摘要:
A stripping method for stripping a support plate from a laminate including a substrate and the support plate adhered to the wafer via an adhesive layer, in which the adhesive layer is formed from an adhesive compound soluble in a non-polar solvent or a highly polar solvent; and the stripping method includes the step of supplying the non-polar solvent or the highly polar solvent, so that the non-polar solvent or the highly polar solvent is retained at least on an edge portion of that surface of the laminate which faces the support plate, and on a lateral surface of the laminate.
摘要:
To provide a perforated support plate with high rigidity, the perforated support plate for supporting a surface of a wafer by interposing an adhesive layer comprises a reinforcing part for deflection prevention.
摘要:
The object of the present invention is to provide a method for forming a coating film in which a coating film is prevented from drastically shrinking by controlling the temperature accurately when a SOG film is formed in a substrate with a coating liquid containing an alkoxysilane compound, cracks are prevented from occurring in the SOG film by preventing the glass forming material from disappearing, and also metal materials of the circuit are prevented from melting and deforming. According to the present invention, the temperature of the surface of the material to be treated is escalated from a lower temperature to a higher temperature by setting at least three ranges of the temperature in the drying process, and the temperature of the surface of the material to be treated is further increased to 250-500° C. and maintained within the range of ±3° C. during the baking process.
摘要:
A system, method, and computer program product that have a graphical user interface capable of easily generating different kinds of items on a canvas by a user by operation of a mouse pointer on the canvas without requiring movement of the mouse pointer between a palette and the canvas are disclosed. In accordance with one embodiment of the present invention a system is provided which comprises displaying means to display a pointer and a positional reference on a display screen; input means to accept an operation by a user; and control means to control a position and a function of the pointer on the display screen in response to the operation; wherein the control means determines the function of the pointer according to a distance between the position of the pointer and the positional reference.
摘要:
A crime prevention system includes an operation sensor 3 that judges whether a user has operated an access point in an object of operation by a user, an ID authentication processing unit 21 that performs ID authentication for the user on the basis of a result of the judgment of the operation sensor 3, and an external processing determining unit 22 that causes an external apparatus to execute a service corresponding to a result of the ID authentication of the ID authentication processing unit 21.
摘要:
A system, method, and computer program product that have a graphical user interface capable of easily generating different kinds of items on a canvas by a user by operation of a mouse pointer on the canvas without requiring movement of the mouse pointer between a palette and the canvas are disclosed. In accordance with one embodiment of the present invention a system is provided which comprises displaying means to display a pointer and a positional reference on a display screen; input means to accept an operation by a user; and control means to control a position and a function of the pointer on the display screen in response to the operation; wherein the control means determines the function of the pointer according to a distance between the position of the pointer and the positional reference.
摘要:
The objective of the present invention is to provide proximity sensors employing impulse waves to detect the characteristics of objects lying inside the object of surveillance, such as a container, including their distance, the reflection strength from an object, the speed an object is moving, etc., as well as to provide a status surveillance system which detects, from the data from the proximity sensors, that the inside of the container remains unchanged. To achieve the foregoing objectives, the present invention adds proximity sensor functions to wireless communication nodes inside of the object of surveillance, such as inside of a container. Said proximity sensors output microimpulse waves from the wireless communication nodes, and said communication nodes receive the reflections of those waves from nearby objects. The wave reception sampling is performed based upon the bit signals of the clock for the microimpulse transmissions and the local clock, and the analysis of the received signals enables the highly precise measurement of the distance to an object using simple circuitry. It is then possible to detect an abnormal occurrence inside the object of surveillance by comparing the characteristic data obtained from the initial environment with that data obtained during the period of surveillance. Further, the proximity sensing function is able to detect the direction of any penetration.
摘要:
A developing apparatus and method is provided in which the use amount of a developing solution can be reduced without deteriorating the accuracy of development. The developing apparatus comprises a new solution tank for storing an unused developing solution and a used solution tank for storing a used developing solution which is withdrawn from a material to be treated. A new solution feeding nozzle extends from the new solution tank, and the tip end of the nozzle faces toward the upper portion of the cup of each developing unit. A used solution feeding nozzle extends from the used solution tank, and the tip end of the nozzle faces toward the upper portion of the cup of each developing unit.
摘要:
A method for forming a coating film, comprises the steps of: applying a raw material of a low dielectric constant onto a surface of a plate-like material to be treated; reducing oxygen concentration in the atmosphere surrounding the plate-like material to be less than or equal to 1% before a surface temperature of said plate-like material to be treated rises to 200° C.; thereafter heating said plate-like material to be treated to a temperature greater than or equal to 400° C.; and then maintaining the oxygen content in the atmosphere to be less than or equal to 1% until the surface temperature of said plate-like material to be treated lowers to 200° C. The raw material is an organic SOG obtained by hydrolyzing and condensing at least one alkoxysilane compound expressed by the following equation (I) into an organic solvent under an acid catalyst, RnSi(OR1)4-n (I) where R is an alkyl group or an aryl group having a carbon number of 1-4, R1is an alkyl group having a carbon number of 1-4, and n is an integer of 0-2.