摘要:
In a semiconductor device having a ferroelectric capacitor and manufacturing method thereof, a spacer comprising a low dielectric material is formed on the side surfaces of a plurality of lower electrodes separated into each cell unit, and a ferroelectric film is formed on the lower electrodes whereon the low dielectric material spacer is formed, and an upper electrode is formed on the ferroelectric film, to thereby prevent an error which may be caused between the adjacent lower electrodes.
摘要:
A memory device includes a substrate having a cell region, a low voltage region and a high voltage region. A ground selection transistor, a string selection transistor and a cell transistor are in the cell region, a low voltage transistor is in the low voltage region, and a high voltage transistor is in the high voltage region. A common source contact is on the ground selection transistor and a low voltage contact is on the low voltage transistor. A bit line contact is on the string selection transistor, a high voltage contact is on the high voltage transistor, and a bit line is on the bit line contact. A first insulating layer is on the substrate, and a second insulating layer is on the first insulating layer. The common source contact and the first low voltage contact extend to a height of the first insulating layer, and the bit line contact and the first high voltage contact extend to a height of the second insulating layer.
摘要:
The present invention relates to a semiconductor memory device having a voltage driving circuit. The semiconductor memory device includes: a core voltage node; a first driving unit having a first controller for comparing a feedback voltage level of the core voltage node with a reference voltage to output a first control signal, and a first pull-up driver for pulling up the core voltage node; a second driving unit having a second controller driven in response to the active signal as an enable signal to compare the feedback voltage level of the core voltage node with the reference voltage to output a second control signal, and a second pull-up driver for pulling up the core voltage node; and a selecting unit for selectively outputting the first control signal and the second control signal in response to the active signal as a select signal, in which the first pull-up driver is driven in response to the first control signal and the second pull-up driver is driven in response to an output signal of the selecting means.
摘要:
An automatic controlled delay circuit for use in a semiconductor memory device capable of detecting and adjusting a variation in delay with PVT variation delays a wordline activating signal by a predetermined time period and outputs the same as a bitline sense amplifier activating signal. The delay circuit is implemented with a plurality of delay blocks that are connected serially. The semiconductor device comprises a delay pulse signal generating block for generating a plurality of delayed pulse signals, each of which has different delay values at a time point at which the wordline activating signal is activated using an internal clock; a signal detecting block for detecting an activation time point of the bitline sense amplifier activating signal to generate a detected pulse signal; and a delay amount adjusting block for comparing the plurality of delayed pulse signals with the detected pulse signal to control the plurality of delay blocks.
摘要:
The present invention relates to a semiconductor memory device having a voltage driving circuit. The semiconductor memory device includes: a core voltage node; a first driving unit having a first controller for comparing a feedback voltage level of the core voltage node with a reference voltage to output a first control signal, and a first pull-up driver for pulling up the core voltage node; a second driving unit having a second controller driven in response to the active signal as an enable signal to compare the feedback voltage level of the core voltage node with the reference voltage to output a second control signal, and a second pull-up driver for pulling up the core voltage node; and a selecting unit for selectively outputting the first control signal and the second control signal in response to the active signal as a select signal, in which the first pull-up driver is driven in response to the first control signal and the second pull-up driver is driven in response to an output signal of the selecting means.