公开(公告)号：US10700126B2

公开(公告)日：2020-06-30

申请号：US16167485

申请日：2018-10-22

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Ting-Hsiang Huang ,  Yi-Chung Sheng ,  Sheng-Yuan Hsueh ,  Kuo-Hsing Lee ,  Chih-Kai Kang

IPC: H01L27/22 ,  G11C11/16 ,  H01L43/08

Abstract: A magnetic random access memory (MRAM) includes device strings coupled in parallel, each comprising magnetic tunnel junctions (MTJs) coupled in serial, wherein a quantity of the MTJs of each of the device strings is equal to a quantity of the device strings, and an equivalent resistance (Req) of the MTJs is equal to an average of the sum of a high resistance of one of the MTJs and a low resistance of another MTJ.

公开(公告)号：US10580883B2

公开(公告)日：2020-03-03

申请号：US15912526

申请日：2018-03-05

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Yi-Chung Sheng ,  Sheng-Yuan Hsueh ,  Chih-Kai Kang

IPC: H01L29/66 ,  H01L29/78 ,  H01L27/092 ,  H01L21/8238 ,  H01L21/8234 ,  H01L27/088 ,  H01L27/12 ,  H01L21/84

Abstract: A method of forming a fin forced stack inverter includes the following steps. A substrate including a first fin, a second fin and a third fin across a first active area along a first direction is provided, wherein the first fin, the second fin and the third fin are arranged side by side. A fin remove inside active process is performed to remove at least a part of the second fin in the first active area. A first gate is formed across the first fin and the third fin in the first active area along a second direction. The present invention also provides a 1-1 fin forced fin stack inverter formed by said method.

公开(公告)号：US10529707B2

公开(公告)日：2020-01-07

申请号：US15983096

申请日：2018-05-18

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Hsin-Hsien Chen ,  Sheng-Yuan Hsueh ,  Yi-Chung Sheng ,  Chih-Kai Kang ,  Wen-Kai Lin ,  Shu-Hung Yu

IPC: H01L27/06 ,  H01L21/768 ,  H01L29/06 ,  H01L49/02 ,  H01L23/528

Abstract: A method of forming a capacitor includes the following steps. First, a substrate is provided. A dielectric layer is formed over the substrate. A first patterning process is performed to form a first contact plug through the whole thickness of the dielectric layer and a second patterning process is performed to form a second contact plug in the dielectric layer and spaced apart from the first contact plug in a pre-determined distance, wherein the first contact plug and the second contact plug are capacitively coupled.

公开(公告)号：US10256155B1

公开(公告)日：2019-04-09

申请号：US15893709

申请日：2018-02-12

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Wen-Kai Lin ,  Yi-Chung Sheng ,  Sheng-Yuan Hsueh ,  Chih-Kai Kang

IPC: H01L29/78 ,  H01L21/762 ,  H01L23/528 ,  H01L27/088 ,  H01L21/8234

Abstract: A method for fabricating semiconductor device includes the steps of: forming a first active region and a second active region extending along a first direction on a substrate; forming a first single diffusion break (SDB) structure extending along a second direction between the first active region and the second active region; and forming a first gate line extending along the second direction intersecting the first active region and the second active region. Preferably, the first SDB structure is directly under the first gate line between the first active region and the second active region.

公开(公告)号：US20180156862A1

公开(公告)日：2018-06-07

申请号：US15369905

申请日：2016-12-06

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Hsin-Hsien Chen ,  Sheng-Yuan Hsueh ,  Yi-Chung Sheng ,  Wen-Kai Lin ,  Chih-Kai Kang

IPC: G01R31/28

CPC classification number: G01R31/2884 ,  H01L22/14 ,  H01L22/34

Abstract: The present invention provides a test key structure for measuring or simulating a target via array. The structure includes a substrate with a test region, a plurality of first conductive lines in the test region; a plurality of second conductive lines in the test region and on the first conductive lines, wherein the first conductive lines and the second conductive lines overlaps vertically in a plurality of target regions, and a plurality of vias disposed between the first conductive lines and the second conductive lines, wherein at least two vias vertically contact one of the first conductive lines and one of the second conductive lines. The present invention further provides a method of measuring resistance by using the testkey structure

公开(公告)号：US20180130753A1

公开(公告)日：2018-05-10

申请号：US15347757

申请日：2016-11-09

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chih-Kai Kang ,  Sheng-Yuan Hsueh ,  Yi-Chung Sheng ,  Kuo-Yu Liao ,  Shu-Hung Yu ,  Hung-Hsu Lin ,  Hsiang-Hung Peng

IPC: H01L23/544 ,  H01L27/092 ,  H01L23/522

Abstract: A semiconductor device includes a substrate including a plurality of chip areas and a scribe line defined thereon, and a mark pattern disposed in the scribe line. The mark pattern includes a plurality of unit cells immediately adjacent to each other, and each unit cell includes a first active region, a second active region isolated from the first active region, a plurality of first gate structures extending along a first direction and arranged along a second direction perpendicular to the first direction, and a plurality of first conductive structures. The first gate structures straddle the first active region and the second active region. The first conductive structures are disposed on the first active region, the second active region, and two opposite sides of the first gate structures.

