公开(公告)号：US07390383B2

公开(公告)日：2008-06-24

申请号：US10734098

申请日：2003-12-11

申请人： Paul R. McHugh ,  Gregory J. Wilson ,  Daniel J. Woodruff ,  Nolan Zimmerman ,  James J. Erickson

发明人： Paul R. McHugh ,  Gregory J. Wilson ,  Daniel J. Woodruff ,  Nolan Zimmerman ,  James J. Erickson

IPC分类号： C25D17/00 ,  C25D17/02 ,  C25F7/00 ,  C25D7/12 ,  C25F3/30

CPC分类号： C25D5/006 ,  C25D5/08 ,  C25D17/001 ,  C25D17/008 ,  C25D17/10 ,  C25D17/12 ,  C25D21/10 ,  C25D21/12 ,  H01L21/6723

摘要： Paddles and enclosures for processing microfeature workpieces are disclosed. A paddle device having multiple paddles is positioned in an enclosure to reciprocate back and forth along a generally linear path. The clearances between the paddles, the workpiece and the walls of the chamber are relatively small to increase the flow agitation at the surface of the workpiece and enhance the mass transfer process occurring there. The paddles are shaped to reduce or eliminate electrical shadowing effects created at the surface of the workpiece during electrochemical processing. Paddles on the same paddle device may have different shapes to reduce the likelihood for creating three-dimensional effects in the flow field proximate to the surface of the workpiece. The reciprocation stroke of the paddles may shift to further reduce shadowing.

摘要翻译： 公开了用于处理微特征工件的鞍座和外壳。 具有多个桨叶的桨装置定位在外壳中，沿着大致线性的路径往复运动。 桨叶，工件和室壁之间的间隙相对较小，以增加工件表面的流动搅拌并增强在那里发生的传质过程。 桨叶的形状可减少或消除在电化学处理期间在工件表面产生的电阴影效应。 相同桨装置上的桨叶可以具有不同的形状，以减少在靠近工件表面的流场中产生三维效应的可能性。 桨叶的往复行程可能会转移以进一步减少阴影。

公开(公告)号：US07390382B2

公开(公告)日：2008-06-24

申请号：US10734100

申请日：2003-12-11

申请人： Paul R. McHugh ,  Gregory J. Wilson ,  Daniel J. Woodruff ,  Nolan Zimmerman ,  James J. Erickson

发明人： Paul R. McHugh ,  Gregory J. Wilson ,  Daniel J. Woodruff ,  Nolan Zimmerman ,  James J. Erickson

IPC分类号： C25F7/00 ,  C25D17/02 ,  C25D17/00 ,  C25D7/12 ,  C25F3/30

CPC分类号： C25D5/006 ,  C25D5/08 ,  C25D17/001 ,  C25D17/008 ,  C25D17/10 ,  C25D17/12 ,  C25D21/10 ,  C25D21/12 ,  H01L21/6723

摘要： Reactors having multiple electrodes and/or enclosed reciprocating paddles are disclosed. The reactor can include multiple electrodes spaced apart from a process location to provide virtual electrodes proximate to the process location for transferring material to or from the workpiece. A magnet may be positioned proximate to the process plane to orient magnetically sensitive material deposited on the workpiece. The electrodes may be removable from the reactor without passing them through the magnet to reduce interference between the electrodes and the magnet. The workpiece may be carried by a rotatable workpiece support to orient the workpiece for processing. At least one of the electrodes can operate as a current thief to reduce terminal effects at the periphery of the workpiece. An electric field control element positioned between the electrodes and the workpiece circumferentially varies the effect of the thieving electrode current to account for effects created by elongated paddles as they oscillate proximate to the workpiece.

摘要翻译： 公开了具有多个电极和/或封闭的往复式叶片的反应器。 反应器可以包括与处理位置间隔开的多个电极，以提供靠近处理位置的虚拟电极，用于将材料转移到工件或从工件传送材料。 可以将磁体定位成靠近处理平面以定向沉积在工件上的感应敏感材料。 电极可以从反应器中移除，而不会使它们通过磁体，以减少电极和磁体之间的干扰。 工件可以由可旋转的工件支撑件承载以使工件定向以进行加工。 电极中的至少一个可以作为电流窃贼工作，以减少在工件周边处的终端效应。 定位在电极和工件之间的电场控制元件周向地改变了窃电电极电流的影响，以解决细长桨叶在靠近工件振荡时产生的效应。

