Ink feed trench etch technique for a fully integrated thermal inkjet printhead

    公开(公告)号:US06517735B2

    公开(公告)日:2003-02-11

    申请号:US09811052

    申请日:2001-03-15

    IPC分类号: H01L2100

    摘要: A monolithic inkjet printhead formed using integrated circuit techniques is described. A silicon substrate has formed on its top surface a thin polysilicon layer in the area in which a trench is to be later formed in the substrate. The edges of the polysilicon layer align with the intended placement of ink feed holes leading into ink ejection chambers. Thin film layers, including a resistive layer, are formed on the top surface of the silicon substrate and over the polysilicon layer. An orifice layer is formed on the top surface of the thin film layers to define the nozzles and ink ejection chambers. A trench mask is formed on the bottom surface of the substrate. A trench is etched (using, for example, TMAH) through the exposed bottom surface of the substrate and to the polysilicon layer. The etching of the polysilicon layer exposes fast etch planes of the silicon. The TMAH then rapidly etches the silicon substrate along the etch planes, thus aligning the edges of the trench with the polysilicon. A wet etch is then performed using a buffered oxide etch (BOE) solution. The BOE will completely etch through the exposed thin film layers on the topside and underside of the substrate, forming ink feed holes through the thin film layers. The trench is now aligned with the ink feed holes due to the polysilicon layer.

    Method of making ink-jet component
    58.
    发明授权
    Method of making ink-jet component 失效
    制作喷墨组件的方法

    公开(公告)号:US5560837A

    公开(公告)日:1996-10-01

    申请号:US336405

    申请日:1994-11-08

    申请人: Kenneth E. Trueba

    发明人: Kenneth E. Trueba

    IPC分类号: B41J2/16

    摘要: A process for fabricating a thin-film structure using a transparent substrate is disclosed. A first structure, such as a ring having a central pillar, is formed of a conductive material on a surface of the substrate. A photoresist material pillar is formed on top of the conductive material central pillar by exposure through the transparent material. Such structures are useful as mandrel structures in the forming of precision thin-film components such as nozzle plates, mesh filter screens, and the like, for ink-jet pens.

    摘要翻译: 公开了一种使用透明基板制造薄膜结构的方法。 诸如具有中心柱的环的第一结构在基板的表面上由导电材料形成。 光致抗蚀剂材料柱通过透明材料的曝光形成在导电材料中心柱的顶部上。 这种结构在形成用于喷墨笔的喷嘴板,筛网筛等的精密薄膜部件的芯棒结构中是有用的。

    Method for forming tapered inkjet nozzles
    59.
    发明授权
    Method for forming tapered inkjet nozzles 失效
    形成锥形喷墨喷嘴的方法

    公开(公告)号:US5417897A

    公开(公告)日:1995-05-23

    申请号:US308329

    申请日:1994-03-19

    摘要: A single mask is used to form a tapered nozzle in a polymer nozzle member using laser ablation. In one embodiment of the mask, clear portions of the mask, corresponding to the nozzle pattern to be formed, each incorporate a variable-density dot pattern, where the opaque dots act to partially shield the underlying polymer nozzle member from the laser energy. This partial shielding of the nozzle member under the dot pattern results in the nozzle member being ablated to less of a depth than where there is no shielding. By selecting the proper density of opaque dots around the peripheral portions of the mask openings, the central portion of each nozzle formed in the polymer nozzle member will be completely ablated through, and the peripheral portions of the nozzle will be only partially ablated through. By increasing the density of dots toward the periphery of each mask opening, the resulting nozzle may be formed to have any tapered shape. Other mask patterns are also described.

    摘要翻译: 使用单个掩模在使用激光烧蚀的聚合物喷嘴构件中形成锥形喷嘴。 在掩模的一个实施例中,对应于要形成的喷嘴图案的掩模的透明部分各自包含可变密度点图案,其中不透明点用于部分地屏蔽下面的聚合物喷嘴构件与激光能量。 喷嘴构件在点图案下的部分屏蔽导致喷嘴构件被烧蚀到比没有屏蔽的那个深度更小的深度。 通过在掩模开口的周边部分周围选择适当的不透明点密度,形成在聚合物喷嘴构件中的每个喷嘴的中心部分将被完全烧蚀穿过,并且喷嘴的周边部分将仅被部分地烧蚀通过。 通过向每个掩模开口的周边增加点的密度,所得到的喷嘴可以形成为具有任何锥形形状。 还描述了其他掩模图案。

    Bidirectional ink jet printing
    60.
    发明授权
    Bidirectional ink jet printing 失效
    双向喷墨打印

    公开(公告)号:US5369428A

    公开(公告)日:1994-11-29

    申请号:US898872

    申请日:1992-06-15

    摘要: Ink jet print quality is improved and higher pen speed permitted by a bidirectional printing protocol. According to the new protocol, each individual character to be printed is first partitioned into a leading portion and a trailing portion. The trailing portion includes all trailing edge bits. Only the leading portion is printed on a forward pass of the ink jet pen. The trailing portion is printed on a reverse pass of the pen, so that trailing edge ink drops are instead printed as leading edge ink drops. As a result, satellite ink drops are directed toward the center of the character, where they are covered by primary ink drops, thereby minimizing character edge roughness associated with exposed satellite ink drops.

    摘要翻译: 喷墨打印质量得到提高,并且双向打印协议允许更高的笔速度。 根据新协议,要打印的每个单独的字符首先被划分为前导部分和后端部分。 尾部包括所有后缘位。 只有前置部分印刷在喷墨笔的正向通行上。 尾部打印在笔的反向通道上,使得后缘墨滴被打印为前缘墨滴。 结果,卫星墨滴指向字符的中心,在那里它们被初级墨滴覆盖,从而最小化与暴露的卫星墨滴相关联的字符边缘粗糙度。