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1.发明申请Micromechanical component having a monolithically integrated circuit and method for manufacturing a component 审中-公开具有单片集成电路的微机械部件和用于制造部件的方法公开(公告)号：US20080093690A1
公开(公告)日：2008-04-24
申请号：US11974011
申请日：2007-10-10
IPC分类号： H01L29/84 , H01L21/302
CPC分类号： B81C1/00246 , B81B2201/0235 , B81C2203/0778
摘要： A micromechanical component and a method for manufacturing such a component, the component having a micromechanical structure and an integrated circuit, the micromechanical structure being monolithically integrated into the circuit, the circuit being provided in a circuit area of the substrate, and the micromechanical structure being provided in a sensor area of the substrate, the material of the substrate being provided in the area of a sacrificial layer as well as in the area of a function layer without a transition.
摘要翻译： 一种微机械部件和制造这种部件的方法，所述部件具有微机械结构和集成电路，所述微机械结构单片集成到所述电路中，所述电路设置在所述基板的电路区域中，所述微机械结构为 设置在衬底的传感器区域中，衬底的材料设置在牺牲层的区域中以及在没有转变的功能层的区域中。
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公开(公告)号：US08429971B2
公开(公告)日：2013-04-30
申请号：US12308632
申请日：2007-11-14
IPC分类号： G01P15/125
CPC分类号： G01P15/18 , G01P15/125 , G01P2015/084
摘要： A micromechanical acceleration sensor includes a substrate, an elastic diaphragm which extends parallel to the substrate plane and which is partially connected to the substrate, and which has a surface region which may be deflected perpendicular to the substrate plane, and a seismic mass whose center of gravity is situated outside the plane of the elastic diaphragm. The seismic mass extends at a distance over substrate regions which are situated outside the region of the elastic diaphragm and which include a system composed of multiple electrodes, each of which together with oppositely situated regions of the seismic mass forms a capacitor in a circuit. In its central region the seismic mass is attached to the elastic diaphragm in the surface region of the elastic diaphragm which may be deflected perpendicular to the substrate plane.
摘要翻译： 微机械加速度传感器包括基板，平行于基板平面延伸并且部分地连接到基板的弹性隔膜，并且具有可以垂直于基板平面偏转的表面区域，以及地震块的中心 重力位于弹性隔膜的平面之外。 地震质量在位于弹性膜片的区域之外的衬底区域上延伸一段距离，其包括由多个电极组成的系统，每个电极与地震质量体的相对定位的区域在电路中形成电容器。 在其中心区域，抗震块附着在弹性隔膜的表面区域中的弹性隔膜，弹性隔膜可能垂直于基板平面偏转。
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公开(公告)号：US20120060604A1
公开(公告)日：2012-03-15
申请号：US12734228
申请日：2008-10-02
申请人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
发明人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
CPC分类号： G01C19/574 , F16F1/025 , G01C19/5747 , G01P3/44
摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.
摘要翻译： 具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕 第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。
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公开(公告)号：US20140326070A1
公开(公告)日：2014-11-06
申请号：US14334407
申请日：2014-07-17
申请人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
发明人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
IPC分类号： G01P3/44 , F16F1/02 , G01C19/574
CPC分类号： G01C19/574 , F16F1/025 , G01C19/5747 , G01P3/44
摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.
摘要翻译： 具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕 第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。
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公开(公告)号：US20110174076A1
公开(公告)日：2011-07-21
申请号：US12308632
申请日：2007-11-14
IPC分类号： G01P15/02
CPC分类号： G01P15/18 , G01P15/125 , G01P2015/084
摘要： A micromechanical acceleration sensor includes a substrate, an elastic diaphragm which extends parallel to the substrate plane and which is partially connected to the substrate, and which has a surface region which may be deflected perpendicular to the substrate plane, and a seismic mass whose center of gravity is situated outside the plane of the elastic diaphragm. The seismic mass extends at a distance over substrate regions which are situated outside the region of the elastic diaphragm and which include a system composed of multiple electrodes, each of which together with oppositely situated regions of the seismic mass forms a capacitor in a circuit. In its central region the seismic mass is attached to the elastic diaphragm in the surface region of the elastic diaphragm which may be deflected perpendicular to the substrate plane.
摘要翻译： 微机械加速度传感器包括基板，平行于基板平面延伸并且部分地连接到基板的弹性隔膜，并且具有可以垂直于基板平面偏转的表面区域，以及地震块的中心 重力位于弹性隔膜的平面之外。 地震质量在位于弹性膜片的区域之外的衬底区域上延伸一段距离，其包括由多个电极组成的系统，每个电极与地震质量体的相对定位的区域在电路中形成电容器。 在其中心区域，抗震块附着在弹性隔膜的表面区域中的弹性隔膜，弹性隔膜可能垂直于基板平面偏转。
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公开(公告)号：US20110088469A1
公开(公告)日：2011-04-21
申请号：US12513834
申请日：2007-11-08
申请人： Reinhard Neul , Johannes Classen , Sebastian Gracki , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Kersten Kehr , Christian Gerhardt
发明人： Reinhard Neul , Johannes Classen , Sebastian Gracki , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Kersten Kehr , Christian Gerhardt
IPC分类号： G01C19/56
CPC分类号： G01C19/5712
摘要： A method and system are provided including a rotation-rate sensor having a substrate, a bearing, a vibrating structure suspended on the bearing by springs in a rotatable manner for performing a planar driving vibration motion, and drive means for producing the planar driving vibration motion of the vibrating structure. The rotation-rate sensor has first evaluation means for detecting a rotation in a first axis of rotation and second evaluation means for detecting a rotation in a second axis of rotation.
