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    Devices involving silicon glasses
    52.
    发明授权
    Devices involving silicon glasses 失效
    涉及硅玻璃的设备

    公开(公告)号：US4826709A

    公开(公告)日：1989-05-02

    申请号：US161876

    申请日：1988-02-29

    Applicant: Vivian W. Ryan ,  Gerald Smolinsky

    Inventor： Vivian W. Ryan ,  Gerald Smolinsky

    IPC: C03C3/06 ,  H01L21/316 ,  B05D3/12

    CPC classification number: C03C3/06 ,  H01L21/316 ,  C03C2201/02 ,  C03C2201/10 ,  C03C2201/28 ,  C03C2203/20

    Abstract: A sol-gel process is utilized for producing silicon oxide glasses useful in the manufacture of devices such as semiconductor devices. These glasses are easily deposited by techniques such as spinning. Not only is the glass easily applied, but also has advantageous electrical, etching, and mechanical properties. Thus, these glasses are useful in applications such as passivating layers for integrated circuit devices and as intermediary layers in trilevel lithography for the production of such devices.

    Abstract translation: 溶胶 - 凝胶法用于生产用于制造诸如半导体器件的器件的氧化硅玻璃。 这些玻璃容易通过旋转技术沉积。 不仅玻璃容易应用，而且具有有利的电，蚀刻和机械性能。 因此，这些玻璃在诸如用于集成电路器件的钝化层和用于制造这种器件的三层光刻中的中间层的应用中是有用的。

    PRODUCTION OF P{11 O{11 -SiO{11 {11 PRODUCTS
    53.
    发明授权
    PRODUCTION OF P{11 O{11 -SiO{11 {11 PRODUCTS 失效
    生产P {11 O {11 -SiO {11}

    公开(公告)号：US3767432A

    公开(公告)日：1973-10-23

    申请号：US3767432D

    申请日：1971-04-08

    Applicant: OWENS ILLINOIS INC

    Inventor： THOMAS I

    IPC: C03C1/00 ,  C03C3/06 ,  C03C3/097 ,  C04B35/14 ,  C08G77/02 ,  C08G77/30 ,  C08G77/48 ,  C03C3/04

    CPC classification number: C08G77/48 ,  C03C1/006 ,  C03C3/06 ,  C03C3/097 ,  C03C2201/28 ,  C03C2203/26 ,  C04B35/14 ,  C08G77/02 ,  C08G77/30 ,  Y10S65/901

    Abstract: A method is provided for producing homogeneous oxide products of phosphorus and silicon such as, for example, a P2O5 and SiO2 glass by a process which comprises: forming a clear solution of a soluble, substantially linear, further polymerizable polymer having phosphorus-oxygen-silicon linkages by intimately contacting phosphorous acid, phosphoric acid, phosphorus pentoxide, or mixtures thereof, with a single phase solution of an at least partially hydrolyzed silicon alkoxide, converting the solution of said further polymerizable polymer to a gel in the presence of a sufficient quantity of water to cross-link said polymer, then removing free liquid components from the gel and thermally degrading the residue to a homogeneous oxide product. This oxide product may be converted to a substantially unitary shape by conventional melting techniques or by conventional sintering techniques. The product may, accordingly, be used as an additive in conventional glass melting operations to supply at least a portion of the silica and P2O5 requirement or the product may be compacted and suitably fired, for example sintered, into a substantially unitary solid body, which body is an excellent target in sputtering applications for forming films on semiconductive materials such as, for example, silicon chips.

    Abstract translation: 提供了一种通过以下方法制备磷和硅的均匀氧化物产物的方法，所述方法包括：形成具有磷 - 氧 - 硅的可溶性基本线性的可聚合聚合物的透明溶液 通过将亚磷酸，磷酸，五氧化二磷或其混合物与至少部分水解的硅烷醇盐的单相溶液紧密接触，将所述另外的可聚合聚合物的溶液在足够量的 水以交联所述聚合物，然后从凝胶中除去游离的液体组分并将残余物热降解成均匀的氧化物产物。 该氧化物产物可以通过常规熔融技术或通过常规烧结技术转化为基本上单一的形状。 因此，该产品可以用作常规玻璃熔化操作中的添加剂，以供应至少一部分二氧化硅和P2O5要求，或者产品可以被压实并适当地烧制，例如烧结成基本上单一的固体，其中 体是用于在半导电材料（例如硅芯片）上形成薄膜的溅射应用中的优异靶标。

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