公开(公告)号：US07002698B2

公开(公告)日：2006-02-21

申请号：US10721057

申请日：2003-11-24

申请人： Kyle Hanson ,  Mark Dix ,  Vlad Zila ,  Daniel J. Woodruff

发明人： Kyle Hanson ,  Mark Dix ,  Vlad Zila ,  Daniel J. Woodruff

IPC分类号： G01B11/14

CPC分类号： H01L21/67259 ,  H01L21/67173 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67742 ,  H01L21/67769 ,  H01L21/67781

摘要： A lift/tilt assembly for use in a semiconductor wafer processing device is set forth. The lift/tilt assembly includes a linear way comprising a fixed frame and a moveable frame. A nest for accepting a plurality of semiconductor wafers is rotatably connected to the moveable frame. The nest rotates between a wafer-horizontal orientation and a wafer-vertical orientation as it is driven with the movable frame by a motor that is coupled to the linear way. A lever connected to the nest provides an offset from true vertical for the nest when the nest is in the wafer-vertical orientation.

公开(公告)号：US06991710B2

公开(公告)日：2006-01-31

申请号：US10080914

申请日：2002-02-22

申请人： Randy Harris ,  Daniel J. Woodruff

发明人： Randy Harris ,  Daniel J. Woodruff

IPC分类号： C25D19/00

CPC分类号： H01L21/67766 ,  C25D7/123 ,  C25D17/001 ,  Y10S134/902 ,  Y10S414/135 ,  Y10T29/49124

摘要： A method and apparatus for manually and automatically processing microelectronic workpieces. The apparatus can include a tool having a plurality of processing stations, all of which are manually accessible to a user, and an input/output station configured to support at least one microelectronic workpiece for automatic transfer to and from the processing stations. A transfer device is positioned proximate to the input/output station and the processing stations and is configured to automatically transfer microelectronic workpieces between the input/output station and the processing stations. The apparatus can be used for both manual and automatic processing of microelectronic workpieces, either sequentially or simultaneously.

摘要翻译： 一种用于手动和自动处理微电子工件的方法和装置。 该设备可以包括具有多个处理站的工具，所有这些处理站都可以由用户手动访问，以及被配置为支持至少一个微电子工件的输入/输出站，用于自动传送到和从处理站传送。 传送装置位于输入/输出站和处理站附近，并被配置为在输入/输出站与处理站之间自动传送微电子工件。 该装置可以顺序地或同时地用于微电子工件的手动和自动处理。

公开(公告)号：US06849167B2

公开(公告)日：2005-02-01

申请号：US10338200

申请日：2003-01-07

申请人： Daniel J. Woodruff ,  Kyle M. Hanson ,  Robert W. Batz, Jr. ,  James T. Kuechmann

发明人： Daniel J. Woodruff ,  Kyle M. Hanson ,  Robert W. Batz, Jr. ,  James T. Kuechmann

IPC分类号： C25D7/12 ,  H01L21/687 ,  C25B9/12 ,  C25D17/06

CPC分类号： H01L21/68728 ,  C25D17/001 ,  H01L21/68785

摘要： An apparatus for electroplating a workpiece is disclosed in which the apparatus includes a workpiece holding structure. The workpiece holding structure includes a workpiece support having at least one surface that is disposed to engage a front side of the workpiece and at least one electrical contact disposed for contact with at least one corresponding electrical contact on a back-side of the workpiece. The workpiece includes one or more electrically conductive paths between the at least one corresponding electrical contact and a front-side of the workpiece to facilitate electroplating of the front-side surface. An actuator is provided for driving the workpiece support between a first position in which the at least one electrical contact of the workpiece and the at least one contact of the workpiece holding structure are disengaged from one another, and a second position in which the at least one surface clamps the workpiece in a position in which the at least one electrical contact of the workpiece holding structure electrically engages the at least one electrical contact of the workpiece.

摘要翻译： 公开了一种用于电镀工件的设备，其中该设备包括工件保持结构。 工件保持结构包括具有至少一个表面的工件支撑件，所述至少一个表面设置成与工件的前侧相接合，以及至少一个电触点，该电触点设置成用于与工件的背面上的至少一个对应的电触点接触。 所述工件包括在所述至少一个对应的电触点和所述工件的前侧之间的一个或多个导电路径，以便于所述前侧表面的电镀。 提供致动器，用于在第一位置和第二位置之间驱动工件支撑件，在第一位置，工件的至少一个电触点与工件保持结构的至少一个触点彼此脱离，第二位置至少 一个表面将工件夹紧在其中工件保持结构的至少一个电接触与工件的至少一个电接触电接合的位置。

公开(公告)号：US06497801B1

公开(公告)日：2002-12-24

申请号：US09113418

申请日：1998-07-10

申请人： Daniel J. Woodruff ,  Kyle M. Hanson

发明人： Daniel J. Woodruff ,  Kyle M. Hanson

IPC分类号： C25D550

CPC分类号： C25D17/12 ,  C25D7/123 ,  C25D17/001

摘要： An electroplating apparatus includes a reactor vessel having a segmented anode array positioned therein for effecting electroplating of an associated workpiece such as a semiconductor wafer. The anode array includes a plurality of ring-like anode segments which are preferably positioned in concentric, coplanar relationship with each other. The anode segments can be independently operated to create varying electrical potentials with the associated workpiece to promote uniform deposition of electroplated metal on the surface of the workpiece.

