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    FLUORESCENCE DETECTION DEVICE
    51.
    发明申请
    FLUORESCENCE DETECTION DEVICE 审中-公开
    荧光检测装置

    公开(公告)号：US20100252747A1

    公开(公告)日：2010-10-07

    申请号：US12549942

    申请日：2009-08-28

    申请人： Takahisa Nakano ,  Tsutomu Saito

    发明人： Takahisa Nakano ,  Tsutomu Saito

    IPC分类号： G01J1/58

    CPC分类号： G07D7/1205

    摘要： A fluorescence detection device is configured to detect a fluorescent substance which is attached to an inspected medium and glows at a specific wavelength. The detection device includes an illumination device configured to apply excitation light for exciting a fluorescent substance to an inspected medium, a first photoreceptor configured to receive excited light from the fluorescent substance of the inspected medium and detect only light of a specific wavelength, a second photoreceptor configured to receive excited light from the fluorescent substance of the inspected medium and detect light in a wider frequency band including the specific wavelength, and an authentication section configured to authenticate the fluorescent substance based on detection signals from the first and second photoreceptors.

    摘要翻译： 荧光检测装置被配置为检测附着到被检查介质并以特定波长发光的荧光物质。 检测装置包括：照明装置，其被配置为向被检查介质施加用于激发荧光物质的激发光;第一感光体，构造成从被检查介质的荧光物质接收激发光，仅检测特定波长的光;第二感光体 被配置为从被检测介质的荧光物质接收激发的光，并检测包括特定波长的较宽频带的光;以及认证部，其被配置为基于来自第一和第二感光体的检测信号来认证荧光物质。

    Specimen Inspection Equipment and How to Make the Electron Beam Absorbed Current Images
    52.
    发明申请
    Specimen Inspection Equipment and How to Make the Electron Beam Absorbed Current Images 有权
    标本检测设备和如何使电子束吸收当前图像

    公开(公告)号：US20100116986A1

    公开(公告)日：2010-05-13

    申请号：US12691331

    申请日：2010-01-21

    申请人： Tomoharu Obuki ,  Hiroshi Toyama ,  Yasuhiro Mitsui ,  Munetoshi Fukui ,  Yasuhiko Nara ,  Tohru Ando ,  Katsuo Ooki ,  Tsutomu Saito ,  Masaaki Komori

    发明人： Tomoharu Obuki ,  Hiroshi Toyama ,  Yasuhiro Mitsui ,  Munetoshi Fukui ,  Yasuhiko Nara ,  Tohru Ando ,  Katsuo Ooki ,  Tsutomu Saito ,  Masaaki Komori

    IPC分类号： G01N23/225

    CPC分类号： G01N23/225 ,  H01J2237/2449 ,  H01J2237/24564 ,  H01J2237/2817

    摘要： An object of the present invention is to obtain a clear absorbed current image without involving the difference in gain of amplifier between inputs, from absorbed currents detected by using a plurality of probes and to improve measurement efficiency.In the present invention, a plurality of probes are brought in contact with a specimen. While irradiating the specimen with an electron beam, currents flowing in the probes are measured. Signals from at least two probes are input to a differential amplifier. An output of the differential amplifier is amplified. On the basis of the amplified output and scanning information of the electron beam, an absorbed current image is generated. According to the invention, a clear absorbed current image can be obtained without involving the difference in gain of amplifier between inputs. Thus, measurement efficiency in a failure analysis of a semiconductor device can be improved.

    摘要翻译： 本发明的目的是获得清晰的吸收电流图像，而不涉及放大器在输入之间的增益差异，从吸收的电流通过使用多个探针检测并提高测量效率。 在本发明中，使多个探针与试样接触。 在用电子束照射样品的同时，测量在探针中流动的电流。 至少两个探头的信号被输入到差分放大器。 差分放大器的输出被放大。 基于电子束的放大输出和扫描信息，产生吸收的当前图像。 根据本发明，可以获得清晰的吸收电流图像而不涉及放大器在输入之间的增益差。 因此，可以提高半导体器件的故障分析中的测量效率。

    Semiconductor Testing Method and Semiconductor Tester
    53.
    发明申请
    Semiconductor Testing Method and Semiconductor Tester 有权
    半导体测试方法和半导体测试仪

    公开(公告)号：US20080237462A1

    公开(公告)日：2008-10-02

    申请号：US11834207

    申请日：2007-08-06

    申请人： Tohru ANDO ,  Yasuhiko Nara ,  Tsutomu Saito ,  Shinichi Kato ,  Takeshi Sunaoshi

    发明人： Tohru ANDO ,  Yasuhiko Nara ,  Tsutomu Saito ,  Shinichi Kato ,  Takeshi Sunaoshi

