STRIPPING DEVICE AND STRIPPING METHOD
    51.
    发明申请
    STRIPPING DEVICE AND STRIPPING METHOD 有权
    剥离装置和剥离方法

    公开(公告)号:US20110259527A1

    公开(公告)日:2011-10-27

    申请号:US13093412

    申请日:2011-04-25

    IPC分类号: B32B38/10

    摘要: A stripping method for stripping a support plate from a laminate including a substrate and the support plate adhered to the wafer via an adhesive layer, in which the adhesive layer is formed from an adhesive compound soluble in a non-polar solvent or a highly polar solvent; and the stripping method includes the step of supplying the non-polar solvent or the highly polar solvent, so that the non-polar solvent or the highly polar solvent is retained at least on an edge portion of that surface of the laminate which faces the support plate, and on a lateral surface of the laminate.

    摘要翻译: 一种用于从包括基底和支撑板的层压板剥离支撑板的剥离方法,所述支撑板通过粘合剂层粘合到晶片上,其中粘合剂层由可溶于非极性溶剂或高极性溶剂的粘合剂形成 ; 并且剥离方法包括供给非极性溶剂或高极性溶剂的步骤,使得非极性溶剂或高极性溶剂至少保留在层压体的面向支持体的表面的边缘部分上 板,并且在层压板的侧表面上。

    Coating film forming method
    53.
    发明授权
    Coating film forming method 有权
    涂膜成型方法

    公开(公告)号:US07601396B2

    公开(公告)日:2009-10-13

    申请号:US11404968

    申请日:2006-04-14

    申请人: Akihiko Nakamura

    发明人: Akihiko Nakamura

    IPC分类号: B05D3/02

    摘要: The object of the present invention is to provide a method for forming a coating film in which a coating film is prevented from drastically shrinking by controlling the temperature accurately when a SOG film is formed in a substrate with a coating liquid containing an alkoxysilane compound, cracks are prevented from occurring in the SOG film by preventing the glass forming material from disappearing, and also metal materials of the circuit are prevented from melting and deforming. According to the present invention, the temperature of the surface of the material to be treated is escalated from a lower temperature to a higher temperature by setting at least three ranges of the temperature in the drying process, and the temperature of the surface of the material to be treated is further increased to 250-500° C. and maintained within the range of ±3° C. during the baking process.

    摘要翻译: 本发明的目的是提供一种形成涂膜的方法,其中通过含有烷氧基硅烷化合物的涂布液在基材中形成SOG膜时,通过高精度地控制温度来防止涂膜急剧收缩, 通过防止玻璃形成材料消失而防止在SOG膜中发生,并且防止电路的金属材料熔化和变形。 根据本发明,通过设定干燥过程中的温度的至少三个范围,并且材料的表面的温度,将要处理的材料的表面的温度从较低的温度升高到更高的温度 待处理进一步提高到250-500℃,并且在烘烤过程中保持在±3℃的范围内。

    Method to create multiple items with a mouse
    54.
    发明授权
    Method to create multiple items with a mouse 失效
    使用鼠标创建多个项目的方法

    公开(公告)号:US07478343B2

    公开(公告)日:2009-01-13

    申请号:US11463702

    申请日:2006-08-10

    IPC分类号: G06F3/048 G09G5/00

    摘要: A system, method, and computer program product that have a graphical user interface capable of easily generating different kinds of items on a canvas by a user by operation of a mouse pointer on the canvas without requiring movement of the mouse pointer between a palette and the canvas are disclosed. In accordance with one embodiment of the present invention a system is provided which comprises displaying means to display a pointer and a positional reference on a display screen; input means to accept an operation by a user; and control means to control a position and a function of the pointer on the display screen in response to the operation; wherein the control means determines the function of the pointer according to a distance between the position of the pointer and the positional reference.

    摘要翻译: 一种具有图形用户界面的系统,方法和计算机程序产品,其能够通过在画布上操作鼠标指针而容易地在画布上生成画布上的不同种类的项目,而不需要鼠标指针在调色板和 画布被披露。 根据本发明的一个实施例,提供了一种系统,其包括在显示屏上显示指针和位置参考的显示装置; 输入装置接受用户的操作; 以及控制装置,用于响应于该操作来控制指示器在显示屏幕上的位置和功能; 其中所述控制装置根据所述指针的位置与所述位置参考之间的距离来确定所述指针的功能。

    METHOD TO CREATE MULTIPLE ITEMS WITH A MOUSE
    56.
    发明申请
    METHOD TO CREATE MULTIPLE ITEMS WITH A MOUSE 失效
    用鼠标创建多个项目的方法

    公开(公告)号:US20070035514A1

    公开(公告)日:2007-02-15

    申请号:US11463702

    申请日:2006-08-10

    IPC分类号: G09G5/08

    摘要: A system, method, and computer program product that have a graphical user interface capable of easily generating different kinds of items on a canvas by a user by operation of a mouse pointer on the canvas without requiring movement of the mouse pointer between a palette and the canvas are disclosed. In accordance with one embodiment of the present invention a system is provided which comprises displaying means to display a pointer and a positional reference on a display screen; input means to accept an operation by a user; and control means to control a position and a function of the pointer on the display screen in response to the operation; wherein the control means determines the function of the pointer according to a distance between the position of the pointer and the positional reference.

