摘要:
There is provided a method for testing a piezoelectric/electrostrictive actuator, wherein the displacement of a piezoelectric/electrostrictive actuator is estimated on the basis of the relations between one or more frequency characteristic values selected from the group consisting of the heights and areas of the peaks of the resonance waveforms and the difference of the maximum and minimum of the first order or first to higher orders of the resonance frequency characteristic values of the piezoelectric/electrostrictive actuator and the k-th order (k=1 to 4) of the first or first to higher orders of resonance frequencies. According to this piezoelectric/electrostrictive actuator testing method, a piezoelectric/electrostrictive actuator can be tested with high precision without actually driving the same as a product and without being accompanied by any disassembly/breakage.
摘要:
A passage detection apparatus is configured to detect the change in the properties (propagation state of sound wave, dielectric constant, etc.) of a specific space, which changes according to the passage of an object in the specific space and the size of the object. The passage detection apparatus includes a pair of detection units and configured to transmit and receive signals to and from an external device. The specific space is formed by the space between the detection unit and the detection unit. The detection unit is supported by a first substrate. The detection unit is supported by a second substrate that is parallel to the first substrate, and arranged at the position corresponding to the detection unit supported by the first substrate.
摘要:
There is disclosed a method of manufacturing a piezoelectric element including a step of preparing a green sheet A including a portion which becomes a fired piezoelectric body later, by use of a piezoelectric material; a step of joining, to at least one surface of the green sheet A, a green sheet B having an opening in a portion facing the portion which becomes the fired piezoelectric body later, followed by firing to obtain the fired piezoelectric body provided with a reinforcing plate to which the reinforcing plate formed owing to the firing of the green sheet B is attached; and a step of forming a film-like electrode in a portion obtained by the firing of the green sheet A in the fired piezoelectric body provided with the reinforcing plate.
摘要:
Disclosed is a piezoelectric/electrostrictive membrane sensor wherein the main component of terminal electrodes is contained in the vicinity of the surface of a piezoelectric/electrostrictive body. The membrane sensor is hardly electrostatically charged and thus prevented from electrostatic discharge damage and/or the attraction of dust, dirt or the like.
摘要:
There is provided a method for manufacturing a piezoelectric actuator where the planar shape is adjusted by subjecting the piezoelectric body layer located on one of the outer surfaces in the two or more piezoelectric body layers to a polarization treatment to control remnant polarization of the piezoelectric body layer. The piezoelectric actuator is used as a drive portion of a piezoelectric drive type variable capacitor. The variable capacitor has high mechanical strength and excellent reliability for a long period of time. The relation between the displacement amount of the piezoelectric actuator and the capacity of the capacitor is stable, and the variable capacity is wide.
摘要:
A passage detection apparatus is configured to detect the change in the properties (propagation state of sound wave, dielectric constant, etc.) of a specific space, which changes according to the passage of an object in the specific space and the size of the object. The passage detection apparatus includes a pair of detection units configured to transmit and receive signals to and from an external device. The specific space is formed by the space between the first detection unit and the second detection unit. The first detection unit is supported by a first substrate. The second detection unit is supported by a second substrate that is parallel to the first substrate, and arranged at the position corresponding to the first detection unit supported by the first substrate.
摘要:
Disclosed herein is a flight state detection apparatus and a flight state detection method that is capable of accurately detecting the flight state of a micro object ejected from a micro object ejection part. The flight state detection apparatus is constructed in a simplified structure and is manufactured at low costs. The flight state detection apparatus includes a sensor substrate, a piezoelectric/electrostrictive element, and an aperture plate. The sensor substrate includes a thick support part and a vibrating plate supported by the thick support part in a cantilever shape. The piezoelectric/electrostrictive element is mounted to a fixed end side of the vibrating plate. In the aperture plate, an aperture is formed, which is opposite to a target part disposed at a free end side of the vibrating plate. When the micro object passes through the aperture, and then collides with the target part, the vibrating plate is vibrated, and an electromotive force corresponding to the vibration state is generated in the piezoelectric/electrostrictive element.
摘要:
A liquid droplet discharging piezoelectric device 1 provided with a cavity member 11 with a built-in cavity 3; an introduction member 13 having introduction channel 5 connecting with the cavity 3; and a nozzle member 12 having nozzle channel 4 connecting with the cavity 3 on a side opposite to the channel 5. This liquid droplet discharging piezoelectric device 1 is provided with an introduction port 6, attached to the introduction member 13, capable of introducing a liquid into the cavity 3 via the introduction channel 5, and a discharge port 7, attached to the nozzle member 12, capable of discharging as droplets a liquid filled in the cavity 3 via the nozzle channel 40. Even in a case where an amount of liquid droplets is of a nanoliter (nl) order, excellent stability and reproducibility are attained, and the unit can stably be operated when attached to an apparatus.
摘要:
Disclosed is a piezoelectric/electrostrictive membrane type sensor 20 provided with a ceramic base body 1 and a piezoelectric/electrostrictive element 12. The ceramic base body is provided with a thin diaphragm portion 3, a thick portion 2 and a cavity 10 formed by the portions. The piezoelectric/electrostrictive element is arranged on the ceramic base body 1 and includes a piezoelectric/electrostrictive body 5, and an upper electrode 6 and a lower electrode 4 sandwiching the piezoelectric/electrostrictive body 5. In the piezoelectric/electrostrictive membrane type sensor 20, the piezoelectric/electrostrictive body 5 contains an alkaline metal or an alkaline earth metal, and the upper electrode 6 and the lower electrode 4 contain gold or platinum. When there is a change in the atmosphere at a place where the sensor is used, the sensor copes with such change and at least prevents continuation of low-quality measurement.
摘要:
Disclosed herein is a passage detection apparatus capable of detecting a passage of an object in a specific space. The passage detection apparatus includes a transmitting device, a receiving device, and a shielding member. The transmitting device is provided with a vibration generating source. The receiving device is arranged at the position corresponding to the transmitting device across the specific space. The shielding member has a through-hole, and is arranged so as to be interposed between the transmitting device and the receiving device. The vibration transmitted from the transmitting device reaches the receiving device via the through-hole and a passage route of the object. On the other hand, the reception of the vibration, reflected in the specific space, by the receiving device is suppressed by the shielding member.