    IPC分类号： G01N23/00 ,  G06K9/00

    CPC分类号： G01N23/225 ,  H01J2237/2817 ,  H01J2237/2826

    摘要： A semiconductor testing method capable of quickly counting semiconductor cells with accuracy is achieved. Since an SEM is adjusted in a specific condition, the rotation axis of a stage and the axis of an optical system are deviated from each other in a different observation environment and a different adjustment environment. The deviation between the axes is easily adjusted in each observation environment, so that the deviation is reduced. A seemingly horizontal or vertical line is drawn with a mouse and raster rotation is performed in alignment with the closer axis. After that, the stage is horizontally moved, pattern matching is performed on an image on a position where the image should be disposed, and an angle is adjusted. The stage is moved evenly along the X-axis and the Y-axis, achieving a movement to a destination like a straight line. In synchronization with the smooth movement of the stage, a cell 201 is surrounded in a rectangular frame 205 by a ruler 301 and the number of cells is displayed with a numeric value 302. Thus by using a correct direction and a stable velocity, image correction (501 to 504) is further performed during the movement of the stage (403), so that the cells 201 can be easily counted with accuracy.

    摘要翻译： 实现了能够精确地快速计数半导体单元的半导体测试方法。 由于在特定条件下调整SEM，因此在不同的观察环境和不同的调节环境下，台的旋转轴和光学系统的轴线彼此偏离。 在每个观察环境中容易调整轴之间的偏差，从而减小偏差。 用鼠标绘制一个看似水平或垂直的线条，并且与更靠近的轴线对齐进行光栅旋转。 之后，水平移动台，对应该设置图像的位置上的图像执行图案匹配，并且调整角度。 舞台沿着X轴和Y轴均匀移动，实现了像直线一样的目的地移动。 与平台的平滑移动同步，单元201由标尺301在矩形框205中包围，并且以数值302显示单元的数量。 因此，通过使用正确的方向和稳定的速度，在台（403）的移动期间进一步执行图像校正（501〜504），使得可以容易地对单元201进行计数。

    Logical CAD navigation for device characteristics evaluation system
    54.
    发明申请
    Logical CAD navigation for device characteristics evaluation system 有权
    设备特征评估系统的逻辑CAD导航

    公开(公告)号：US20070124713A1

    公开(公告)日：2007-05-31

    申请号：US11583983

    申请日：2006-10-20

    申请人： Tohru Ando ,  Tsutomu Saito ,  Yasuhiko Nara ,  Mikio Takagi ,  Koichi Takauchi

    发明人： Tohru Ando ,  Tsutomu Saito ,  Yasuhiko Nara ,  Mikio Takagi ,  Koichi Takauchi

    IPC分类号： G06F17/50

    CPC分类号： G06T7/001 ,  G06T2200/24 ,  G06T2207/30148 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/2817 ,  Y10S715/964

    摘要： A navigation system for easily determining defective positions is provided. In the case of CAD navigation to defective positions, logical information for indicating defective positions is created in a CAD format, instead of CAD data of physical information indicating circuit design. Specifically, by attaching marks such as rectangles, characters, or lines, to an electron microscope image with software, quick navigation is performed with required minimum information. By using created CAD data, re-navigation with the same equipment and CAD navigation to heterogeneous equipment are performed.

    摘要翻译： 提供了用于容易地确定缺陷位置的导航系统。 在CAD导航到缺陷位置的情况下，代替用于指示电路设计的物理信息的CAD数据，以CAD格式创建用于指示缺陷位置的逻辑信息。 具体地，通过用软件将诸如矩形，字符或线的标记附加到电子显微镜图像上，使用所需的最小信息进行快速导航。 通过使用创建的CAD数据，执行使用相同设备和CAD导航到异构设备的重新导航。

    Applicator
    55.
    发明授权
    Applicator 失效
    申请人

    公开(公告)号：US06270277B1

    公开(公告)日：2001-08-07

    申请号：US09512065

    申请日：2000-02-24

    申请人： Nobuaki Ogino ,  Tsutomu Saito

    发明人： Nobuaki Ogino ,  Tsutomu Saito

    IPC分类号： A46B1704

    CPC分类号： A46B11/0089 ,  A46B11/0013 ,  A46B11/0079 ,  A46B2200/20

    摘要： An applicator comprising a container containing an application liquid and an applicator member of the application liquid held to an opening provided in part of the container, wherein the applicator member comprises an application face material and a cover ring for engaging the application face material with the container, and at least in the central region of the outer surface of the application face material, a plurality of flexible fine protruding from the outer surface of the applicator member are arranged, and at the same time, at least in part of clearances between a plurality of the fine filament like portions in the outer surface of the application face member, holes for discharging the application liquid are provided, and the application face material and the cover ring are composed with different synthetic resins, and provides remarkable durability and convenience.