    摘要翻译: 一种具有图形用户界面的系统,方法和计算机程序产品,其能够通过在画布上操作鼠标指针而容易地在画布上生成画布上的不同种类的项目,而不需要鼠标指针在调色板和 画布被披露。 根据本发明的一个实施例,提供了一种系统,其包括在显示屏上显示指针和位置参考的显示装置; 输入装置接受用户的操作; 以及控制装置,用于响应于该操作来控制指示器在显示屏幕上的位置和功能; 其中所述控制装置根据所述指针的位置与所述位置参考之间的距离来确定所述指针的功能。

    Proximate sensor using micro impulse waves for monitoring the status of an object, and monitoring system employing the same
    58.
    发明授权
    Proximate sensor using micro impulse waves for monitoring the status of an object, and monitoring system employing the same 失效
    使用微脉冲波的近似传感器用于监测物体的状态,以及采用该物体的监测系统

    公开(公告)号:US06954145B2

    公开(公告)日:2005-10-11

    申请号:US10228279

    申请日:2002-08-27

    摘要: The objective of the present invention is to provide proximity sensors employing impulse waves to detect the characteristics of objects lying inside the object of surveillance, such as a container, including their distance, the reflection strength from an object, the speed an object is moving, etc., as well as to provide a status surveillance system which detects, from the data from the proximity sensors, that the inside of the container remains unchanged. To achieve the foregoing objectives, the present invention adds proximity sensor functions to wireless communication nodes inside of the object of surveillance, such as inside of a container. Said proximity sensors output microimpulse waves from the wireless communication nodes, and said communication nodes receive the reflections of those waves from nearby objects. The wave reception sampling is performed based upon the bit signals of the clock for the microimpulse transmissions and the local clock, and the analysis of the received signals enables the highly precise measurement of the distance to an object using simple circuitry. It is then possible to detect an abnormal occurrence inside the object of surveillance by comparing the characteristic data obtained from the initial environment with that data obtained during the period of surveillance. Further, the proximity sensing function is able to detect the direction of any penetration.

    摘要翻译: 本发明的目的是提供接近传感器,其使用脉冲波来检测位于监视对象内的物体的特征,例如容器,包括其距离,物体的反射强度,物体移动的速度, 等等,并且提供状态监视系统,其从接近传感器的数据检测容器的内部保持不变。 为了实现上述目的,本发明将接近传感器功能添加到诸如容器内部的监视对象内的无线通信节点。 所述接近传感器从无线通信节点输出微脉冲波,并且所述通信节点接收来自附近对象的那些波的反射。 基于用于微脉冲传输和本地时钟的时钟的位信号执行波接收采样,并且接收信号的分析使得能够使用简单的电路高度精确地测量到对象的距离。 通过将从初始环境获得的特征数据与在监视期间获得的数据进行比较,可以检测监视对象内的异常发生。 此外,接近感测功能能够检测任何穿透的方向。

    Developing apparatus and method
    59.
    发明申请
    Developing apparatus and method 失效
    开发设备和方法

    公开(公告)号:US20050180744A1

    公开(公告)日:2005-08-18

    申请号:US10997816

    申请日:2004-11-24

    CPC分类号: G03D3/08

    摘要: A developing apparatus and method is provided in which the use amount of a developing solution can be reduced without deteriorating the accuracy of development. The developing apparatus comprises a new solution tank for storing an unused developing solution and a used solution tank for storing a used developing solution which is withdrawn from a material to be treated. A new solution feeding nozzle extends from the new solution tank, and the tip end of the nozzle faces toward the upper portion of the cup of each developing unit. A used solution feeding nozzle extends from the used solution tank, and the tip end of the nozzle faces toward the upper portion of the cup of each developing unit.

    摘要翻译: 提供一种显影装置和方法,其中可以降低显影液的使用量,而不会降低显影精度。 显影装置包括用于储存未使用的显影液的新溶液罐和用于储存从待处理材料中取出的用过的显影液的用过的溶液罐。 新的溶液供给喷嘴从新的溶液罐延伸,并且喷嘴的尖端面向每个显影单元的杯的上部。 使用的溶液供给喷嘴从使用的溶液罐延伸,并且喷嘴的前端朝向每个显影单元的杯的上部。

    Method for forming a coating film on a plate-like workpiece
    60.
    发明申请
    Method for forming a coating film on a plate-like workpiece 有权
    在板状工件上形成涂膜的方法

    公开(公告)号:US20050009363A1

    公开(公告)日:2005-01-13

    申请号:US10914523

    申请日:2004-08-09

    摘要: A method for forming a coating film, comprises the steps of: applying a raw material of a low dielectric constant onto a surface of a plate-like material to be treated; reducing oxygen concentration in the atmosphere surrounding the plate-like material to be less than or equal to 1% before a surface temperature of said plate-like material to be treated rises to 200° C.; thereafter heating said plate-like material to be treated to a temperature greater than or equal to 400° C.; and then maintaining the oxygen content in the atmosphere to be less than or equal to 1% until the surface temperature of said plate-like material to be treated lowers to 200° C. The raw material is an organic SOG obtained by hydrolyzing and condensing at least one alkoxysilane compound expressed by the following equation (I) into an organic solvent under an acid catalyst, RnSi(OR1)4-n   (I) where R is an alkyl group or an aryl group having a carbon number of 1-4, R1is an alkyl group having a carbon number of 1-4, and n is an integer of 0-2.

    摘要翻译: 一种形成涂膜的方法,包括以下步骤:将低介电常数的原料施加到待处理的板状材料的表面上; 在待处理的板状材料的表面温度升高到200℃之前,将板状材料周围的气氛中的氧浓度降低至1%以下。 然后将待处理的板状材料加热至大于或等于400℃的温度; 然后将气氛中的氧含量保持在1%以下,直到所述待处理的板状材料的表面温度降至200℃为止。原料是通过水解和冷凝得到的有机SOG 由下式(I)表示的至少一种烷氧基硅烷化合物在酸催化剂RnSi(OR 1)4-n(I)表示的有机溶剂中,其中R是烷基或碳数为1的芳基 -4,R 1是碳数为1-4的烷基,n为0-2的整数。