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公开(公告)号：US5695832A
公开(公告)日：1997-12-09
申请号：US464545
申请日：1995-06-05
IPC分类号： C23C14/00 , C23C16/02 , C23C16/26 , C23C16/458 , C23C16/511 , H01J37/32 , B05D3/06 , C23C16/00
CPC分类号： H01J37/32192 , C23C14/0021 , C23C16/0272 , C23C16/029 , C23C16/26 , C23C16/4588 , C23C16/511 , H01J37/32706 , H01J37/32733 , H01J2237/3321 , Y10T428/265 , Y10T428/30 , Y10T428/31678
摘要： A method for forming the coated substrate includes a first step of forming the intermediate layer on the substrate in a vacuum chamber, and a second step of forming the hard carbon film on the intermediate layer within the same vacuum chamber. The first step may involve evaporation or sputtering of material atoms for the intermediate layer, either with or without plasma generation, or directly forming a plasma from a gas containing the material atoms. The second step may involve forming a plasma from a gas that contains carbon. Another method involves generating a plasma, applying a high frequency voltage to the substrate so as to generate a self-bias of not more than -20 V, and supplying a reaction gas that contains carbon.
摘要翻译： 形成涂布基板的方法包括在真空室中在基板上形成中间层的第一步骤，以及在相同真空室内的中间层上形成硬碳膜的第二步骤。 第一步可能涉及中间层的材料原子的蒸发或溅射，无论是否产生等离子体，或者是从含有材料原子的气体直接形成等离子体。 第二步可能涉及从含有碳的气体形成等离子体。 另一种方法包括产生等离子体，向衬底施加高频电压，以产生不大于-20V的自偏压，以及提供含有碳的反应气体。
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公开(公告)号：US5626963A
公开(公告)日：1997-05-06
申请号：US259480
申请日：1994-06-14
IPC分类号： C23C14/00 , C23C16/02 , C23C16/26 , C23C16/458 , C23C16/511 , H01J37/32
CPC分类号： H01J37/32192 , C23C14/0021 , C23C16/0272 , C23C16/029 , C23C16/26 , C23C16/4588 , C23C16/511 , H01J37/32706 , H01J37/32733 , H01J2237/3321 , Y10T428/265 , Y10T428/30 , Y10T428/31678
摘要： A hard-carbon-film-coated substrate includes in stacked sequence a substrate, an intermediate layer, and a hard carbon film. The substrate consists of a metal or an alloy mainly composed of Ni or Al, or stainless steel. The intermediate layer is mainly composed of Ru, Si, Ge or carbon, or is a mixed layer including Ru, Si, or Ge mixed with at least one of carbon, nitrogen or oxygen, with a composition gradient across its thickness. An apparatus for forming the coated substrate especially includes means for forming the intermediate layer and means for forming the hard carbon film in the same vacuum chamber.
摘要翻译： 硬碳膜涂布基板以堆叠顺序包括基板，中间层和硬碳膜。 基体由主要由Ni或Al或不锈钢构成的金属或合金组成。 中间层主要由Ru，Si，Ge或碳组成，或者是包含与碳，氮或氧中的至少一种混合的Ru，Si或Ge的混合层，其厚度为组成梯度。 用于形成涂覆基材的装置特别包括用于形成中间层的装置和用于在同一真空室中形成硬碳膜的装置。
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公开(公告)号：US20080100587A1
公开(公告)日：2008-05-01
申请号：US11727255
申请日：2007-03-26
IPC分类号： G06F3/041
CPC分类号： G06F3/041
摘要： A touch sensor includes a contact sensor and a pressure sensor. The contact sensor includes a first electrode and a first switching element connected to the first electrode, and detects a change in an electric potential when an object contacts a surface. The pressure sensor includes a second electrode and a second switching element connected to the second electrode, and detects a change in a pressure when an object depresses the surface. The touch sensor includes a plurality of the contact sensors and a plurality of the pressure sensors disposed regularly in an array.
摘要翻译： 触摸传感器包括接触传感器和压力传感器。 接触传感器包括第一电极和连接到第一电极的第一开关元件，并且当物体接触表面时检测电位的变化。 压力传感器包括连接到第二电极的第二电极和第二开关元件，并且当物体压下表面时检测压力的变化。 触摸传感器包括多个接触传感器和多个定期排列的压力传感器。
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公开(公告)号：US07825911B2
公开(公告)日：2010-11-02
申请号：US11727255
申请日：2007-03-26
CPC分类号： G06F3/041
摘要： A touch sensor includes a contact sensor and a pressure sensor. The contact sensor includes a first electrode and a first switching element connected to the first electrode, and detects a change in an electric potential when an object contacts a surface. The pressure sensor includes a second electrode and a second switching element connected to the second electrode, and detects a change in a pressure when an object depresses the surface. The touch sensor includes a plurality of the contact sensors and a plurality of the pressure sensors disposed regularly in an array.
摘要翻译： 触摸传感器包括接触传感器和压力传感器。 接触传感器包括第一电极和连接到第一电极的第一开关元件，并且当物体接触表面时检测电位的变化。 压力传感器包括连接到第二电极的第二电极和第二开关元件，并且当物体压下表面时检测压力的变化。 触摸传感器包括多个接触传感器和多个定期排列的压力传感器。
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