公开(公告)号：US07438995B2

公开(公告)日：2008-10-21

申请号：US10475245

申请日：2002-05-14

Applicant: Roger Harquail French ,  Robert Clayton Wheland ,  Weiming Qiu

Inventor： Roger Harquail French ,  Robert Clayton Wheland ,  Weiming Qiu

IPC: G03F7/20 ,  C08F12/20 ,  C08F14/18 ,  C08F114/18

CPC classification number: G03F1/62 ,  G03F7/0046

Abstract: Disclosed are partially fluorinated and fully fluorinated polymers that are substantially transparent to ultraviolet radiation at wavelengths from approximately 150 nanometer to 260 nanometers.

Abstract translation: 公开了部分氟化和完全氟化的聚合物，其对于大约150纳米至260纳米波长的紫外线辐射基本上是透明的。

公开(公告)号：US06872503B2

公开(公告)日：2005-03-29

申请号：US10257901

申请日：2001-05-04

Applicant: Robert Clayton Wheland ,  Roger Harquail French ,  Frank Leonard Schadt, III ,  Frederick C. Zumsteg, Jr.

Inventor： Robert Clayton Wheland ,  Roger Harquail French ,  Frank Leonard Schadt, III ,  Frederick C. Zumsteg, Jr.

IPC: C08F8/00 ,  C08F214/18 ,  C08F220/10 ,  G03F7/004 ,  G03F7/038 ,  G03F7/039 ,  G03C1/492

CPC classification number: C08F214/186 ,  G03F7/0046 ,  G03F7/0048 ,  G03F7/0382 ,  G03F7/0392

Abstract: Fluoroolefin/acid group or protected acid group-containing copolymers for photoresist compositions and microlithography methods employing the photoresist compositions are described. These copolymer compositions comprise 1) at least one fluoroolefin, preferably hexafluoroisobutylene, and 2) an acid group or a protected acid group (e.g., a t-alkyl ester, preferably a t-butyl ester), which together impart high ultraviolet (UV) transparency and developability in basic media to these materials. The materials of this invention have high UV transparency, particularly at short wavelengths, e.g., 157 nm and 193 nm, which makes them useful for lithography at these short wavelengths.

Abstract translation: 描述了用于光致抗蚀剂组合物的氟烯烃/酸基或被保护的含酸基的共聚物和使用光致抗蚀剂组合物的微光刻方法。 这些共聚物组合物包含1）至少一种氟代烯烃，优选六氟异丁烯，以及2）酸性基团或被保护的酸基团（例如，叔烷基酯，优选叔丁基酯），它们共同赋予高紫外（UV） 这些材料的基本媒体的透明度和可开发性。 本发明的材料具有高的UV透明度，特别是在短波长，例如157nm和193nm，这使得它们可用于在这些短波长处的光刻。

公开(公告)号：US06824930B1

公开(公告)日：2004-11-30

申请号：US10130445

申请日：2002-05-15

Applicant: Robert Clayton Wheland ,  Roger Harquail French ,  Fredrick Claus Zumsteg, Jr.

Inventor： Robert Clayton Wheland ,  Roger Harquail French ,  Fredrick Claus Zumsteg, Jr.

IPC: G03F900

CPC classification number: G03F1/62 ,  C08F214/18 ,  G03F7/0046 ,  G03F7/091

Abstract: Disclosed are partially fluorinated and fully fluorinated polymers that are substantially transparent to ultraviolet radiation at wavelengths from 140 to 186 nanometers.

Abstract translation: 公开了部分氟化和完全氟化的聚合物，其对于140-186纳米波长的紫外线辐射基本上是透明的。

公开(公告)号：US06423798B2

公开(公告)日：2002-07-23

申请号：US09783498

申请日：2001-02-14

Applicant: Robert Clayton Wheland ,  Paul Douglas Brothers ,  Colin Anolick ,  Charles W. Stewart, Sr.

