Power-interface assembly of susceptor for use in semiconductor fabrication apparatus
    51.
    发明授权
    Power-interface assembly of susceptor for use in semiconductor fabrication apparatus 失效
    用于半导体制造装置的基座的电源接口组件

    公开(公告)号:US06688923B2

    公开(公告)日:2004-02-10

    申请号:US10303528

    申请日:2002-11-25

    IPC分类号: H01R1122

    摘要: The present invention provides a susceptor power-interface assembly which is used for a chamber process module that includes a power supply, a process chamber and a susceptor, wherein the susceptor includes a susceptor shaft penetrating a bottom of the process chamber and a susceptor base on which a wafer is disposed for the process. The susceptor power-interface assembly electrically connects the power supply to the susceptor base. For the electrical-connection between the power supply to the suceptor base, the susceptor power-interface assembly includes a first flange at the end of the susceptor shaft, the first flange bent outside from the susceptor shaft; a second flange having a circular shape, the second flange coupled with the first flange using screws; a plurality of connectors penetrating the second flange, wherein one part of each connector is disposed on the inner surface of the second flange and electrically connected to the susceptor base, wherein the other part of each connector is disposed on the outer surface of the second flange; and a plurality of power boots each having a hole so as to cap each connector disposed on the outer surface of the second flange, wherein each connector slide into the hole of each power boot to be coupled with the power boot. The susceptor power-interface assembly further includes an O-ring packing that is interposed between the first and second flanges and made of Teflon.

    摘要翻译: 本发明提供了一种用于腔室处理模块的基座电源接口组件,其包括电源,处理室和基座,其中,所述基座包括穿过所述处理室底部的基座轴和基座 其中为该工艺设置晶片。 基座电源接口组件将电源电连接到基座。 为了在受电基座的电源之间的电连接,基座电源接口组件包括在基座轴端部的第一凸缘,第一凸缘从基座轴向外弯曲; 具有圆形形状的第二凸缘,所述第二凸缘使用螺钉与所述第一凸缘联接; 穿过所述第二凸缘的多个连接器,其中每个连接器的一部分设置在所述第二凸缘的内表面上并电连接到所述基座,其中每个连接器的另一部分设置在所述第二凸缘的外表面上 ; 以及多个动力靴,每个动力靴具有孔,以便盖住设置在第二凸缘的外表面上的每个连接器,其中每个连接器滑入每个动力靴的孔中以与动力靴相连。 基座电源接口组件还包括插入在第一和第二凸缘之间并由特氟纶制成的O形密封圈。

    Low temperature sintering conductive metal film and preparation method thereof
    52.
    发明授权
    Low temperature sintering conductive metal film and preparation method thereof 有权
    低温烧结导电金属薄膜及其制备方法

    公开(公告)号:US09145503B2

    公开(公告)日:2015-09-29

    申请号:US13991130

    申请日:2011-10-20

    摘要: A low-temperature sintered conductive metal ink and a method for preparing the same are provided. To be specific, the preparation method includes the following steps of: preparing the conductive film or pattern by printing a conductive metal ink including metal nanocolloids, metal salts, and polymers reacted with the metal salts and preparing the metal nanocolloids (step 1); preparing a mixture by mixing the metal salts and polymers (step 2); preparing the metal ink by stirring the metal nanocolloids and the metal salt/polymer mixture prepared at steps 1 and 2 (step 3); printing the metal ink prepared at step 3 (step 4); and drying and thermally treating a product printed at step 4 (step 5).

    摘要翻译: 提供了一种低温烧结导电金属油墨及其制备方法。 具体而言,该制备方法包括以下步骤:通过印刷包含金属纳米胶体,金属盐和与金属盐反应的聚合物并制备金属纳米胶体的导电金属油墨来制备导电膜或图案(步骤1)。 通过混合金属盐和聚合物制备混合物(步骤2); 通过搅拌金属纳米胶体和步骤1和2制备的金属盐/聚合物混合物(步骤3)制备​​金属油墨; 印刷在步骤3(步骤4)制备的金属油墨; 并干燥和热处理在步骤4打印的产品(步骤5)。

    Built-in antenna and method for improving antenna efficiency
    54.
    发明授权
    Built-in antenna and method for improving antenna efficiency 有权
    内置天线和提高天线效率的方法

    公开(公告)号:US08786500B2

    公开(公告)日:2014-07-22

    申请号:US13204032

    申请日:2011-08-05

    IPC分类号: H01Q1/24

    摘要: A built-in antenna of a portable terminal and a method of forming the same are provided. The built-in antenna includes a first conductor having a specific length and used for a ground, a second conductor disposed with a specific distance in parallel to the first conductor to couple with the first conductor and used for power feeding, and a separating element disposed between the first conductor and the second conductor to separate the first and second conductors. Accordingly, the built-in antenna may exhibit a smooth radiation property even if a metal construction is used in a device and thus may implement robustness improvement of the device and make the device slim and have an attractive outer appearance. In addition, a method of improving antenna efficiency may prevent deterioration of the radiation property of the antenna radiator of the related art by using simple processing, and the metal construction may be used as a radiator.

