摘要:
A discharge location determination unit includes: discharge detection circuits connected to metal electrodes, respectively, and to which a signal due to discharge is input; and a calculation circuit to which signals output from the discharge detection circuits are input, wherein, if the intensity difference or intensity ratio between the two output signals is within a predetermined value, the calculation circuit determines that the discharge location is inside a tank, otherwise the calculation circuit determines that the discharge location is outside the tank.
摘要:
A gate driver turns on/off a switching element Q1 by applying a control signal from a controller to a gate of the switching element. The switching element has the gate, a drain, and a source and contains a wide-bandgap semiconductor. The gate driver includes a parallel circuit that includes a first capacitor C1 and a first resistor R1 and is connected between the controller and the gate of the switching element and a short-circuit unit S4 that is connected between the gate and source of the switching element and short-circuits the gate and source of the switching element after a delay from an OFF pulse of the control signal.
摘要:
A particle beam irradiation apparatus that can measure and display a dose two-dimensional distribution during scan while reducing degradation of a particle beam shape, including a particle beam generation portion; a particle beam emission control portion; a two-dimensional beam scanning portion; a sensor portion including first linear electrodes arranged in parallel in a first direction and second linear electrodes arranged in parallel in a second direction orthogonal to the first direction; a beam shape calculation portion that calculates a center of gravity of the particle beam from outputs of each the first linear and second linear electrodes and that obtains a two-dimensional beam shape of the particle beam around the center of gravity; a storage portion that accumulates and stores the two-dimensional beam shapes; and a display portion that displays the two-dimensional beam shapes as a two-dimensional distribution of a dose.
摘要:
A liquid immersion member is disposed inside an immersion exposure apparatus and at least partly around an optical member and an optical path of exposure light that passes through a liquid between the optical member and an object. The liquid immersion member comprises: a first member, which has a recovery port that recovers at least some of the liquid from the space above the object; a recovery passageway, wherethrough the liquid recovered via the recovery port flows; a discharge part, which has a first discharge port for discharging the liquid from the recovery passageway and a second discharge port for discharging a gas from the recovery passageway, that separately discharges the liquid and the gas from the recovery passageway; and a hindering part, which hinders the liquid in the recovery passageway from contacting the second discharge port.
摘要:
An exposure apparatus exposes a substrate with exposure light, which transits a first liquid. The exposure apparatus comprises: an optical member, which has an emergent surface wherefrom the exposure light emerges; a liquid immersion member, which at least partly surrounds an optical path of the exposure light emerging from the emergent surface, has a lower surface that the substrate opposes during an exposure of the substrate, and holds the first liquid between the substrate and at least part of the lower surface; and a plate member, which has a first surface and a second surface that faces the opposite direction to the first surface and which is capable of moving to a position at which it opposes the lower surface; wherein, cleaning is performed in a state wherein the first surface opposes the lower surface.
摘要:
A current source inverter includes an inverter having arm units and AC terminals, the numbers of the arm units and AC terminals being adapted to an AC load connected to the AC terminals. An upper arm is connected between a positive DC terminal and the corresponding AC terminal and has an upper arm switch Q7 (Q2, Q3) and an upper arm diode. A lower arm is connected between a negative DC terminal 5 and the corresponding AC terminal and has a lower arm switch Q8 (Q5, Q6) and a lower arm diode. The apparatus also includes a smoothing reactor and a DC power source that are connected in series between the positive DC terminal and the negative DC terminal, and includes drivers to control ON/OFF of the upper and lower aim switches to output AC power. The switches Q7 and Q8 are each a normally-ON switch.
摘要:
In the present invention, switching circuits connected in middle points of power supply lines of a three-phase alternating-current power supply are switched to cause currents to intermittently flow on primary windings of a transformer, a voltage generated on a secondary winding is rectified and smoothed, and then is outputted to a load. The switching circuits each include: a series circuit including a first primary winding, a bidirectional switch and a second primary winding, which are connected in series in this order; a drive circuit power supply generating circuit generating a direct-current positive voltage and a direct-current negative voltage by use of an alternating-current power supply voltage applied between two ends of the series circuit; and a drive circuit performing on-off drive of the bidirectional switch. A reference potential point of the bidirectional switch is connected to a reference potential point of the drive circuit power supply generating circuit.
摘要:
Techniques are disclosed herein for applying different process steps to single-level cell (SLC) blocks in a memory array than to multi-level cell (MLC) blocks such that the SLC blocks will have high endurance and the MLC blocks will have high reliability. In some aspects, different doping is used in the MLC blocks than the SLC blocks. In some aspects, different isolation is used in the MLC blocks than the SLC blocks. Techniques are disclosed that apply different read parameters depending on how many times a block has been programmed/erased. Therefore, blocks that have been cycled many times are read using different parameters than blocks that have been cycled fewer times.
摘要:
In a display device comprising a cooling suction fan and an air filter arranged on the suction side of the cooling suction fan, there are provided first means for measuring the value of a current flowing through a power supply line to the cooling suction fan for each predetermined time period, and second means for judging that the air filter is clogged when the measured current value is not more than a predetermined reference value, to inform the user that the air filter is clogged.