Apparatus for conserving vapor in a carbon dioxide dry cleaning system

    公开(公告)号:US06795991B2

    公开(公告)日:2004-09-28

    申请号:US10696612

    申请日:2003-10-29

    IPC分类号: D06B3902

    CPC分类号: D06F43/08 D06F43/007

    摘要: A method for conserving carbon dioxide vapor in a carbon dioxide dry cleaning system employing a liquid carbon dioxide cleaning solution to clean articles, where the method includes removing carbon dioxide vapor from a wash tank to a vapor tank, storing the carbon dioxide vapor in the vapor tank; and charging the wash tank with carbon dioxide vapor from the vapor tank. The method may be performed as part of a wash cycle that includes filling the wash tank with cleaning solution, washing articles to be cleaned in the wash tank, and emptying the cleaning solution out of the wash tank. An apparatus may also be employed for conserving carbon dioxide vapor in a carbon dioxide dry cleaning system employing a liquid carbon dioxide cleaning solution to clean articles, where the apparatus includes a wash tank for contacting the articles to be cleaned with the liquid carbon dioxide cleaning solution, a working tank for storing liquid carbon dioxide cleaning solution, a vapor tank for storing carbon dioxide vapor, a first piping system providing fluid communication between the wash tank and the vapor tank, where the first piping system includes a first line and a first valve residing in the first line, and a second piping system providing fluid communication between the working tank and the wash tank. Methods and apparatus for collecting liquid carbon dioxide in a collecting tank are also provided.

    Methods for cleaning microelectronic structures with cyclical phase modulation

    公开(公告)号:US06596093B2

    公开(公告)日:2003-07-22

    申请号:US09951259

    申请日:2001-09-13

    IPC分类号: B08B300

    摘要: A method of cleaning and removing water, entrained solutes and particulate matter during a manufacturing process from a microelectronic device such as a resist-coated semiconductor substrate, a MEM's device, or an optoelectronic device comprising the steps of: (a) providing a partially fabricated integrated circuit, MEM's device, or optoelectronic device having water and entrained solutes on the substrate; (b) providing a densified (e.g., liquid or supercritical) carbon dioxide cleaning composition, the cleaning composition comprising carbon dioxide and, optionally but preferably, a cleaning adjunct; (c) immersing the surface portion in the densified carbon dioxide drying composition, and subjecting the densified carbon dioxide drying composition to cyclical phase modulation during at least a portion of the immersing step to thereby facilitating cleaning; and then (d) removing the cleaning composition from the surface portion. Process parameters are preferably controlled so that the drying composition is maintained as a homogeneous composition during the immersing step, the removing step, or both the immersing and removing step, without substantial deposition of the drying/cleaning adjunct or entrained solutes on the substrate.

    Pumpless carbon dioxide dry cleaning system

    公开(公告)号:US06536059B2

    公开(公告)日:2003-03-25

    申请号:US09760346

    申请日:2001-01-12

    IPC分类号: D06F3908

    摘要: The present invention provides a method for the pumpless transfer of liquid carbon dioxide cleaning medium in a carbon dioxide dry cleaning apparatus having a wash vessel, a working vessel, a vapor vessel, and a compressor. The apparatus is preferably overpressurized with an overpressurization gas such as air. The method comprises (a) storing liquid carbon dioxide dry cleaning medium in the working vessel; (b) storing a vapor comprising air and carbon dioxide as a gas under pressure in the vapor vessel; (c) transferring a portion of the vapor from the vapor vessel to the wash vessel, by at least partially equilibrating the pressure between the vapor vessel and the wash vessel, with the wash vessel remaining at a pressure less then that of the working vessel; then (d) transferring at least a portion of the liquid carbon dioxide cleaning medium from the working vessel to the wash vessel by the force of a pressure differential therebetween; (e) washing articles to be cleaned in the wash vessel while concurrently (f) circulating at least a portion of the liquid dry cleaning medium back and forth between the wash vessel to the working vessel.

    Carbon dioxide cleaning and separation systems
    54.
    发明授权
    Carbon dioxide cleaning and separation systems 失效
    二氧化碳清洗和分离系统

    公开(公告)号:US06506259B1

    公开(公告)日:2003-01-14

    申请号:US09718020

    申请日:2000-11-20

    IPC分类号: B08B704

    摘要: A separation method includes (a) providing a heterogeneous separation system, the heterogeneous cleaning system comprising CO2 in a first phase and an oil in a separate second phase; (b) entraining a material to be separated in the second phase; (c) wholly or partially solubilizing the second phase in the first phase to produce a separation system in which said material to be separated is insoluble; and then (d) separating the material from the system. The separating step is preferably followed by the step of (e) recovering at least a portion of the oil. The system is useful in a variety of applications, including cleaning (particularly metal cleaning), polymerization, extraction, coating, and particle formation and treatment.

