输入耦合元件，并且基本上从充满气体的容器的长度照射电磁能量，以释放充满气体的容器。

公开(公告)号：US08258687B2

公开(公告)日：2012-09-04

申请号：US12225652

申请日：2007-03-28

申请人： Frederick M. Espiau ,  Mehran Matloubian ,  Alexandre Dupuy

发明人： Frederick M. Espiau ,  Mehran Matloubian ,  Alexandre Dupuy

IPC分类号： H01J61/12

CPC分类号： H01J65/044

摘要： The present invention relates to a coaxial waveguide electrodeless lamp. The lamp is formed in analogy to coaxial waveguide cables, with an outer conductor, a central conductor, and a gas-fill vessel made of dielectric material between the outer conductor and the inner conductor. The gas-fill vessel is substantially hollow and filled with substances that form a plasma and emit light when RF radiation carried by the central conductor and ground conductor interacts with the substances in the gas-fill vessel. The present invention also relates to a leaky waveguide electrodeless lamp. The lamp is formed in analogy to leaky waveguides, with a conductor, a ground conductor, and a gas-fill vessel made of dielectric material butted against the conductor and encompassed by the ground conductor. The leaky waveguide electrodeless lamp emits light from a plasma similar to light-emission action of the coaxial waveguide electrodeless lamp described above.

摘要翻译： 本发明涉及同轴波导无极灯。 灯类似于同轴波导电缆形成，外部导体，中心导体和由外部导体和内部导体之间的电介质材料制成的气体填充容器。 气体填充容器基本上是中空的，并且填充有形成等离子体的物质，并且当由中心导体和接地导体携带的RF辐射与气体填充容器中的物质相互作用时发出光。 本发明还涉及一种泄漏波导无极灯。 灯类似于泄漏的波导形成，其中导体，接地导体和由电介质材料制成的气体填充容器对接导体并被接地导体包围。 类似于上述同轴波导无极灯的发光作用，泄漏波导无极灯发射等离子体的光。

公开(公告)号：US20120086352A1

公开(公告)日：2012-04-12

申请号：US13327760

申请日：2011-12-16

申请人： Frederick Matthew Espiau ,  Mehran Matloubian

发明人： Frederick Matthew Espiau ,  Mehran Matloubian

IPC分类号： H01J65/04 ,  H05B41/16

CPC分类号： H01J65/046 ,  H01J65/042 ,  H05B41/2806 ,  Y02B20/22

摘要： Described is an electrode-less plasma lamp comprising a gas-fill vessel, a gas-fill contained within the gas-fill vessel, an RF electromagnetic radiation source, an RF electromagnetic resonator, an output probe that couples RF energy from the RF electromagnetic resonator to the gas-fill vessel, an input probe that couples RF energy from the RF electromagnetic radiation source to the resonator, and a grounding strap that holds a metal veneer surrounding the resonator and a portion of the gas-fill vessel at RF ground. Also described are many variations of the electrode-less plasma lamp; non-limiting examples of which include embodiments that employ other probes in a Dielectric Resonant Oscillator to drive the lamp, and many methods of improving light-harvesting, including raising the gas-fill vessel away from the resonator via a coaxial type transmission line, and collecting light with an optical reflector.

摘要翻译： 描述了一种无电极等离子体灯，其包括气体填充容器，气体填充容器内包含的气体填充物，RF电磁辐射源，RF电磁谐振器，将来自RF电磁谐振器的RF能量耦合的输出探头 将来自RF电磁辐射源的RF能量耦合到谐振器的输入探针以及将谐振器周围的金属薄板和RF接地的气体填充容器的一部分的接地带连接到气体填充容器。 还描述了无电极等离子体灯的许多变化; 其非限制性实例包括采用介质谐振器中的其它探针驱动灯的实施例，以及许多改善光收集的方法，包括通过同轴型传输线使气体填充容器远离谐振器，以及 用光学反射器收集光。