摘要翻译： 提供了一种方法和系统，其包括旋转速率传感器，其具有基板，轴承，以可旋转的方式由弹簧悬挂在轴承上的振动结构，用于执行平面驱动振动运动;以及驱动装置，用于产生平面驱动振动运动 的振动结构。 旋转速率传感器具有用于检测第一旋转轴线的旋转的第一评估装置和用于检测第二旋转轴线的旋转的第二评估装置。
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公开(公告)号：US20100000321A1
公开(公告)日：2010-01-07
申请号：US12303443
申请日：2007-06-06
申请人： Reinhard Neul , Johannes Classen , Axel Franke , Marco Quander , Udo-Martin Gomez , Kersten Kehr
发明人： Reinhard Neul , Johannes Classen , Axel Franke , Marco Quander , Udo-Martin Gomez , Kersten Kehr
IPC分类号： G01C19/56
CPC分类号： G01C19/5762 , G01C19/5747
摘要： A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second axis perpendicular to the surface, and having a detection device by which the deflection of the detection mass element along the second axis is detectable. Due to the arrangement of the second axis perpendicular to the surface, the yaw rate sensor may be integrated into a chip together with additional yaw rate sensors suitable for detection of rotations about axes of rotation in other directions.
摘要翻译： 偏航率传感器包括驱动质量元件，该驱动质量元件位于衬底的表面上方并且可被驱动装置驱动，沿着沿表面延伸的第一轴线振动，具有检测质量元件，该检测质量元件可在 科里奥利力沿着垂直于表面的第二轴线，并且具有检测装置，通过该检测装置可以检测检测质量元件沿着第二轴线的偏转。 由于垂直于表面的第二轴的布置，横摆角速度传感器可以与适合于检测围绕其它方向的旋转轴线的旋转的附加横摆速率传感器一体地集成到一个芯片中。
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公开(公告)号：US09081027B2
公开(公告)日：2015-07-14
申请号：US12734228
申请日：2008-10-02
申请人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
发明人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
IPC分类号： G01C19/56 , G01P3/44 , G01C19/574 , F16F1/02
CPC分类号： G01C19/574 , F16F1/025 , G01C19/5747 , G01P3/44
摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, where the movable substructures are excitable into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, where deflections of the Coriolis elements induced by a Coriolis force are detectable, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.
摘要翻译： 具有衬底和多个可移动子结构的偏转速率传感器，其安装在衬底的表面上，可移动子结构耦合到共享的，特别是中心弹簧元件，其中可移动子结构可激发成耦合振荡 在平行于衬底的表面延伸的平面中，具有科里奥利元件的可移动子结构，其中可检测科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕第一轴线的偏航率， 提供了用于检测围绕第二轴线的偏航率的第二科里奥利元件，所述第二轴线垂直于所述第一轴线定向。
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公开(公告)号：US09261363B2
公开(公告)日：2016-02-16
申请号：US12303443
申请日：2007-06-06
申请人： Reinhard Neul , Johannes Classen , Axel Franke , Marco Quander , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
发明人： Reinhard Neul , Johannes Classen , Axel Franke , Marco Quander , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
IPC分类号： G01C19/56 , G01C19/5762 , G01C19/5747
CPC分类号： G01C19/5762 , G01C19/5747
摘要： A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second axis perpendicular to the surface, and having a detection device by which the deflection of the detection mass element along the second axis is detectable. Due to the arrangement of the second axis perpendicular to the surface, the yaw rate sensor may be integrated into a chip together with additional yaw rate sensors suitable for detection of rotations about axes of rotation in other directions.
摘要翻译： 偏航率传感器包括驱动质量元件，该驱动质量元件位于衬底的表面上方并且可被驱动装置驱动，沿着沿表面延伸的第一轴线振动，具有检测质量元件，该检测质量元件可在 科里奥利力沿着垂直于表面的第二轴线，并且具有检测装置，通过该检测装置可以检测到检测质量元件沿着第二轴线的偏转。 由于垂直于表面的第二轴的布置，横摆角速度传感器可以与适合于检测围绕其它方向的旋转轴线的旋转的附加横摆速率传感器一体地集成到一个芯片中。
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公开(公告)号：US20130299927A1
公开(公告)日：2013-11-14
申请号：US13888920
申请日：2013-05-07
申请人： Axel Franke , Patrick Wellner , Lars Tebje
发明人： Axel Franke , Patrick Wellner , Lars Tebje
CPC分类号： B81B3/0075 , B81C1/00626 , B81C1/00674 , B81C2201/0112 , B81C2201/014 , B81C2203/0109
摘要： Measures are proposed by which the design freedom is significantly increased in the case of the implementation of the micromechanical structure of the MEMS element of a component, which includes a carrier for the MEMS element and a cap for the micromechanical structure of the MEMS element, the MEMS element being mounted on the carrier via a standoff structure. The MEMS element is implemented in a layered structure, and the micromechanical structure of the MEMS element extends over at least two functional layers of this layered structure, which are separated from one another by at least one intermediate layer.
摘要翻译： 提出的措施是，在实现元件的MEMS元件的微机械结构的情况下，设计自由度显着增加，其包括用于MEMS元件的载体和用于MEMS元件的微机械结构的盖， MEMS元件通过支架结构安装在载体上。 MEMS元件以分层结构实现，并且MEMS元件的微机械结构在该分层结构的至少两个功能层上延伸，所述功能层通过至少一个中间层彼此分离。
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