    摘要翻译： 一种涂抹器，其包括容纳施用液体的容器和保持在所述容器的一部分中的开口的施用液体的施用器构件，其中所述施用器构件包括施加面材料和用于将所述施用面材料与所述容器接合的盖环 ，并且至少在施加面材料的外表面的中心区域中布置有从施用器构件的外表面突出的多个柔性细孔，并且同时至少部分地在多个 在涂布面构件的外表面的细丝状部分中设置用于排出涂布液的孔，并且涂布面材料和盖环由不同的合成树脂构成，并且提供显着的耐久性和便利性。

    Vehicle window control system responsive to external force
    57.
    发明授权
    Vehicle window control system responsive to external force 失效
    车窗控制系统响应外力

    公开(公告)号：US5932931A

    公开(公告)日：1999-08-03

    申请号：US33091

    申请日：1998-03-02

    申请人： Takeshi Tanaka ,  Noboru Tsuge ,  Hidenori Ishihara ,  Tsutomu Saito

    发明人： Takeshi Tanaka ,  Noboru Tsuge ,  Hidenori Ishihara ,  Tsutomu Saito

    IPC分类号： B60J1/17 ,  E05F15/16 ,  G05G5/04

    CPC分类号： B60J1/17 ,  E05F15/41 ,  E05F15/665 ,  G05G5/04

    摘要： When a closing end of a vehicle windowpane is located at the upper side of a preset point P1 while the windowpane is closing, an obstacle pinched between a window frame and the windowpane is detected by a window frame sensor. When the closing end of the vehicle window is located at the lower side of a preset point P2, the pinched obstacle is detected by the window frame sensor and a motor rotation speed sensor, which indicates changes in motor driving load. This prevents a vehicle window control system from operating erroneously when an obstacle is pinched at a slope portion of the window frame.

    摘要翻译： 当窗玻璃关闭时，当车窗玻璃的闭合端位于预设点P1的上侧时，通过窗框传感器检测夹在窗框和窗玻璃之间的障碍物。 当车窗的关闭端位于预设点P2的下侧时，由窗框传感器和电动机转速传感器检测到夹紧的障碍物，其指示电动机驱动负载的变化。 当障碍物被夹在窗框的斜坡部分时，这防止车窗控制系统错误地操作。

    Pellicle structure and process for preparation thereof with dissolution of coating layer
    60.
    发明授权
    Pellicle structure and process for preparation thereof with dissolution of coating layer 失效
    薄膜结构及其制备方法与涂层溶解

    公开(公告)号：US5643654A

    公开(公告)日：1997-07-01

    申请号：US801500

    申请日：1991-11-27

    申请人： Minoru Fujita ,  Hiroaki Nakagawa ,  Tsutomu Saito

    发明人： Minoru Fujita ,  Hiroaki Nakagawa ,  Tsutomu Saito

    IPC分类号： G03F1/62 ,  H01L21/027 ,  G03B27/28 ,  B32B3/24

    CPC分类号： G03F1/62 ,  Y10T428/23 ,  Y10T428/24331 ,  Y10T428/24777 ,  Y10T428/24942 ,  Y10T428/2804 ,  Y10T428/2813 ,  Y10T428/2826 ,  Y10T428/2891 ,  Y10T428/3154 ,  Y10T428/31544 ,  Y10T428/31891 ,  Y10T428/31928

    摘要： A pellicle structure comprises a frame having a vertical through opening and a pellicle film spread on the upper the upper end of the opening of the frame. The pellicle film has a coating layer comprising a coating agent formed at least on the inner surface thereof, and a bonding portion for bonding the end edge of the frame to the peripheral edge of the pellicle film through an adhesive layer. The coating agent, in the bonding portion, is dissolved or dispersed in the adhesive so that the pellicle substrate is directly contacted by and bonded to the adhesive. In forming this pellicle structure, an adhesive, capable of dissolving therein the coating agent which comprises the coating layer, is coated on the top end of the opening of the frame; the adhesive is contacted with the coating layer on the surface of the pellicle substrate, whereby the coating agent dissolves in the adhesive allowing direct contact of the adhesive with the pellicle substrate; and the adhesive is then cured, whereby the pellicle substrate is directly bonded to the frame without interposition of the coating layer.

    摘要翻译： 防护薄膜组件包括具有垂直通孔的框架和在框架的开口的上端的上部扩展的防护薄膜。 防护薄膜具有包括至少在其内表面上形成的涂布剂的涂层和用于通过粘合剂层将框架的端边缘粘合到防护薄膜的周边边缘的粘合部分。 粘合部分中的涂布剂溶解或分散在粘合剂中，使得防护薄膜组件基底直接与粘合剂接触并粘合。 在形成该防护薄膜结构体时，将能够溶解在其中的包含涂层的涂布剂的粘合剂涂覆在框架的开口的顶端上; 粘合剂与防护薄膜组件表面上的涂层接触，由此涂覆剂溶解在粘合剂中，允许粘合剂与防护薄膜组件基底直接接触; 然后固化粘合剂，由此防护薄膜组件基底直接粘合到框架而不插入涂层。