    摘要翻译: 提供了便携式终端的内置天线及其形成方法。 内置天线包括具有特定长度并用于地面的第一导体,与第一导体平行设置的具有特定距离的第二导体,以与第一导体耦合并用于馈电,以及分离元件设置 在第一导体和第二导体之间,以分离第一和第二导体。 因此,即使在设备中使用金属结构,内置天线也可以呈现平滑的辐射特性,因此可以实现设备的鲁棒性改善并且使设备变得苗条并且具有有吸引力的外观。 此外,通过使用简单的处理,提高天线效率的方法可以防止现有技术的天线辐射体的辐射特性的劣化,并且金属结构可以用作散热器。

    Apparatus having conveyor and method of transferring substrate using the same
    55.
    发明授权
    Apparatus having conveyor and method of transferring substrate using the same 有权
    具有传送带和使用其传送基板的方法的设备

    公开(公告)号:US08545159B2

    公开(公告)日:2013-10-01

    申请号:US10956389

    申请日:2004-10-01

    IPC分类号: B65G49/07 H01L21/677

    摘要: An apparatus for a liquid crystal display device includes: a process chamber for treating a substrate; a load-lock chamber having an interior conveyor; and a transfer chamber connected to the process chamber and the at least one load-lock chamber, the transfer chamber having a substrate-transferring means.

    摘要翻译: 一种液晶显示装置的装置,包括:处理基板的处理室; 具有内部输送机的装载锁定室; 以及连接到所述处理室和所述至少一个装载锁定室的传送室,所述传送室具有基板传送装置。

    PRODUCTION METHOD AND PRODUCTION DEVICE FOR A COMPOSITE METAL POWDER USING THE GAS SPRAYING METHOD
    58.
    发明申请
    PRODUCTION METHOD AND PRODUCTION DEVICE FOR A COMPOSITE METAL POWDER USING THE GAS SPRAYING METHOD 有权
    使用气体喷射方法的复合金属粉末的生产方法和生产装置

    公开(公告)号:US20120244034A1

    公开(公告)日:2012-09-27

    申请号:US13378756

    申请日:2009-12-16

    IPC分类号: B22F9/04 C22C21/04 C22B9/16

    CPC分类号: C22C1/1042 B22F2009/0816

    摘要: Disclosed herein are a method and an apparatus for preparing a metal composite powder by using gas spraying. The method of preparing a metal composite powder by using gas spraying includes introducing a matrix phase in a chamber, including a reinforcing phase in the chamber, melting the introduced matrix phase to form a melt, adding the reinforcing phase in the melt, stirring the melt with the added reinforcing phase to form a melt mixture, atomizing the melt mixture together with a gas to form a metal composite powder containing the reinforcing phase, and collecting the metal composite powder formed.

    摘要翻译: 本文公开了通过使用气体喷射来制备金属复合粉末的方法和装置。 通过使用气体喷射制备金属复合粉末的方法包括在室中引入基质相,包括在室中的增强相,熔化引入的基质相以形成熔体,将增强相加入熔体中,搅拌熔体 加入增强相以形成熔融混合物,将熔融混合物与气体一起雾化以形成含有增强相的金属复合粉末,并收集所形成的金属复合粉末。

    ETCHING SYSTEM AND METHOD OF CONTROLLING ETCHING PROCESS CONDITION
    59.
    发明申请
    ETCHING SYSTEM AND METHOD OF CONTROLLING ETCHING PROCESS CONDITION 有权
    蚀刻系统和控制蚀刻工艺条件的方法

    公开(公告)号:US20120055908A1

    公开(公告)日:2012-03-08

    申请号:US13220084

    申请日:2011-08-29

    IPC分类号: B23K26/36 B23K26/04

    摘要: Provided is an etching system and a method of controlling etching process condition. The etching system includes a light source that irradiates incident light into a target wafer, a light intensity measuring unit that measures light intensity according to the wavelength of interference light generated by interference between reflected light beams from the target wafer, a signal processor that detects a time point at which an extreme value in the intensity is generated when the intensity of interference light varies according to the wavelength, and a controller that compares the extreme value generating time point detected from the signal processor with a reference time point corresponding to the extreme value generating time point and controls a process condition according to the comparison result.

    摘要翻译: 提供了蚀刻系统和控制蚀刻工艺条件的方法。 蚀刻系统包括将入射光照射到目标晶片中的光源,光强度测量单元,其根据由来自目标晶片的反射光之间的干涉产生的干涉光的波长来测量光强度;信号处理器,其检测 当干扰光的强度根据波长变化时产生强度极值的时间点,以及将从信号处理器检测的极值产生时间点与对应于极值的参考时间点进行比较的控制器 产生时间点,并根据比较结果控制过程条件。

    STRUCTURE OF ENGINE MOUNT FOR VEHICLE
    60.
    发明申请
    STRUCTURE OF ENGINE MOUNT FOR VEHICLE 有权
    发动机结构用于车辆

    公开(公告)号:US20120048638A1

    公开(公告)日:2012-03-01

    申请号:US13191879

    申请日:2011-07-27

    IPC分类号: B60K5/04 B60K5/12

    摘要: A structure of an engine mount is provided for a vehicle in which an engine is disposed in the front of the vehicle, a front wheel is driven, and the engine is integrally coupled with a transmission to be seated horizontally on a vehicle body in a transverse mounting direction. The structure may include a driveshaft coupled to receive the driving force of the engine through the transmission and penetrate a center bearing through a bearing bracket fixed to the engine, a subframe as a plate shape coupled to the vehicle body in a rear lower part of the engine and coupled to a lower part of the transmission through a main roll rod mounted on the front, and a sub-roll rod having one end connected to the subframe and the other end connected to the bearing bracket.

    摘要翻译: 发动机支架的结构为发动机设置在车辆的前部而被驱动的车辆提供,并且发动机与变速器一体地联接,以使车身横向放置在横向 安装方向。 该结构可以包括被连接以通过传动装置接收发动机的驱动力的驱动轴,并通过固定在发动机上的轴承架穿过中心轴承,将副车架作为联接到车身的板形在后部的下部 发动机,并且通过安装在前部的主辊杆耦合到变速器的下部;以及副辊杆,其一端连接到副车架,另一端连接到轴承座。