摘要:
A micro-electromechanical fluid ejection device includes a substrate that defines a plurality of fluid supply channels and a plurality of chambers in fluid communication with respective fluid supply channels. A drive circuitry layer is positioned on the substrate. A plurality of roof structures are connected to the drive circuitry layer to cover respective fluid chambers. Each roof structure defines a fluid ejection port. A plurality of actuators is connected to the drive circuitry layer and is operatively positioned at respective chambers to eject fluid from the fluid ejection ports on receipt of an electrical signal from the drive circuitry layer. The substrate defines chamber walls that diverge from respective ink inlet channels to respective roof structures.
摘要:
A nozzle arrangement for an ink jet printhead includes a wafer substrate having a nozzle chamber defined therein. The nozzle arrangement has a nozzle chamber wall that defines an ink ejection port and a rim about the ink ejection port. A series of radially positioned actuators are connected to the wafer substrate and extend radially inwardly towards the rim. Each actuator is configured so that a radially inner edge of each actuator is displaceable, with respect to the nozzle rim, into the chamber, upon actuation of the actuator and so that, upon such displacement, a pressure within the nozzle chamber is increased, resulting in the ejection of ink from the ejection port.
摘要:
A thermal inkjet actuator for use in an inkjet printer assembly includes heat conduction means arranged to realize a predetermined negative pressure profile to facilitate droplet formation. In a preferred embodiment the heat conduction means comprises a thin layer of very high thermally conductive material such as Aluminum located in the middle of a non-heat conductive passive bend layer. The overall cool-down speed of the actuator, and hence the speed with which the passive bend layer returns to its quiescent position can be controlled by controlling the proximity of the heat conductive layer to the actuator's heater during fabrication.
摘要:
A method of forming an inkjet nozzle chamber includes the steps of: (a) depositing a layer of chamber material onto a substrate, the layer of chamber material defining a depth of the nozzle chamber; (b) removing a predetermined region of the layer of chamber material to define sidewalls of the nozzle chamber and an internal volume of the nozzle chamber; (c) depositing a sacrificial material to fill the internal volume contained within the sidewalls; (d) depositing a roof layer onto the sacrificial material and the sidewalls; (e) etching the roof layer to define a nozzle opening therein; and (f) removing the sacrificial material contained in the internal volume so as to form the nozzle chamber.
摘要:
A thermal bend actuator includes: a first active cantilever beam for connection to drive circuitry, the first beam having a bent planar beam element; a second passive cantilever beam fused to the first beam; a conduction pad sandwiched between the first and second beams; and first and second adjacent electrode contacts positioned at one side of the actuator. A first end of the beam element is connected to the first contact and a second end of the beam element is connected to the second contact. The conduction pad is positioned at a bend region of the planar beam element so as to facilitate electrical conduction around the bend region.
摘要:
Provided is an inkjet printhead integrated circuit that has a wafer substrate that has an ink passage, and a nozzle plate supported on the substrate by side walls to define an ink chamber supplied with ink via the ink passage. The nozzle plate has an ink ejection port corresponding to the ink chamber. A heater element is bonded to the nozzle plate inside the chamber for vaporising ink to generate a vapour bubble that ejects ink through the ejection port. The heater element is bonded to the nozzle plate with a low thermal product layer. The thermal product thermal product is less than 1495 Jm−2K−1s−1/2, the thermal product being (ρCk)1/2, where ρ is the density of the layer, C is specific heat of the layer and k is thermal conductivity of the layer.
摘要:
A printhead integrated circuit comprising a silicon substrate defining a frontside and a backside, inkjet nozzle assemblies positioned at the frontside, drive circuitry for supplying power to the inkjet nozzle assemblies and through-silicon connectors extending from the frontside towards the backside. The through-silicon connectors provides electrical connections between the drive circuitry and corresponding integrated circuit contacts. The integrated circuit contacts are positioned for connection to a backside-mounted connector film supplying power to the drive circuitry.
摘要:
An inkjet printhead has nozzles and respective heater elements. A print engine controller actuates the heater elements to eject ink through the corresponding nozzle. During use, the print engine controller actuates each of the heater elements at least once every decap time. The decap time is a predetermined time period in which the viscosity of the ejectable liquid at the nozzle increases to a threshold, at which ejection fails and the nozzle clogs.
摘要:
A method of fabricating a printhead integrated circuit configured for backside electrical connections. The method comprises the steps of: (a) providing a wafer comprising a plurality of partially-fabricated nozzle assemblies on a frontside of the wafer and through-silicon connectors extending from the frontside towards a backside of the wafer; (b) depositing a conductive layer on the frontside of said wafer and etching to form an actuator for each nozzle assembly and a frontside contact pad over a head of each through-silicon connector; (c) performing further MEMS processing steps to complete formation of nozzle assemblies ink supply channels through-silicon connectors; and (d) dividing the wafer into individual printhead integrated circuits. Each printhead integrated circuit thus formed is configured for backside-connection to the drive circuitry via the through-silicon connectors the contact pads.
摘要:
An inkjet printhead includes: a nozzle plate having a plurality of nozzle apertures and ink supply conduits for supplying ink to the nozzle apertures. Each of the ink supply conduits has a conduit wall defined by part of the nozzle plate. Each of the conduit walls includes a plurality of pressure-dampening structures for dampening pressure fluctuations experienced at the nozzle apertures.