Inventor： Robert Clayton Wheland ,  Paul Douglas Brothers ,  Colin Anolick ,  Charles W. Stewart, Sr.

IPC: C08F22202

CPC classification number: C08L27/12 ,  C08F214/186 ,  C09D127/12 ,  Y02P20/544

Abstract: Novel copolymers of fluorinated olefins and maleic anhydride, maleic acid, dichloromaleic anhydride or dichloromaleic acid may be made by using as solvents for the maleic anhydride or acid a perfluorinated alkyl carboxylic acid, or liquid or supercritical hexafluoropropylene or carbon dioxide. The resulting polymers are useful as adhesives or compatibilizing agents for fluoropolymers, and in coatings.

Abstract translation: 氟代烯烃和马来酸酐的新型共聚物，马来酸，二氯马来酸酐或二氯马来酸可以通过使用用作马来酸酐或酸的全氟化烷基羧酸或液体或超临界六氟丙烯或二氧化碳的溶剂来制备。 所得聚合物可用作含氟聚合物和涂料中的粘合剂或相容剂。

公开(公告)号：US6133389A

公开(公告)日：2000-10-17

申请号：US869521

申请日：1997-06-06

Applicant: Colin Anolick ,  Viacheslav Alexandrovich Petrov ,  Bruce Edmund Smart ,  Charles Winfield Stewart ,  Robert Clayton Wheland ,  William Brown Farnham ,  Andrew Edward Feiring ,  Weiming Qiu

Inventor： Colin Anolick ,  Viacheslav Alexandrovich Petrov ,  Bruce Edmund Smart ,  Charles Winfield Stewart ,  Robert Clayton Wheland ,  William Brown Farnham ,  Andrew Edward Feiring ,  Weiming Qiu

IPC: C07C313/20 ,  C07C317/04 ,  C07C317/18 ,  C08F214/18 ,  C08F214/22 ,  C08F214/26 ,  C08F214/28 ,  C08L23/02 ,  C08L27/18 ,  C09D127/18 ,  C09D127/20 ,  C08F114/18

CPC classification number: C07C313/20 ,  C07C317/04 ,  C07C317/18 ,  C08F214/18 ,  C08F214/22 ,  C08F214/26 ,  C08F214/265 ,  C08F214/28 ,  C08L23/02 ,  C09D127/18 ,  C09D127/20 ,  C08L27/18

Abstract: Disclosed herein are novel amorphous tetrafluoroethylene-hexafluoropropylene (TFE-HFP) dipolymers, and other copolymers containing TFE, HFP and a third monomer, many of which are more random than previous amorphous TFE-HFP copolymers, as well as a novel high productivity continuous process for making these polymers. The polymers are particularly useful in the form of coatings, films and encapsulants.

公开(公告)号：US5962746A

公开(公告)日：1999-10-05

申请号：US128506

申请日：1998-08-04

Applicant: George Francis Diffendall ,  Thomas William Harding ,  Joseph Norman Hockman ,  Carl George Krespan ,  Matthew John Targett ,  Robert Clayton Wheland

Inventor： George Francis Diffendall ,  Thomas William Harding ,  Joseph Norman Hockman ,  Carl George Krespan ,  Matthew John Targett ,  Robert Clayton Wheland

IPC: C07C409/24 ,  C07C409/30 ,  C07C409/34 ,  C07C409/38 ,  C07C409/40 ,  C07C409/42 ,  C07C409/00

CPC classification number: C07C407/00

Abstract: A process for the faster manufacturing of hydrocarbon, fluorocarbon and chlorocarbon acyl peroxides is disclosed wherein a hydroxide, a peroxide and an acyl halide are reacted under continuous vigorous agitation conditions so as to bring the reaction to substantial completion is less than one minute.

Abstract translation: 公开了一种用于快速制备烃，碳氟化合物和氯代碳酰基过氧化物的方法，其中氢氧化物，过氧化物和酰卤在连续剧烈搅拌条件下反应，使反应基本上完成的时间小于1分钟。