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公开(公告)号：US20070224339A1
公开(公告)日：2007-09-27
申请号：US11723845
申请日：2007-03-22
IPC分类号： B05D5/12
CPC分类号： G11B5/855
摘要： According to one embodiment, there is provided a method of manufacturing a patterned media having a substrate and a magnetic recording layer on the substrate including protruded magnetic patterns and a nonmagnetic material filling recesses between the magnetic patterns. The method includes depositing a first nonmagnetic material to fill the recesses between the magnetic patterns, carrying out surface reforming of the first nonmagnetic material, depositing a second nonmagnetic material on the first nonmagnetic material, and etching back the second and first nonmagnetic materials.
摘要翻译： 根据一个实施例，提供了一种制造图案化介质的方法，该图案化介质在基板上具有基板和磁记录层，该基板包括突出的磁图案和填充磁图案之间的凹槽的非磁性材料。 该方法包括沉积第一非磁性材料以填充磁性图案之间的凹槽，进行第一非磁性材料的表面重整，在第一非磁性材料上沉积第二非磁性材料，以及蚀刻第二和第一非磁性材料。
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52.发明申请Method of forming patterns and method of manufacturing magnetic recording media 失效形成图案的方法和制造磁记录介质的方法公开(公告)号：US20070090087A1
公开(公告)日：2007-04-26
申请号：US11580862
申请日：2006-10-16
CPC分类号： C23F4/00 , B82Y10/00 , C23C2/02 , C23C2/26 , C23C4/02 , C23C4/18 , G03F7/0046 , G11B5/74 , G11B5/743 , G11B5/82 , G11B5/855 , H01F41/34
摘要： According to one embodiment, a method of forming patterns is provided, in which the method including forming a resist on an underlying material, pressing a stamper having patterns of protrusions and recesses, sidewalls of which protrusions are tapered, onto the resist to form a patterned resist having patterns of protrusions and recesses, sidewalls of which protrusions are tapered, forming a protective film on the patterned resist, performing anisotropic etching to leave the protective film on the tapered sidewalls of protrusions of the patterned resist, etching a resist residue remaining in recesses of the patterned resist using the protective film as a mask, and etching the underlying material using the protective film and the patterned resist as a mask.
摘要翻译： 根据一个实施例，提供了一种形成图案的方法，其中所述方法包括在下层材料上形成抗蚀剂，将具有突起和凹陷图案的压模（其突出部分的锥形的侧壁）按压到抗蚀剂上以形成图案化 抗蚀剂具有突起和凹陷的图案，其侧壁突起成锥形，在图案化的抗蚀剂上形成保护膜，进行各向异性蚀刻以将保护膜留在图案化抗蚀剂的突起的锥形侧壁上，蚀刻保留在凹槽中的抗蚀剂残渣 使用保护膜作为掩模的图案化抗蚀剂，并使用保护膜和图案化的抗蚀剂作为掩模蚀刻下面的材料。
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53.发明授权公开(公告)号：US08318331B2
公开(公告)日：2012-11-27
申请号：US11942904
申请日：2007-11-20
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/59688 , G11B5/743 , G11B5/855
摘要： According to one embodiment, a magnetic recording medium includes a substrate, and a magnetic recording layer formed on the substrate and having patterns of protrusions and recesses corresponding to a servo area and a recording area, in which the magnetic recording layer located in each of the recesses in the recording area has a thickness smaller than two thirds of a thickness of the magnetic recording layer corresponding to each of the protrusions, the magnetic recording layer remaining in each of the recesses in the recording area has a thickness of 1 nm or more, and a difference in height on a surface of the magnetic recording medium is 7 nm or less.
摘要翻译： 根据一个实施例，磁记录介质包括基板和形成在基板上并具有对应于伺服区域和记录区域的突起和凹槽的图案的磁记录层，其中磁记录层位于每个 记录区域中的凹部的厚度小于与每个突起相对应的磁记录层的厚度的三分之二，记录区域中每个凹槽中残留的磁记录层的厚度为1nm以上， 并且磁记录介质的表面上的高度差为7nm以下。
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54.发明申请公开(公告)号：US20110132754A1
公开(公告)日：2011-06-09
申请号：US12950235
申请日：2010-11-19
CPC分类号： C25D1/10 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G11B5/82 , G11B5/855 , Y10T428/24612
摘要： According to one embodiment, patterns of protrusions and recesses includes a substrate including a conductive region on at least one major surface, and a projecting pattern layer formed on the conductive region on the major surface, and made of a microcrystalline material, a polycrystalline material, an amorphous material, or an oxide of the microcrystalline, polycrystalline, or amorphous material.
摘要翻译： 根据一个实施例，突起和凹陷的图案包括在至少一个主表面上包括导电区域的基板和形成在主表面上的导电区域上并由微晶材料制成的突出图案层，多晶材料， 非晶材料或微晶，多晶或无定形材料的氧化物。
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公开(公告)号：US20070207263A1
公开(公告)日：2007-09-06
申请号：US11705037
申请日：2007-02-12
摘要： It is made possible to manufacturing a magnetic recording medium capable of high-density recording at low cost. A method for manufacturing a magnetic recording medium, includes: forming a magnetic film on a substrate; and forming a pattern transfer film, into which a concavo-convex pattern of a magnetic recording medium is to be transferred by imprinting, by vapor-depositing a material for forming the pattern transfer film onto the magnetic film while heating the material at a temperature of 100° C. to 400° C. in a vacuum of 1×10−3 Torr or less.