摘要翻译： 电镀设备包括反应器容器，其具有定位在其中的分段阳极阵列，用于实现诸如半导体晶片的相关工件的电镀。 阳极阵列包括多个环形阳极段，其优选地彼此以同心的，共面的关系定位。 阳极段可以独立地操作以产生与相关联的工件的变化的电势，以促进电镀金属在工件表面上的均匀沉积。

公开(公告)号：US06342137B1

公开(公告)日：2002-01-29

申请号：US09604198

申请日：2000-06-27

申请人： Daniel J. Woodruff ,  Martin C. Bleck

发明人： Daniel J. Woodruff ,  Martin C. Bleck

IPC分类号： C25D1704

CPC分类号： H01L21/67017 ,  C25D7/123 ,  C25D17/001

摘要： A lift and rotate assembly for use in a workpiece processing station. The lift and rotate assembly includes a body having a slim profile and pins located on opposite sides for mounting the assembly onto a tool frame. The lift and rotating assembly further includes a rotating mechanism coupling a processing head to the body, and for rotating the process head with respect to the body. The rotating mechanism includes a motor, wherein the motor is located within the processing head and the shaft of the motor is coupled to and rotationally fixed with respect to the body. The lift and rotate assembly further includes a lift mechanism for lifting the process head with respect to the body. A cable assembly within the lift and rotate assembly includes a common cable loop for feeding additional length of cable along both the lift direction and the rotational direction of movement.

摘要翻译： 用于工件加工台的升降和旋转组件。 提升和旋转组件包括具有细长轮廓的主体和位于相对侧上的销，用于将组件安装到工具框架上。 提升和旋转组件还包括将处理头连接到主体并且用于相对于主体旋转处理头的旋转机构。 旋转机构包括电动机，其中电动机位于处理头内并且电动机的轴相对于主体联接并旋转地固定。 提升和旋转组件还包括用于相对于主体提升处理头的升降机构。 提升和旋转组件内的电缆组件包括用于沿着提升方向和旋转运动方向进给额外长度的电缆的公共电缆环。

公开(公告)号：US06280582B1

公开(公告)日：2001-08-28

申请号：US09385781

申请日：1999-08-30

申请人： Daniel J. Woodruff ,  Kyle M. Hanson

发明人： Daniel J. Woodruff ,  Kyle M. Hanson

IPC分类号： C25D1702

CPC分类号： C25D17/001 ,  C25D5/08 ,  C25D7/123 ,  C25D17/06

摘要： An improved anode, cup and conductor assembly for a reactor vessel includes an anode assembly supported within a cup which holds a supply of process fluid. The anode assembly has an anode shield carrying an anode. The anode shield and the anode are supported from below by a delivery tube which also serves to deliver process fluid to the cup. A bayonet connection is provided between a top portion of the delivery tube and the anode assembly. The fluid delivery tube has a fixed height within the vessel. The anode elevation is adjusted by the interposing of a spacer of desired thickness between the anode and the tube. An electrical conductor is connected to the anode, and passes through the tube to be electrically accessible outside the vessel. The conductor is connected to the anode with a plug-in connection which is completed when the tube is coupled to the anode by the bayonet connection. A spring loaded bellos seal and a corrugated sleeve seal the electrical conductor from the anode, though the delivery tube, and to the outside electrical accessibility.

摘要翻译： 用于反应器容器的改进的阳极，杯和导体组件包括支撑在保持供给工艺流体的杯内的阳极组件。 阳极组件具有承载阳极的阳极屏蔽层。 阳极护罩和阳极从下方被输送管支撑，输送管也用于将工艺流体输送到杯子。 在输送管的顶部和阳极组件之间提供卡口连接。 流体输送管在容器内具有固定的高度。 通过在阳极和管之间插入所需厚度的间隔物来调节阳极高度。 电导体连接到阳极，并且通过管以在电容器外部电可通达。 导体通过插入式连接连接到阳极，当插管通过卡口连接将管连接到阳极时，该插件连接完成。 弹簧加载的贝氏体密封件和波纹套筒将电导体从阳极密封，尽管是输送管，并且与外部的电气可达性密封。

