公开(公告)号：US20110220493A1

公开(公告)日：2011-09-15

申请号：US13047210

申请日：2011-03-14

申请人： Kiyoshi Aratake

发明人： Kiyoshi Aratake

IPC分类号： C23C14/34 ,  H01L41/22

CPC分类号： H03H3/02 ,  H03H9/02 ,  H03H9/10 ,  H03H9/19 ,  Y10T29/42

摘要： Provided are a masking material capable of suppressing the occurrence of pattern blurring when forming a pattern on a substrate by a sputtering method, a piezoelectric vibrator using the masking material, a method of manufacturing the piezoelectric vibrator, and an oscillator, an electronic device, and a radio-controlled timepiece each having the piezoelectric vibrator. A masking material which is used when forming a pattern on a substrate by a sputtering method includes openings corresponding to the pattern, and portions where the openings are not formed have a uniform thickness.

摘要翻译： 提供了一种掩模材料，其能够通过溅射法在基板上形成图案时抑制图案模糊的发生，使用掩模材料的压电振动器，压电振动器的制造方法以及振荡器，电子设备和 每个具有压电振动器的无线电控制的钟表。 通过溅射法在基板上形成图形时使用的掩模材料包括对应于图案的开口，并且不形成开口的部分具有均匀的厚度。

公开(公告)号：US07531945B2

公开(公告)日：2009-05-12

申请号：US11505693

申请日：2006-08-17

申请人： Kiyoshi Aratake

发明人： Kiyoshi Aratake

IPC分类号： H01L41/08

CPC分类号： H03H9/1035 ,  H01L2924/0002 ,  H03H9/0542 ,  H03H9/0595 ,  H03H9/215 ,  H01L2924/00

摘要： To provide a quartz crystal vibrator, an oscillator and an electronic apparatus capable of preventing a bonding electrode from being corroded and easily maintaining soundness of the bonding electrode over a long period of time, a quartz crystal vibrator is provided with a quartz crystal vibrating plate formed by surrounding a quartz crystal vibrating piece by a frame-like portion, a hermetically closed vessel including a lid member and a base member in a plate-like shape for interposing the quartz crystal vibrating plate in a thickness direction, bonding electrodes provided between the lid member and the quartz crystal vibrating plate and between the base member and the quartz crystal vibrating plate and electrically connected to an inner electrode, and a protecting film for protecting the bonding electrode, provided with a recess portion recessed to an inner side of the hermetically closed vessel from an outer edge portion between the lid member and the quartz crystal vibrating plate and an outer edge portion between the base member and the quartz crystal vibrating plate, the protecting film is provided at the recess portion and the bonding electrode is disposed on the inner side of the recess portion.

公开(公告)号：US20070044565A1

公开(公告)日：2007-03-01

申请号：US11506055

申请日：2006-08-17

申请人： Kiyoshi Aratake

发明人： Kiyoshi Aratake

IPC分类号： G01M7/00

CPC分类号： H03H9/1021 ,  H03H9/21

摘要： To provide a piezoelectric vibrator, an oscillator, an electronic part, an electronic apparatus, a method of fabricating a piezoelectric vibrator and a method of fabricating an electronic part capable of swiftly and easily providing a plurality of electrodes for applying a voltage to a piezoelectric vibrating piece while maintaining airtightness at inside of a hermetically sealed vessel, there is provided a piezoelectric vibrator including a hermetically sealed vessel 2 constituted by overlapping a lid member 6 and a base member 7 in a plate-like shape, a piezoelectric vibrating piece 3 provided at inside of the hermetically sealed vessel 2, a lead-out electrode 16 provided at an overlapping face 6a of the lid member 6, electrically connected to the piezoelectric vibrating piece 3 by way of a connecting portion, and extending the connecting portion 15 to an edge portion of the overlapping face 6a of the lid member 6, an external electrode 27 electrically connected to the lead-out electrode 16 from a side face of the hermetically sealed vessel 2, and a bonding film 20 comprising a metal or silicone provided between the overlapping face 6a of the lid member 6 and an overlapping face 7a of the base member 7, in which an insulating film 22 is provided between the lead-out electrode 16 and the bonding film 20.

