Thin-film semiconductor integrated circuit device and picture display device with using thereof and manufacturing method thereof
    54.
    发明授权
    Thin-film semiconductor integrated circuit device and picture display device with using thereof and manufacturing method thereof 有权
    薄膜半导体集成电路器件及其使用的图像显示器件及其制造方法

    公开(公告)号:US06727514B2

    公开(公告)日:2004-04-27

    申请号:US09811561

    申请日:2001-03-20

    IPC分类号: H01L2906

    摘要: At least one of a semiconductor thin-film for forming a picture display portion and a semiconductor thin-film for forming a peripheral circuit portion, which are accumulated on one common insulative substrate, is constructed with a semiconductor thin-film having a plural number of semiconductor crystalline portions formed to be divided and disposed in a matrix-like, and TFTs are provided in the semiconductor thin-film by bringing those semiconductor single crystal portions into active portions thereof. For that purpose, a crystallization accelerating material is adhered at the position of lattice points of a matrix and is treated with heating process, for forming the single crystal portions disposed in the matrix-like manner, so as to form the TFTs on the surface thereof, thereby completing the thin-film semiconductor integrated circuit device.

    摘要翻译: 用于形成图像显示部分的半导体薄膜和积聚在一个公共绝缘基板上的用于形成外围电路部分的半导体薄膜中的至少一个由半导体薄膜构成,半导体薄膜具有多个 通过将这些半导体单晶部分置于其有效部分,半导体晶体部分被形成为分成矩阵状并且设置在半导体薄膜中。 为此,将结晶促进材料粘附在基体的晶格点的位置,并通过加热处理进行处理,以形成以矩阵状排列的单晶部分,从而在其表面上形成TFT 从而完成薄膜半导体集成电路器件。