公开(公告)号：US06228232B1

公开(公告)日：2001-05-08

申请号：US09112300

申请日：1998-07-09

申请人： Daniel J. Woodruff ,  Kyle M. Hanson

发明人： Daniel J. Woodruff ,  Kyle M. Hanson

IPC分类号： C25B900

CPC分类号： C25D17/001 ,  C25D5/08 ,  C25D7/123 ,  C25D17/06

摘要： An improved anode, cup and conductor assembly for a reactor vessel includes an anode assembly supported within a cup which holds a supply of process fluid. The cup is supported around its perimeter within the reactor vessel. The anode assembly has an anode shield carrying an anode, the anode shield having upwardly extending brackets with radially extending members. A diffusion plate is supported above the anode by the anode brackets using first bayonet connections. The anode shield and the anode are supported from below by a delivery tube which also serves to deliver process fluid to the cup. A second bayonet connection is provided between a top portion of the delivery tube and the anode assembly. The fluid delivery tube has a fixed height within the vessel. The anode elevation is adjusted by the interposing of a spacer of desired thickness between the anode and the tube. An electrical conductor is connected to the anode, and passes through the tube to be electrically accessible outside the vessel. The conductor is connected to the anode with a plug-in connection which is completed when the tube is coupled to the anode by the second bayonet connection. A spring loaded bellows seal and a corrugated sleeve seal the electrical conductor from the anode, through the delivery tube, and to the outside electrical accessibility. The diffusion plate and the anode assembly are installable and removable from a top side of the reactor vessel using a tool which is lockable to the diffusion plate or to the anode. The tool provides a handle for manual engagement or disengagement of the first and second bayonet connections.

摘要翻译： 用于反应器容器的改进的阳极，杯和导体组件包括支撑在保持供给工艺流体的杯内的阳极组件。 杯子围绕反应堆容器内的周边支撑。 阳极组件具有承载阳极的阳极屏蔽件，阳极屏蔽件具有向上延伸的具有径向延伸构件的托架。 扩散板通过第一个卡口连接由阳极支架支撑在阳极的上方。 阳极护罩和阳极从下方被输送管支撑，输送管也用于将工艺流体输送到杯子。 在输送管的顶部和阳极组件之间设置第二卡口连接。 流体输送管在容器内具有固定的高度。 通过在阳极和管之间插入所需厚度的间隔物来调节阳极高度。 电导体连接到阳极，并且通过管以在电容器外部电可通达。 导体通过插入式连接方式连接到阳极，该插入式连接在管通过第二卡口连接与阳极连接时完成。 弹簧加载的波纹管密封件和波纹套筒将电导体从阳极密封，通过输送管和外部电气可接近性。 漫射板和阳极组件可以使用可被锁定到扩散板或阳极的工具从反应堆容器的顶侧安装和移除。 该工具提供用于手动接合或解除第一和第二卡口连接的手柄。

公开(公告)号：US06091498A

公开(公告)日：2000-07-18

申请号：US991062

申请日：1997-12-15

申请人： Kyle Hanson ,  Mark Dix ,  Vladimir Zila ,  Daniel J. Woodruff

发明人： Kyle Hanson ,  Mark Dix ,  Vladimir Zila ,  Daniel J. Woodruff

IPC分类号： B65G49/07 ,  B25J9/06 ,  C25D7/12 ,  H01L21/00 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687 ,  G01B11/14 ,  G01N21/00

CPC分类号： H01L21/67259 ,  H01L21/67173 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67742 ,  H01L21/67769 ,  H01L21/67781

摘要： A lift/tilt assembly for use in a semiconductor wafer processing device is set forth. The lift/tilt assembly includes a linear guide/actuator comprising a fixed frame and a movable frame. A nest for accepting a plurality of semiconductor wafers is rotatably connected to the movable frame. The nest rotates between a wafer-horizontal orientation and a wafer-vertical orientation as it is driven with the movable frame by a motor that is coupled to the linear way. A lever connected to the nest provides an offset from true vertical for the nest when the nest is in the wafer-vertical orientation.

摘要翻译： 阐述了用于半导体晶片处理装置的提升/倾斜组件。 提升/倾斜组件包括具有固定框架和可移动框架的线性导向/致动器。 用于接收多个半导体晶片的嵌套可旋转地连接到可移动框架。 当它由与可线性方式耦合的电动机用可移动框架驱动时，嵌套在晶片水平取向和晶片垂直取向之间旋转。 当嵌套处于晶片垂直方向时，连接到嵌套的杠杆提供与巢的真垂直的偏移。