摘要翻译： 提供压电振动器，振荡器，电子部件，电子设备，制造压电振动器的方法和制造电子部件的方法，其能够快速且容易地提供用于向压电振动器施加电压的多个电极 同时保持密封容器内部的气密性，提供了一种压电振动器，其包括通过将盖构件6和基座构件7重叠成板状而构成的气密密封容器2，压电振动片3设置在 在密封容器2的内部，设置有盖构件6的重叠面6a的引出电极16，其通过连接部与压电振动片3电连接，并且将连接部15延伸到 盖构件6的重叠面6a的边缘部分，与导出件电连接的外部电极27 电极16从密封容器2的侧面，以及接合膜20，其包括设置在盖构件6的重叠面6a和基部构件7的重叠面7a之间的金属或硅酮，其中 绝缘膜22设置在引出电极16和接合膜20之间。

公开(公告)号：US06417478B1

公开(公告)日：2002-07-09

申请号：US09493759

申请日：2000-01-28

申请人： Masayoshi Shiraishi ,  Kiyoshi Aratake ,  Yasuhiro Nohara

发明人： Masayoshi Shiraishi ,  Kiyoshi Aratake ,  Yasuhiro Nohara

IPC分类号： B23K1116

CPC分类号： B23K1/0004

摘要： To provide an anodic bonding method which can favorably bond between members different in thermal expansion coefficient. In an anodic bonding method of applying a voltage to and bonding between a first member 10 having a bonding film 11 on a bonding surface and a second member 12 closely put on the bonding surface of the first member 10 through the bonding film 11 in a manner that the first member 10 is rendered as an anode, characterized in that: the bonding film 11 is of a metal film and the second member 12 is of a soda-lime glass, and a bonding temperature is at 100-200° C. and an application voltage is at 0.5-5.0 kV.

摘要翻译： 提供可以有利地结合热膨胀系数不同的部件之间的阳极接合方法。 在通过接合膜11以紧密接合在第一部件10的接合面上的第一部件10与接合面11接合的接合膜11的第一部件10与第二部件12之间施加电压并进行接合的阳极接合方法中， 使第一构件10呈阳极，其特征在于，接合膜11为金属膜，第二构件12为钠钙玻璃，接合温度为100〜200℃， 施加电压为0.5-5.0kV。

公开(公告)号：US08444801B2

公开(公告)日：2013-05-21

申请号：US12869098

申请日：2010-08-26

申请人： Kiyoshi Aratake

发明人： Kiyoshi Aratake

IPC分类号： B29C65/14

CPC分类号： H03H3/02 ,  H03H9/1014

摘要： An anodic bonding method of anodically bonding a base wafer 10 and a lid wafer 11 includes:(1) superimposing the base wafer 10 and the lid wafer 11 onto each other in a direction where a bonding film 9 faces a cavity C; (2) subsequent to the superimposition step, pressurizing and holding the base wafer 10 and the lid wafer 11 in a vacuum state in the superimposition direction; and (3) subsequent to the pressurizing step, partitioning and setting a plurality of intended bonding areas A1, A2, A3 and A4 in a concentric form on a contacting surface where the base wafer 10 and the lid wafer 11 are in contact with each other and applying a DC voltage to each of the plurality of intended bonding areas A1, A2, A3 and A4.

摘要翻译： 阳极接合基底晶片10和盖子晶片11的阳极接合方法包括：（1）将基底晶片10和盖子晶片11在接合薄膜9面向空腔C的方向上彼此重叠; （2）在叠加步骤之后，将基底晶片10和盖片11加压并保持在叠置方向的真空状态; 和（3）在加压步骤之后，在基底晶片10和盖子晶片11彼此接触的接触表面上以同心形式分割和设置多个预期的粘合区域A1，A2，A3和A4 以及向所述多个预期粘合区域A1，A2，A3和A4中的每一个施加DC电压。

公开(公告)号：US08427250B2

公开(公告)日：2013-04-23

申请号：US13112570

申请日：2011-05-20

申请人： Kiyoshi Aratake

发明人： Kiyoshi Aratake

IPC分类号： H03B5/32 ,  H01L41/053

CPC分类号： H03H9/215 ,  H03H3/04 ,  H03H9/0519 ,  H03H9/1021 ,  H03H2003/0492 ,  Y10T29/42

摘要： The piezoelectric vibrator includes: a package in which a first substrate and a second substrate are superimposed so as to form a cavity therebetween; outer electrodes which are formed on an outer surface of the first substrate; inner electrodes which are formed on the first substrate so as to be accommodated in the cavity; penetration electrodes which are formed so as to penetrate through the first substrate so that the outer electrodes and the inner electrodes are electrically connected; and a piezoelectric vibrating reed which is sealed in the cavity and electrically connected to the inner electrodes at the inner side of the cavity. The first substrate and the second substrate are bonded by a bonding film that is formed of a low-melting-point glass, and the bonding film is heated to a predetermined bonding temperature when the first substrate and the second substrate are bonded together, and is formed by being heated to a temperature higher than the bonding temperature before the bonding is performed.