    摘要翻译: 分离方法包括(a)提供非均相分离系统,所述非均相清洁系统包括第一阶段的CO 2和在独立的第二阶段中的油; (b)在第二阶段夹带分离材料; (c)在第一相中完全或部分地增溶第二相以产生分离系统,其中待分离的材料是不溶的; 然后(d)从系统中分离材料。 优选分离步骤之后是(e)回收至少一部分油的步骤。 该系统可用于各种应用,包括清洗(特别是金属清洗),聚合,萃取,涂覆和颗粒形成和处理。

    System for the control of a carbon dioxide cleaning apparatus
    55.
    发明授权
    System for the control of a carbon dioxide cleaning apparatus 失效
    用于控制二氧化碳清洁装置的系统

    公开(公告)号:US06314601B1

    公开(公告)日:2001-11-13

    申请号:US09405619

    申请日:1999-09-24

    IPC分类号: D06B3902

    CPC分类号: D06F43/007 B08B7/0021

    摘要: A carbon dioxide dry cleaning apparatus and system for the control thereof is disclosed. The apparatus comprises a wash vessel, a working vessel containing a carbon dioxide cleaning medium and operatively associated with the wash vessel, a pump operatively associated with the wash vessel, a condenser connected to the working vessel, a still operatively associated with the working vessel (which still may be a separate still or incorporated into other system components as explained below), a compressor operatively associated with the wash vessel, and a pressure release valve operatively associated with said working vessel. At least one filter is included in the system, but the filter and still may be consolidated together in a single vessel. The apparatus includes a suitable controller which, operating in association with appropriate valves in the apparatus, provides a system that is used to place the apparatus in a cleaning cycle for washing articles therein, a waking cycle separate from the cleaning cycle during which distillation, recharging and other maintenance and preparatory function can be performed, or a resting cycle or resting state for long term periods of idleness.

    摘要翻译: 公开了一种二氧化碳干洗设备及其控制系统。 该装置包括洗涤容器,含有二氧化碳清洁介质并与洗涤容器可操作地相关联的工作容器,与洗涤容器操作地相关联的泵,连接到工作容器的冷凝器,与工作容器操作相关联的( 其仍然可以是单独的或并入如下所述的其它系统部件中),与洗涤容器操作地相关联的压缩机和与所述工作容器操作地相关联的压力释放阀。 系统中至少包括一个过滤器,但是过滤器仍然可以在单个容器中固结在一起。 该设备包括合适的控制器,其与设备中的适当阀相关联地提供用于将设备放置在用于在其中洗涤物品的清洁循环中的系统,与清洁循环分离的清洗循环,在该循环期间进行蒸馏,再充电 可以进行其他维护和准备功能,或者休息周期或休息状态长时间的闲置。

    Method of making a composite membrane
    59.
    发明授权
    Method of making a composite membrane 有权
    制作复合膜的方法

    公开(公告)号:US07588796B2

    公开(公告)日:2009-09-15

    申请号:US11077652

    申请日:2005-03-11

    IPC分类号: B05D7/22

    摘要: A method of making a composite membrane with ion exchange properties includes, in an exemplary embodiment, forming a porous membrane from a first material, dissolving a coating material in a fluid at supercritical conditions, and exposing the porous membrane to the coating material dissolved in the supercritical fluid. The method also includes precipitating a uniform coating of the coating material onto an exterior surface of the porous membrane by changing the supercritical conditions of the fluid to a non-supercritical condition, and applying an ion exchange material to the coated porous membrane so that the ion exchange material is in intimate contact with substantially all of the coated surfaces of the porous membrane.

    摘要翻译: 制造具有离子交换性质的复合膜的方法包括在一个示例性实施方案中,从第一材料形成多孔膜,在超临界条件下将涂料溶解在流体中,并将​​多孔膜暴露于溶解在 超临界流体 该方法还包括通过将流体的超临界条件改变为非超临界状态将涂层材料均匀地涂覆到多孔膜的外表面上,并将离子交换材料施加到涂覆的多孔膜上,使得离子 交换材料与多孔膜的基本上所有的涂覆表面紧密接触。

    Holder For Electrically Charging A Substrate During Coating
    60.
    发明申请
    Holder For Electrically Charging A Substrate During Coating 有权
    用于在涂层期间对基板进行充电的支架

    公开(公告)号:US20080095919A1

    公开(公告)日:2008-04-24

    申请号:US11877591

    申请日:2007-10-23

    IPC分类号: A61L33/00 B05B5/025

    摘要: A stent holder for mounting and electrically charging a stent during coating of the stent using dry particles, the particles comprising inert polymers, pharmaceutical or biological agents, is provided. An assembly for supporting and electrically charging a stent during the coating of the stent using dry particles, the particles comprising inert polymers, pharmaceutical or biological agents, is provided. A chamber for creating an electrical field around a stent and for supporting, electrically charging, and exposing the stent to dry particles, the particles comprising inert polymers, pharmaceutical or biological agents, is provided. A method for creating an electrical field around a stent and for supporting, electrically charging, and exposing the stent to dry particles comprising inert polymers, pharmaceutical or biological agents is provided.

    摘要翻译: 提供一种用于在使用干燥颗粒涂覆支架期间安装和充电支架的支架支架,所述颗粒包括惰性聚合物,药物或生物制剂。 提供了一种用于在使用干燥颗粒涂覆支架期间支撑和充电支架的组件,所述颗粒包含惰性聚合物,药物或生物制剂。 提供了一种用于在支架周围产生电场并用于支撑,充电并将支架暴露于干颗粒的腔室,包括惰性聚合物,药物或生物制剂的颗粒。 提供了一种用于在支架周围产生电场并用于支撑,充电和将支架暴露于包含惰性聚合物,药物或生物制剂的干燥颗粒的方法。