Method of manufacturing a semiconductor device including etching of a peripheral area before chemical-mechanical polishing
    54.
    发明授权
    Method of manufacturing a semiconductor device including etching of a peripheral area before chemical-mechanical polishing 失效
    制造半导体器件的方法,包括在化学机械抛光之前蚀刻周边区域

    公开(公告)号:US06759345B2

    公开(公告)日:2004-07-06

    申请号:US10062505

    申请日:2002-02-05

    申请人: Hiroyuki Kawano

    发明人: Hiroyuki Kawano

    IPC分类号: H01L2131

    CPC分类号: H01L21/31053 H01L21/31056

    摘要: A method of manufacturing a semiconductor device includes the formation of a dielectric film on a substrate having an effective device area surrounded by a peripheral area. A resist pattern exposing part of the dielectric film in the peripheral area is formed, and the dielectric film is etched to reduce the thickness of the exposed part. After the resist pattern has been removed, the dielectric film is planarized by chemical-mechanical polishing. Good planarity is achieved because the etching step removes high parts of the dielectric film from the peripheral area. This method of achieving improved planarity is less expensive than conventional methods employing dummy devices.

    摘要翻译: 一种制造半导体器件的方法包括在具有由周边区域包围的有效器件区域的衬底上形成电介质膜。 形成露出周边区域的电介质膜的一部分的抗蚀剂图案,并且蚀刻电介质膜以减小暴露部分的厚度。 在去除抗蚀剂图案之后,通过化学机械抛光使电介质膜平坦化。 由于蚀刻步骤从周边区域去除电介质膜的高部分,因此实现良好的平面性。 实现改进的平面度的这种方法比采用虚设装置的常规方法便宜。

    Scroll compressor and method for manufacturing an oldham ring therefor
    55.
    发明授权
    Scroll compressor and method for manufacturing an oldham ring therefor 失效
    涡旋式压缩机及制造方法

    公开(公告)号:US06210136B1

    公开(公告)日:2001-04-03

    申请号:US08910340

    申请日:1997-08-13

    IPC分类号: F04C1804

    摘要: A scroll compressor having an extended life due to the support structure for the orbiting scroll, even when using a chlorine-free substitution refrigerant. The support structure includes an Oldham ring for supporting an orbiting scroll so as to allow the orbiting scroll more orbiting motion without rotating about a fixing scroll. The Oldham ring is formed of a different material from both a fixing member and the orbiting scroll. Hence, if a boundary lubrication state occurs in mutually sliding parts, only sliding between different materials occurs, and mutual adhesion in the portion of the boundary lubrication state is avoided. As a result, the shortening of the life due to the wearing of the support structure of the orbiting scroll is prevented.

    摘要翻译: 即使在使用无氯替代制冷剂的情况下,由于用于绕动涡旋件的支撑结构而具有延长使用寿命的涡旋式压缩机。 支撑结构包括用于支撑绕动涡旋件的十字形环,以允许绕动涡旋件更周向运动而不围绕固定涡旋件旋转。 十字戒指由与固定构件和绕动涡盘两者不同的材料形成。 因此,如果在相互滑动的部分发生边界润滑状态,则仅发生不同材料之间的滑动,并且避免边界润滑状态部分的相互粘合。 结果,防止由于绕动涡卷的支撑结构的磨损引起的寿命缩短。

    Scroll compressor having lubrication of the rotation preventing member
    56.
    发明授权
    Scroll compressor having lubrication of the rotation preventing member 失效
    具有旋转阻止构件的润滑的涡旋式压缩机

    公开(公告)号:US6071100A

    公开(公告)日:2000-06-06

    申请号:US870237

    申请日:1997-06-05

    CPC分类号: F04C29/023 F01C17/066

    摘要: A scroll compressor includes a fixed scroll and an orbiting scroll which define therebetween a plurality of compression chambers for compressing fluid introduced via a suction port. The orbiting scroll has a base plate and a shaft portion extending from the base plate toward a crankshaft rotatably supported by a support member. A seal member is disposed between the base plate and the support member to define an inner region and an outer region. The inner region surrounds the shaft portion, while the outer region includes therein a rotation preventing member interposed between the base plate of the orbiting scroll and the support member. The inner region communicates with the outer region via an oil-feed passage formed through the orbiting scroll. The oil-feed passage includes therein a restrictor and opens in the neighborhood of an upper sliding portion between the rotation preventing member and the support member. Thus, lubricating oil supplied to the inner region is fed to the neighborhood of the upper sliding portion via the oil-feed passage for lubrication thereof. The lubricating oil collects downward due to the gravity to achieve lubrication of a lower sliding portion between the rotation preventing member and the support member.

    摘要翻译: 涡旋压缩机包括固定涡旋件和绕动涡旋件,其在其间限定多个用于压缩通过吸入口引入的流体的压缩室。 绕动涡盘具有基板和从基板向由支撑构件可旋转地支撑的曲轴延伸的轴部。 密封构件设置在基板和支撑构件之间以限定内部区域和外部区域。 内部区域围绕轴部,而外部区域包括设置在绕动涡盘的基板和支撑构件之间的防旋转构件。 内部区域经由绕动涡盘形成的供油路与外部区域连通。 供油通道包括限流器,并且在旋转阻止构件和支撑构件之间的上部滑动部分附近开口。 因此,供给到内部区域的润滑油经由供油通路被供给到上部滑动部附近,以进行润滑。 润滑油由于重力而向下收集,以实现旋转防止构件和支撑构件之间的下滑动部分的润滑。

    Compressor with oil separating mechanism
    60.
    发明授权
    Compressor with oil separating mechanism 有权
    带油分离机构的压缩机

    公开(公告)号:US09109598B2

    公开(公告)日:2015-08-18

    申请号:US13812347

    申请日:2012-03-15

    摘要: According to a compressor of the present invention, the compressor further comprises an oil separating mechanism 40 which separates oil from the refrigerant gas discharged from the compressing mechanism 10, the oil separating mechanism 40 includes a cylindrical space 41 in which the refrigerant gas orbits, an inflow portion 42 for flowing the refrigerant gas discharged from the compressing mechanism 10 into the cylindrical space 41, a sending-out port 43 for sending out, from the cylindrical space 41 to the one container space 32, the refrigerant gas from which the oil is separated, and an exhaust port 44 for discharging the separated oil from the cylindrical space 41 into the other container space 32. According to this configuration, efficiency of the electric motor 20 is enhanced, volumetric efficiency is enhanced, and low oil circulation is realized.

    摘要翻译: 根据本发明的压缩机,压缩机还包括分油机构40,其将油与从压缩机构10排出的制冷剂气体分离,油分离机构40包括制冷剂气体在其中轨道运动的圆柱形空间41, 用于将从压缩机构10排出的制冷剂气体流入圆筒形空间41的流出部分42,从圆筒形空间41向一个容器空间32排出油的制冷剂气体的送出口43 以及用于将分离的油从圆筒空间41排出到另一个容器空间32中的排气口44.根据该结构,电动机20的效率提高,容积效率提高,油循环低。