摘要翻译： 能够以低成本制造能够高密度记录的磁记录介质。 一种制造磁记录介质的方法，包括：在基板上形成磁膜; 并且通过在形成图案转印膜的材料上气相沉积到磁性膜上形成图案转印膜，通过压印将磁记录介质的凹凸图案转印到该图案转印膜中，同时在 在1×10 -3乇或更低的真空中，100℃至400℃。
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56.发明申请Stamper for magnetic recording media, method of manufacturing magnetic recording media using the same, and method of manufacturing stamper for magnetic recording media 失效用于磁记录介质的压模，使用该磁记录介质的磁记录介质的制造方法以及制造用于磁记录介质的压模的方法公开(公告)号：US20070070548A1
公开(公告)日：2007-03-29
申请号：US11527467
申请日：2006-09-27
IPC分类号： G11B5/82
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/855 , Y10S425/81
摘要： According to one embodiment, a stamper for a magnetic recording media has patterns of protrusions and recesses to manufacture a discrete track recording type magnetic recording media having servo areas including an address portion, a preamble portion and a burst portion, and data areas including a recording track portion, the patterns of protrusions and recesses being formed at a pitch of 400 nm or less, in which a magnitude relation of depths of recesses corresponding to the address portion, the preamble portion, the burst portion and the recording track portion is inverted to a magnitude relation of area ratios of the protrusions to the recesses in the address portion, the preamble portion, the burst portion and the recording track portion.
摘要翻译： 根据一个实施例，用于磁记录介质的压模具有突起和凹槽的图案，以制造具有包括地址部分，前导码部分和突发部分的伺服区域的离散轨道记录型磁记录介质，以及包括记录 轨道部分，以400nm或更小的间距形成的突起和凹陷的图案，其中对应于地址部分，前导码部分，突发部分和记录轨道部分的凹部的深度的大小关系被反转到 在地址部分，前导码部分，突发部分和记录轨道部分中的突起与凹部的面积比的大小关系。
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公开(公告)号：US07740767B2
公开(公告)日：2010-06-22
申请号：US11472525
申请日：2006-06-22
IPC分类号： B44C1/22 , B05D5/12 , B05D1/32 , B05D1/02 , H01L21/306
摘要： According to one embodiment, a method for manufacturing a patterned media includes forming patterns of a magnetic layer having protrusions and recesses corresponding to tracks, servo zones or data zones on a substrate having a center hole, and spraying gas flow produced by diffusing a liquid gas toward the center hole of the substrate before or after forming the patterns of the magnetic layer.
摘要翻译： 根据一个实施例，一种用于制造图案化介质的方法包括形成具有与具有中心孔的基板上的轨道，伺服区或数据区对应的突起和凹部的磁性层的图案，并且喷射通过扩散液体气体而产生的气流 在形成磁性层的图案之前或之后朝向基板的中心孔。
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58.发明申请Patterned media, method of manufacturing the same, and magnetic recording/reproducing apparatus 审中-公开图案化介质，其制造方法和磁记录/再现装置公开(公告)号：US20070281078A1
公开(公告)日：2007-12-06
申请号：US11806229
申请日：2007-05-30
CPC分类号： G11B5/855
摘要： According to one embodiment, a patterned media includes a magnetic film processed into patterns for tracks, servo zones or data zones, and a nonmagnetic filling material filled between patterns of the magnetic film for the tracks, servo zones or data zones and including a base material and a barrier material formed of a metal that does not constitute the base material.
摘要翻译： 根据一个实施例，图案化介质包括处理成用于轨道，伺服区或数据区的图案的磁性膜，以及填充在用于轨道，伺服区或数据区的磁性膜的图案之间的非磁性填充材料，并且包括基材 以及由不构成基材的金属形成的阻挡材料。
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公开(公告)号：US20070065588A1
公开(公告)日：2007-03-22
申请号：US11520023
申请日：2006-09-13
CPC分类号： G11B5/855
摘要： A method of forming patterns includes coating a toroidal substrate having a center hole with an imprint material containing a precursor of a metal oxide film, selected from the group consisting of a metal alkoxide and a metal oxide, and an ether type nonionic surfactant containing fluorine or silicon, imprinting a stamper on the imprint material to transfer patterns of protrusions and recesses of the stamper to the imprint material, and removing organic components from the imprint material through plasma processing or heat treatment to form a metal oxide film having patterns of protrusions and recesses.
摘要翻译： 形成图案的方法包括用具有中心孔的环形基板涂覆含有金属氧化物膜的前体的压印材料，所述金属氧化物膜的前体选自金属醇盐和金属氧化物，以及含有氟的醚型非离子表面活性剂 硅，在压印材料上压印压模以将压模的突起和凹陷的图案转印到压印材料，以及通过等离子体处理或热处理从压印材料中去除有机组分以形成具有突起和凹陷图案的金属氧化物膜 。
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公开(公告)号：US20060289382A1
公开(公告)日：2006-12-28
申请号：US11472525
申请日：2006-06-22
IPC分类号： B44C1/22 , B05D5/12 , B05D1/32 , H01L21/306 , B05D1/02
摘要： According to one embodiment, a method for manufacturing a patterned media includes forming patterns of a magnetic layer having protrusions and recesses corresponding to tracks, servo zones or data zones on a substrate having a center hole, and spraying gas flow produced by diffusing a liquid gas toward the center hole of the substrate before or after forming the patterns of the magnetic layer.
摘要翻译： 根据一个实施例，一种用于制造图案化介质的方法包括形成具有与具有中心孔的基板上的轨道，伺服区或数据区对应的突起和凹部的磁性层的图案，并且喷射通过扩散液体气体而产生的气流 在形成磁性层的图案之前或之后朝向基板的中心孔。
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