公开(公告)号：US20250071983A1

公开(公告)日：2025-02-27

申请号：US18372130

申请日：2023-09-24

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Sheng-Yuan Hsueh ,  Yung-Chen Chiu ,  Chih-Kai Kang ,  Wen-Kai Lin

IPC: H10B20/25

Abstract: A method for fabricating a semiconductor device includes the steps of first providing a substrate having a transistor region and an one time programmable (OTP) capacitor region, forming a first fin-shaped structure on the transistor region and a second fin-shaped structure on the OTP capacitor region, and then performing an oxidation process to form a gate oxide layer on the first fin-shaped structure and the second fin-shaped structure. Preferably, the first fin-shaped structure and the second fin-shaped structure have different shapes under a cross-section perspective.

公开(公告)号：US20240429228A1

公开(公告)日：2024-12-26

申请号：US18829265

申请日：2024-09-09

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Sheng-Yuan Hsueh ,  Chien-Liang Wu ,  Te-Wei Yeh ,  Yi-Chun Chen

IPC: H01L27/06 ,  H01L21/306 ,  H01L21/765 ,  H01L21/8252 ,  H01L29/20 ,  H01L29/205 ,  H01L29/40 ,  H01L29/66 ,  H01L29/778

Abstract: A method of manufacturing a resistor-transistor-logic circuit with GaN structures, including steps of forming a GaN layer, an AlGaN barrier layer and a p-type doped GaN capping layer on a substrate, patterning the p-type doped GaN capping layer into multiple p-type doped GaN capping patterns, wherein the GaN layer under parts of the p-type doped GaN capping patterns is converted into gate depletion regions, and the GaN layer not covered by the p-type doped GaN capping patterns in a resistor region functions as 2DEG resistors, forming a passivation layer on the GaN layer and the p-type doped GaN capping patterns, forming multiple sources and drains on the GaN layer, and forming multiple gates on the p-type doped GaN capping patterns, wherein the gates, sources and drains in a high-voltage device region constitute high-voltage HEMTs, and the gates, sources and drains in a low-voltage device region constitute low-voltage logic FETs.

公开(公告)号：US20240387523A1

公开(公告)日：2024-11-21

申请号：US18212188

申请日：2023-06-21

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Hsin-Hsien Chen ,  Sheng-Yuan Hsueh ,  Kun-Szu Tseng ,  Kuo-Hsing Lee ,  Chih-Kai Kang

IPC: H01L27/088 ,  H01L21/8234 ,  H01L29/06 ,  H01L29/417 ,  H01L29/423 ,  H01L29/78

Abstract: A semiconductor device includes a substrate. A high voltage transistor is disposed within a high voltage region of the substrate. The high voltage transistor includes a first gate dielectric layer disposed on the substrate. A first gate electrode is disposed on the first gate dielectric layer. A first source/drain doping region and a second source/drain doping region are respectively disposed in the substrate at two sides of the first gate electrode. A first silicide layer covers and contacts the first source/drain doping region and a second silicide layer covers and contacts the second source/drain doping region. A first conductive plate penetrates the first silicide layer and contacts the first source/drain doping region. A second conductive plate penetrates the second silicide layer and contacts the second source/drain doping region.

公开(公告)号：US12133377B2

公开(公告)日：2024-10-29

申请号：US17320234

申请日：2021-05-14

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Sheng-Yuan Hsueh ,  Chi-Horn Pai ,  Chih-Kai Kang

IPC: H10B20/20 ,  G11C17/16

CPC classification number: H10B20/20 ,  G11C17/16

Abstract: A bit cell structure for one-time programming is provided in the present invention, including a substrate, a first doped region in the substrate and electrically connecting a source line, a second doped region in the substrate and having a source and a drain electrically connecting a bit line, a heavily-doped channel in the substrate and connecting the first doped region and the source of second doped region, and a word line crossing over the second dope region between the source and the drain.