公开(公告)号：US20120104978A1

公开(公告)日：2012-05-03

申请号：US13259976

申请日：2010-01-28

申请人： Axel Franke ,  Frank Freund ,  Daniel Christoph Meisel

发明人： Axel Franke ,  Frank Freund ,  Daniel Christoph Meisel

IPC分类号： H02N1/00

CPC分类号： G01C19/5755

摘要： A device is provided for resonantly driving a micromechanical system, which includes at least one seismic mass supported by spring vibrations, at least one drive for driving the vibration of the seismic mass and at least one element that is motionally coupled to the seismic mass. Furthermore, the device includes at least one detection element for detecting a relational parameter, that changes with the vibration of the seismic mass, between the motionally coupled element and the detection element, the detection element being equipped to cause an interruption of the vibration drive when a predetermined value of the relational parameter is reached.

摘要翻译： 提供了一种用于共振驱动微机械系统的装置，该微机械系统包括由弹簧振动支撑的至少一个地震质量，用于驱动地震质量块的振动的至少一个驱动器和与地震质量块动态耦合的至少一个元件。 此外，该装置包括至少一个检测元件，用于检测与动力耦合元件和检测元件之间的地震质量的振动而变化的关系参数，检测元件被配备成引起振动驱动的中断，当 达到关系参数的预定值。

公开(公告)号：US20120025277A1

公开(公告)日：2012-02-02

申请号：US13258570

申请日：2010-03-01

申请人： Axel Franke

发明人： Axel Franke

IPC分类号： H01L29/84

CPC分类号： G01D5/2412 ,  H01L29/84

摘要： A measuring element for recording a deflection includes a region which is situated on a semi-conductor substrate and an electrode for influencing a conductivity of the region, the electrode being mounted deflectably in relation to the region, in such a way that an overlap region is formed between the electrode and the region, the overlap region having a dimension that is variable with a deflection of the electrode. A change in the output signal of the measuring element is a function of the conductivity of the region and is controllable by a change in the dimension of the overlap region, the change in the dimension of the overlap region having a non-linear relationship with the deflection of the electrode so that a change in the output signal of the measuring element has a non-linear relationship with the deflection of the electrode.

摘要翻译： 用于记录偏转的测量元件包括位于半导体衬底上的区域和用于影响该区域的导电性的电极，电极相对于区域可偏转地安装，使得重叠区域为 形成在电极和区域之间，重叠区域具有随着电极的偏转而变化的尺寸。 测量元件的输出信号的变化是该区域的电导率的函数，并且可以通过重叠区域的尺寸的变化来控制，与重叠区域的重叠区域的尺寸具有非线性关系的尺寸的变化 电极的偏转使得测量元件的输出信号的变化与电极的偏转成非线性关系。

公开(公告)号：US20100232119A1

公开(公告)日：2010-09-16

申请号：US12660066

申请日：2010-02-19

申请人： Manuela Schmidt ,  Axel Franke ,  Sven Zinober

发明人： Manuela Schmidt ,  Axel Franke ,  Sven Zinober

IPC分类号： H05K7/00 ,  H01R43/26

CPC分类号： H01L25/0657 ,  B81C1/0023 ,  H01L25/16 ,  H01L2225/06513 ,  H01L2225/06541 ,  H01L2924/0002 ,  H01L2924/14 ,  H01L2924/1433 ,  Y10T29/49208 ,  H01L2924/00

摘要： A method for producing an electronic module, in that at least one first microelectronic component is provided and is electrically connected to a second microelectronic component by a first flip-chip method step; at least one dielectric component is provided which has at least one printed circuit trace, and at least one printed circuit trace of the dielectric component is electrically connected to the second microelectronic component; and the second microelectronic component is electrically connected by a second flip-chip method step to a printed circuit board by way of the printed circuit trace(s) of the dielectric component, in order to avoid vias through a microelectronic component; the invention also relates to a corresponding electronic module.

摘要翻译： 一种用于制造电子模块的方法，其中提供至少一个第一微电子部件，并通过第一倒装芯片方法步骤电连接到第二微电子部件; 提供至少一个介电元件，其具有至少一个印刷电路迹线，并且所述电介质元件的至少一个印刷电路迹线电连接到所述第二微电子元件; 并且所述第二微电子部件通过第二倒装芯片方法步骤通过所述电介质部件的印刷电路迹线电连接到印刷电路板，以避免通过微电子部件的通孔; 本发明还涉及相应的电子模块。

公开(公告)号：US20100206076A1

公开(公告)日：2010-08-19

申请号：US12678669

申请日：2008-09-19

申请人： Jochen Zoellin ,  Axel Franke ,  Kathrin Teeffelen ,  Christina Leinenbach

发明人： Jochen Zoellin ,  Axel Franke ,  Kathrin Teeffelen ,  Christina Leinenbach

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/084

摘要： A sensor element is provided for sensing accelerations in three spatial directions, which furnishes reliable measurement results and moreover can be implemented economically and with a small configuration. The sensor element encompasses at least one seismic mass deflectable in three spatial directions, a diaphragm structure that functions as a suspension mount for the seismic mass, and at least one stationary counterelectrode for capacitive sensing of the deflections of the diaphragm structure. According to the exemplary embodiments and/or exemplary methods of the present invention, the diaphragm structure encompasses at least four electrode regions, electrically separated from one another, that are mechanically coupled via the seismic mass.

摘要翻译： 提供了用于感测三个空间方向上的加速度的传感器元件，其提供可靠的测量结果，并且还可以经济地实现并且具有小的配置。 传感器元件包括至少一个在三个空间方向上可偏转的地震质量，作为用于地震质量块的悬挂安装件的隔膜结构，以及至少一个用于对隔膜结构的偏转进行电容感测的固定反电极。 根据本发明的示例性实施例和/或示例性方法，隔膜结构包括彼此电分离的至少四个电极区域，其经由地震块机械耦合。

公开(公告)号：US20080093690A1

公开(公告)日：2008-04-24

申请号：US11974011

申请日：2007-10-10

申请人： Frank Reichenbach ,  Franz Laermer ,  Kersten Kehr ,  Axel Franke ,  Andreas Scheurle

发明人： Frank Reichenbach ,  Franz Laermer ,  Kersten Kehr ,  Axel Franke ,  Andreas Scheurle

IPC分类号： H01L29/84 ,  H01L21/302

CPC分类号： B81C1/00246 ,  B81B2201/0235 ,  B81C2203/0778

摘要： A micromechanical component and a method for manufacturing such a component, the component having a micromechanical structure and an integrated circuit, the micromechanical structure being monolithically integrated into the circuit, the circuit being provided in a circuit area of the substrate, and the micromechanical structure being provided in a sensor area of the substrate, the material of the substrate being provided in the area of a sacrificial layer as well as in the area of a function layer without a transition.

摘要翻译： 一种微机械部件和制造这种部件的方法，所述部件具有微机械结构和集成电路，所述微机械结构单片集成到所述电路中，所述电路设置在所述基板的电路区域中，所述微机械结构为 设置在衬底的传感器区域中，衬底的材料设置在牺牲层的区域中以及在没有转变的功能层的区域中。