摘要翻译： 压电振子包括：第一基板和第二基板叠加在其中以在其间形成空腔的封装; 形成在第一基板的外表面上的外电极; 内电极，其形成在第一基板上以容纳在空腔中; 穿透电极，其形成为穿过第一基板，使得外电极和内电极电连接; 以及压电振动片，其密封在空腔中并且在腔的内侧电连接到内部电极。 第一基板和第二基板通过由低熔点玻璃形成的接合膜接合，并且当第一基板和第二基板接合在一起时，接合膜被加热到预定的接合温度，并且是 通过加热到高于接合前的接合温度的温度而形成。

公开(公告)号：US08013499B2

公开(公告)日：2011-09-06

申请号：US12791286

申请日：2010-06-01

申请人： Kiyoshi Aratake ,  Yasuo Kawada

发明人： Kiyoshi Aratake ,  Yasuo Kawada

IPC分类号： H01L41/04 ,  H01L41/08

CPC分类号： H03H3/02 ,  H03H9/1021 ,  H03H9/21 ,  H03H2003/026 ,  Y10T29/42

摘要： There is provided a method of manufacturing a package 1 having a base substrate 10 and a lid substrate 20 bonded to each other and both formed of a glass base material; and a cavity C formed between the both substrates for storing an encapsulated object 2 in a state of being hermetically encapsulated, including: a depression forming step for forming a depression C1 for a cavity which defines the cavity when the both substrates are superimposed to each other on at least one of the both substrates; and a bonding step for superimposing the both substrates so as to store the encapsulated object in the depression and then bonding the both substrates to encapsulate the encapsulated object in the cavity, characterized in that in the depression forming step, printed layers 12 are laminated on an upper surface of a flat plate-shaped glass base material 11 in a frame shape in plan view by screen printing, and then the printed layers and the glass base material are baked at the same time to form the depression.

摘要翻译： 提供一种制造封装1的方法，该封装1具有彼此接合且均由玻璃基材形成的基底基板10和盖基板20; 以及形成在两个基板之间的空腔C，用于以密封的状态存储被封装物体2，包括：凹陷形成步骤，用于在两个基板彼此叠置时形成限定空腔的空腔的凹陷C1 在两个基材中的至少一个上; 以及结合步骤，用于叠加两个基板，以将封装物体存储在凹陷中，然后将两个基板接合以将封装物体封装在空腔中，其特征在于，在凹陷形成步骤中，将印刷层12层压在 通过丝网印刷在平面图中以平板状的平板状玻璃基材11的上表面，然后同时烘烤印刷层和玻璃基材以形成凹陷。

公开(公告)号：US20110025166A1

公开(公告)日：2011-02-03

申请号：US12845142

申请日：2010-07-28

申请人： Kiyoshi Aratake

发明人： Kiyoshi Aratake

IPC分类号： H01L41/053 ,  H01L41/22

CPC分类号： H03H9/21 ,  H03H3/04 ,  H03H9/02149 ,  H03H9/1021 ,  H03H2003/026 ,  H03H2003/0478 ,  H03H2003/0492 ,  H03H2009/02165 ,  Y10T29/42

摘要： A piezoelectric vibrator which can be manufactured efficiently and a manufacturing method thereof are provided. The piezoelectric vibrator includes: a tuning-fork-type piezoelectric vibrating piece which has a pair of vibration arm portions, excitation electrodes formed on base end portions of the vibration arm portions, and weight metal films formed on distal end portions of the vibration arm portions; and a package which houses the piezoelectric vibrating piece therein. A gettering film on which a laser radiation flaw is formed is formed on intermediate portions between the base end portions and the distal end portions of the vibration arm portions. A first metal film included in the excitation electrode, a second metal film included in the weight metal film and the gettering film are formed using the same material.

摘要翻译： 提供一种能够有效制造的压电振动器及其制造方法。 压电振子包括：音叉型压电振动片，其具有一对振动臂部，形成在振动臂部的基端部的激励电极，以及形成在振动臂部的前端部的重量金属膜 ; 以及其中容纳压电振动片的封装。 在基端部和振动臂部的前端部之间的中间部分形成有形成有激光辐射缺陷的吸气膜。 包含在激发电极中的第一金属膜，使用相同的材​​料形成包含在重量金属膜中的第二金属膜和吸气膜。

公开(公告)号：US20100237740A1

公开(公告)日：2010-09-23

申请号：US12794180

申请日：2010-06-04

申请人： Kiyoshi Aratake ,  Yasuo Kawada

发明人： Kiyoshi Aratake ,  Yasuo Kawada

IPC分类号： H01L41/053 ,  H01L41/04 ,  H01L41/22

CPC分类号： H03H9/1021 ,  H03H9/21 ,  Y10T29/42 ,  Y10T29/49126 ,  Y10T29/49165 ,  Y10T29/49798

摘要： There is provided a method of manufacturing piezoelectric vibrators 1. The method includes a process for through holes 35 and 36, which pass through a base substrate wafer, so that openings of the through holes are opened to the outside of the recesses for cavities C; a process for patterning a bonding layer 30, pairs of mounting layers, and pairs of extraction electrode layers 33 and 34 on the upper surface of the base substrate wafer with the same conductive material; and a process for electrically isolating the extraction electrode layers 34 in the middle by irradiating a part (area S2) of the extraction electrode layers 34, which are formed between the bonding layer and openings of through holes 36, with laser light after both the wafers are anodically bonded to each other. The bonding layer 30 surrounds the recesses, the pairs of mounting layers are in the recesses, and the pairs of extraction electrode layers 33 and 34 electrically connect the pairs of mounting layers to the bonding layer.

摘要翻译： 提供了制造压电振动器1的方法。该方法包括通孔35和36的方法，其通过基底晶片，使得通孔的开口朝向空腔C的凹部的外侧开口; 用相同的导电材料在基底晶片的上表面上构图接合层30，成对安装层和成对的引出电极层33和34的工艺; 以及通过在两个晶片之后用激光照射形成在通孔36的接合层和开口之间的引出电极层34的部分（区域S2），使中间的引出电极层34电隔离的工艺 相互阳极结合。 接合层30围绕凹部，这些安装层位于凹部中，并且成对的引出电极层33和34将成对的安装层电连接到接合层。

公开(公告)号：US07589458B2

公开(公告)日：2009-09-15

申请号：US12360409

申请日：2009-01-27

申请人： Kiyoshi Aratake

发明人： Kiyoshi Aratake

IPC分类号： H01L41/08

CPC分类号： H03H9/1035 ,  H01L2924/0002 ,  H03H9/0542 ,  H03H9/0595 ,  H03H9/215 ,  H01L2924/00

摘要： To provide a quartz crystal vibrator, an oscillator and an electronic apparatus capable of preventing a bonding electrode from being corroded and easily maintaining soundness of the bonding electrode over a long period of time, a quartz crystal vibrator is provided with a quartz crystal vibrating plate formed by surrounding a quartz crystal vibrating piece by a frame-like portion, a hermetically closed vessel including a lid member and a base member in a plate-like shape for interposing the quartz crystal vibrating plate in a thickness direction, bonding electrodes provided between the lid member and the quartz crystal vibrating plate and between the base member and the quartz crystal vibrating plate and electrically connected to an inner electrode, and a protecting film for protecting the bonding electrode, provided with a recess portion recessed to an inner side of the hermetically closed vessel from an outer edge portion between the lid member and the quartz crystal vibrating plate and an outer edge portion between the base member and the quartz crystal vibrating plate, the protecting film is provided at the recess portion and the bonding electrode is disposed on the inner side of the recess portion.

摘要翻译： 为了提供能够防止接合电极被腐蚀并且容易保持接合电极的长时间稳定性的石英晶体振子，振荡器和电子设备，石英振子具有形成的石英振动板 通过围绕石英晶体振动片由框状部分，密封容器，其包括盖构件和板状形状的底座构件，用于在厚度方向插入石英振动板，接合电极设置在盖 构件和石英晶体振动板，并且在基底构件和石英振动板之间并且电连接到内部电极，以及用于保护接合电极的保护膜，设置有凹陷到密封的内侧的凹部 容器从盖构件和石英振动板之间的外边缘部分 以及在所述基座部件和所述石英振动板之间的外缘部，所述保护膜设置在所述凹部，所述接合电极配置在所述凹部的内侧。